JPH0436116Y2 - - Google Patents

Info

Publication number
JPH0436116Y2
JPH0436116Y2 JP1986184327U JP18432786U JPH0436116Y2 JP H0436116 Y2 JPH0436116 Y2 JP H0436116Y2 JP 1986184327 U JP1986184327 U JP 1986184327U JP 18432786 U JP18432786 U JP 18432786U JP H0436116 Y2 JPH0436116 Y2 JP H0436116Y2
Authority
JP
Japan
Prior art keywords
holding
arm
substrate
support arm
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986184327U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6389245U (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986184327U priority Critical patent/JPH0436116Y2/ja
Publication of JPS6389245U publication Critical patent/JPS6389245U/ja
Application granted granted Critical
Publication of JPH0436116Y2 publication Critical patent/JPH0436116Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP1986184327U 1986-11-29 1986-11-29 Expired JPH0436116Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986184327U JPH0436116Y2 (2) 1986-11-29 1986-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986184327U JPH0436116Y2 (2) 1986-11-29 1986-11-29

Publications (2)

Publication Number Publication Date
JPS6389245U JPS6389245U (2) 1988-06-10
JPH0436116Y2 true JPH0436116Y2 (2) 1992-08-26

Family

ID=31131896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986184327U Expired JPH0436116Y2 (2) 1986-11-29 1986-11-29

Country Status (1)

Country Link
JP (1) JPH0436116Y2 (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2703373B2 (ja) * 1989-12-01 1998-01-26 シャープ株式会社 板状体の把持装置

Also Published As

Publication number Publication date
JPS6389245U (2) 1988-06-10

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