JPS61175285A - 真空ポンプの監視装置 - Google Patents
真空ポンプの監視装置Info
- Publication number
- JPS61175285A JPS61175285A JP1634385A JP1634385A JPS61175285A JP S61175285 A JPS61175285 A JP S61175285A JP 1634385 A JP1634385 A JP 1634385A JP 1634385 A JP1634385 A JP 1634385A JP S61175285 A JPS61175285 A JP S61175285A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- pump
- vacuum
- abnormality
- detection means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1634385A JPS61175285A (ja) | 1985-01-30 | 1985-01-30 | 真空ポンプの監視装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1634385A JPS61175285A (ja) | 1985-01-30 | 1985-01-30 | 真空ポンプの監視装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61175285A true JPS61175285A (ja) | 1986-08-06 |
| JPH0436271B2 JPH0436271B2 (de) | 1992-06-15 |
Family
ID=11913743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1634385A Granted JPS61175285A (ja) | 1985-01-30 | 1985-01-30 | 真空ポンプの監視装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61175285A (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63248984A (ja) * | 1987-04-02 | 1988-10-17 | Seiko Seiki Co Ltd | 真空ポンプの真空度測定装置 |
| JP2009028088A (ja) * | 2007-07-24 | 2009-02-12 | Toshiba Home Technology Corp | 炊飯器 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5361917B2 (ja) * | 2011-02-07 | 2013-12-04 | 東芝医用システムエンジニアリング株式会社 | 磁気共鳴イメージング装置 |
-
1985
- 1985-01-30 JP JP1634385A patent/JPS61175285A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63248984A (ja) * | 1987-04-02 | 1988-10-17 | Seiko Seiki Co Ltd | 真空ポンプの真空度測定装置 |
| JP2009028088A (ja) * | 2007-07-24 | 2009-02-12 | Toshiba Home Technology Corp | 炊飯器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0436271B2 (de) | 1992-06-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |