JPH0440373A - Current/voltage conversion circuit - Google Patents
Current/voltage conversion circuitInfo
- Publication number
- JPH0440373A JPH0440373A JP2146959A JP14695990A JPH0440373A JP H0440373 A JPH0440373 A JP H0440373A JP 2146959 A JP2146959 A JP 2146959A JP 14695990 A JP14695990 A JP 14695990A JP H0440373 A JPH0440373 A JP H0440373A
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- operational amplifier
- current
- noise
- resistors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Current Or Voltage (AREA)
- Amplifiers (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野〕
本発明は、微少電流の測定に関し、特に高速かつ低ノイ
ズ特性を備えた電流電圧変換回路に関するもので、産業
用分析機器、STM(走査型トンネル顕微鏡)及びST
Mの基本原理を応用した計測器などに利用される。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to the measurement of minute currents, and in particular to a current-voltage conversion circuit with high-speed and low-noise characteristics. tunneling microscope) and ST
It is used in measuring instruments that apply the basic principle of M.
従来、ピコアンペア(p A)レベルの電流測定を行う
際には、入力バイアス電流I、の小さい(pA以下)オ
ペアンプOPIと、大きな値のフィードバック抵抗R(
Ω)を用いる回!(第5図)が−船釣に使われている。Conventionally, when making picoampere (pA) level current measurements, an operational amplifier OPI with a small input bias current I (pA or less) and a feedback resistor R (with a large value) are used.
Ω) times! (Figure 5) is used for boat fishing.
(オペアンプの教科書、データブック等で紹介されてい
る。例えば、岡村辿夫著(「オペアンプ回路の設計JC
Q出版社など)
この回路の動作原理は、入力された′@流1囚が、OP
Iには流れ込まず(!、の小さいため)すべて抵抗Rを
通るため、出力としては1に比例した電圧v=−1・R
を得るという簡単なものである。(Introduced in operational amplifier textbooks, data books, etc. For example, by Takuo Okamura ("Op Amp Circuit Design JC
Q Publisher, etc.) The operating principle of this circuit is that the input '@flow 1 prisoner is
Since it does not flow into I (because of the small value of !), it all passes through the resistor R, so the output is a voltage proportional to 1, v=-1・R
It is as simple as obtaining .
]pAの電流を測定する場合、R=100MΩのときV
=O,l mVを得る。当然、1.<1pAでなければ
ならない。] When measuring a current of pA, when R = 100MΩ, V
=O,l mV is obtained. Naturally, 1. Must be <1 pA.
この回路のノイズは、抵抗Rの両端に発生する熱雑音e
7が入力電流に換算していくらになるかが理論的最小ノ
イズとして目安になる0周波数帯域幅をB(Hz)とす
ると、ノイズ′@流i、、は、ill ” 630−
B”” ・R”” (p Ap−p ) ・・
・(11となる。(例えば、岡村辿夫著r解析ノイズメ
カニズムJCQ出版社)
この回路を用いると、抵抗Rに並列に存在する浮遊容量
Ctにより、回路の周波数帯域fcが、fc= (2π
・R−Ct ) −’ (Hz) −121で決
定されると言われている。The noise in this circuit is the thermal noise e generated across the resistor R.
If B (Hz) is the 0 frequency bandwidth, which is a guideline for the theoretical minimum noise and how much 7 is converted into input current, then the noise '@current i,, is ill '' 630-
B""・R"" (p Ap-p) ・・
・(11. (For example, by Takao Okamura, R Analysis Noise Mechanism JCQ Publishing) When using this circuit, due to the stray capacitance Ct existing in parallel with the resistor R, the frequency band fc of the circuit becomes fc = (2π
・R−Ct ) −′ (Hz) It is said to be determined by −121.
式(1)から、1いを小さくするためには、抵抗Rを大
きくする必要がある0例えば、B=10kHzで10p
Aの電流を測定するためには、抵抗Rとして100MΩ
以上が必要である。(このときの10は6.39Aであ
る。)
実際に第5図で、OPIにAD515(アナログデバイ
ス社製、Ib = 0.3pA以下)、Rに100MΩ
を使い、第6図の回路で周波数特性を調べてみると、第
7図のような特性が得られた。この場合、帯域を4KH
zとして計算すると、Ct = 0.4p F程度にな
る。また、ノイズは、30pA程度であった。From equation (1), it is necessary to increase the resistance R in order to reduce 1. For example, at B = 10kHz, 10p
To measure the current of A, the resistance R is 100MΩ.
The above is necessary. (10 in this case is 6.39A.) Actually, in Figure 5, AD515 (manufactured by Analog Devices, Ib = 0.3pA or less) is connected to OPI, and 100MΩ is connected to R.
When we investigated the frequency characteristics using the circuit shown in Figure 6, we obtained the characteristics shown in Figure 7. In this case, the band is 4KH
When calculated as z, Ct = approximately 0.4pF. Further, the noise was about 30 pA.
