JPH04366404A - Magnetic head and its manufacture - Google Patents

Abstract

PURPOSE:To provide a magnetic head without any reaction between a glass and a magnetic alloy thin film and with an improved reliability and its manufacturing method by solving a problem where the glass becomes fragile due to reaction between the glass and an alloy thin film with soft magnetic properties when forming a gap and a release is generated on a gap surface in a magnetic head which is used for VTR, DAT. FDD etc. CONSTITUTION:In a magnetic head where an alloy thin film 2 with soft magnetic properties is placed on a gap butt surface 8 of a magnetic core 9 and a glass 6 is molded at a track-width regulation groove. 2-15wt.% Fe2O3 is added to a constituent of the glass 6 and melting is performed within atmospheric up to a transfer point of the glass and within an inactive gas after that as conjugation conditions of the magnetic core 9.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention is applicable to VTR, DAT, FD
The present invention relates to a magnetic head used in D, etc., and a manufacturing method thereof.

0002

2. Description of the Related Art In recent years, as trends in magnetic recording technology require characteristics in a high frequency range for video heads and the like, there is a demand for magnetic heads and recording media that can adequately handle submicron recording wavelengths. Under these current circumstances, magnetic heads use recording media with high coercive force Hc (for example, metal, B
a-Fe tape), a soft magnetic alloy thin film (e.g. sendust, amorphous material, etc.) with a higher saturation magnetic flux density Bs than non-metallic magnetic materials such as ferrite is placed near the ferrite gap. Magnetic heads with a similar structure were developed, some of which were put into practical use, and 8mm and DAT
It is installed for.

A conventional method of manufacturing a magnetic head will be described below with reference to the drawings. FIG. 7 is a process diagram showing a conventional method for manufacturing a magnetic head in which a soft magnetic alloy thin film of several micrometers is disposed near the magnetic gap, and FIG. A winding groove 15 is machined on at least one side, and the gap joint surface is polished to a mirror finish.

FIG. 2B shows a core half 14 in which track width regulating grooves 16 are formed on the gap joining surface.

FIG. 2C shows a core half 14 in which a soft magnetic alloy thin film 17 and a SiO2 and glass film (not shown in the figure) are formed as gap materials on the gap bonding surface.

FIG. 1D shows a magnetic core 19 in which glass 18 is molded into the track width regulating groove 16 with the gap joint surfaces abutted against each other. The head chip 20 shown in FIG. 3(e) is obtained.

[0007]Although not shown in the figure, the cut head chip is then bonded to a metal base, etc., and the sliding surface with the medium is polished to a curvature appropriate to the system to be mounted, and winding is performed. Completed as a magnetic head.

[0008]

However, in the above conventional magnetic head using the soft magnetic alloy thin film 17 on the gap surface, the glass 18 and the soft magnetic alloy thin film 1 are separated when the gap is formed.
As a result of the reaction in step 7, the glass 18 becomes brittle, and peeling occurs at the gap surface due to processing loads such as chip cutting and tape sliding surface polishing, and the gap depth (Ga
pDepth) cannot be measured accurately.

The present invention has been made to solve these conventional problems, and an object of the present invention is to provide a highly reliable magnetic head and a method for manufacturing the same.

0010

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a soft magnetic alloy thin film and S as a gap material on the gap forming surfaces of a pair of magnetic cores made of ferromagnetic oxide.
iO2, a glass film is arranged, and Fe2O is placed in the track width regulating groove.
A magnetic head is made by molding glass containing 2 to 15 wt% of ferromagnetic oxide, and the manufacturing method includes polishing the magnetic gap forming surfaces of a pair of magnetic cores made of ferromagnetic oxide to a mirror surface, and winding. The process of forming line grooves and track width regulating grooves, and the process of forming soft magnetic alloy thin films and S as gap members.
The process of sequentially forming the iO2 film and the glass film, and the melting conditions for molding the glass with the gap surfaces of the pair of magnetic cores butted against each other, are as follows: an atmosphere containing oxygen up to the transition point of the glass; The treatment is carried out in an active gas atmosphere or in an atmosphere containing 1% or less of oxygen in an inert gas.

[0011]

Therefore, according to the present invention, by adding Fe2O3 to the glass molded into the track width regulating groove, diffusion of Fe from the soft magnetic alloy thin film or ferrite into the glass can be suppressed. Furthermore, by setting the conditions for forming the gap to the above-mentioned atmosphere, the wetting of the glass becomes better, and it becomes possible to mold the glass into the track width regulating groove sufficiently. In this way, a highly reliable magnetic head without any reaction between the glass and the soft magnetic alloy thin film can be obtained using a manufacturing method with a small number of steps.

