JPH0437266U - - Google Patents
Info
- Publication number
- JPH0437266U JPH0437266U JP7869790U JP7869790U JPH0437266U JP H0437266 U JPH0437266 U JP H0437266U JP 7869790 U JP7869790 U JP 7869790U JP 7869790 U JP7869790 U JP 7869790U JP H0437266 U JPH0437266 U JP H0437266U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- material supply
- chamber
- heat treatment
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
図面は本考案の一実施例の模式的断面図である
。 １……チヤンバ、３……ルツボ、１１……原料
供給器、１５……熱処理装置。
。 １……チヤンバ、３……ルツボ、１１……原料
供給器、１５……熱処理装置。
Claims (1)
- 【実用新案登録請求の範囲】 原料をチヤンバ内のルツボへ送り込むための原
料供給器を備えた単結晶成長装置において、 前記原料供給器の上方に、原料表面のナチユラ
ルオキサイドを除去するための熱処理装置を配設
し、且つ、前記熱処理装置からチヤンバ内に到る
原料供給経路の雰囲気を無酸素雰囲気となしたこ
とを特徴とする単結晶成長装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7869790U JPH0437266U (ja) | 1990-07-26 | 1990-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7869790U JPH0437266U (ja) | 1990-07-26 | 1990-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0437266U true JPH0437266U (ja) | 1992-03-30 |
Family
ID=31622194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7869790U Pending JPH0437266U (ja) | 1990-07-26 | 1990-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437266U (ja) |
-
1990
- 1990-07-26 JP JP7869790U patent/JPH0437266U/ja active Pending
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