JPH0437940B2 - - Google Patents
Info
- Publication number
- JPH0437940B2 JPH0437940B2 JP21964384A JP21964384A JPH0437940B2 JP H0437940 B2 JPH0437940 B2 JP H0437940B2 JP 21964384 A JP21964384 A JP 21964384A JP 21964384 A JP21964384 A JP 21964384A JP H0437940 B2 JPH0437940 B2 JP H0437940B2
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- resistance
- gas sensor
- base
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052735 hafnium Inorganic materials 0.000 claims description 5
- 229910052726 zirconium Inorganic materials 0.000 claims description 5
- 238000002156 mixing Methods 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 238000005245 sintering Methods 0.000 claims description 2
- 229910002076 stabilized zirconia Inorganic materials 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 3
- 239000000843 powder Substances 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 description 12
- 229910052760 oxygen Inorganic materials 0.000 description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 11
- 239000000203 mixture Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- 206010021143 Hypoxia Diseases 0.000 description 4
- 238000002485 combustion reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000013021 overheating Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000000446 fuel Substances 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 229910020106 MgCo2O4 Inorganic materials 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 239000011533 mixed conductor Substances 0.000 description 1
- 229910002077 partially stabilized zirconia Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
産業上の利用分野
本発明はガスおよび石油ストーブ,ボイラ,自
動車のエンジンなどの燃焼機器の立消えおよび過
熱と、酸欠状態や空気/燃料比(A/F)(当量
組成以外の領域も含む)の検知を1つのセンサで
出来る多機能センサに関するものである。
従来の技術
従来、立消えや過熱を検知するには、検知対象
それぞれに応じてサーミスタを設けておき、その
抵抗の変化から状態検知を行なつていた。個々に
設ける必要は、立消えという室温に近い状態検知
から過熱という1000℃前後までの広い温度範囲に
わたつて高感度で測れ、しかも材料的に安定なも
のがなかつたことによる。また、このような状態
を検知してガス弁を閉じるという同じ動作をする
ことがあつても、センサからの出力形態が異なる
ため、電気回路もそれぞれのセンサに附随した
個々の回路を設ける必要があつた。
酸欠状態や燃焼の当量組成に相当するA/Fの
検知には、安定化または部分安定化ジルコニア固
定電解質の両側にPtを電極としてつけ、一方の
電極を空気のような酸素分圧が一定(Pp2=
0.21atm)の雰囲気にさらし、他方を排気ガスに
さらして酸素の濃淡電池を形成させ、発生する起
電力が燃焼の当量組成を境にして大きく変わるこ
とを利用するものとか、SnO2,TiO2,MgCo2O4
の電気抵抗が燃焼の当量組成を境にして大きく変
わることを利用するセンサが用いられている。
発明が解決しようとする問題点
上記のような従来のものでは、立消えとか過熱
を同時に検知することもできないし、起電力や抵
抗の急変を起こすA/Fの検知は当量組成に限ら
れていた。これらのセンサの当量組成での変化の
度合を急峻にするには、PdやPtなどの貴金属の
触媒作用が必要であり、そのために酸化物の抵抗
変化を利用するセンサではセンサ基体にこれらの
貴金属を触媒として添加していた。そのため価格
的にも高くなる欠点を有していた。
発明者らは、先に酸欠状態や当量組成のA/F
の検知にSr1+x/2La1−x/2Co1-xFexO3からな
る電子−酸素イオン混合導電体を用いると、この
材料自体が触媒作用を有するので貴金属触媒を加
える必要がないばかりでなく、酸素過剰状態では
10-4S/cm2と抵抗の低いものであつて還元ガス過
剰になると抵抗が増大する(SnO2やTiO2サンサ
の挙動とは逆)ので、断線に対してフエイルセー
フになり、かつセンサ自体に電流を流して回路な
しで直接制御できる利点を有するセンサが提供で
きることを明らかにした(特開昭57−103041号公
報)。またこのセンサに酸素ポンプをハイブリツ
ドすると、当量組成のA/Fのみしか出力が急変
しなかつたものを、ポンプに流す電流を変えるこ
とにより任意のA/Fの所に移すことが可能であ
ることを見出した。またセンサ基体材料に
SrMeO3(Me=Zr,Hf)を適当な比で混合焼結
させると、300℃以上で酸欠状態の検知が可能に
なる事を明らかにした。
しかしながら上記センサにおいては、酸欠状態
を示す抵抗変化量が最大でも2倍程度であり、セ
ンサとしての感度(S=R/Ro,Ro=酸素分圧
が0.21atmでの抵抗,R=その時の抵抗)は大き
くなかつた。
本発明はかかる点に鑑みてなされたもので、低
温度領域においても大きい感度をもつセンサを提
供することを目的としている。
問題点を解決するための手段
本発明は上記問題点を解決するため、基体材料
SrMeO3(Me=Zr,Hf)のMeの一部をAで置
換する事により、センサ感度の増大を行なうもの
である。
