JPH0436476Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] This invention is a compound moving table device having a mounting table that can be moved slightly in the XYZ directions, and in particular, a device for placing a comparatively large-area object on the mounting table. This invention relates to a compound movement table that accurately makes fine movements in the X, Y, and Z directions.

PRIOR ART

2. Description of the Related Art In the manufacturing process of semiconductor integrated circuits and shadow masks, an exposure apparatus is used to expose and print a predetermined pattern on a member to be exposed, such as a wafer coated with photoresist. With the increasing density of semiconductor integrated circuits and shadow masks, exposure apparatuses are required to have high precision positioning on the order of 0.1 micron.

It is difficult to perform such highly accurate positioning with a conventionally known moving table device in which the mounting table is simply moved by a feed screw. For this reason, a table moved by a feed screw is used as a coarse movement table, a fine movement table supported so as to be able to move minutely is provided on this coarse movement table, and the absolute position of this fine movement table is measured using a laser length measuring device. It has been proposed to correct the error in the movement of the coarse movement table by slightly displacing the fine movement table, thereby achieving precise positioning.

As the exposure apparatus, a reduction projection type exposure apparatus is generally employed. This reduction projection type exposure device uses a so-called step-and-repeat method that prints small patterns one by one on a substrate such as a wafer, so it can accurately measure the parallelism of the light-receiving surface of the substrate such as a wafer. Therefore, it is necessary to maintain the parallelism of the upper surface of the mounting table on which the base material such as a wafer is placed with high precision.

A conventional compound moving table includes a Z slider having a trapezoidal cross section with an inclined surface, an XY base having an inclined surface that makes sliding contact with the inclined surface, and a Y slider and an X slider arranged in order on this XY base. A type has been proposed in which the XY base is moved in the Z-axis direction by moving the Z slider forward and backward in the horizontal direction using a direct drive mechanism (see Japanese Utility Model Application Publication No. 196834/1983).

In addition, when placing a large exposed member such as a shadow mask, the size and weight of the mounting table will inevitably increase, so the mounting table itself must be made of lightweight material such as aluminum alloy. The idea is to make it lighter. In this way, when a mounting table made of aluminum alloy is used, the coefficient of thermal expansion becomes large, so the mounting table expands and contracts due to temperature changes, resulting in measurement errors when measuring length with a laser length measuring machine, and the exposed object that is held by suction. To avoid deformation of parts, etc., it is necessary to precisely adjust the temperature of the atmosphere in which the exposure equipment is placed. However, the limit for atmospheric temperature control is about ±0.1℃ relative to the set temperature, so more precise temperature control is required. In order to perform control, it has been proposed to incorporate a temperature adjusting heater into the mounting table itself (see Japanese Patent Application Laid-Open No. 62-280743).

[Problem that the invention attempts to solve]

However, in the case of the above-mentioned conventional compound movement table, by moving the Z slider having an inclined surface horizontally forward and backward using a linear drive mechanism, the Recently, the size of wafers has increased to 6 inches or 8 inches, and the shadow masks of cathode ray tubes (CRTs) have also increased in length, such as large liquid crystal masks.
When the number of requests to expose large exposed parts of 508 mm and width 457 mm increases, the X
It is necessary to increase the size of the slider, Y slider, and XY base to match the size of the exposed member, which inevitably increases the load on the Z slider. It needs to be larger. By increasing the size of the slider in this way, the slope of the slider
There was a problem in that it became difficult to ensure accuracy with the inclined surface of the XY base, and accordingly, it became impossible to ensure parallelism of the top surface of the mounting table.

In addition, the weight of the Z slider and
As the contact area of the sloped surface of the XY base becomes wider, the frictional resistance between the two becomes larger, requiring a larger driving force to drive the Z slider, and also causing stake slip and vibration. There was also the problem that it became easier.

In order to solve the above problems, US Patent No.
As described in the specification of No. 4561815, it is considered that a rolling bearing is inserted between the inclined surface of the slider and the mounting inclined surface to reduce the frictional resistance between both inclined surfaces. However, in the case of reduction projection exposure equipment, as mentioned above, it is necessary to position the mounting table at high speed, so if a rolling bearing is applied as described above to reduce the frictional resistance between both inclined surfaces, When the mounting table is moved at high speed, the inertia of the slider increases, making it impossible to stop the table accurately for positioning, or causing the rolling bearing to shift, making it difficult to ensure smooth table movement. There were some problems such as it disappearing.

