JPH04357169A - Silicon nitride sintered product and its production - Google Patents
Silicon nitride sintered product and its productionInfo
- Publication number
- JPH04357169A JPH04357169A JP3129654A JP12965491A JPH04357169A JP H04357169 A JPH04357169 A JP H04357169A JP 3129654 A JP3129654 A JP 3129654A JP 12965491 A JP12965491 A JP 12965491A JP H04357169 A JPH04357169 A JP H04357169A
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- nitride sintered
- powder
- oxide powder
- product
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Ceramic Products (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は耐熱性の高温部材や耐摩
耗性部品などに使用される窒化珪素質焼結体及びその製
造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a silicon nitride sintered body used for heat-resistant high-temperature members, wear-resistant parts, etc., and a method for manufacturing the same.
【0002】0002
【従来の技術】窒化珪素焼結体は耐熱性を要求される高
温構造材料や耐摩耗材料として期待されているが、難焼
結性物質であるため焼結助剤としてAl2 O3 、Y
2 O3 、MgO等を添加して焼成する方法が採られ
ていた。
この方法で作成した焼結体はAl2 O3 −Y2 O
3 −MgO−SiO2 系等の粒界ガラス相の固相温
度(加熱により液相が現われはじめる温度)が約130
0℃と低いため、1300℃前後の高温領域で強度が低
くなること、高温での耐酸化性が不十分であるという問
題があった。[Prior Art] Silicon nitride sintered bodies are expected to be used as high-temperature structural materials and wear-resistant materials that require heat resistance, but since they are difficult to sinter, they are used as sintering aids such as Al2 O3 and Y.
A method of adding 2 O3, MgO, etc. and firing was adopted. The sintered body created by this method is Al2 O3 -Y2 O
3 -The solidus temperature of the grain boundary glass phase (temperature at which a liquid phase begins to appear upon heating) of the -MgO-SiO2 system, etc. is approximately 130
Since the temperature is as low as 0°C, there are problems in that the strength is low in the high temperature range of around 1300°C and the oxidation resistance at high temperatures is insufficient.
【0003】0003
【発明が解決しようとする課題】本発明は上記技術水準
に鑑みこの問題点を解決するために、固相温度の高い粒
界ガラス相を有する窒化珪素質焼結体及びその製造方法
を提供しようとするものである。[Problems to be Solved by the Invention] In order to solve this problem in view of the above-mentioned state of the art, the present invention provides a silicon nitride sintered body having a grain boundary glass phase with a high solidus temperature and a method for manufacturing the same. That is.
【0004】0004
【課題を解決するための手段】本発明は(1)窒化珪素
粒子の間隙がAl−Er−Siを含む粒界ガラス相また
はAl−Yb−Siを含む粒界ガラス相で充填されてな
ることを特徴とする窒化珪素質焼結体。[Means for Solving the Problems] The present invention provides (1) gaps between silicon nitride particles are filled with a grain boundary glass phase containing Al-Er-Si or a grain boundary glass phase containing Al-Yb-Si. A silicon nitride sintered body characterized by:
【0005】(2)窒化珪素粉末、酸化アルミニウム粉
末、酸化エルビウムまたは酸化イッテルビウム粉末とを
、酸化物粉末が2〜20重量%になるように調整し、有
機溶媒中で分散剤とともに均一に混合した後、乾燥、成
形、脱脂し、1600〜1950℃の不活性雰囲気中で
加熱焼結することを特徴とする窒化珪素質焼結体の製造
方法。である。(2) Silicon nitride powder, aluminum oxide powder, erbium oxide or ytterbium oxide powder were adjusted so that the oxide powder was 2 to 20% by weight, and uniformly mixed with a dispersant in an organic solvent. A method for producing a silicon nitride sintered body, which comprises drying, molding, degreasing, and heating and sintering in an inert atmosphere at 1,600 to 1,950°C. It is.
