JPH043714A - Transfer device and transfer method - Google Patents

Abstract

PURPOSE:To securely transfer only parts having no deficiency, in a transfer device such as a semiconductor device, by detecting the deficiency of electrical parts on a first pitch conveyor at the transferring part to a second conveyor, and if any deficiency is found, by stopping the second conveyor by one pitch. CONSTITUTION:Read-formed semiconductor devices 4 are placed on a fixed rail 1, and are subjected to pitch-transfer in a box-motion as shown in A-B-C-D of a movable plate 2 (not shown). And, at a transferring pat 10, presence of deficiency in the semiconductors 4 is detected by a sensor 12. When any deficiency is found or there is no feeding, by the signal of the sensor 12 a second movable plate 7 is stopped by one pitch. Even if there is no deficiency, if there is a mark of defective product, the device 4 is expelled outside the system by means of an attracting pad 14 so as to be subjected to the same treatment as that at the time of deficiency. By this constitution, nonfeeding can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a conveyance device and a conveyance method used in the manufacturing process of electrical components that are produced in relatively large quantities, such as semiconductor devices.

[Conventional technology]

FIGS. 4 and 5 are a side view and a plan view of a conventional transport device, and illustrate the case of transporting a semiconductor device, which is an electrical component. In these figures, (1) is two fixed rails, which are provided parallel to each other and horizontally. In FIG. 4, one wire on the near side is omitted to make the diagram easier to understand. (21 is two fixed rails (1
) It is a long and thin movable plate provided between the holes, and can move vertically and horizontally in Fig. 4. B
) are protrusions provided on the movable plate (2) in a shape extending in the width direction thereof, and a plurality of protrusions are provided at regular intervals in the longitudinal direction of the movable plate (2). (A) is a semiconductor device to be transported.

Next, the operation will be explained. The lead-shaped semiconductor device (2) is conveyed from left to right in the figure by pitch feeding, which repeats feeding at a fixed pitch many times. A movable plate [with] a box movement performs this conveyance. That is, when the movable plate (2) rises from direction A to direction B with a semiconductor device (a) loaded on the fixed rail (1), the semiconductor device (a) is moved by the movable plate (2) onto the protrusion. (It fits into the 311m fixed rail (
1) is lifted upwards.

Next, the movable plate (2) moves horizontally from B to C by a predetermined pitch to transport the semiconductor device (A) to the right in the figure, and then descends from C to D. This means that W (2) is again received by the fixed rail (1) and sent to the right by the above pitch.

Thereafter, the movable plate (2) moves horizontally from D to A and returns to its original position.

The above operation can be carried out simultaneously for a number of semiconductor devices (a) loaded at different positions by the above feed pitch, and by repeating the above operation, the semiconductor devices can be moved to the right by the feed pitch. It can be transported sequentially in both directions. In addition, Fig. 4 shows a state in which the movable plate (2) is being supported by both the fixed rail (1) and the movable plate (2) while moving from A to B or from C to D. It shows.

[Problem to be solved by the invention]

Conventional conveying devices and methods are configured as described above, so if electrical components are not continuously supplied from the previous process, the electrical components can be accurately placed on the conveying device at intervals equal to the feed pitch. Without clogging, parts of electrical parts are missing, and the parts are transported to the next process with the parts missing, and even if the electrical parts contain unspecified parts, such as defective parts, they are rejected. However, there were problems such as the mixed materials being sent to the next process.

This invention was made in order to solve the above-mentioned problems, and provides a conveyance device and a conveyance method that can convey electrical components to the next process without missing them, and can convey only predetermined electrical components to the next process. The purpose is to obtain.

[Means to solve the problem]

The conveying device according to the present invention includes first and second conveying machines that perform pitch feeding, and a detector that detects the presence or absence of missing electrical components that are objects to be conveyed within the conveying range of the first conveying machine. In a state where a missing electrical component appears in the transfer section between the first and second transport machines, the operation of the second transport machine is stopped by one pitch,
The apparatus also includes an inspection device that inspects whether the electrical components are specified or not, and a rejector that removes electrical components that are determined to be out of the specified specifications.

Furthermore, the conveyance method according to the present invention includes the steps of performing first and second conveyance, and the step of detecting whether or not an electrical component is missing within the range of the first conveyance, and the method includes the steps of performing first and second conveyance, and detecting whether or not an electrical component is missing within the range of the first conveyance. The second conveyance is stopped for one pitch when the second conveyance appears at the transfer section between the first and second conveyance, and the process of performing the first and second conveyance and the electrical parts are This process consists of a process of inspecting whether or not the item is correct, and a process of eliminating non-specified items.