In addition, when a temperature adjustment heater is provided on the mounting table as in Japanese Patent Application Laid-open No. 62-280743, measures against electrical leakage are required, and when controlling the temperature,
Since it is an on-off control, there is a problem that hunting occurs and precise temperature control cannot be performed.

Therefore, this invention is a compound moving table in which a coarse moving table movable in the XY directions is provided with a mounting table that can be moved finely in the XYZ directions and on which an object is placed. A Z-direction position adjusting means is provided between the two, and the Z-direction position adjusting means is connected to a slope slider on which the mounting table is placed via a rolling element, a plurality of slope guide parts for tiltingly guiding the slider, and the slope guide part. By constructing the engaging rolling elements, it is possible to place a relatively large mounting table without increasing the weight of the Z-direction position adjustment means, and this is a composite that can solve the problems of the conventional example described above. The purpose is to provide a mobile table.

In addition, this idea supplies the refrigerant to the mounting table at a constant temperature using a temperature control device.
It is an object of the present invention to provide a composite moving table capable of keeping the temperature of the mounting table constant by minimizing temperature changes.

[Means for solving problems]

In order to achieve the above purpose, this invention
A mounting table that is movable in the XYZ directions and on which an object is placed is arranged on a coarse movement table that is movable in the X, Y, and Z directions. The Z-direction position adjustment means includes a slope slider having a horizontal surface on which the mounting table is placed via a rolling element, a plurality of slope guide parts that obliquely guide the slope slider, and the slope. a tilting guide mechanism having a rolling member that engages with a guide part, one of the tilt guide part and the rolling member being disposed on the coarse motion table and the other disposed on the slope slider; The present invention is characterized in that it includes a drive mechanism that drives the slope slider forward and backward in the oblique motion guide direction. Here, it is preferable that a refrigerant whose temperature is controlled by a temperature control device is supplied to the mounting table to maintain a constant temperature.

[Effect]

In this invention, a slope slider on which a mounting table on which an object is placed is placed via a rolling element is formed by a slope guide mechanism consisting of a plurality of slope guide parts and a rolling member that engages with the slope slider. By providing oblique guidance and driving the slope slider forward and backward using the drive mechanism,
The mounting table is moved in the Z-axis direction via the rolling elements.
Therefore, the load of the mounting table applied to the slope slider can be received by the plurality of slope guide parts, so a large-sized mounting table can be placed without increasing the weight of the slope slider itself, and the slope guide part Since the rolling member is engaged with, the slope slider can be smoothly tilted.

In addition, by supplying a refrigerant whose temperature is controlled by a temperature control device to the mounting table, it is possible to keep the temperature change of the mounting table to about ±0.05℃ relative to the set temperature, allowing precise temperature control. It can be carried out.

〔Example〕

Hereinafter, embodiments of this invention will be described based on the drawings.

First, an outline of a reduction projection exposure apparatus to which this invention can be applied will be explained with reference to FIG.

In the figure, 101 is a reduction projection exposure apparatus, which includes a stage 103 on which a member to be exposed 102 such as a wafer or a shadow mask is placed, a reduction lens 104 fixedly arranged opposite to the upper surface of the stage 103, and a reduction lens 104 arranged above the stage 103. The reticle mounting table 106 has a reticle mounting table 106 on which a reticle 105 is placed, and a light source section 107 placed above the reticle mounting table 106. Exposure light from the light source section 107 passes through the reticle 105 and the reduction lens 104 to the movable table device. XYZ stage 1 as
The circuit pattern formed on the reticle 105 is irradiated onto the exposed member 102 on the exposed member 1.
Reduction projection exposure is performed on 02.

The XYZ stage 103 is configured to be movable in three axes (X, Y, and Z axes), and performs focus adjustment by moving in the Z-axis direction.

At the lower end of the cylinder 108 that holds the reduction lens 104 facing the member 102 to be exposed, there is a through hole 109 that transmits the exposure light beam, and four holes are formed at equal angular intervals around the through hole 109.
Two air blowing nozzles 110 are formed. Each nozzle 110 has a common air supply source 111
112 through a throttle 112, and to one input side of a common differential pressure converter 113. The other input side of the differential pressure converter 113 is connected to the air supply source 111 via a restriction 114 and communicated with the atmosphere.
These nozzles 110, air supply source 111, aperture 1
12, 114 and the differential pressure converter 113 constitute an air micrometer 115.

