JPH0437151A - Substrate accommodating case - Google Patents

Abstract

PURPOSE:To firmly fix substrates such as accommodated reticle and photomask and prevent movement and vibration of substrates by providing a lock means which is energized by an elastic member and pushes substrates to a supporting means in order to stop rotation of a hook. CONSTITUTION:In a substrate accommodating case comprising a short vessel 11, a supporting means 12 for horizontally supporting a substrate 10 within the vessel 11, a hook 14 which is rotatably coupled at the one end with the vessel 11 and at the other end with an elastic member 13 and is energized by the elastic member 13 to push the susbstrate 10 to a supporting means 12, a door 15 for freely opening or closing an entrance 11a of the vessel 11 and a hook rotating means 16 which is coupled at the one end with the hook 14 to cancel contactness between the hook 14 and substrate 10 by rotating the hook 14 at the time of opening the entrace 11a through rotation of the door 15 and also recovers contactness between the hook 14 and substrate 10 by rotating the hook 14 in the reverse direction to the rotating direction explained above at the time of closing the entrace 11a with the door 15, a lock mans 17 for stopping rotation of the hook 14 is also provided.

Description

[Detailed Description of the Invention] [Summary] Regarding a substrate storage case for storing substrates such as reticles and photomasks, the present invention relates to a substrate storage case that can securely fix the stored substrates and prevent movement and vibration of the substrates. A low-profile container having an entrance and exit for loading and unloading a substrate, a support means for horizontally supporting the substrate within the container, and a support means rotatably connected to the container and connected to an elastic member within the container. , a hook that is biased by an elastic member to press and fix the substrate to the support means; an opening/closing door that is rotatably connected to the container and that freely opens and closes the entrance/exit; and one end connected to the hook;
A board storage case configured to include a hook rotating means connected to the opening/closing door at the other end and rotating the hook to release the pressure on the board supporting means when the opening/closing door is rotated to open the entrance/exit. In the above, a locking means capable of stopping the rotation of the hook is provided to configure the substrate storage case.

[Industrial application field]

The present invention relates to a substrate storage case, and particularly to a substrate storage case that can reliably define stored substrates and prevent movement and vibration of the substrates.

When transporting reticles, photomasks, etc. (hereinafter collectively referred to as substrates) to remote locations, substrate storage cases that can prevent the adhesion of floating dust are widely used.

[Prior Art] Next, a conventional board storage case will be described with reference to the drawings.

Fig. 2 is a diagram for explaining a conventional board storage case, in which (a) is a schematic side sectional view with the entrance/exit open, and (b) is a schematic side sectional view with the entrance/exit closed. The side sectional view (c) is a schematic plan view with the entrance and exit closed.

Note that the same symbols are given to the same parts and materials throughout the drawings.

That is, as shown in FIG. 2, the conventional board storage case is a low-profile, hollow rectangular parallelepiped box, such as a Teflon box, with an entrance 11a formed to open only one side of the box.
A container 11 in which substrates 10 are taken in and out through an entrance/exit 11a, and two rods made of, for example, Teflon are placed at the bottom of the container 11 perpendicular to the entrance/exit 11a and spaced apart from each other. The substrate 10 is formed so as to be fixed in parallel.
Supporting means 1 that guides the substrate 10 when taking it in and out of the container 11, and also supports and holds the substrate 10 horizontally.
2, and is rotatably connected to a rotation shaft 14a fixed perpendicularly to the inner wall of the container 11 and protruding into the container 11, and
An elastic member, for example, the other end of a spring spring 13, whose one end is connected to the inner wall of A hook 14 that presses and fixes to the means 12 is connected to a hinge 1.5a attached along the upper end surface of the entrance 11a of the container If, and is rotated in the B-B' force direction to open and close the entrance 11a. A flat plate-shaped door 15 that can be opened and closed freely.
Then, connect one end of the hook 14 to the point where the spring spring 13 is connected or the vicinity thereof, and connect the other end to the inner surface of the opening/closing door 15, and rotate the opening/closing door 15 in the direction of arrow B to open the entrance/exit 11a. When opening, the hook 14 is rotated in the direction of arrow C to release the pressure of the hook 14 against the support means 12 of the board 10, and the opening/closing door 15 is rotated in the direction of arrow B'' to close the entrance/exit 11a. When closing with opening/closing door 15, hook 1
4 is rotated in the direction of arrow C° by the biasing force of the spring spring 13, and the means 12 for supporting the substrate 10 by the hook 14 is rotated.
The structure includes a hook rotating means, for example, a spring spring 16, for restoring the pressure on the hook.