ところが、同じ回路で、OPIに0PAI11(バーブ
ラウン社製、1b=2pA以下)を用いると、帯域は6
KIIzまで広がり、C,= 0.3p Fになる。同
じRを使いながら異なったC7が得られることは、一般
に言われているように、帯域が(2)式によって制限さ
れているのではないことを示している。AD515と0
PAIIIの性能を比較すると、オープンループゲイン
に差がある。0PAIIIの方が、オープンループゲイ
ンが大きく、そのために同じ抵抗Rを用いても帯域が広
がったと考えられる。However, in the same circuit, if 0PAI11 (manufactured by Burr-Brown, 1b = 2 pA or less) is used for OPI, the band is 6
It spreads to KIIz and becomes C, = 0.3pF. The fact that different C7s can be obtained while using the same R indicates that the band is not limited by equation (2), as is generally said. AD515 and 0
Comparing the performance of PAIII, there is a difference in open loop gain. It is thought that 0PAIII has a larger open loop gain, which is why the band is wider even if the same resistor R is used.
すなわち、従来の回路(第5図)で決まる帯域以下の性
能しか実現できないという問題点があった。この問題点
は、いままで見逃されていたものである。That is, there was a problem in that the performance could only be achieved below the band determined by the conventional circuit (FIG. 5). This problem has been overlooked until now.
上記、従来の問題点を解決するために、本発明は、第1
図に示したように、OPIのゲイン不足分を別のアンプ
OP2により補った。In order to solve the above-mentioned conventional problems, the present invention provides the first
As shown in the figure, the lack of gain in OPI was compensated for by another amplifier OP2.
本発明によれば、入力バイアスtiの小さいオペアンプ
OPIは、−船釣にオープンループゲインが足りないた
めOF2がゲインの不足分を補うアンプとして作用する
。According to the present invention, since the operational amplifier OPI with a small input bias ti does not have enough open loop gain for boat fishing, OF2 acts as an amplifier to compensate for the lack of gain.
第2図に本発明を実施した一例を示す、OF2の倍率は
、数倍から士数倍が、回路の発振を防止するために適当
である。(OPIの第2ポールに系の不安定性を防止す
るため)
本発明に使用するOF2としては、低バイアス電流であ
る必要はないができるだけ低ノイズであることが望まし
い。FIG. 2 shows an example of implementing the present invention. The magnification of OF2 is several times to a factor of several times, which is suitable for preventing oscillation of the circuit. (To prevent system instability at the second pole of OPI) OF2 used in the present invention does not need to have a low bias current, but it is desirable that the noise be as low as possible.
第3図にフィードバック抵抗(R1+R2)の浮遊容量
による帯域の減少をキャンセルする回路4を付加した実
施例を示す、可変容量C1によりフィードバック抵抗の
浮遊容量の影響がキャンセルでき、特にフィードバック
抵抗(R1+R2)が100以上の時に有効である。Fig. 3 shows an embodiment in which a circuit 4 is added to cancel the decrease in bandwidth due to the stray capacitance of the feedback resistor (R1+R2).The effect of the stray capacitance of the feedback resistor can be canceled by the variable capacitor C1. is valid when is 100 or more.
ループゲインをOF2により11倍高めることにより、
第4図番こ示すように、周波数特性が100倍程広がっ
た。さらに、従来回路の周波数特性(第7図)に見られ
るような入力容量に起因するゲインのピークも抑えられ
、フラットな特性を得ることができた。By increasing the loop gain by 11 times with OF2,
As shown in Figure 4, the frequency characteristics have been broadened by about 100 times. Furthermore, the gain peak caused by the input capacitance, as seen in the frequency characteristics of the conventional circuit (FIG. 7), was suppressed, and flat characteristics could be obtained.
このときのノイズは、(1)式によれば、12.6pA
であるが、試作した@路は、熱雑音理論値の2倍程度の
30pAであった。According to equation (1), the noise at this time is 12.6 pA
However, the prototype @ path had a thermal noise of 30 pA, which is about twice the theoretical value.
本発明により、ノイズを増やす事なく、入手しやすいオ
ペアンプにより、高速の電流電圧回路を構成することが
できる。According to the present invention, a high-speed current-voltage circuit can be constructed using easily available operational amplifiers without increasing noise.
また、発振しやすいフィードフォワードや調整の難しい
位相補償などを用いることなく 、+21式により決ま
る時定数まで帯域を広げることができる。Furthermore, the band can be expanded to the time constant determined by the +21 formula without using feedforward, which tends to oscillate, or phase compensation, which is difficult to adjust.
さまざまなC1の補償回路が提案されているが、本発明
を併用すれば、さらに帯域を広げることが可能である。Various C1 compensation circuits have been proposed, but if the present invention is used in combination, it is possible to further widen the band.