Then, the detection signal of the differential pressure converter 113 is supplied to the focus adjustment control device 116, and this control device 11
6, the target value setter 116a compares the target value with a predetermined target value, and a difference signal, which is the difference value, is supplied to the drive circuit 116b, which includes an amplifier or the like.
This forms a drive output that operates an actuator 117 such as a motor, and supplies this to the Z-axis drive mechanism of the XYZ stage 103 to drive it, thereby adjusting the distance between the nozzle 110 and the member to be exposed 102 appropriately. Adjust to value.

A specific example of the XYZ stage 103 is constructed as shown in FIGS. 1 to 8.

That is, reference numeral 1 denotes a rectangular base, which is fixed to a coarse movement table 2 that is moved at high speed in the XY directions by a feed mechanism such as a feed screw.

At the center of the base 1, as shown in Figs.
As shown in the figure, a cylindrical body 3 with a closed upper end face is fixed, and the upper face of this cylindrical body 3 is a flat vibration damping surface 3a.
It is said that.

Further, inclined guide rails 4L and 4R, which serve as inclined guide portions constituting a tilted guide mechanism, are fixed in parallel on both left and right sides of the base 1 with the cylindrical body 3 interposed therebetween. Each of these inclined guide rails 4L, 4R is inclined upward toward the rear so that the height thereof increases from the front end toward the rear end in FIG.

A rectangular frame-shaped slope slider 5 is engaged with each of the slope guide rails 4L, 4R so as to be slidable in the front-rear direction in FIG. The slope slider 5 is the fifth
As shown in the figure and FIG.
An inclined mounting surface 6 parallel to L and 4R is formed, and a linear ball bearing 7 is provided as a rolling member that engages with the inclined guide rails 4L and 4R on these inclined mounting surfaces 6.
a to 7f are fixed by inserting and fastening bolts 9 into bolt holes 8 formed on the upper surface side. Here, the linear ball bearing 7a~
7f, detailed explanation thereof will be omitted, but as shown in an enlarged view in FIG.
Rolling grooves 13 are formed in the left and right side walls of the inclined guide rails 4L and 4R at positions facing the rolling grooves 12 extending in the axial direction, and sleeve portions 11 are connected to these rolling grooves 13. A large number of rolling elements 15 such as balls and rollers are held by a retainer 16 and rolled in the rolling path and circulation path 14 formed by the rolling grooves 12 and 13. It is inserted freely.

On the other hand, mounting plates 17a to 17 are placed on the upper surface of the four corners of the slope slider 5 so that the upper surfaces are in the same horizontal plane.
d is fixed by fixing means such as bolting,
An oblong flat surface 18 extending in the front-back direction is formed on the upper surface of these mounting plates 17a to 17d, and a large number of balls 20 as rolling elements held in alignment by a retainer 19 are mounted on these flat surfaces 18. It is placed. As shown in an enlarged view in FIG. 10, the retainer 19 has a U-shaped cross section, consisting of a flat plate portion 19b having a large number of through holes 19a through which the balls 20 are inserted, and a peripheral flange 19c formed on the outer peripheral surface of the lower surface of the flat plate portion 19b. Four balls 19d are arranged at equal intervals on the lower surface of the circumferential flange 19c, thereby reducing the frictional resistance between the retainer 19 and the flat surface 18.
This prevents jamming between 9c and the flat surface 18.

Then, the slope slider 5 is tilted by the linear drive mechanism 20 along the guide rails 4L, 4R. As shown in FIG. 7, this linear drive mechanism 20 includes a stepping motor 21 fixed to the base 1 with a rotating shaft 21a inclined so as to be parallel to the guide rails 4L and 4R, and A ball screw 23 connected via a coupling ring 22 to
and a ball nut 24 which is screwed into the ball screw 23 and attached to the central lower surface of the rear end side of the slope slider 5.