[Effect]

In the conveyance device and the conveyance method according to the present invention, when a missing electrical component appears in the transfer section between the first and second conveyance, the second conveyance is stopped by one pitch, so that empty feeding is not performed. The second conveyance is carried out with the electric parts jammed in the place where the electric parts were. Furthermore, since the electrical parts are inspected to see if they are of the specified type and those that are not specified are removed, only the specified parts are transported to the next process.

[Embodiments of the invention]

FIGS. 1 and 2 are a side view and a plan view of a transport device according to an embodiment of the present invention, and show a case where a semiconductor device, which is an electrical component, is transported.

In these figures, (1), (3), and (company) are the same as those in FIGS. 4 and 5, so their explanations will be omitted. 1st
In the figure, like FIG. 4, one of the fixed rails (1) on the near side is omitted. (6) and (7) are first and second movable plates serving as first and second conveyance machines that perform first and second conveyance, respectively, and are both provided with protrusions B). As shown in Fig. 2, the first movable plate (6
) is formed with a concave notch 6 at the right end, and a convex narrow part (9) whose width is narrower than other parts is formed at the left end of the second movable plate (7). is formed, and the narrow part (9) can enter into the notch part (81), so that they do not interfere with each other even if they move in the vertical direction in FIG. 1.The first movable plate (6) A shown in Figure 1
, B, C, D, and the second movable plate is similarly E, F.

It is designed to be able to move up, down, left and right in both the G and H directions. When the first movable plate (6) moves to the right in the figure and the second movable plate (7) moves to the left, a portion occurs where they overlap in the left-right direction, and this is where the first and second movable plates overlap. movable plate (61, (7
It serves as a transfer unit 00) for semiconductor devices (2) between the two terminals.

(12) is a sensor that has both the functions of a detector that detects whether the semiconductor device (2) is missing and a tester that inspects whether the semiconductor device (a) is the specified one; (13) is a semiconductor an ejector (1) for removing the device (2) from the conveyance path;
4) is a suction pad that suctions the semiconductor device 4, and (15) is a head that supports the sensor (12) and the suction pad (14), and the suction pad (14) is movable in the R and S directions. . (16) supports the head (15) and is P.

It is an arm that moves in the direction of Q, and (14) to (16)
) constitutes the rejector (13).

Next, the operation will be explained. With the lead-formed semiconductor device (2) loaded on the fixed rail (1), the first movable plate (21) moves in the same manner as the box motion of the movable plate (21) in the cases of FIGS. 4 and 5. 6) is A.

It moves in sequence like B, CD, and A to perform pitch feeding of the semiconductor device (a). FIGS. 1 and 2 show the first movable plate (6) moving from C to D, from the delivery section 00) to the left side in the figure. 6) is within the transport range.

At the transfer section α0) which is the terminal end of the first conveyance,
At each pitch of the first conveyance, the sensor (12) detects whether the semiconductor device (2) is missing or not, that is, whether or not the immediately preceding first conveyance was a blank feed. If there is no missing part, that is, if there is a semiconductor device (2) there, it is determined that it is a defective product in the previous process and is inspected for the presence or absence of a mark attached thereto.

If there is such a mark, the semiconductor device (2) is out of the specified range, so descend from the suction pad (14) in the direction S, pick up the semiconductor device (2), and move it in the direction R. After lifting, the head (15) is driven in the direction Q by the arm (16) to remove the semiconductor device (A) from the transport path. If this exclusion is performed, the delivery section 00
) is missing the semiconductor device (a), so it is considered missing.

If the semiconductor device (A) is not missing at the delivery part α0) and there is no mark mentioned above, the semiconductor device (2)
is a predetermined value, so the second movable plate (6) performs the same box movement as the first movable plate (6),
A second transport of the semiconductor device (a) is performed.

That is, the second movable plate m rises in the direction from E to F, receives and lifts the semiconductor device (2) in the delivery section 00), and then moves from F to G by one pitch. , descending from G to H, semiconductor device (2)
By placing the semiconductor device (2) on the fixed rail (1), the semiconductor device (2) is moved one pitch to the right in the figure. The second movable plate (2) then returns from H towards E. Note that FIGS. 1 and 2 show the state immediately before the second movable plate (7) rises from E to F.

Unlike the above, if the sensor (12) determines that the semiconductor device (4) is missing in the QOI of the delivery section, the second
The movable plate roller is controlled to stop its operation by one pitch. Therefore, the second movable plate roller does not feed idly.

The above operations can be summarized as shown in the flowchart of FIG. In step (21), the first conveyance is performed, and in step (22), it is detected whether or not there is a semiconductor device (a) in the delivery section aω. If there is not, the first conveyance is carried out while the second conveyance is stopped. is repeated, and if it exists, it is checked in step (23) whether it is the predetermined one. If it is outside the specified range, eliminate it in step (24),
The first conveyance is repeated while the second conveyance is stopped. If it is a predetermined one, a second conveyance is performed in step (25). By repeating such an operation one pitch at a time, the semiconductor device (2) can be transported to the next process by the second movable plate (to) without any missing parts.

Note that the first conveyance pitch and the second conveyance pitch may be the same distance or different distances. Further, in the above embodiment, the first and second movable plates (6), (
Either a notch (8) and a narrow part (9) are formed in each of the parts 7) to prevent them from interfering with each other at the transfer part αα, or the first movable plate (6) is made without such a part. C
When descending from to D, the second movable plate RO is in the right G or H position, and the second movable plate 1
- When (2) rises from E to F, the first movable plate (6) moves to the left to A or B to prevent interference at the transfer section α0). , but that's fine.

Furthermore, although the sensor (12) is provided above the delivery section QO1, it may also be located to the left of this position in the figure, but in this case, the sensor (12) may be placed to the left of the delivery section QOI, and the second Care must be taken to match the timing with the operation control of the movable plate (7).

〔Effect of the invention〕

As described above, according to the present invention, when a missing electrical component appears in the transfer section between the first and second conveyors, the second conveyor
The conveyance of the electrical parts is stopped for one pitch, and the structure is configured to check whether the electrical parts are the specified ones and eliminate those that are not specified, so that the next process can be carried out without any missing electrical parts. Further, only predetermined electrical components can be transported.

[Brief explanation of the drawing]

1 and 2 are respectively a side view and a plan view of a conveying device according to an embodiment of the present invention, FIG. 3 is a flowchart showing the conveying operation of the conveying device of FIGS. 1 and 2, and FIG.
FIG. 5 is a side view and a plan view of a conventional conveying device, respectively. In the figure, (2) is a semiconductor device, (6) and (7) are first and second movable plates, aO) is a delivery part, and (12) is a transfer part.
) is a sensor, and (13) is an eliminator. Note that the same reference numerals in each figure indicate the same or corresponding parts. Agent Patent Attorney Masuo Oiwa 44-Guide (To device 6 '1 no town ★ Wapt 27 '2 no''101° L - To Figure 1 no 10 f1 cho 5 momme sound [ ) 2 ze J penalty - ノ3 MaJ% γ, t Machine Figure 2 Figure 3 Figure 4 Figure 5

Claims (4)

[Claims] (1) a first conveying machine that transports electrical components by pitch-feeding; a second transporting machine that receives the electrical components transported by the first transporting machine at a delivery section and transports them by pitch-feeding; A detector is provided for detecting whether or not the electrical component is missing within the transport range of the first carrier, and a state in which the electrical component is missing in the delivery section is detected using the detection result of the detector. A conveying device characterized in that the operation of the second conveying machine is stopped by one pitch. (2) a first conveyor that pitch-feeds and conveys electrical components; receives the electric components conveyed by this first conveyor;
A second conveying machine that conveys the electric components by pitch feeding, an inspection device that inspects whether the electrical components are specified or not, and a removal device that removes the electrical components that are determined to be out of the specified ones by the inspection device. Equipped with a transport device. (3) A step of pitch-feeding the electric component to perform the first conveyance, a step of detecting whether or not the electric component is missing within the range of the first conveyance, and a step of detecting whether or not the electric component is missing within the range of the first conveyance; The apparatus comprises a step of receiving the electric component at a delivery section and performing a second conveyance, and the second conveyance is stopped by one pitch when the electric component is missing in the transfer section. A transportation method characterized by: (4) A step of pitch-feeding the electrical component to perform the first transportation, a step of receiving the electrical component transported in the first transportation and performing the second transportation, and whether or not the electrical component is the specified one. A transportation method comprising a step of inspecting the electrical components, and a step of removing the electrical components determined to be predetermined as a result of the inspection.