第1図は本発明の概要を示す、第2図は本発明の実施例
、第3図は第2図の回路を基本にして、フィードバック
抵抗の浮遊容量の影響をキャンセルする構成にした実施
例、第4図は第6図の試験回路を用いて測定した第2図
の回路の周波数特性である。第5図は従来の電流電圧変
換回路の一例である。第6図は電流電圧変換回路の試験
回路である。第7図は第6図の試験回路を用いて測定し
た第5図の周波数特性である。第7図と比べて周波数帯
域が約lO倍広がっている上に、ピークのないフラフト
な特性が得られている。
l・・・抵抗バイアス電流オペアンプ0PIl・・・交
流電圧発生器
l・・・入力容量に起因すると考えられるビーク2・・
・フィードバック抵抗R
2・・・供試回路
3・・・OPlのゲインを補うためのアンプP2
P2
以上
続
(自発)
平成
2年
9月19
事件の表示
平成
2年
特許願
第146959号
発明の名称
電流電圧変換回路
補正をする者
1=V、/10”
鴇 6 口
(他1名)Fig. 1 shows an overview of the present invention, Fig. 2 shows an embodiment of the invention, and Fig. 3 shows an embodiment based on the circuit of Fig. 2, with a configuration that cancels the influence of stray capacitance of the feedback resistor. , FIG. 4 shows the frequency characteristics of the circuit of FIG. 2 measured using the test circuit of FIG. 6. FIG. 5 is an example of a conventional current-voltage conversion circuit. FIG. 6 shows a test circuit for a current-voltage conversion circuit. FIG. 7 shows the frequency characteristics of FIG. 5 measured using the test circuit of FIG. 6. The frequency band is about 10 times wider than that in FIG. 7, and a flat characteristic without a peak is obtained. l...Resistance bias current operational amplifier 0PIl...AC voltage generator l...Beak 2 thought to be caused by input capacitance...
・Feedback resistor R 2...Circuit under test 3...Amplifier P2 for supplementing the gain of OPl P2 Continuation of the above (spontaneous) September 19, 1990 Display of incident 1990 Patent Application No. 146959 Title of the invention Current-voltage conversion circuit correction person 1 = V, /10” Toki 6 mouth (1 other person)
Claims (2)
段に用いた電流電圧変換回路において、低ノイズのオペ
アンプを追加してループゲインを増すことにより周波数
特性を改善したことを特徴とする電流電圧変換回路。(1) A current-voltage conversion circuit that uses an operational amplifier IC with a small input bias current in the input stage, and has improved frequency characteristics by adding a low-noise operational amplifier and increasing loop gain. .
組み合わせた第1項記載の回路。(2) The circuit according to item 1, which is combined with a circuit that compensates for stray capacitance of the feedback resistor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2146959A JPH0440373A (en) | 1990-06-05 | 1990-06-05 | Current/voltage conversion circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2146959A JPH0440373A (en) | 1990-06-05 | 1990-06-05 | Current/voltage conversion circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0440373A true JPH0440373A (en) | 1992-02-10 |
Family
ID=15419454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2146959A Pending JPH0440373A (en) | 1990-06-05 | 1990-06-05 | Current/voltage conversion circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0440373A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5986910A (en) * | 1997-11-21 | 1999-11-16 | Matsushita Electric Industrial Co., Ltd. | Voltage-current converter |
| JP2011009800A (en) * | 2009-05-26 | 2011-01-13 | Toru Kawana | Operational amplifier |
| JP2013066176A (en) * | 2011-09-01 | 2013-04-11 | Nf Corp | Amplification circuit and feedback circuit |
| CN109709151A (en) * | 2019-01-30 | 2019-05-03 | 南通大学 | A system for measuring electrical properties of dielectric thin films |
| US11181504B2 (en) | 2018-07-26 | 2021-11-23 | Advantest Corporation | Measurement apparatus |
| DE102019123173B4 (en) | 2018-09-19 | 2024-07-18 | Advantest Corporation | PORE DEVICE AND SMALL PARTICLE MEASUREMENT SYSTEM |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5793265A (en) * | 1980-10-14 | 1982-06-10 | Perkin Elmer Corp | Potentiometer |
-
1990
- 1990-06-05 JP JP2146959A patent/JPH0440373A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5793265A (en) * | 1980-10-14 | 1982-06-10 | Perkin Elmer Corp | Potentiometer |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5986910A (en) * | 1997-11-21 | 1999-11-16 | Matsushita Electric Industrial Co., Ltd. | Voltage-current converter |
| JP2011009800A (en) * | 2009-05-26 | 2011-01-13 | Toru Kawana | Operational amplifier |
| JP2013066176A (en) * | 2011-09-01 | 2013-04-11 | Nf Corp | Amplification circuit and feedback circuit |
| US11181504B2 (en) | 2018-07-26 | 2021-11-23 | Advantest Corporation | Measurement apparatus |
| DE102019116347B4 (en) * | 2018-07-26 | 2025-11-06 | Advantest Corporation | MEASURING DEVICE AND MICROPARTTIC MEASURING SYSTEM |
| DE102019123173B4 (en) | 2018-09-19 | 2024-07-18 | Advantest Corporation | PORE DEVICE AND SMALL PARTICLE MEASUREMENT SYSTEM |
| CN109709151A (en) * | 2019-01-30 | 2019-05-03 | 南通大学 | A system for measuring electrical properties of dielectric thin films |
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