On the other hand, a mounting table 26 that holds the exposed member 102 by suction is placed on the upper surface side of the ball 20 of the slope slider 5.
is placed. This mounting table 26 is shown in FIG.
As shown in FIG. 4, a vacuum chuck 27 for suctioning and holding the exposed member 102 on the upper surface is formed extending radially from the center of the mounting table 26.
4 facing the ball 20 of the sloped slider 5 on the lower surface
Projections 28a to 28d are formed at these locations, and spacers 29a to 29d each have a flat bottom surface as shown in FIGS. 6 and 8.
are fixed with fixing means such as bolts, and these spacers 2
9a to 29d are mounted on the slope slider 5 via balls 20.

In addition, as shown in FIGS. 5 and 8, the base 1
Support stands 31a to 31d are fixed to the four corners of the support stand 31a and 31b, and leaf springs 32a and 32b
The convex X-direction fine movement body 33L is connected to the support base 3 via
A convex x-direction fine movement body 33R is bridged between 1c and 31d via plate springs 32c and 32d, allowing fine movement in the X direction, and between these X-direction fine movement bodies 33L and 33R via plate springs 34a to 34d. XY
A direction fine movement body 35 is bridged so as to be finely movable in the Y direction. Here, as shown in FIGS. 7 and 8, the XY direction fine movement body 35 has a through hole 36 in the center thereof through which the cylindrical body 3 is inserted.
6 is closed by an upper disk 37 as shown in FIG. A vibration damping part 40 is formed by being fixed to the damping surface 3a of the body 3 so as to closely face it, and a damping material 39 having high viscosity such as silicone oil is interposed between the damping surfaces 3a and 38a. .

Then, electromagnets 41L and 41 are placed on the outside of the X-direction fine movement bodies 33L and 33R, close to and facing them.
R is on the outside of the front and rear ends of the XY direction fine movement body 35,
Electromagnets 42F and 42R are fixedly arranged on the base 1, respectively, in close opposition to these electromagnets 41
By controlling the amount of current applied to L, 41R, 42F and 42R, the X direction fine movement bodies 33L, 3
The 3R and XY direction fine movement body 35 is finely moved in the X direction and the Y direction in submicron units.

These electromagnets 41L, 41R and 42F, 42
Fine adjustment of the X-direction fine movement bodies 33L, 33R and the XY-direction fine movement body 35 by means of R is carried out at the positive direction end of the Y-axis and the positive direction end of the X-axis shown in FIG. Installed length measuring mirrors 44 and 45
By projecting a laser beam from a laser length measuring machine (not shown) placed at a position facing these, and letting the reflected light enter the laser length measuring machine, interference of the laser beams can be detected. The absolute distance of the mounting table 26 is measured, and based on the measurement result, the electromagnet 41
Highly accurate positioning is performed by controlling the amount of excitation current with the control circuits L, 41R and 42F, 42R.

Plate springs 47a to 47d as elastic coupling bodies are interposed between the XY direction fine movement body 35 and the spacers 29a to 29d of the mounting table 26. Each of these leaf springs 47a to 47d is formed into a substantially E-shape as shown in FIG.
9a to 29d, the central part 49 is the xy direction fine movement body 3
5 with screws. Therefore, the displacement of the XY direction fine movement body 35 in the XY direction is transmitted to the mounting table 26 by the leaf springs 47a to 47d, and the mounting table 26 is urged downward.

Furthermore, as shown in FIGS. 1 and 2, a support piece 51 hanging downward is provided on the lower surface of the mounting table 26.
is fixed, and a permanent magnet 52 is fixed to the tip of this support piece 51. On the other hand, a support piece 53 facing the support piece 51 is installed on the base 1, and a proximity switch 54 such as a ball element facing the permanent magnet 52 is attached to the upper end of this support piece 53. The origin position of the mounting table 26 in the Z-axis direction is detected by the switch 54 and the permanent magnet 52, and based on this origin detection signal, a control circuit (not shown) for the stepping motor 21 of the linear drive mechanism 20 is activated.
By controlling the circuit of the stepping motor 21, positioning in the Z-axis direction can be performed with high precision.

Next, the operation of the above embodiment will be explained. First, a wafer is placed on the vacuum chuck 27 of the mounting table 26.
A member 102 to be exposed, such as a CRT shadow mask or a liquid crystal mask, is placed and held by suction, and then the focus is adjusted. This focus adjustment is performed by the air supply source 111
Pressure air is squeezed from the nozzle 110 through the throttle 112
The air micrometer 115 is activated by supplying the air to the air, and in this state, the focus adjustment control device 116 is activated.