0012

DESCRIPTION OF THE PREFERRED EMBODIMENTS A magnetic head according to an embodiment of the present invention will be described below with reference to the drawings. FIG. 1(a) shows the configuration of a magnetic head in an embodiment of the present invention, and FIG. 1(b) is an enlarged view showing the structure of the magnetic head near the gap. As shown in the figure, ferrite core material 1
A soft magnetic alloy thin film 2 made of a sendust film or the like is formed on the gap surface, and a SiO2 film 3 and a glass film 4 are formed as gap materials on the sendust film 2. The ferrite core material 1 is processed with a winding window 5, and 2 to 15w of Fe2O3 is processed for joining the pair of ferrite core materials 1.
Glass 6 containing t% is used.

FIG. 2 shows that the base glass has a weight ratio of P.
Using a glass 6 containing bO-86, SiO2-10, ZnO-3 and other microelements with Fe2O3 added, a 4 μm thick Sendust film 2 and a 0.1 μm thick Si
The reaction layer was measured when glass 6 was melted on a substrate on which O2 film 3 was formed. From this figure 2, Fe2O3
It can be seen that the reaction between the sendust film 2 and the glass 6 is reduced when 2 wt % or more of Sendust film 2 is added, but on the other hand, when the amount exceeds 15 wt %, the glass 6 is colored brown to such an extent that GapDepth cannot be measured. As described above, the magnetic head using the glass 6 containing 2 to 15 wt% of Fe2O3 for bonding the ferrite core material 1 was highly reliable as there was no reaction between the sendust film 2 and the glass 6.

Next, a method of manufacturing a magnetic head according to an embodiment of the present invention will be explained with reference to the drawings. FIG. 3 is a process diagram showing a method for manufacturing a magnetic head according to an embodiment of the present invention, and FIG. After that, a magnetic core 9 with a mirror-finished gap abutment surface 8 is formed.
It is. The same figure (b) shows the state in which the track width regulating groove 10 is formed on the gap abutting surface 8 of the ferrite core material 1, and the same figure (c) shows the state where the track width regulating groove 10 is formed on the gap abutting surface 8 of the ferrite core material 1. A state in which a soft magnetic alloy thin film 2 is formed, which is represented by an alloy, CoaMb, or FeaMb and has a structure in which the nitrogen composition is modulated in the thickness direction, and a SiO2 film 3 and a glass film 4 are formed thereon as gap materials (Fig. (omitted).

In the soft magnetic alloy thin film 2 represented by CoaMb, M is Nb, Ta, Zr, Hf, Ti.
, Mo, and W, and a and b expressed in atomic ratio are each 0.80≦a≦0
．． 95, 0.05≦b≦0.20, a+b=1.0, or a soft magnetic alloy thin film 2 represented by FeaMb
In the case of , M is Nb, Ta, Zr, Hf, Ti, Mo,
Consists of one or more elements selected from Cr, W, Mn, Re, Ru, and a and b are each 0.70≦a≦0
．． 95, 0.05≦b≦0.30, and a+b=1.0.

The temperature conditions when forming the gap are as shown in FIG.
When molding into the track width regulating groove 10, as shown in the figure, heat treatment is performed in the atmosphere until the transition point of the glass 6 (point At in the figure), and thereafter in an inert gas (N2 or Ar) atmosphere. Alternatively, it is carried out in an atmosphere containing 1% or less of oxygen in an inert gas.

Following the step shown in FIG. 3(c), the step shown in FIG.
) is a magnetic core 9 with a gap 11 formed therein, and shows a state where it is bonded with glass 6. From then on, the specified size (
X-X line shown in the figure), and finally the same figure (e
), a head chip 13 having a tape sliding surface 12 can be obtained.

[0018] In the manufacturing process in this example above,
By creating the atmosphere as shown in FIG. 4, the glass 6 is easily molded into the track width regulating groove 10 as shown in FIG. 5, and as shown in FIG. The reaction between glass 6 and glass 6 was significantly reduced.

As described above, according to the above embodiment, Fe2O
Since the track width regulating grooves 10 of the ferrite core material 1 are molded using the gas 6 containing 2 to 15 wt% of 3, the manufactured head chip 13 has extremely low reliability with minimal reaction between the sendust film 2 and the glass 6. It was a high value.

