JPH0436271B2 - - Google Patents

Info

Publication number
JPH0436271B2
JPH0436271B2 JP1634385A JP1634385A JPH0436271B2 JP H0436271 B2 JPH0436271 B2 JP H0436271B2 JP 1634385 A JP1634385 A JP 1634385A JP 1634385 A JP1634385 A JP 1634385A JP H0436271 B2 JPH0436271 B2 JP H0436271B2
Authority
JP
Japan
Prior art keywords
vacuum
pump
vacuum pump
abnormality
detection means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1634385A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61175285A (ja
Inventor
Junichi Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP1634385A priority Critical patent/JPS61175285A/ja
Publication of JPS61175285A publication Critical patent/JPS61175285A/ja
Publication of JPH0436271B2 publication Critical patent/JPH0436271B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP1634385A 1985-01-30 1985-01-30 真空ポンプの監視装置 Granted JPS61175285A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1634385A JPS61175285A (ja) 1985-01-30 1985-01-30 真空ポンプの監視装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1634385A JPS61175285A (ja) 1985-01-30 1985-01-30 真空ポンプの監視装置

Publications (2)

Publication Number Publication Date
JPS61175285A JPS61175285A (ja) 1986-08-06
JPH0436271B2 true JPH0436271B2 (de) 1992-06-15

Family

ID=11913743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1634385A Granted JPS61175285A (ja) 1985-01-30 1985-01-30 真空ポンプの監視装置

Country Status (1)

Country Link
JP (1) JPS61175285A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011087995A (ja) * 2011-02-07 2011-05-06 Toshiba Medical System Co Ltd 磁気共鳴イメージング装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63248984A (ja) * 1987-04-02 1988-10-17 Seiko Seiki Co Ltd 真空ポンプの真空度測定装置
JP4807333B2 (ja) * 2007-07-24 2011-11-02 東芝ホームテクノ株式会社 炊飯器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011087995A (ja) * 2011-02-07 2011-05-06 Toshiba Medical System Co Ltd 磁気共鳴イメージング装置

Also Published As

Publication number Publication date
JPS61175285A (ja) 1986-08-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term