When the focus adjustment control device 116 enters the operating state in this way, a deviation formed by the difference value between the focus adjustment target value set in advance by the target value setting device 116a and the differential pressure detection signal output from the differential pressure converter 113 is detected. A signal is provided to the drive circuit 116b, which drives the drive circuit 116b.
The pulse signal output from b is the linear drive mechanism 20
is supplied to the stepping motor 21 of. Therefore, as shown in FIGS. 4 to 7, when the slope slider 5 is sliding forward, the differential pressure detection signal is small with respect to the target value, and the nozzle 110 and the exposed member 102 are Since the interval is wider than the reference value, for example, the stepping motor 21 is rotated in the forward direction. When the stepping motor 21 rotates normally in this way, the rotational force is applied to the ball screw 23 and the ball nut 24.
, the slope slider 5 moves backward along the guide rails 4L and 4R that constitute the linear guide. As the slope slider 5 retreats, the mounting plates 17a to 17d of the slope slider 5 rise, and the mounting table 26 placed thereon via the balls 20 moves upward against the leaf springs 47a to 47d. and move. At this time, the backward movement of the slope slider 5 is guaranteed to be smooth with respect to the guide rails 4L and 4R by the linear ball bearings 7a to 7f that engage with the guide rails 4L and 4R. Since smooth movement is ensured by the large number of balls 20 held in this manner, the parallelism of the flat surfaces 18 of the mounting plates 17a to 17d of the slope slider 5 will not be disturbed, and therefore the mounting table 26 The mounting table 26 is raised without losing its parallelism. Moreover, the frictional resistance of the slope slider 5 is small, and the slope slider 5 bears only the load of the mounting table 26, and the X-direction fine movement body 33
Since it does not bear the load of L, 33R and the XY direction fine movement body 35, the rotational torque of the stepping motor 21 that drives it can be small.
Furthermore, since the slope slider 5 itself is formed into a rectangular frame shape and has an extremely small inertial mass, the inertial force when moving the mounting table 26 at high speed in the Z-axis direction by the stepping motor 21 can be reduced. Accurate positioning can be performed.

In this way, by raising the mounting table 26, the distance between the exposed member 102 and the nozzle 110 narrows, and when this becomes equal to the reference value, the raising of the mounting table 26 is stopped and the focus adjustment is completed. do.

Conversely, when the value of the differential pressure detection signal is larger than the target value, the control device 116 controls the stepping motor 2.
1 is output in the reverse direction, the stepping motor 21 is reversed, the slope slider 5 is advanced, the mounting table 26 is lowered, and the distance between the exposed member 102 and the nozzle 110 is widened, and this is the standard. When the position is reached, the lowering is stopped to complete the focus adjustment.

After completing this focus adjustment, the exposed member 1
To adjust the position in the XY directions of 02, if the moving distance of the exposed member 102 in the XY directions is large, the coarse movement table 2 is moved at high speed by the drive mechanism to the vicinity of the target position, and then Electromagnet 4
The excitation coils 1L, 41R and 42F, 42R are energized to move the XY direction fine movement body 35 to the plate springs 32a to 3.
2d in the XY direction, and the displacement of the XY direction fine movement body 35 is transmitted to the mounting table 26 via the plate springs 47a to 47d.
makes a slight movement in the XY direction. The absolute value of this slight movement of the mounting table 26 is accurately measured using a laser length measuring machine (not shown), and based on the length measurement result, the electromagnets 41L, 41
By controlling the amount of current applied to the excitation coils R, 42F, and 42R, positioning on the submicron order can be performed.

In this way, by using an electromagnet as the drive mechanism for making small movements in the X and Y directions, there is no vibration that occurs when using a motor.
When the mounting table 26 is moved in the XY directions, it is possible to prevent the mounting table 26 from shifting in the Z-axis direction.

Moreover, when the coarse movement table 2 is moved at high speed by the drive mechanism, the mounting table 26, the X direction fine movement body 3
3L, 33R and the inertia of the XY direction fine movement body 35, and due to the fine movement of the mounting table 26 in the XY direction.
Even if vibration occurs in the XY plane,
5 and the cylindrical body 3 fixed to the base 1, the high-viscosity vibration damping material 3 drive is interposed, so that a large vibration damping effect can be exhibited. In this case, the vibration damping part 40 is formed in the center of the compound moving table,
Since the opposing area between the XY direction fine movement body 35 and the cylindrical body 3 can be increased, a large vibration damping effect can be exhibited without increasing the size of the entire moving table.

