JPH043744A - Ultra-thin plate-shaped body shifting device - Google Patents

Abstract

PURPOSE:To shift a ultra-thin plate-shaped body in no contact in a liquid by separting ultra-thin plate-shaped bodies one by one via the injection of the liquid from the second liquid injection port, and carrying the uppermost ultra- thin plate-shaped body among the separated ultra-thin plate-shaped bodies to the outside of a storing container through a notch section via the injection of the liquid from the third liquid injection port. CONSTITUTION:Several ultra-thin plate-shaped bodies 3 from above among stacked ultra-thin plate-shaped bodies are floated via the suction of a liquid from a liquid suction port 14 and the injection of the liquid from the first liquid injection port 17. The floated several ultra-thin plate-shaped bodies 3 are separated one by one via the injection of the liquid from the second liquid injection port 22. The uppermost ultra-thin plate-shaped body 3 among the separated ultra-thin plate-shaped bodies 3 flows to the outside of a storing container 2 through a notch section 21 via the injection of the liquid from the third liquid injection port 24.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention provides an ultra-thin plate-like object transfer device that separates and transfers a large number of stacked ultra-thin plate-like objects such as semiconductor sea urchins one by one. It is related to.

[Prior Art] Conventional transfer equipment that separates and transfers a large number of stacked semiconductor utensils, etc., one by one, generally vacuums the semiconductor utensils, etc. using suction cups in the air. It was a contact type structure that sucked.

[Problems to be Solved by the Invention] In the conventional configuration described above, the semiconductor wafer or the like is contaminated, warped, or damaged due to contact or suction of the suction cup. In addition, especially in the case of mirror-finished or lap-finished semiconductor wafers, it is necessary to prevent contamination not only from contact with suction cups but also from dust in the air, so transfer them in liquid such as water. is desired.

[Means for Solving the Problems] In order to solve the above problems, the ultra-thin plate-like object transfer device of the present invention has an upper end that is located in a liquid and accommodates a large number of ultra-thin plate-like objects in a stacked state. An open storage container and a movable body that can reciprocate a predetermined distance in the vertical direction and that can enter the storage container from the upper end opening of the storage container are provided. A liquid suction port that opens at the center of the opposing surface and a first liquid injection port that opens continuously or at appropriate intervals along the outer periphery of the opposing surface are formed. a notch located at the upper end of the container for discharging one ultra-thin plate-like body; a plurality of second liquid injection ports opening at appropriate intervals in the circumferential direction on the inner surface of the side wall of the storage container; A third liquid injection port is formed on the side control surface and at a position above the second liquid injection port and faces the notch, so that the suction of the liquid from the liquid suction port and the third liquid injection port are formed at a position above the second liquid injection port. Several ultra-thin plate-like bodies are floated from above among the stacked ultra-thin plate-like bodies by jetting liquid from a liquid jetting port, and these extremely thin plate-like bodies are lifted by jetting liquid from a second liquid jetting port. The ultra-thin plate-like body is separated one by one, and the topmost ultra-thin plate-like body among the separated ultra-thin plate-like bodies is carried out from the notch to the outside of the storage container by jetting liquid from the third liquid injection port. It is.

[Function] Due to the suction of the liquid from the liquid suction port and the jetting of the liquid from the first liquid injection port, the top few ultra-thin plate-like bodies among the stacked ultra-thin plate-like bodies are lifted up. By jetting the liquid from the second liquid jetting port, the several ultra-thin plate-like bodies that have been rolled up are separated one by one. By jetting the liquid from the third liquid injection port, the topmost ultra-thin plate-like body among the separated ultra-thin plate-like bodies flows out of the storage container from the notch [Example] Hereinafter, an example of the present invention will be described. An embodiment will be described based on FIG.