To store a substrate in the substrate storage case configured as described above, as shown in FIG. is rotated in the direction of arrow C, so that the distance between the lower end of the hook 14 and the upper end of the support means 12 is equal to or greater than the thickness of the substrate 10.

Next, the substrate 10 is inserted from the entrance/exit 11a in the direction of the arrow, and the substrate 10 is supported by the support stand 12.

After this, the opening/closing door 15 is rotated in the direction of arrow B', and the container 11 is rotated.
The entrance/exit 11a of the hook 14 is closed by the opening/closing door 15, and the biasing force of the spring spring 16 in the E direction is weakened.
is rotated in the direction of arrow C'' by the urging force of the spring spring 13 in the six directions of arrows.

In this way, the substrate 10 held horizontally by the support means 12 is held by the hook 14 biased by the spring spring 13.
It is pressed and fixed to the support stand 12 and stored in the container 11.

[Problem to be solved by the invention]

However, in the conventional substrate storage case, as shown in FIG. 2, the substrate 10 is simply pressed and fixed onto the support base 12 using the hook 14 biased by the spring spring 13.

For this reason, when the board 10 housed in the board storage case is transported to a remote location, if strong vibrations or shocks are applied to the board 10, the board 10 moves inside the board storage case against the biasing force of the spring spring 13. It vibrates and rubs against the board storage case.

Due to the friction between the board 10 and the board storage case,
Fine powder originating from the substrate or substrate storage case itself is generated within the substrate storage case and adheres to the substrate or substrate storage case.

Therefore, if a substrate to which such fine powder is attached, such as a reticle, is used as it is to expose a resist adhered to a semiconductor wafer, this fine powder will be transferred to the resist of the semiconductor wafer, and the semiconductor wafer will have to be discarded due to pattern defects. There were other problems.

The present invention was made to solve these problems, and its purpose is to provide a substrate storage case that securely fixes stored substrates such as reticles and photomasks, and prevents movement and vibration of the substrates. Our goal is to provide the following.

[Means to solve the problem]

As shown in FIG. 1, the purpose is to provide a low profile container 11 having an entrance 11a for loading and unloading the substrate 10, a support means 12 for horizontally supporting the substrate 10 within the container 11, and a support means 12 for horizontally supporting the substrate 10 within the container 11. An elastic member 13 having one end rotatably connected to the elastic member 13 and the other end disposed inside the container 11.
A hook 14 is connected to the container 11 and is urged by the elastic member 13 to press the substrate 10 against the support means 12. A hook 14 is rotatably connected to the container 11 at one end and can freely open and close the entrance 11a of the container 11. A door 15 that can be opened and closed at one end, and one end of which is connected to the hook 14 and the other end of which the door 15 can be opened and closed.
When the opening/closing door 15 is rotated to open the entrance/exit 11a, the hook 14 is rotated to release the contact between the hook 14 and the board 10, and when the opening/closing door 15 is opened/closed to close the entrance/exit 11a, the hook 14 is 14 in the opposite direction to the rotation direction to restore contact between the hook 14 and the substrate 10, the substrate storage case includes: Possible locking means 17
This is achieved by a substrate storage case characterized by providing the following.

[For production]

The substrate storage case of the present invention is provided with a locking means 17 that can stop the rotation of the hook 14.