【0006】すなわち、本発明は窒化珪素(Si3 N
4 )粉末、酸化アルミニウム(Al2 O3 )粉末
と酸化エルビニウム(Er2 O3 )粉末または酸化
イッテルビウム(Yb2 O3 )粉末の合計2種の酸
化物粉末を2〜20重量%加え、これをエタノール、ト
ルエン等の有機溶媒中でポリビニールアルコール、ポリ
エチレンアミン等の分散剤を加えて均一に混合した後、
乾燥、成形後、脱脂し、続いて窒素等の不活性ガス加圧
雰囲気下で1600〜1950℃の温度で焼成する方法
であり、このような方法によると窒化珪素粒子の間隙が
固相温度の高いAl−Er−SiまたはAl−Yb−S
iを含む粒界ガラス相で充填された窒化珪素焼結体が得
られる。That is, the present invention uses silicon nitride (Si3N
4) Add 2 to 20% by weight of powder, a total of two types of oxide powder, aluminum oxide (Al2O3) powder and erbinium oxide (Er2O3) powder or ytterbium oxide (Yb2O3) powder, and add this to ethanol, toluene, etc. After adding a dispersant such as polyvinyl alcohol or polyethylene amine in an organic solvent and mixing uniformly,
After drying and shaping, it is degreased and then fired at a temperature of 1,600 to 1,950°C under a pressurized atmosphere of an inert gas such as nitrogen. High Al-Er-Si or Al-Yb-S
A silicon nitride sintered body filled with a grain boundary glass phase containing i is obtained.
【0007】なお、本発明ではSi3 N4 等の原料
粉末の成形体を真空中で300〜700℃に加熱して脱
脂し、続いて窒素ガスの加圧雰囲気下で1600〜19
50℃の温度で焼成する方法を好ましい実施態様とする
ものである。[0007] In the present invention, a molded body of raw material powder such as Si3N4 is degreased by heating to 300 to 700°C in vacuum, and then heated to 1600 to 19°C in a pressurized atmosphere of nitrogen gas.
A preferred embodiment is a method of firing at a temperature of 50°C.
【0008】更に、上記説明では、Al2 O3 とE
r2 O3 、Al2 O3 とYb2 O3 の組合
せについてのみ説明したが、Al2 O3 とEr2
O3 、Yb2 O3 を組合せてもよい。この場合も
酸化物粉末の添加量はSi3 N4 粉末に対して2〜
20重量%とすることは云うまでもない。Furthermore, in the above explanation, Al2 O3 and E
Although only the combinations of r2 O3 , Al2 O3 and Yb2 O3 have been explained, the combination of Al2 O3 and Er2
O3 and Yb2 O3 may be combined. In this case as well, the amount of oxide powder added is 2 to 2 to
Needless to say, the content is 20% by weight.
【0009】[0009]
【作用】以下、本発明の作用について説明する。Si3
N4 に焼結助剤としてAl2 O3 とEr2 O
3 、またはAl2 O3 とYb2 O3 を加えた
場合、Si3 N4 原料粉末中に不純物として含まれ
る酸化物であるSiO2 とが焼結過程で反応して生成
するAl2 O3 −Er2 O3 −SiO2 また
はAl2 O3 −Yb2 O3 −SiO2 系の粒
界ガラス相の固相温度は約1450〜1500℃であり
、Al2 O3 とY2 O3等を助剤とする現在知ら
れている窒化珪素質焼結体中のガラス相よりも固相温度
が約100℃以上も高くなり、このため、本発明で得ら
れた焼結体が耐熱性に優れるという作用を奏する。[Operation] The operation of the present invention will be explained below. Si3
Al2 O3 and Er2 O as sintering aids in N4
3, or when Al2 O3 and Yb2 O3 are added, Al2 O3 -Er2 O3 -SiO2 or Al2 O3 - is produced by reacting with SiO2, which is an oxide contained as an impurity in the Si3 N4 raw material powder, during the sintering process. The solidus temperature of the grain boundary glass phase of the Yb2 O3 -SiO2 system is about 1450 to 1500°C, which is higher than the glass phase in currently known silicon nitride sintered bodies using Al2 O3 and Y2 O3 as auxiliaries. The solidus temperature also increases by about 100° C. or more, and therefore, the sintered body obtained by the present invention has excellent heat resistance.