作 用
基体材料SrMeO3(Me=Zr,Hf)のMeの一部
をAで置換する事によりセンサ感度が増大する
原理は次のようになる。
すなわち、酸素分圧が低下していくと結晶中の
Me−O−Me間のOが欠損として結晶外に放出さ
れ、その放出量に比例して抵抗が増大するのであ
るが、たとえば、Zr−O−ZrよりもZr−O−A
の方がOはこの結合を立ち切り易く、そのため
同じ酸素分圧でも酸素欠損は大きくなるのであ
る。
実施例
<実施例 1>
Sr0.65La0.35Co0.7Fe0.3O3とSrZr1-xAxO3を第
1表に示すXの値でモル比0.55:0.45で混合、さ
らにこれに対してメチルセルロースを重量比率で
20%の割合で加えてボールミル中で微粉砕,混合
した後、1ton/cm2で加圧成型し空気中にて1350℃
で2時間焼成した。これを微粉砕した後、0.3mm
φのAg−Pd合金(重量比4:1)リードととも
にプレスし、それを再び1350℃で2時間焼結した
のが第3図に示すセンサ基体である。これを第3
図に示す様に構成した。このセンサの酸素分圧に
対する電気抵抗の変化を示したのが第1図であ
る。電気抵抗は、第2図のリードとの間に抵抗測
定器を接続して測定したものである。
Industrial Application Fields The present invention is applicable to combustion equipment such as gas and kerosene stoves, boilers, and automobile engines, which can be used to burn out and overheat, as well as to treat oxygen deficiency conditions and air/fuel ratios (A/F) (including areas other than equivalent composition). The present invention relates to a multifunctional sensor that can detect the following with a single sensor. Conventional Technology Conventionally, in order to detect a power out or overheating, a thermistor was provided for each object to be detected, and the state was detected from the change in resistance of the thermistor. The need to provide individual sensors was due to the lack of a stable material that could measure with high sensitivity over a wide temperature range, from detecting a state near room temperature, such as turning off, to around 1,000 degrees Celsius, indicating overheating. Furthermore, even if the sensor performs the same action of detecting such a state and closing the gas valve, the output format from the sensor is different, so it is necessary to provide an individual electrical circuit for each sensor. It was hot. To detect A/F, which corresponds to an oxygen-deficient state or the equivalent composition of combustion, Pt is attached as an electrode on both sides of a stabilized or partially stabilized zirconia fixed electrolyte, and one electrode is connected to a device with a constant oxygen partial pressure like air. (P p2 =
0.21 atm) and the other side to exhaust gas to form an oxygen concentration cell, and utilize the fact that the generated electromotive force changes greatly depending on the equivalent composition of combustion . , MgCo2O4
Sensors are used that take advantage of the fact that the electrical resistance of the fuel changes greatly depending on the combustion equivalent composition. Problems to be Solved by the Invention With the conventional devices described above, it is not possible to detect turning off or overheating at the same time, and detection of A/F that causes sudden changes in electromotive force or resistance is limited to equivalent composition. . In order to sharpen the degree of change in the equivalent composition of these sensors, the catalytic action of noble metals such as Pd and Pt is required, and for this reason, sensors that utilize the resistance change of oxides contain these noble metals in the sensor substrate. was added as a catalyst. Therefore, it had the disadvantage of being expensive. The inventors first investigated the oxygen deficiency state and equivalent composition of A/F.