Therefore, the elastic member 13 is stored in the board storage case.
Even if strong vibrations or shocks are applied to the substrate 10 during transportation, the substrate 10 is fixed by being pressed against the support means 12 by the hook 14, which is biased by jamming and whose rotation is stopped by the locking means 17. There is no movement or vibration within the board storage case.

Therefore, the substrate 10 and the substrate storage case do not rub against each other (therefore, fine powder originating from the substrate or the substrate storage case itself is not generated inside the substrate storage case).

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram for explaining a substrate storage case according to an embodiment of the present invention. FIG. 1(a) is a schematic side sectional view with the entrance/exit open, and FIG. FIG. 6(c) is a schematic side sectional view with the hook fixed, and FIG. 2(d) is a schematic enlarged plan view of the main part with the hook fixed.

That is, the board storage case of one embodiment of the present invention is provided in the conventional board storage case explained in FIG. A locking means 17 is added, which consists of a threaded hole 17a and two screws 17b whose tips are tapered and are screwed into the threaded holes 17a.

In order to stop the rotation of the hook 140 which is biased by the spring spring 13 and presses and fixes the board 10 to the support metalwork 2 by the locking means 17, the screw 17b is inserted into the screw hole 1.
7a, and rotate the screw 17b to bring the outer peripheral surface of the tapered tip into strong contact with the upper end surface of the hook 14.

As a result, the hook 14 is fixed by the locking means 17 as shown in FIG. 1(c), and also in the direction of arrow C.
Further, it becomes impossible to rotate at all in the direction of arrow C° force.

Therefore, if the board is transported in this condition, even if strong vibrations or shocks are applied to the board storage case and the board during transportation,
The board does not move or vibrate within the board storage case.

In this way, since the substrate and the substrate storage case do not rub against each other during transportation, fine powder originating from the substrate or the substrate storage case itself is not generated inside the substrate storage case.

〔Effect of the invention〕

As is clear from the above description, according to the present invention, it is possible to provide a substrate storage case that securely fixes stored substrates such as reticles and photomasks and prevents movement and vibration of the substrates.

Therefore, when transporting substrates such as reticles and photomasks to remote locations, by storing them in the substrate storage case of the present invention and transporting them, the quality of the substrates can be maintained at the same level as before transport. It is possible to do so.

[Brief explanation of the drawing]

FIG. 1 is a diagram for explaining a board storage case according to an embodiment of the present invention, and FIG. 2 is a diagram for explaining a conventional board storage case. In the figure, 10 is a substrate, 11 is a container, 11a is an entrance, 12 is a support means (support stand), 13 is an elastic member (spring spring), 14 is a flap, 14a is a rotating shaft, 15 is an opening/closing door, 15a is a hinge, 16 is a hook rotation means (spring spring), 17 is a locking means, 17a is a screw hole, and 17b is a screw. <1) + Shijin oeFr'lf L t-Kt'jLt
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Claims (1)

[Scope of Claims] A low-profile container (11) having an entrance/exit (11a) through which the substrate (10) is taken in and taken out; and support means (12) for horizontally supporting the substrate (10) within the container (11). , one end is rotatably connected to the container (11) within the container (11), and the other end is connected to an elastic member (13) disposed within the container (11), and the elastic member ( a hook (14) that is biased by a hook (13) to press the substrate (10) against the support means (12);
), the opening/closing door (15) is connected to the hook (14) at one end and the other end is connected to the opening/closing door (15). Rotate to enter/exit (
11a), rotate the hook (14) to release the contact between the hook (14) and the board (10), and close the doorway (11a) with the opening/closing door (15). (
14) in the opposite direction to the above-mentioned rotation direction to attach the hook (1
4) and a hook rotating means (16) for restoring contact between the board (10) and the board (10),
A substrate storage case characterized in that a locking means (17) capable of stopping rotation of the hook (14) is provided.