JPH04360593A - Semiconductor laser device - Google Patents

Semiconductor laser device

Info

Publication number
JPH04360593A
JPH04360593A JP16358491A JP16358491A JPH04360593A JP H04360593 A JPH04360593 A JP H04360593A JP 16358491 A JP16358491 A JP 16358491A JP 16358491 A JP16358491 A JP 16358491A JP H04360593 A JPH04360593 A JP H04360593A
Authority
JP
Japan
Prior art keywords
light
semiconductor laser
package
cap
stem
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16358491A
Other languages
Japanese (ja)
Inventor
Tadaki Wakao
若生 忠樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP16358491A priority Critical patent/JPH04360593A/en
Publication of JPH04360593A publication Critical patent/JPH04360593A/en
Pending legal-status Critical Current

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  • Semiconductor Lasers (AREA)

Abstract

PURPOSE:To suppress a level of stray light to be irradiated by reflection in a package for hermetically sealing a semiconductor laser element and to obtain an accurate output light with low noise by forming a light absorption film on the inner wall of the package. CONSTITUTION:In a semiconductor laser having a semiconductor laser element 1, and a package for hermetically sealing the element 1, formed partly of a light transmission member 6, light absorption films 7 made of black resin containing carbon for absorbing the optical output of the element 1, are formed on the inner surface of a stem 3 for hermetically sealing the element 1 and the inner surface of a cap 5. Thus, light emitted from the rear of the element 1 is directed to the stem 3 directly or after reflected on the surface of a submount 2 and absorbed by the film 7 provided on the surface. The light advanced to the inner surface of the cap 5 is also absorbed here, thereby reducing a reflected light component as compared with that of prior art.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、光通信用機器、光情報
処理装置あるいは光センサ等の光源として用いられる半
導体レーザ装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor laser device used as a light source for optical communication equipment, optical information processing equipment, optical sensors, and the like.

【0002】0002

【従来の技術】図3は、この種従来の半導体レーザ装置
の破砕断面図である。同図において、1は半導体レーザ
素子、2は半導体レーザ素子が搭載されるサブマウント
、3はサブマウント2およびリード4を保持するステム
、5は光透過部分に透明板6を有し、半導体レーザ素子
を気密封止するキャップである。
2. Description of the Related Art FIG. 3 is a fragmentary sectional view of a conventional semiconductor laser device of this type. In the figure, 1 is a semiconductor laser element, 2 is a submount on which the semiconductor laser element is mounted, 3 is a stem that holds the submount 2 and leads 4, and 5 is a transparent plate 6 in the light transmitting part, and the semiconductor laser This is a cap that hermetically seals the device.

【0003】ここで、サブマウントはSi等によって形
成されており、ステムおよびキャップ5はコバーやニッ
ケル等の素材を用い、その表面に金メッキを施したもの
である。また、透明板6にはサファイヤのような安定し
た材料のものが用いられている。
[0003] Here, the submount is made of Si or the like, and the stem and cap 5 are made of a material such as Covar or nickel, and their surfaces are plated with gold. Further, the transparent plate 6 is made of a stable material such as sapphire.

【0004】0004

【発明が解決しようとする課題】上述した従来の半導体
レーザ装置では、ステムおよびキャップの表面が金、ニ
ッケル等の材料で形成されているためパッケージ内面で
の反射率が極めて高い。半導体レーザ素子の共振器端面
から放出される前方出射光は透明板6に向かうが一部は
そこで反射される。また、後方出射光は直接あるいはサ
ブマウントの表面で反射された後,ステムの表面に到達
しここで反射される。また、レーザ素子の出射光の一部
は直接あるいは他の部分で反射された後、キャップの内
側表面に到達しここで反射される。これら反射光はレー
ザ素子の主出射光とともに透明板を透過して出力される
のであるが、従来例ではパッケージ内面が反射率の高い
材料で形成されているため、反射光成分のレベルが極め
て高いものとなる。そのため、従来のレーザ装置では雑
音レベルが高く正確な出力光を得ることが困難であった
。
In the conventional semiconductor laser device described above, the surfaces of the stem and cap are made of a material such as gold or nickel, so that the reflectance on the inner surface of the package is extremely high. The forward emitted light emitted from the resonator end face of the semiconductor laser element is directed toward the transparent plate 6, but a portion is reflected there. Further, the rear emitted light reaches the surface of the stem and is reflected there either directly or after being reflected on the surface of the submount. Further, a part of the emitted light from the laser element reaches the inner surface of the cap after being reflected directly or by other parts and is reflected there. These reflected lights are transmitted through the transparent plate and output together with the main emitted light of the laser element, but in conventional cases, the inner surface of the package is made of a material with high reflectance, so the level of the reflected light components is extremely high. Become something. Therefore, with conventional laser devices, the noise level is high and it is difficult to obtain accurate output light.

【0005】[0005]

【課題を解決するための手段】本発明の半導体レーザ装
置は、半導体レーザ素子の気密封止用ステムの内側の面
および/またはキャップの内側の面に前記レーザ素子の
光出力を吸収する被膜を形成したものである。
[Means for Solving the Problems] The semiconductor laser device of the present invention includes a coating that absorbs the optical output of the laser element on the inner surface of the hermetically sealed stem and/or the inner surface of the cap. It was formed.

【0006】[0006]

【実施例】次に、本発明の実施例について図面を参照し
て説明する。図1は、本発明の一実施例を示す破砕断面
図である。同図において、1は半導体レーザ素子、3は
サブマウント2およびリード4を支持するステム、5は
透明板6を有するキャップ、7はステム3及びキャップ
5の内面に形成された、カーボンを含有する黒色樹脂に
よる光吸収膜である。
Embodiments Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a fragmentary sectional view showing one embodiment of the present invention. In the figure, 1 is a semiconductor laser element, 3 is a stem that supports a submount 2 and leads 4, 5 is a cap having a transparent plate 6, and 7 is a carbon-containing cap formed on the inner surface of the stem 3 and the cap 5. This is a light absorption film made of black resin.

【0007】図1の実施例において、半導体レーザ素子
1の後方から出射された光は直接あるいはサブマウント
2の表面で反射されてステム3に向かい、その表面に設
けられた光吸収膜7によって吸収される。また、キャッ
プ5の内側表面に進行した光もここで吸収される。よっ
て、上記構成により、従来例で数十%含まれていた反射
光成分を1%以下に低減させることができた。
In the embodiment shown in FIG. 1, light emitted from the rear of the semiconductor laser device 1 is directed toward the stem 3 either directly or reflected by the surface of the submount 2, and is absorbed by the light absorption film 7 provided on the surface. be done. Further, the light traveling to the inner surface of the cap 5 is also absorbed here. Therefore, with the above configuration, the reflected light component, which was included in the conventional example by several tens of percent, could be reduced to 1% or less.

【0008】図2は、本発明の他の実施例を示す破砕断
面図である。同図において、図1の部分と同等の部分に
は同一の参照番号が付されているので重複する説明は省
略する。本実施例では、光吸収膜7が、透明板6内面の
主射出光透過部分を除く部分に塗布されている。
FIG. 2 is a fragmentary sectional view showing another embodiment of the present invention. In this figure, parts that are equivalent to those in FIG. 1 are given the same reference numerals, so redundant explanation will be omitted. In this embodiment, the light absorption film 7 is applied to the inner surface of the transparent plate 6 except for the main emission light transmitting part.

【0009】この構成により、半導体レーザ素子1から
の光出力のうち反射により透明板6から出ていく分を少
なくすることができ、また、透明板6からの再反射を防
ぐことができる。
With this configuration, it is possible to reduce the portion of the optical output from the semiconductor laser element 1 that exits from the transparent plate 6 due to reflection, and also to prevent re-reflection from the transparent plate 6.

