JPH04372191A - Circuit board - Google Patents

Circuit board

Info

Publication number
JPH04372191A
JPH04372191A JP15010591A JP15010591A JPH04372191A JP H04372191 A JPH04372191 A JP H04372191A JP 15010591 A JP15010591 A JP 15010591A JP 15010591 A JP15010591 A JP 15010591A JP H04372191 A JPH04372191 A JP H04372191A
Authority
JP
Japan
Prior art keywords
conductor
circuit
circuit conductor
circuit board
palladium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15010591A
Other languages
Japanese (ja)
Other versions
JP2738603B2 (en
Inventor
Kenichi Aihara
合原 憲一
Takashi Okunosono
奥ノ薗 隆志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP3150105A priority Critical patent/JP2738603B2/en
Publication of JPH04372191A publication Critical patent/JPH04372191A/en
Application granted granted Critical
Publication of JP2738603B2 publication Critical patent/JP2738603B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Parts Printed On Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE:To provide a circuit board, in which the electrical conduction of a wiring conductor and a circuit conductor is improved and the conductors can be attached. CONSTITUTION:A circuit conductor 3 composed of a metal mainly comprising silver-palladium is attached onto the external surface of an insulating base body 1, to which a wiring conductor 2 consisting of at least one kind of tungsten, molybdenum and manganese is formed, so that one part of the circuit conductor is brought into contact with the wiring conductor 2. The circuit conductor 3, on a surface of which there is no oxide film, can be attached to the wiring conductor 2 while extremely improving electrical conduction.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は混成集積回路装置等に使
用される回路基板の改良に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to improvements in circuit boards used in hybrid integrated circuit devices and the like.

【0002】0002

【従来の技術】従来、半導体素子等の能動部品や抵抗器
、コンデンサ等の受動部品を多数搭載し、所定の電子回
路を構成するようになした混成集積回路装置は、通常、
内部にタングステン(W) 、モリブデン(Mo)、マ
ンガン(Mn)等の高融点金属から成る配線導体を埋設
した絶縁基体の外表面に銅(Cu)から成る回路導体を
その一部が前記配線導体と接続するようにして被着させ
た構造の回路基板を準備し、次に前記回路基板の表面に
半導体素子やコンデンサ、抵抗器等を載置させるととも
に各々の電極端子を回路導体に半田(Sn−Pb合金)
 等を介し接合させることによって形成されている。
2. Description of the Related Art Conventionally, hybrid integrated circuit devices that are equipped with a large number of active components such as semiconductor elements and passive components such as resistors and capacitors to form a predetermined electronic circuit are usually
A circuit conductor made of copper (Cu) is placed on the outer surface of an insulating base in which a wiring conductor made of a high-melting point metal such as tungsten (W), molybdenum (Mo), or manganese (Mn) is embedded. A circuit board is prepared with a structure in which it is connected to the circuit board, and then semiconductor elements, capacitors, resistors, etc. are placed on the surface of the circuit board, and each electrode terminal is soldered (Sn) to the circuit conductor. -Pb alloy)
It is formed by joining via etc.

【0003】尚、かかる従来の混成集積回路装置等に使
用される回路基板は一般にセラミックスの積層技術及び
スクリーン印刷等の厚膜技術を採用することによって製
作されており、具体的には以下の方法によって製作され
る。
[0003] The circuit boards used in such conventional hybrid integrated circuit devices are generally manufactured by employing ceramic lamination technology and thick film technology such as screen printing. Specifically, the following method is used. Produced by.