【0010】Al2 O3 、Er2 O3 、Yb2
O3 等の酸化物の全添加量は2〜20重量%にすべ
きである。これら酸化物の全添加量が2重量%より小さ
い時は焼結反応が進まず、また20重量%以上添加して
もSi3 N4 の焼結にともなう密度の増加を促進す
る効果は飽和して、添加量に見合うだけの効果が増えな
いので、助剤添加量としては上記の範囲にすべきである
。[0010] Al2 O3, Er2 O3, Yb2
The total addition of oxides such as O3 should be between 2 and 20% by weight. When the total amount of these oxides added is less than 2% by weight, the sintering reaction does not proceed, and even if 20% by weight or more is added, the effect of promoting the increase in density due to sintering of Si3N4 is saturated. Since the effect does not increase commensurately with the amount added, the amount added of the auxiliary agent should be within the above range.
【0011】Si3 N4 、Al2 O3 等の原料
粉末の分散剤としてはポリビニールアルコール、ポリエ
チレンアミン等が使用され、その使用量としてはセラミ
ックス原料100重量部に対して1〜10重量部が好ま
しく、これらを分散させるエタノール、トルエン等の有
機溶媒の添加量としては50〜150重量部を用いるこ
とが好ましい。このような分散剤と溶媒の混合比を用い
た理由は分散剤添加量が1重量部以下では原料粉末の分
散効果がなく、また10重量部以上では溶液の粘度が大
きくなりすぎ逆に分散しにくくなる等の問題を生じるか
らである。なお、得られた原料粉末を成形した後、分散
剤を脱脂する方法としては真空中で300〜700℃の
温度に加熱することで十分である。Polyvinyl alcohol, polyethylene amine, etc. are used as dispersants for raw material powders such as Si3 N4 and Al2 O3, and the amount used is preferably 1 to 10 parts by weight per 100 parts by weight of ceramic raw materials. It is preferable to use 50 to 150 parts by weight of the organic solvent such as ethanol and toluene for dispersing. The reason for using such a mixing ratio of the dispersant and the solvent is that if the amount of the dispersant added is less than 1 part by weight, there will be no dispersion effect for the raw material powder, and if it is more than 10 parts by weight, the viscosity of the solution will become too high and the dispersion will be adversely affected. This is because it may cause problems such as making it difficult to use. In addition, as a method for degreasing the dispersant after molding the obtained raw material powder, it is sufficient to heat it to a temperature of 300 to 700° C. in a vacuum.
【0012】最後に緻密な窒化珪素質焼結体を得るため
の焼成条件としては、窒素ガス加圧下で1600〜19
50℃の温度で焼成する。本発明の焼結助剤を添加した
場合、粒界ガラス相が液相になる温度が高いため、焼成
温度が1600℃以下では焼結にともなう体積の収縮が
なく焼結が進まない。また焼成温度が1950℃よりも
高い場合、分解等のために密度は上昇せず、良質の焼結
体が得られず、さらに高温で処理するため製造コストも
高くなる等の問題があるからである。Finally, the firing conditions for obtaining a dense silicon nitride sintered body are as follows:
Calcinate at a temperature of 50°C. When the sintering aid of the present invention is added, the temperature at which the grain boundary glass phase becomes a liquid phase is high, so if the sintering temperature is 1600° C. or lower, there is no volumetric shrinkage due to sintering and sintering does not proceed. Furthermore, if the firing temperature is higher than 1950°C, the density will not increase due to decomposition, etc., making it impossible to obtain a high-quality sintered body, and there will be problems such as higher manufacturing costs due to processing at higher temperatures. be.
【0013】[0013]
【実施例】以下、本発明の一実施例をあげ本発明の効果
を説明する。用いたSi3 N4 粉末の平均粒径は0
.3μm、助剤として添加したAl2 O3 、Er2
O3 、Yb2 O3 の平均粒径はそれぞれ0.8
、1.0、1.0μmである。分散剤としてはポリエチ
レンアミン、溶媒としてはエタノールを用いた。[Example] Hereinafter, an example of the present invention will be given to explain the effects of the present invention. The average particle size of the Si3N4 powder used was 0.
.. 3μm, Al2O3 and Er2 added as auxiliaries
The average particle diameters of O3 and Yb2 O3 are each 0.8
, 1.0, 1.0 μm. Polyethylene amine was used as a dispersant and ethanol was used as a solvent.
【0014】表1に示すような原料の配合比で、エタノ
ール中で均一に混合した後、乾燥し、プレスで直径60
mmφ、厚さ5mmの円板状に成形し、4000kg/
cm2 の圧力で静水圧プレスして成形体を得た。この
成形体を真空中で500℃まで加熱し、1時間保持して
脱脂した後、窒素ガス10気圧の加圧下で表2に示した
温度に加熱し焼成を行った後、炉冷して窒化珪素質焼結
体を得た。得られた焼結体の焼成条件と相対密度の関係
を表2に示す。この結果本発明により提供された製造方
法により緻密な窒化珪素質焼結体が得られることがわか
った。[0014] After uniformly mixing the raw materials in ethanol with the blending ratio shown in Table 1, they were dried and pressed to a diameter of 60 mm.
Formed into a disk shape with mmφ and thickness of 5mm, weighing 4000kg/
A molded body was obtained by isostatic pressing at a pressure of cm2. This molded body was heated to 500°C in vacuum, held for 1 hour to degrease it, heated to the temperature shown in Table 2 under nitrogen gas pressure of 10 atm, fired, and then cooled in a furnace and nitrided. A silicon sintered body was obtained. Table 2 shows the relationship between the firing conditions and relative density of the obtained sintered body. As a result, it was found that a dense silicon nitride sintered body could be obtained by the manufacturing method provided by the present invention.
【表1】[Table 1]
【表2】[Table 2]
【0015】[0015]
【発明の効果】本発明により、緻密な窒化珪素質焼結体
及びその製造方法が得られ、得られた耐熱性で耐摩耗性
の窒化珪素質焼結体は産業上の利用価値が大きい。EFFECTS OF THE INVENTION According to the present invention, a dense silicon nitride sintered body and a method for producing the same are obtained, and the obtained heat-resistant and wear-resistant silicon nitride sintered body has great industrial utility value.
Claims (2)
iを含む粒界ガラス相またはAl−Yb−Siを含む粒
界ガラス相で充填されてなることを特徴とする窒化珪素
質焼結体。Claim 1: The gap between the silicon nitride particles is Al-Er-S.
1. A silicon nitride sintered body filled with a grain boundary glass phase containing i or a grain boundary glass phase containing Al-Yb-Si.
、酸化エルビウムまたは酸化イッテルビウム粉末とを、
酸化物粉末が2〜20重量%になるように調整し、有機
溶媒中で分散剤とともに均一に混合した後、乾燥、成形
、脱脂し、1600〜1950℃の不活性雰囲気中で加
熱焼結することを特徴とする窒化珪素質焼結体の製造方
法。2. Silicon nitride powder, aluminum oxide powder, erbium oxide or ytterbium oxide powder,
The oxide powder is adjusted to 2 to 20% by weight, mixed uniformly with a dispersant in an organic solvent, dried, molded, degreased, and heated and sintered in an inert atmosphere at 1600 to 1950°C. A method for manufacturing a silicon nitride sintered body, characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3129654A JPH04357169A (en) | 1991-05-31 | 1991-05-31 | Silicon nitride sintered product and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3129654A JPH04357169A (en) | 1991-05-31 | 1991-05-31 | Silicon nitride sintered product and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04357169A true JPH04357169A (en) | 1992-12-10 |
Family
ID=15014860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3129654A Withdrawn JPH04357169A (en) | 1991-05-31 | 1991-05-31 | Silicon nitride sintered product and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04357169A (en) |
-
1991
- 1991-05-31 JP JP3129654A patent/JPH04357169A/en not_active Withdrawn
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19980806 |