FIG. 1 is a schematic configuration diagram of an ultra-thin plate-shaped object transfer device according to an embodiment of the present invention, in which a bottomed cylindrical storage container 2 is placed on a pedestal 1 installed in a liquid such as water with its opening facing upward. It is installed as follows. A large number of ultra-thin plate-like bodies 3 such as semiconductor wafers are stored inside the storage container 2 in a stacked state in the thickness direction, and the upper surface of the storage container 2 is located a predetermined distance below the liquid level 4. ing. A movable body 5 that can move up and down a predetermined distance is arranged concentrically with the housing container 2 near the upper surface of the container 2, and the movable body 5 has a large diameter portion 6 in the shape of a truncated cone at its lower end.
The movable body body 6 has a cylindrical shape, a lower cover body 7 that covers the large diameter portion 6a, and an upper cover body 8 that is fixed to the upper surface of the lower cover body 7 and covers the middle part of the movable body body 6. has been done. The lower cover body 7 has a cylindrical outer peripheral surface and is attached to the storage container 2.
The inner circumferential surface faces the outer circumferential surface of the large diameter portion 6a of the movable body main body 6 with a slight gap therebetween. The upper cover 8 has a cylindrical outer circumferential surface with a smaller diameter than the outer circumferential surface of the lower cover 7, and the inner circumferential surface faces the outer circumferential surface of the movable body 6 with a slight gap except for the upper end. There is. The inner circumferential surface of the upper end portion of the upper cover body 8 is in contact with the outer circumferential surface of the upper portion of the movable body main body 6 . The upper end of the movable body 6 is connected to a lift shaft 11 of a drive device 10 via a bracket 9, and the drive device 10 is attached to a support stand 12 erected on the frame 1. The drive device 10 includes, for example, an electric motor and a rack and pinion mechanism, and the elevator shaft 11 is raised and lowered by the operation of the electric motor. A liquid suction port 14 is provided at the center of the lower surface of the moving body main body 6, that is, the surface facing the ultra-thin plate-like body 3.
The liquid suction port 14 is connected to a pump (not shown) through a through hole formed on the axis of the movable body 6 and a hose connected to the upper surface of the movable body 6. ) is connected to the suction port. The lower end of the through hole 15 is formed into a light-spreading shape. An annular first liquid injection port 17 is opened at the outer peripheral edge of the lower surface of the moving body 5. It is formed. The first liquid injection port 17 is connected to the mobile body 6
the gap between the movable body main body 6 and the upper cover 8, the through hole 18 formed horizontally in the peripheral wall of the upper cover 8, and the outer periphery of the upper cover 8. It communicates with a discharge port of a pump (not shown) via a hose 19 connected to the surface. A notch 21 is formed at the upper end of the storage container 2 for discharging one ultra-thin plate-like body 3. A second liquid injection port 22, a liquid injection port 23, and a third liquid injection port 24 are opened in this order from bottom to top on the inner surface of the side wall of the storage container 2.

A plurality of second liquid injection ports 22 are opened at appropriate intervals in the circumferential direction, and these second liquid injection ports 22 are connected to the storage container 2.
It communicates with a discharge port of a pump (not shown) via a through hole 25 horizontally penetrating the side wall of the container 2 and a hose 26 connected to the outer surface of the side wall of the container 2 . A plurality of liquid injection ports 23 are opened at appropriate intervals in the circumferential direction. It communicates with a discharge port of a pump (not shown) via a hose 28 connected to the outer surface. The third liquid injection port 24 is located at the notch 21
, and communicates with a discharge port of a pump (not shown) via a through hole 29 that horizontally penetrates the side wall of the storage container 2 and a hose 30 connected to the outer surface of the side wall of the storage container 2. There is. Note that the third liquid injection port 24 may be one or more. On the outer surface of the side wall of the storage container 2, at a position slightly below the notch 21, there is a flat guide plate 31 extending in the horizontal direction that guides one ultra-thin plate-like body 3 discharged from the notch 2. is in contact with one end of the

An annular seal portion +432 that contacts the upper surface of the lower cover 7 is attached to the annular groove formed on the lower surface of the upper cover 8. An annular sealing member 33 that comes into contact with the upper outer circumferential surface of the movable body main body 6 is attached to the movable body 6 . Although not shown, the hoses 1619.26 and 28.30 are equipped with electric on-off valves, flow rate adjustment valves, etc., and these on-off valves, flow rate adjustment valves, pumps, etc. are controlled by the control device. , hydraulic pressure, flow rate, etc. are adjusted. Further, near the other end of the guide plate 31, a storage device such as a movable rack type holder for storing the ultra-thin plate-like bodies 3 one by one is arranged.

Next, the operation will be explained. When a worker inserts a large number of stacked ultra-thin plate-shaped bodies 3 into the storage container 2 and operates a start switch (not shown), the drive device 1 starts in response to a command from the control device.
0 operates, and the movable body 5 descends into the container 2. When the lower surface of the movable body 5 reaches a position a predetermined distance below the upper end of the storage container 2, the movable body 5
stops descending, and the pump is activated by a command from the control device to inject liquid from the first liquid injection port 17 and suck the liquid from the liquid suction port 14. As a result, storage container 2
A substantially arc-shaped liquid flow is generated from the inner surface of the side wall toward the center, and this liquid flow causes the top few ultra-thin plate-like bodies 3 to float from among the many stacked ultra-thin plate-like bodies 3. At this time, several ultrathin plate-like bodies 3 are stacked and integrated. After a predetermined period of several seconds has elapsed since the moving body 5 stopped descending,
In response to a command from the control device, when the liquid injection from the first liquid injection port 17 is stopped and the movable body 5 rises, the liquid flow caused by the suction of the liquid from the liquid suction port 14 The several ultra-thin plate-like bodies 3 also rise, and at the time when the moving body 5 has risen a predetermined distance, the several ultra-thin plate-like bodies 3 have floated to the height of the second liquid injection port 22 . At this point, the movement of the moving body 5 temporarily stops due to a command from the control device, and liquid is injected from the second liquid injection port 22 according to a command from the control device, and this liquid flow causes several integrated ultra-thin plates to be formed. The shaped bodies 3 are separated one by one. When the movable body 5 rises again in response to a command from the control device, the several separated ultra-thin plate-like bodies 3 also rise accordingly. When the moving body 5 rises a predetermined distance, the topmost ultra-thin plate-like body 3 among the several ultra-thin plate-like bodies 3 rises to a position above the liquid injection port 23 . At this point, when the liquid is injected diagonally downward from the liquid injection port 23 in response to a command from the control device, this liquid flow causes the topmost ultra-thin plate of the several ultra-thin plate-like bodies 3 to appear as shown in FIG. The extremely thin plate-like bodies 3 except the shaped body 3 are prevented from rising by the liquid flow. When the movable body 5 further rises by a predetermined distance, the topmost ultra-thin plate-shaped body 3 reaches a position at the height of the third liquid injection port 24, and the liquid is sucked from the liquid suction port 14 according to a command from the control device. When the liquid is stopped and liquid is injected from the third liquid injection port 24, the topmost ultra-thin plate-shaped body 3 flows out of the container 2 through the notch 21 due to the liquid flow. The liquid flow is guided by the guide plate 3] and advances horizontally, so the extremely thin plate-like material 3 flowing out from the notch 21
1 along the guide plate 31 as shown by the imaginary line, and is stored in a storage device (not shown). Thereafter, similar operations are repeated, and a large number of ultra-thin plate-shaped bodies 3 in the container 2 are transferred to the storage device one by one.