[0020]

Effects of the Invention As is clear from the above embodiments, the present invention utilizes Fe2O3 as a material for glass for molding.
The melting condition is to use an atmosphere containing 15 wt% of the glass, and the melting condition is to maintain the atmosphere in the air until near the transition point of the glass, and thereafter to process in an inert gas atmosphere, or in an atmosphere containing 1% or less of oxygen in the inert gas. By performing this treatment, it is possible to suppress the reaction between the glass and the soft magnetic alloy thin film, and to obtain a magnetic head with high yield and excellent reliability.

[Brief explanation of the drawing]

FIG. 1 (a) is a perspective view of a magnetic head according to an embodiment of the present invention; FIG. 1 (b) is an enlarged plan view of a main part near the gap of a magnetic core constituting a magnetic head according to the same embodiment;

[Fig. 2] Characteristic diagram showing the relationship between the amount of Fe2O3 added in the glass glass and the glass reaction layer in one example.

FIG. 3(a) is a diagram showing the external appearance of a core material used in an embodiment of the method for manufacturing a magnetic head of the present invention; FIG. (c) is an external view of the core material after the thin film forming process in the same example. (d) is an external view of the core block after the core bonding process in the same example. (e) is an external view of the core block after the core bonding process in the same example. External view of the magnetic head obtained from the core block through the process

[Figure 4] Diagram showing temperature conditions during gap formation

[Fig. 5] Characteristic diagram showing the relationship between the glass melting atmosphere conditions and the glass molding ratio in the track width regulating groove in the manufacturing method of the magnetic head.

[Figure 6] Characteristic diagram showing the relationship between the glass melting atmosphere conditions and the glass reaction layer.

FIG. 7(a) is an external appearance diagram of a core material used in a conventional magnetic head manufacturing method; FIG. Figure (c) is an external view of the core after the thin film forming process in the conventional example. (d) is an external view of the core block after the core bonding process in the conventional example. (e) is the core block after the chip cutting process in the conventional example. External view of the magnetic head obtained from

[Explanation of symbols]

2 Sendust film (soft magnetic alloy thin film) 6 Glass 8 Gap butting surface 9 Magnetic core 10 Track width regulation groove

Claims (6)

[Claims] 1. A magnetic head in which a soft magnetic alloy thin film is arranged on the gap abutting surface of a magnetic core mainly made of ferromagnetic oxide, and glass is molded in the track width regulating groove,
A magnetic head characterized in that the glass contains 2 to 15 wt% of Fe2O3. Claim 2: As a soft magnetic alloy thin film, F such as Sendust etc.
2. The magnetic head according to claim 1, wherein an e-Al-Si alloy is used. 3. The magnetic head according to claim 1, wherein the soft magnetic alloy thin film is represented by CoaMb and has a structure in which the nitrogen composition is modulated in the thickness direction. Here, M is composed of one or more elements selected from Nb, Ta, Zr, Hf, Ti, Mo, and W, and a and b represent the atomic ratio and satisfy the following formula. 0.80≦a≦0.95 0.05≦b≦0.20 a+b=1.0 4. The magnetic head according to claim 1, wherein the soft magnetic alloy thin film is represented by FeaMb and has a structure in which the nitrogen composition is modulated in the thickness direction. Here, M is Nb, Ta, Zr, Hf, Ti, Mo, Cr, W, M
It consists of one or more elements selected from n, Re, and Ru, where a and b represent the atomic ratio and satisfy the following formula. 0.70≦a≦0.95 0.05≦b≦0.30 a+b=1.0 5. A method for manufacturing a magnetic head mainly made of ferromagnetic oxide, comprising: forming a winding groove in at least one of a pair of core halves forming a magnetic head, and polishing a gap forming surface to a mirror finish; A step of processing a track width regulating groove, a step of forming a soft magnetic alloy thin film, a step of forming a SiO2 and glass film as a gap material so that the total film thickness becomes a predetermined gap width, and a step of forming a core half. A method for manufacturing a magnetic head characterized in that the bonding conditions include an atmosphere containing oxygen up to near the transition point of glass with the gap surfaces of a pair of core halves abutted against each other, and thereafter melting in an inert gas atmosphere. 6. As the bonding conditions for the core halves, instead of the bonding conditions for the core halves according to claim 5, 1%
6. The method of manufacturing a magnetic head according to claim 5, wherein the glass is melted in an atmosphere containing oxygen as follows.