【0004】即ち、■まず、アルミナ(Al 2 O 
3 ) 、シリカ(SiO2 ) 、マグネシア(Mg
O) 、カルシア(CaO) 等の電気絶縁性に優れた
セラミックス原料粉末に有機溶剤、溶媒を添加混合して
複数枚のセラミック生シートを得るとともに該各セラミ
ック生シートの上下面にタングステン、モリブデン、マ
ンガン等の高融点金属粉末から成る導電ペーストを従来
周知のスクリーン印刷等の厚膜手法を採用することによ
って所定パターンに印刷塗布する。
That is, ■First, alumina (Al 2 O
3), silica (SiO2), magnesia (Mg
A plurality of raw ceramic sheets are obtained by adding and mixing an organic solvent and a solvent to a ceramic raw material powder with excellent electrical insulation properties such as O), calcia (CaO), etc., and tungsten, molybdenum, A conductive paste made of powder of a high melting point metal such as manganese is printed and coated in a predetermined pattern by employing a conventional thick film technique such as screen printing.

【0005】■次に前記各セラミック生シートを積層し
、積層体を得るとともにこれを約1500℃の温度で焼
成し、内部及び表面にタングステン、モリブデン、マン
ガン等の高融点金属から成る配線導体を有する絶縁基体
を得る。
[0005]Next, the above-mentioned green ceramic sheets are laminated to obtain a laminate, which is fired at a temperature of approximately 1500°C, and wiring conductors made of high-melting point metals such as tungsten, molybdenum, and manganese are formed inside and on the surface. Obtain an insulating substrate having the following properties.

【0006】■そして最後に前記絶縁基体の外表面に、
銅(Cu)粉末に有機溶剤、溶媒を添加混合して得た銅
ペーストを従来周知のスクリーン印刷法によりその一部
が前記配線導体と接続するようにして塗布させるととも
にこれを中性雰囲気( 窒素雰囲気)中、約900 ℃
の温度で焼成し、銅粉末を絶縁基体及び配線導体上に被
着させることによって製品としての回路基板となる。
[0006] Finally, on the outer surface of the insulating base,
Copper paste obtained by adding and mixing copper (Cu) powder with an organic solvent and a solvent is applied by a conventionally well-known screen printing method so that a part of the paste is connected to the wiring conductor, and is then placed in a neutral atmosphere (nitrogen). atmosphere), approximately 900 ℃
The copper powder is baked at a temperature of 100 mL to coat the insulating substrate and the wiring conductor to form a circuit board as a product.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、この従
来の回路基板は絶縁基体の外表面に銅ペーストを塗布し
、これを中性雰囲気( 窒素雰囲気)中で焼成して銅か
ら成る回路導体を有する回路基板を得る際、焼成雰囲気
中には通常、銅ペーストに含まれる有機溶剤、溶媒の焼
失を良好とするために7ppm程度の酸素が含有されて
おり、該酸素の含有量の制御は極めて困難で、含有酸素
量が少ないと絶縁基体と銅粉末との界面にアルミン酸銅
(CuAl 2 O 3 ) の析出量が少なくなって
回路導体を絶縁基体に強固に被着させることができず、
また含有酸素量が多いと銅から成る回路導体の表面に酸
化物膜が形成され、回路導体に半導体素子や抵抗器等を
半田を介して接合することが不可となる欠点を有してい
た。
[Problems to be Solved by the Invention] However, this conventional circuit board has a circuit conductor made of copper by applying copper paste to the outer surface of an insulating base and baking it in a neutral atmosphere (nitrogen atmosphere). When obtaining a circuit board, the firing atmosphere usually contains about 7 ppm of oxygen in order to improve the burnout of the organic solvent and solvent contained in the copper paste, and it is extremely difficult to control the oxygen content. If the amount of oxygen contained is small, the amount of copper aluminate (CuAl 2 O 3 ) precipitated at the interface between the insulating substrate and the copper powder will be small, making it impossible to firmly adhere the circuit conductor to the insulating substrate.
Moreover, when the amount of oxygen contained is large, an oxide film is formed on the surface of a circuit conductor made of copper, which has the disadvantage that it is impossible to bond semiconductor elements, resistors, etc. to the circuit conductor via solder.

【0008】[0008]

【課題を解決するための手段】本発明はタングステン、
モリブデン、マンガンの少なくとも1種から成る配線導
体を設けた絶縁基体の外表面に、銀−パラジウムを主成
分とする金属から成る回路導体をその一部が前記配線導
体と接触するようにして被着させたことを特徴とするも
のである。
[Means for Solving the Problems] The present invention provides tungsten,
A circuit conductor made of a metal mainly composed of silver-palladium is coated on the outer surface of an insulating substrate provided with a wiring conductor made of at least one of molybdenum and manganese, with a part of the circuit conductor being in contact with the wiring conductor. It is characterized by the fact that

【0009】[0009]

【実施例】次に本発明を添付図面に基づき詳細に説明す
る。図1は本発明の回路基板を説明するための一部拡大
断面図であり、1 は電気絶縁性の材料から成る絶縁基
体である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be explained in detail with reference to the accompanying drawings. FIG. 1 is a partially enlarged sectional view for explaining the circuit board of the present invention, and 1 is an insulating base made of an electrically insulating material.

【0010】前記絶縁基体1 は、例えばアルミナセラ
ミックス等の電気絶縁材料から成り、アルミナ(Al 
2 O 3 ) 、シリカ(SiO2 ) 、マグネシ
ア(MgO) 、カルシア(CaO) 等のセラミック
ス原料粉末に有機溶剤、溶媒を添加混合して泥漿状とな
すとともにこれをドクターブレード法を採用することに
よってセラミック生シートを得、しかる後、前記セラミ
ック生シートに適当な穴あけ加工を施すとともに複数枚
積層し、還元雰囲気中、約1500℃の温度で焼成する
ことによって製作される。
The insulating substrate 1 is made of an electrically insulating material such as alumina ceramics, and is made of an electrically insulating material such as alumina ceramics.
2 O 3 ), silica (SiO2), magnesia (MgO), calcia (CaO), and other ceramic raw material powders are mixed with organic solvents to form a slurry, which is then processed into ceramics using a doctor blade method. A raw ceramic sheet is obtained, and then a plurality of ceramic raw sheets are laminated together with appropriate perforations, and then fired at a temperature of about 1500° C. in a reducing atmosphere.

【0011】また前記絶縁基体1 にはその内部から上
面に導出する配線導体2 が設けてあり、該配線導体2
 はタングステン、モリブデン、マンガンの少なくとも
1 種より形成されている。
Further, the insulating substrate 1 is provided with a wiring conductor 2 leading out from the inside thereof to the upper surface, and the wiring conductor 2
is made of at least one of tungsten, molybdenum, and manganese.

【0012】前記配線導体2 はタングテン、モリブデ
ン、マンガンの粉末に有機溶剤、溶媒を添加混合して導
体ペーストを作り、該導体ペーストを前記セラミック生
シートの上下面にスクリーン印刷等により所定パターン
に印刷塗布させておくことによって絶縁基体1 の内部
及び表面に被着形成される。
The wiring conductor 2 is made by adding and mixing an organic solvent and a solvent to powders of tungsten, molybdenum, and manganese to make a conductor paste, and printing the conductor paste in a predetermined pattern on the upper and lower surfaces of the green ceramic sheet by screen printing or the like. By applying it, it is deposited on the inside and surface of the insulating substrate 1.

【0013】尚、前記配線導体2 はその露出する外表
面にニッケル(Ni)、金(Au)等をメッキ法により
層着させておくと配線導体2と後述する回路導体3 と
の電気的導通を極めて優れたものと成すことができる。 従って、配線導体2 の露出外表面は回路導体2 との
電気的導通を良好とするためにニッケルを1.0 乃至
10.0μm 、金を0.5乃至5.0 μm の厚み
にメッキ法により層着させておくことが好ましい。
[0013] If the exposed outer surface of the wiring conductor 2 is coated with nickel (Ni), gold (Au), etc. by a plating method, electrical continuity between the wiring conductor 2 and a circuit conductor 3, which will be described later, is established. can be made extremely superior. Therefore, the exposed outer surface of the wiring conductor 2 is plated with nickel to a thickness of 1.0 to 10.0 μm and gold to a thickness of 0.5 to 5.0 μm to ensure good electrical continuity with the circuit conductor 2. It is preferable to form layers.

【0014】また前記配線導体2 の露出外表面を含む
絶縁基体1 表面には銀−パラジウム(Ag−Pd) 
を主成分とする金属から成る回路導体3 が被着されて
おり、該回路導体3には半導体素子等の能動部品や抵抗
器、コンデンサ等の受動部品の各電極端子が接続される
Further, the surface of the insulating substrate 1 including the exposed outer surface of the wiring conductor 2 is coated with silver-palladium (Ag-Pd).
A circuit conductor 3 made of a metal whose main component is .

【0015】前記回路導体3 は銀、パラジウム等の粉
末にガラス粉末と有機溶剤、溶媒とを添加混合して金属
ペーストを作り、該金属ペーストをその一部が配線導体
2 と接触するようにして絶縁基体1 の外表面に印刷
塗布するとともにこれを中性雰囲気中、約850 ℃の
温度で焼成し、絶縁基体1 表面に銀−パラジウム粉末
をガラスを介して被着させることによって絶縁基体1 
の外表面に被着される。この場合、銀−パラジウムを主
成分とする金属から成る回路導体3 はパラジウムが酸
化を抑制す作用を有することから焼成雰囲気中に酸素が
多量に含まれていても表面に酸化物膜が形成されること
は殆どなく、その結果、回路導体3 に半導体素子や抵
抗器等を半田を介して強固に接合させることが可能とな
る。
The circuit conductor 3 is made by adding and mixing glass powder and an organic solvent to a powder of silver, palladium, etc. to make a metal paste, and making a part of the metal paste into contact with the wiring conductor 2. The insulating substrate 1 is printed and coated on the outer surface of the insulating substrate 1 and fired at a temperature of about 850° C. in a neutral atmosphere, thereby depositing silver-palladium powder on the surface of the insulating substrate 1 through the glass.
coated on the outer surface of the In this case, since palladium has the effect of suppressing oxidation, an oxide film is not formed on the surface of the circuit conductor 3 made of a metal mainly composed of silver and palladium even if the firing atmosphere contains a large amount of oxygen. As a result, it becomes possible to firmly bond semiconductor elements, resistors, etc. to the circuit conductor 3 through solder.

【0016】また前記銀−パラジウムを主成分とする金
属から成る回路導体3 はガラスを介して絶縁基体1 
の外表面に被着されていることからその被着強度は焼成
雰囲気中に含まれる酸素の量に左右されることなく常に
強固なものとなすことが可能となる。
Further, the circuit conductor 3 made of a metal mainly composed of silver and palladium is connected to the insulating substrate 1 through glass.
Since it is adhered to the outer surface of the sintering atmosphere, the adhesion strength can always be strong regardless of the amount of oxygen contained in the firing atmosphere.

【0017】尚、前記銀−パラジウムを主成分とする金
属から成る回路導体3 は50乃至80重量%の銀に、
パラジウムを3 乃至25重量%含んでおり、パラジウ
ムの含有量が3重量%未満となると回路導体3 の表面
に酸化物膜が形成サレ、回路導体3 に半導体素子等を
半田を介して強固に接合させることが困難となるととも
に回路導体3に銀のマイグレーションが起こり、隣接す
る回路導体3  間が電気的に短絡して回路基板として
の機能を失う危険性がある。またパラジウムの含有量が
25重量%を越えると回路℃歌3 の電気抵抗値が大き
くなり、回路基板としては適さなくなる傾向にある。従
って、回路導体3 は50乃至80重量%の銀に、パラ
ジウムを3 乃至25重量%含有させておくことが好ま
しい。
The circuit conductor 3 made of a metal mainly composed of silver-palladium contains 50 to 80% by weight of silver,
It contains 3 to 25% by weight of palladium, and when the palladium content is less than 3% by weight, an oxide film is formed on the surface of the circuit conductor 3 and a semiconductor element etc. is firmly bonded to the circuit conductor 3 through solder. At the same time, silver migration occurs in the circuit conductors 3, and there is a risk that adjacent circuit conductors 3 may be electrically short-circuited and lose their function as a circuit board. Furthermore, if the palladium content exceeds 25% by weight, the electrical resistance of the circuit tends to increase, making it unsuitable as a circuit board. Therefore, it is preferable that the circuit conductor 3 contains 50 to 80% by weight of silver and 3 to 25% by weight of palladium.

【0018】また前記回路導体3 に含まれるガラスは
、例えばPbO 、B 2 O 3 、SiO 2 、
Al2 O 3 、Na2 O 、K 2 O 、Ca
O 、ZnO 等から成り、その添加量が0.2 重量
%未満であると回路導体3 を絶縁基体1 に強固に被
着させるのが困難となり、また8.0重量%を越えると
回路導体3 の半田濡れ性( 反応性) が劣化し、回
路導体3 に半導体素子や抵抗器等を半田を介し強固に
接合させるのが困難となる。従って、回路導体3 に添
加含有されるガラスはその添加量を0.2 乃至8.0
 重量%の範囲としておくことが好ましい。
Further, the glass contained in the circuit conductor 3 may be, for example, PbO, B 2 O 3 , SiO 2 ,
Al2O3, Na2O, K2O, Ca
If the amount added is less than 0.2% by weight, it becomes difficult to firmly adhere the circuit conductor 3 to the insulating substrate 1, and if it exceeds 8.0% by weight, the circuit conductor 3 The solder wettability (reactivity) of the circuit conductor 3 deteriorates, making it difficult to firmly bond semiconductor elements, resistors, etc. to the circuit conductor 3 through solder. Therefore, the amount of glass added to the circuit conductor 3 is 0.2 to 8.0.
It is preferable to keep it in the range of % by weight.

【0019】かくしてこの回路基板はその表面に半導体
素子や抵抗器、コンデンサ等が載置され、該半導体素子
等を回路導体に半田を介し接合させることによって混成
集積回路装置となる。
Thus, this circuit board has semiconductor elements, resistors, capacitors, etc. placed on its surface, and by bonding the semiconductor elements, etc. to circuit conductors via solder, it becomes a hybrid integrated circuit device.

【0020】尚、本発明は上述の実施例に限定されるも
ではなく、本発明の要旨を逸脱しない範囲であれば種々
の変更は可能であり、例えば、銀、パラジウム粉末を含
有する金属ペーストを絶縁基体1 に印刷塗布して回路
導体3を形成する際、ビスマスを2.5 乃至25重量
%含有させておくと回路導体3 の絶縁基体1 に対す
る被着強度がより強固なものとなる。
It should be noted that the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the gist of the present invention. For example, metal paste containing silver and palladium powder When the circuit conductor 3 is formed by printing and coating on the insulating substrate 1 , by containing 2.5 to 25% by weight of bismuth, the adhesion strength of the circuit conductor 3 to the insulating substrate 1 becomes stronger.

【0021】また回路導体3 の外表面に金(Au)か
ら成る被覆層を0.1 乃至5.0 μm の厚みに層
着させておくと回路導体3 の酸化腐食を有効に防止す
るとともに半導体素子や抵抗器、コンデンサ等の電極端
子を回路導体3 により強固に接合させることができる
Further, if a coating layer made of gold (Au) is deposited on the outer surface of the circuit conductor 3 to a thickness of 0.1 to 5.0 μm, oxidation corrosion of the circuit conductor 3 can be effectively prevented, and the semiconductor Electrode terminals of elements, resistors, capacitors, etc. can be more firmly connected to the circuit conductor 3.