When an electron-oxygen ion mixed conductor made of Sr1+x/2La1-x/2Co1 -x Fe x O 3 is used to detect In a state of excess oxygen
It has a low resistance of 10 -4 S/cm 2 , and the resistance increases when there is an excess of reducing gas (opposite to the behavior of SnO 2 and TiO 2 sensors), so it is fail-safe against disconnection, and the sensor itself It has been revealed that a sensor can be provided which has the advantage of allowing direct control without a circuit by passing a current through the sensor (Japanese Patent Application Laid-open No. 103041/1983). Also, by hybridizing this sensor with an oxygen pump, it is possible to move the output of only the A/F with equivalent composition, where the output suddenly changes, to any A/F by changing the current flowing through the pump. I found out. Also, the sensor base material
It was revealed that when SrMeO 3 (Me=Zr, Hf) is mixed and sintered in an appropriate ratio, it becomes possible to detect oxygen deficiency conditions at temperatures above 300°C. However, in the above sensor, the amount of change in resistance indicating an oxygen deficiency state is at most twice as large, and the sensitivity as a sensor (S = R/Ro, Ro = resistance at oxygen partial pressure of 0.21 atm, R = resistance at that time) resistance) was not large. The present invention has been made in view of this point, and an object of the present invention is to provide a sensor that has high sensitivity even in a low temperature range. Means for Solving the Problems In order to solve the above problems, the present invention aims to solve the above problems by
Sensor sensitivity is increased by replacing a portion of Me in SrMeO 3 (Me=Zr, Hf) with A. Function The principle of increasing sensor sensitivity by replacing part of Me in the base material SrMeO 3 (Me=Zr, Hf) with A is as follows. In other words, as the oxygen partial pressure decreases, the
O between Me-O-Me is released outside the crystal as a defect, and the resistance increases in proportion to the amount of release.
It is easier for O to break this bond, and therefore the oxygen vacancy becomes larger even at the same oxygen partial pressure. Example <Example 1> Sr 0.65 La 0.35 Co 0.7 Fe 0.3 O 3 and SrZr 1-x A x O 3 were mixed at a molar ratio of 0.55:0.45 with the value of X shown in Table 1, and then methyl cellulose was added to this mixture. in weight ratio
After adding at a ratio of 20% and pulverizing and mixing in a ball mill, it was press-molded at 1 ton/cm 2 and heated to 1350℃ in air.
It was baked for 2 hours. After finely pulverizing this, 0.3mm
The sensor substrate shown in FIG. 3 was obtained by pressing together with an Ag-Pd alloy (weight ratio 4:1) lead of φ and sintering it again at 1350° C. for 2 hours. This is the third
It was configured as shown in the figure. FIG. 1 shows the change in electrical resistance of this sensor with respect to oxygen partial pressure. The electrical resistance was measured by connecting a resistance measuring device between the leads shown in FIG.
【表】
第1図において、曲線A−1は、第1表試料A
のPp2(酸素分圧)=0.21atm中での比抵抗を示した
もの、曲線A−2は同試料AのPp2=1×10-4
atm中での比抵抗を示したものである。同様に曲
線B−1,C−1はPp2=0.21atm、B−2、C−
2はPp2=1×10-4atm中での試料B,Cの比抵
抗を示したものである。この図を見ると分かるよ
うに、400℃において試料Aのセンサ感度は1.4で
あるが試料B及びこのセンサ感度はそれぞれ3.2,
4.2となりこの温度でもセンサ感度は大きいもの
となつた。
実施例 2
センサ基体材料にSrHf1-xAxO3を用いて実
施例1と同様のセンサを作製し、その特性を調べ
た。つまりSr0.65La0.35Co0.7Fe0.3O3とSrHf1-xA
xO3を第2表に示すXの値でモル比0.65:0.35の
割合で混合焼結し、センサ基体材料として、その
電気抵抗を示したのが第2図である。[Table] In Figure 1, curve A-1 is Sample A in Table 1.
Curve A-2 shows the specific resistance at P p2 (oxygen partial pressure) = 0.21 atm of the same sample A, P p2 = 1×10 -4
This shows the specific resistance in ATM. Similarly, curves B-1 and C-1 have P p2 =0.21 atm, B-2, C-
2 shows the specific resistance of samples B and C at P p2 =1×10 −4 atm. As can be seen from this figure, at 400°C, the sensor sensitivity of sample A is 1.4, but the sensitivity of sample B and this sensor are 3.2 and 3.2, respectively.
4.2, indicating that the sensor sensitivity was high even at this temperature. Example 2 A sensor similar to Example 1 was manufactured using SrHf 1-x A x O 3 as the sensor substrate material, and its characteristics were investigated. That is, Sr 0.65 La 0.35 Co 0.7 Fe 0.3 O 3 and SrHf 1-x A
FIG. 2 shows the electrical resistance of x O 3 mixed and sintered at a molar ratio of 0.65:0.35 with the value of X shown in Table 2 and used as a sensor base material.