In the first embodiment, a case has been described in which the slope slider 5 is tilted in the X-axis direction, but the invention is not limited to this, and the slope slider 5 may be tilted in the Y-axis direction. The slope slider 5 is formed by forming the rails 4L and 4R in a spiral shape.
may be rotated by a rotation mechanism.

Further, in the first embodiment, the case where six linear ball bearings 7a to 7f guided by the guide rails 4L and 4R are provided, but the invention is not limited to this, and depending on the weight of the mounting table 26, Any suitable number of linear ball bearings can be applied.

Furthermore, in the first embodiment, a case has been described in which linear ball bearings 7a to 7f are applied as rolling members, but the guide rail 4L is not limited to this, and may include a linear roller bearing or the like that uses rollers instead of balls. , 4R can be applied to reduce the frictional resistance.

Furthermore, in the first embodiment, the case where one slope slider 5 is provided has been described, but the invention is not limited to this, and a plurality of parallel-moving slope sliders 5 are provided, and these are driven by an independent drive mechanism. In some cases, three slope sliders 5 are provided, and the mounting table 26 is supported at three points by these.
By appropriately controlling the movement position of each slope slider, the inclination angle of the mounting table 26 can be arbitrarily changed. In this way, when the upper surface of the exposed member 102 is deformed due to distortion, etc. There is an advantage that the exposed surface can be corrected.

Furthermore, in the first embodiment, the linear ball bearings 7a to 7a are used as the diagonal guide mechanism.
7f to the inclined mounting surface 6 of the inclined slider 5,
In addition, although the case where the guide rails 4L and 4R are attached to the base 1 has been described, the present invention is not limited to this.
The position of the mounting table 26 may be adjusted in the Z direction by attaching the guide rails 4L and 4R to the slope slider 5.

In addition, in the first embodiment, the case where the base 1 is placed on the coarse movement table 2 which can be moved at high speed has been described, but this is not limited to this, and this also applies when the base 1 is fixedly placed on a fixed part. The invention can be applied.

Next, a second embodiment of this invention will be described with reference to FIGS. 12 and 13.

In this second embodiment, the temperature change of the mounting table 26 is minimized to maintain a constant temperature, and the length measurement error during length measurement by the laser length measuring machine due to the influence of temperature change, the deformation of the exposed member 102 held by suction, etc. This is designed to prevent such problems.

That is, FIG. 12 is a plan view of the mounting table corresponding to FIG. 2 in the first embodiment, and FIG. 13 is a schematic diagram showing an example of the temperature adjustment device.

In FIG. 12, reference numeral 27a indicates a large number of suction holes opened in the upper surface of the mounting table 26 made of aluminum alloy, and these suction holes 27a are connected to a suction passage 27b formed in the horizontal direction of the mounting table 27. The suction passage 27b is partially connected to the suction passage 27b.
It is connected to air suction means 27d such as a vacuum pump via a two-way electromagnetic switching valve 27c.

Furthermore, a guide plate 27f is fixed to the upper surface of the mounting table 26 with a set screw, and has a circular through hole 27e formed at a position corresponding to the suction hole 27a.

In the circular through hole 27e of the guide plate 27f covered with the exposed member 102 to be placed,
Suction part A communicating with suction hole 27a shown in FIG.
A chuck main body 27g having a hole formed on the upper surface thereof is fitted thereinto, and a closure tool 27h shown in FIG. 15 for closing the other circular through-hole 27e is fitted therein.

The mounting table 26 also has a plurality of, for example, six, cooling water passages 27i ₁ to 27 through which cooling water as a refrigerant passes.
_27i6 is drilled through it in the left and right direction. Among these, the cooling water passage 27i ₁ is bored near the reflection mirror 45 and along it, and the remaining cooling water passages 27i ₂ to 27i ₆ are formed before and after the circular through hole 27e bored in the guide plate 27f. It is perforated so as to pass through the middle of the direction. And cooling water passage 27i ₁
The right end is connected to the temperature adjustment device 60 and the discharge side of the cooling water temperature control/supply device 61, and the left end is connected to the mounting table 2.
The left end of the cooling water passage 27i2 is connected to the left end of the cooling water passage _27i2 through a tube _27k1 , which is arranged on the outside of the cooling water passage 27i and has curved portions _27j at both ends. The cooling water passage 27i ₃ is connected to the right end thereof, and the left end of the cooling water passage 27i ₃ is connected to the drain side of the cooling water temperature control/supply device 61. Similarly to the cooling water passages _{27i 1 to} 27i ₃ , the cooling water passages 27i 4 to 27i ₆ are also communicated through tubes 27k ₃ and 27k ₄ , and both ends thereof are connected to the discharge of the cooling water temperature control and supply device 61, respectively. Connected to the side and drain side.