【0022】[0022]

【発明の効果】本発明の回路基板によれば回路導体を銀
−パラジウムを主成分とする金属で形成したことから回
路導体を絶縁基体1 の表面に被着させる際、その焼成
雰囲気中に含まれる酸素の量が多かっても少なかっても
常に表面に酸化物膜の存在しない回路導体を絶縁基体の
外表面に強固に被着させることが可能となり、混成集積
回路装置等に使用される回路基板として極めて有用とな
る。
Effects of the Invention According to the circuit board of the present invention, since the circuit conductor is formed of a metal containing silver-palladium as a main component, when the circuit conductor is attached to the surface of the insulating substrate 1, the sintering atmosphere contains Regardless of whether the amount of oxygen absorbed is large or small, it is possible to firmly adhere a circuit conductor with no oxide film on the surface to the outer surface of an insulating substrate. It is extremely useful as a

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明にかかる回路基板を説明するための一部
拡大断面図である。
FIG. 1 is a partially enlarged sectional view for explaining a circuit board according to the present invention.

【符号の説明】[Explanation of symbols]

1・・・絶縁基体 2・・・配線導体 3・・・回路導体 4・・・被覆層 1... Insulating base 2... Wiring conductor 3...Circuit conductor 4...Covering layer

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】タングステン、モリブデン、マンガンの少
なくとも1種から成る配線導体を設けた絶縁基体の外表
面に、銀−パラジウムを主成分とする金属から成る回路
導体をその一部が前記配線導体と接触するようにして被
着させたことを特徴とする回路基板。
1. A circuit conductor made of a metal containing silver-palladium as a main component is provided on the outer surface of an insulating substrate provided with a wiring conductor made of at least one of tungsten, molybdenum, and manganese, a part of which is the wiring conductor. A circuit board characterized in that the circuit board is attached in a contacting manner.
【請求項2】前記銀−パラジウムを主成分とする金属か
ら成る回路導体は、銀、パラジウム粉末にガラス成分を
0.2 乃至8.0 重量%含有させたものからなるこ
とを特徴とする請求項1 記載の回路基板。
2. The circuit conductor made of a metal containing silver-palladium as a main component is made of silver and palladium powder containing 0.2 to 8.0% by weight of a glass component. The circuit board described in Item 1.
JP3150105A 1991-06-21 1991-06-21 Circuit board Expired - Lifetime JP2738603B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3150105A JP2738603B2 (en) 1991-06-21 1991-06-21 Circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3150105A JP2738603B2 (en) 1991-06-21 1991-06-21 Circuit board

Publications (2)

Publication Number Publication Date
JPH04372191A true JPH04372191A (en) 1992-12-25
JP2738603B2 JP2738603B2 (en) 1998-04-08

Family

ID=15489613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3150105A Expired - Lifetime JP2738603B2 (en) 1991-06-21 1991-06-21 Circuit board

Country Status (1)

Country Link
JP (1) JP2738603B2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4957369A (en) * 1972-10-04 1974-06-04
JPS59112681A (en) * 1982-12-20 1984-06-29 株式会社日立製作所 Ceramic circuit board
JPS59178793A (en) * 1983-03-30 1984-10-11 株式会社日立製作所 Ceramic printed circuit board
JPS60167398A (en) * 1984-02-09 1985-08-30 松下電器産業株式会社 Multilayer circuit board and its manufacturing method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4957369A (en) * 1972-10-04 1974-06-04
JPS59112681A (en) * 1982-12-20 1984-06-29 株式会社日立製作所 Ceramic circuit board
JPS59178793A (en) * 1983-03-30 1984-10-11 株式会社日立製作所 Ceramic printed circuit board
JPS60167398A (en) * 1984-02-09 1985-08-30 松下電器産業株式会社 Multilayer circuit board and its manufacturing method

Also Published As

Publication number Publication date
JP2738603B2 (en) 1998-04-08

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