【0010】以上好ましい実施例について説明したが、
本発明はこれら実施例に限定されるものではなく、例え
ば、光吸収膜7の材料としては樹脂塗布膜に代えて金属
化合物膜を用いることができる。また、レーザ素子1の
後方に、後方出射光を受光するモニタ受光素子を配置し
てもよいし、また、レーザ素子を複数個配置してマルチ
ビームレーザ装置を構成するようにしてもよい。
Although the preferred embodiments have been described above,
The present invention is not limited to these examples, and for example, a metal compound film can be used as the material for the light absorption film 7 instead of a resin coating film. Further, a monitor light-receiving element that receives the backward emitted light may be arranged behind the laser element 1, or a multi-beam laser device may be constructed by arranging a plurality of laser elements.

【0011】[0011]

【発明の効果】以上説明したように、本発明は、半導体
レーザ素子を気密封止するパッケージの内壁に光吸収膜
を形成したものであるので、本発明によれば、パッケー
ジ内部での反射によって放出される迷光のレベルを抑制
することができ、雑音の少ない光源を提供することがで
きる。
As explained above, the present invention forms a light absorbing film on the inner wall of a package that hermetically seals a semiconductor laser element. The level of emitted stray light can be suppressed, and a light source with less noise can be provided.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明の一実施例を示す破砕断面図。FIG. 1 is a fragmented cross-sectional view showing one embodiment of the present invention.

【図2】本発明の他の実施例を示す破砕断面図。FIG. 2 is a fragmented sectional view showing another embodiment of the present invention.

【図3】従来例の破砕断面図。FIG. 3 is a fragmented cross-sectional view of a conventional example.

【符号の説明】[Explanation of symbols]

1…半導体レーザ素子 2…サブマウント 3…ステム 4…リード 5…キャップ 6…透明板 7…光吸収膜 1...Semiconductor laser element 2...Submount 3...Stem 4...Lead 5...Cap 6...Transparent plate 7...Light absorption film

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  半導体レーザ素子と、一部が光透過部
材によって構成され、前記半導体レーザ素子を気密封止
するパッケージと、を有する半導体レーザ装置において
、前記半導体レーザ素子の出力光を取り出す部分を除く
前記パッケージの内側には光吸収膜が形成されているこ
とを特徴とする半導体レーザ装置。
1. A semiconductor laser device comprising a semiconductor laser element and a package, a part of which is constituted by a light-transmitting member and hermetically seals the semiconductor laser element, wherein a portion for extracting output light of the semiconductor laser element is provided. A semiconductor laser device characterized in that a light absorption film is formed on the inside of the package except for the package.
JP16358491A 1991-06-07 1991-06-07 Semiconductor laser device Pending JPH04360593A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16358491A JPH04360593A (en) 1991-06-07 1991-06-07 Semiconductor laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16358491A JPH04360593A (en) 1991-06-07 1991-06-07 Semiconductor laser device

Publications (1)

Publication Number Publication Date
JPH04360593A true JPH04360593A (en) 1992-12-14

Family

ID=15776692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16358491A Pending JPH04360593A (en) 1991-06-07 1991-06-07 Semiconductor laser device

Country Status (1)

Country Link
JP (1) JPH04360593A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002026439A (en) * 2000-07-03 2002-01-25 Denso Corp Semiconductor light emitting device
JP2003086830A (en) * 2001-09-14 2003-03-20 Sunx Ltd Laser sensor
JP2008085259A (en) * 2006-09-29 2008-04-10 Oki Electric Ind Co Ltd Optical two-way communication module
JP2018170454A (en) * 2017-03-30 2018-11-01 住友電気工業株式会社 Optical semiconductor device
WO2022185970A1 (en) 2021-03-05 2022-09-09 株式会社堀場製作所 Semiconductor laser device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002026439A (en) * 2000-07-03 2002-01-25 Denso Corp Semiconductor light emitting device
JP2003086830A (en) * 2001-09-14 2003-03-20 Sunx Ltd Laser sensor
JP2008085259A (en) * 2006-09-29 2008-04-10 Oki Electric Ind Co Ltd Optical two-way communication module
JP2018170454A (en) * 2017-03-30 2018-11-01 住友電気工業株式会社 Optical semiconductor device
WO2022185970A1 (en) 2021-03-05 2022-09-09 株式会社堀場製作所 Semiconductor laser device
US12542415B2 (en) 2021-03-05 2026-02-03 Horiba, Ltd. Semiconductor laser device

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