【表】
第2図において、曲線D−1は、第2表の試料
DのPp2=0.21atm中での比抵抗を示したもの、曲
線D−2は同試料DのPp2=1×10-4atm中での
比抵抗を示したものである。同様に曲線E−1,
F−1はPp2=0.21atm、E−2,F−2はPp2=
1×10-4atm中での試料E,Fの比抵抗を示した
ものである。この図を見ると分かるように、400
℃において試料Dのセンサ感度は1.1であるのに
くらべて、試料E,Fはそれぞれ2.2,5.8となり
この温度でもセンサ感度は大きいものとなつた。
発明の効果
第1図で分かるように、本発明はセンサ基体材
料にSr1+x/2La1−x/2Co1-xFexO3とSrMe1-y
AyO3(Me=Zr,Hf)(0<x<0.3,0<y
0.2)の混合焼結体を用いることにより、低温度
領域においても大きい感度を有するセンサを生
む。[Table] In Figure 2, curve D-1 shows the resistivity of sample D in Table 2 at P p2 = 0.21 atm, and curve D-2 shows the resistivity of sample D at P p2 = 1× This shows the specific resistance at 10 -4 atm. Similarly, curve E-1,
F-1 is P p2 = 0.21 atm, E-2, F-2 is P p2 =
It shows the specific resistance of samples E and F at 1×10 −4 atm. As you can see in this diagram, 400
The sensor sensitivity of Sample D was 1.1 at ℃, while Samples E and F had a sensor sensitivity of 2.2 and 5.8, respectively, which was high even at this temperature. Effects of the Invention As can be seen in Fig. 1, the present invention uses Sr1+x/2La1-x/2Co 1-x Fe x O 3 and SrMe 1-y A y O 3 (Me=Zr, Hf) (0 <x<0.3, 0<y
By using a mixed sintered body of 0.2), a sensor with high sensitivity is produced even in the low temperature range.
第1図はセンサ基体材料の電気抵抗の特性図、
第2図は異なるセンサ基体材料の電気抵抗の特性
図、第3図は本発明の一実施例のガスセンサの上
面図、第4図はその断面図である。
1……アルミナ保持管、2……センサ基体。
Figure 1 is a characteristic diagram of the electrical resistance of the sensor base material.
FIG. 2 is a characteristic diagram of electrical resistance of different sensor base materials, FIG. 3 is a top view of a gas sensor according to an embodiment of the present invention, and FIG. 4 is a sectional view thereof. 1...Alumina holding tube, 2...Sensor base.
Claims (1)
SrMe1-yAyO3(Me=ZrまたはHf,0<y
0.2)で表わされる物質の粉末を混合、焼結した
燃結体をセンサ基体とし、前記基体に接続した少
なくとも2つの電極を設け、前記電極間の電気抵
抗の変化を測定することを特徴とするガスセン
サ。 2 センサ基体が焼結膜である事を特徴とする特
許請求の範囲第1項記載のガスセンサ。 3 電極がPt,Pd,Agの少なくとも2種を合金
化したものであることを特徴とする特許請求の範
囲第1項記載のガスセンサ。 4 センサ基体の表面に安定化ジルコニアと第3
の電極とを順次付与したことを特徴とする特許請
求の範囲第1項記載のガスセンサ。 5 センサ基体Sr1+x/2La1−x/2Co1-yFeyO3 とSrMe1-yAyO3のスパツタ層を交互に積層化
したことを特徴とする特許請求の範囲第1項から
第4項のいずれかに記載のガスセンサ。[Claims] 1. A powder of a substance represented by the chemical formula Sr1+x/2La1-x/2Co 1-x Fe x O 3 (0<x<0.3) and
SrMe 1-y A y O 3 (Me=Zr or Hf, 0<y
A sensor base is a sintered body obtained by mixing and sintering powders of substances represented by 0.2), at least two electrodes are connected to the base, and changes in electrical resistance between the electrodes are measured. gas sensor. 2. The gas sensor according to claim 1, wherein the sensor base is a sintered film. 3. The gas sensor according to claim 1, wherein the electrode is an alloy of at least two of Pt, Pd, and Ag. 4 Stabilized zirconia and a third layer on the surface of the sensor base
2. The gas sensor according to claim 1, wherein the electrodes are sequentially provided. 5 Sensor base Claims 1 to 4 characterized in that sputtered layers of Sr1+x/2La1-x/2Co 1-y Fe y O 3 and SrMe 1-y A y O 3 are laminated alternately. The gas sensor described in any of paragraphs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21964384A JPS6197559A (en) | 1984-10-19 | 1984-10-19 | Gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21964384A JPS6197559A (en) | 1984-10-19 | 1984-10-19 | Gas sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6197559A JPS6197559A (en) | 1986-05-16 |
| JPH0437940B2 true JPH0437940B2 (en) | 1992-06-22 |
Family
ID=16738739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21964384A Granted JPS6197559A (en) | 1984-10-19 | 1984-10-19 | Gas sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6197559A (en) |
-
1984
- 1984-10-19 JP JP21964384A patent/JPS6197559A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6197559A (en) | 1986-05-16 |
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