The temperature adjustment device 60, as shown in FIG.
A cooling water temperature control/supply device 61 that controls the temperature of cooling water as a heat medium using a refrigerator or the like and sends it to the cooling water passages 27i ₁ and 27i ₄ , and a temperature sensor 62a disposed on the mounting table 26. , 62b are input, and these are compared with a preset set value, and a temperature command value is outputted from the cooling water temperature adjustment supply device 61 according to the difference between the two. A feedback system is constructed with the following. Note that 64 is a recorder connected to the temperature controller 63.

Next, the operation of the second embodiment will be explained. Since the exposure apparatus 101 is disposed within the chamber 70 whose temperature is controlled to, for example, ±0.1° C. with respect to the set temperature, the mounting table 26 is also at a temperature substantially equal to the temperature inside the chamber. In this state, the cooling water discharged from the cooling water temperature control/supply device 61 is separated into two systems, one of which is the cooling water passage 27i ₁ -tube 27k ₁ -cooling water passage 27i ₂ -tube 27k ₂ -.
A circulation path is formed which returns to the cooling water temperature control/supply device 61 via the cooling water passage 27i ₃ , and the other one is the cooling water passage 27i ₄ -tube 27k ₃ -cooling water passage 27i ₅ -tube 27k ₄ -cooling water passage 27i ₆ forming a circulation path that returns to the cooling water temperature control and supply device 61 through
Each chuck body 27g holds the reflecting mirrors 44 and 45 on the mounting table 26 and the exposed member 102 by suction.
Circulate the placement positions evenly. The temperature detection values detected by the temperature sensors 62a and 62b are respectively input to the temperature controller 63, and a temperature command value corresponding to the difference between the temperature detection value and the set value is provided to the cooling water temperature control/supply device 61. This cooling water temperature control/supply device 61 controls the cooling water temperature to ±0.05°C with respect to the set temperature. In this way, since the temperature-controlled cooling water circulates through the mounting table 26, the temperature of the mounting table 26 is kept constant. Further, since the cooling water has a large specific heat, a stable constant temperature state can be maintained without causing sudden temperature changes. Therefore, the mounting table 2 due to temperature changes
6 can be prevented from expanding and contracting, and the reflective mirror 4
4, 45 and the chuck main body 27g, the measurement error during length measurement by the laser length measuring machine and the deformation of the exposed member 102 can be reduced, and the exposure of the exposed member 102 can be increased. Accuracy can be maintained.

Further, the cooling water discharged from the cooling water temperature control/supply device 61 flows through the cooling water passage 27i ₁ at a predetermined flow rate.
and 27i ₄ , but the direction is changed by the tubes 27k ₁ to 27k ₄ having curved portions with a predetermined curvature, so that the flow is loaded in a laminar flow state without causing an impact at the tubes 27k ₁ to 27k ₄ positions. It flows inside the mounting table 26 and does not affect the positional accuracy of the mounting table 26.

In the second embodiment, a case has been described in which cooling water is used as the refrigerant; however, the present invention is not limited to this, and oil or other fluids with high specific heat may be used.

In addition, in each of the above embodiments, the case where this invention is applied to a reduction projection exposure apparatus has been described, but the present invention is not limited to this and other XYZ
Of course, this invention can also be applied to a compound moving table that is movable in the axial direction.

[Effect of idea]

As explained above, according to this invention, as a Z-direction position adjustment means for moving a mounting table on which a relatively large member such as a wafer or a shadow mask is placed in the Z direction, the mounting table is moved through a rolling element. The slope slider that is placed on the slider and adjusts its movement in the Z direction, and the slope guide mechanism that tilts and guides the slope slider are composed of a plurality of slope guide parts and a rolling member that engages with the slope guide parts. Even if the mounting area of the mounting table becomes larger and its mass increases, the load can be substantially borne by the plurality of slope guide parts, and the rigidity and mass of the slope slider can be reduced. The inertial mass of the Z-direction position adjustment means for vertically moving the mounting table can be extremely reduced, and smooth and highly accurate positioning can be achieved with a small driving force without vibrations caused by stick slips, etc. You can get the desired effect.