In this way, since the ultra-thin plate-like body 3 can be transferred in the liquid without contact, contamination, warping, damage, etc. of the ultra-thin plate-like body 3 can be effectively prevented. Moreover, since the ultra-thin plate-like body 3 is moved by the liquid flow, it can be quickly transferred. Further, if the liquid jet port 23 is provided as in this embodiment, it is possible to more reliably prevent two or more ultra-thin plate-like bodies 3 from flowing out from the notch 21 at the same time.

[Another Embodiment] In the above embodiment, the liquid injection port 23 was provided, but this is because two or more ultra-thin plate-shaped bodies 3 are provided at the position of the third liquid injection port 24.
This is to more reliably prevent the two from surfacing at the same time.
It is not necessarily necessary to provide it.

Further, in the above embodiment, the annular first liquid injection ports 17 are continuously provided on the outer periphery of the lower surface of the moving body 5, but a plurality of first liquid injection ports 17 are provided on the outer periphery of the lower surface of the moving body may be provided at appropriate intervals in the circumferential direction.

Further, in the above embodiment, an example was explained in which a circular ultra-thin plate-like body 3 is transferred, but the present invention is not limited to such a configuration, and can be modified according to the shape of the ultra-thin plate-like body 3. What is necessary is just to set the shape of the storage container 2 and the moving body 5 appropriately.

In addition, the moving body 5 is raised and lowered while rotating around its axis, and the ultra-thin plate-like body 3 in the storage container 2 is supported by an elevating support device, so that the height of the topmost ultra-thin plate-like body 3 is adjusted. Various modifications are possible, such as always maintaining a constant position.

[Effects of the Invention] As explained above, according to the present invention, by suction of liquid from the liquid suction port and jetting of liquid from the first liquid injection port, the top few of the ultrathin plate-like bodies stacked are The ultra-thin plate-like bodies are floated, and these ultra-thin plate-like bodies are separated one by one by jetting liquid from the second liquid injection port. Since the body is carried out from the notch to the outside of the storage container by jetting liquid from the third liquid injection port, the ultra-thin plate-like body can be transferred in the liquid without contact. Excellent prevention of contamination and damage from warping1
F can do it. Furthermore, since the ultra-thin plate-like body is moved by the liquid flow, it can be quickly transferred.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram of an ultra-thin plate-shaped object transfer device according to an embodiment of the present invention. 2... Storage container, 3... Ultra-thin plate-like body, 5... Moving body, 14... Liquid suction port, 17... First liquid injection port,
21... Notch portion, 22... Second liquid injection port, 24.
...Third liquid injection port

Claims (1)

[Claims] 1. A storage container with an open top that is located in the liquid and accommodates a large number of ultra-thin plate-shaped bodies in a stacked state, and a storage container that is movable vertically for a predetermined distance and that can be moved from the top opening of the storage container into the storage container. a movable body that can enter into the housing, and the movable body has a liquid suction port that opens at the center of a surface facing the ultra-thin plate-shaped body housed in the storage container, and a liquid suction port that opens at the center of the surface facing the ultra-thin plate-shaped body housed in the storage container, and a liquid suction port that opens at the outer periphery of the facing surface. a first liquid injection port that opens continuously or at appropriate intervals along the storage container; a plurality of second liquid injection ports opening at appropriate intervals in the circumferential direction on the inner surface of the side wall of the storage container; and a plurality of second liquid injection ports opening at positions above the second liquid injection ports on the inner surface of the side wall of the storage container. A third liquid injection port facing the notch is formed, and the stacked ultra-thin plate-like bodies are sucked from the liquid suction port and jetted from the first liquid injection port. levitating several ultra-thin plate-like bodies from above, and separating these ultra-thin plate-like bodies one by one by jetting liquid from the second liquid injection port;
The topmost ultra-thin plate-like body among these separated ultra-thin plate-like bodies is carried out from the notch to the outside of the storage container by jetting liquid from the third liquid injection port. An ultra-thin plate-like object transfer device.