In addition, by supplying a refrigerant whose temperature is controlled to a constant temperature by a temperature control device to the mounting table, the mounting table can be kept at a constant temperature. It is possible to perform high-precision exposure while preventing such problems.

[Brief explanation of the drawing]

FIG. 1 is a front view showing one embodiment of the present invention, and FIGS. 2 and 3 are a plan view and a right side view of FIG. 1.
FIG. 4 is a cross-sectional view taken along line 1 in FIG. 2.
4 and 7 are cross-sectional views taken along line 4 of FIG.
- line sectional view and - line sectional view, FIG.
FIG. 9 is an enlarged sectional view showing the relationship between the linear ball bearing and the guide rail;
Fig. 10 is an enlarged cross-sectional view of a ball retainer, Fig. 11 is a schematic diagram showing an example of a reduction projection exposure apparatus to which this invention can be applied, Fig. 12 is a plan view of a mounting table showing a second embodiment of this invention, Fig. 13 is a schematic diagram showing an example of a temperature control device, Fig. 14 is a cross-sectional view of a chuck body, and Fig. 15 is a cross-sectional view of a closing tool. In the figures, 1 is a base, 2 is a coarse adjustment table, 3 is a cylinder, 4L and 4R are guide rails (inclined guide parts), 5 is a cross-sectional view of a closing tool, and
indicates an inclined slider, 7a to 7f indicate linear ball bearings (rolling members), 19 indicates a retainer, 20 indicates a ball, 21 indicates a linear drive mechanism, 22 indicates a stepping motor, 24 indicates a ball screw, 25 indicates a ball nut,
26 is a mounting table, 27 is a vacuum chuck, 27g is a chuck body, _27i1 to _27i6 are cooling water passages, 27
Reference numerals _k1 to _27k4 denote tubes, 33L and 33R denote X-direction micro-adjusters, 35 denotes an XY-direction micro-adjuster, 39 denotes silicon oil, 41L, 41R, 42F, and 42R denote electromagnets (micro-adjustment mechanisms), 47a to 47d denote leaf springs (elastic connectors), 60 denotes a temperature adjustment device, 61 denotes a cooling water temperature control and supply device, 62a and 62b denote temperature sensors, and 63 denotes a temperature regulator.

Claims (1)

[Claims for Utility Model Registration] (1) On a coarse movement table movable in the XY directions,
In a compound moving table that can be moved slightly in the XYZ directions and is equipped with a mounting table on which objects are placed,
A Z-direction position adjusting means for the mounting table is provided between the coarse movement table and the mounting table, and the Z-direction position adjusting means includes a slope slider having a horizontal surface on which the mounting table is placed via a rolling element. and a plurality of inclined guide parts that obliquely guide the inclined slider and a rolling member that engages with the inclined guide parts, and one of the inclined guide parts and the rolling member is attached to the coarse movement table, A compound movable table characterized in that the other comprises a diagonal guide mechanism disposed on each of the slope sliders, and a drive mechanism that drives the slope slider forward and backward in the diagonal guide direction. (2) The mounting table is elastically supported on the coarse movement table so as to be able to move finely in the XY directions, and is connected via an elastic connector to an XY fine movement body that is finely moved in the XY directions by a fine movement mechanism. A compound movement table according to claim 1 of the patent registration claim. (3) The compound movement table according to claim 2, wherein the XY fine movement body has a vibration damping section between it and the coarse movement table. (4) In the slanting guide mechanism, the slanting guide portion is composed of mutually parallel slanted guide rails arranged on a coarse movement table, and the rolling member is composed of a plurality of linear ball bearings that engage with each slanted guide rail. A compound movement table according to any one of claims 1 to 3 of the utility model registration claims, which is comprised of: (5) The mounting table is a composite structure according to any one of claims 1 to 4 of the utility model registration claim, in which a circulation path is formed in which a refrigerant whose temperature is controlled by a temperature control device is supplied. moving table.