JPH0441306B2 - - Google Patents
Info
- Publication number
- JPH0441306B2 JPH0441306B2 JP11697683A JP11697683A JPH0441306B2 JP H0441306 B2 JPH0441306 B2 JP H0441306B2 JP 11697683 A JP11697683 A JP 11697683A JP 11697683 A JP11697683 A JP 11697683A JP H0441306 B2 JPH0441306 B2 JP H0441306B2
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen peroxide
- ammonia
- sample
- oxygen
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 98
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 66
- 229910021529 ammonia Inorganic materials 0.000 claims description 38
- 229910001868 water Inorganic materials 0.000 claims description 29
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 20
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 19
- 239000001301 oxygen Substances 0.000 claims description 19
- 229910052760 oxygen Inorganic materials 0.000 claims description 19
- 239000007789 gas Substances 0.000 claims description 14
- 230000008016 vaporization Effects 0.000 claims description 8
- 238000009834 vaporization Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000003054 catalyst Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 4
- 230000003197 catalytic effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 11
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 11
- 238000004140 cleaning Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 238000004737 colorimetric analysis Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- MEFBJEMVZONFCJ-UHFFFAOYSA-N molybdate Chemical compound [O-][Mo]([O-])(=O)=O MEFBJEMVZONFCJ-UHFFFAOYSA-N 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920003053 polystyrene-divinylbenzene Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
- G01N31/10—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using catalysis
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Molecular Biology (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、アンモニア性過酸化水素液中のアン
モニアおよび過酸化水素の濃度を同時にかつ簡潔
に測定する方法およびその装置に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a method and apparatus for simultaneously and simply measuring the concentrations of ammonia and hydrogen peroxide in an ammoniacal hydrogen peroxide solution.
半導体プロセス等で広く用いられるアンモニア
性過酸化水素洗浄液中のアンモニアと過酸化水素
の濃度を測定する方法としては、従来はそれぞれ
別個に測定することが行われていた。すなわち、
アンモニアの濃度の測定は、妨害となる成分が少
なく、応答性が早い隔膜型アンモニウムイオン電
極法や、塩酸や硫酸を用いた中和滴定法が用いら
れていた。また、過酸化水素の濃度の測定は、モ
リブデン酸アンモニアとの呈色反応を利用した比
色分析や、過酸化水素の紫外光の特性吸収240n
ｍの波長を利用した吸光度法が用いられてきた。
しかし、上記した分析法は、いずれも操作が煩雑
であるばかりでなく、それぞれ個別に測定を行う
必要があるという欠点があり、従つて、簡便な方
法で、アンモニアと過酸化水素の濃度を同時に測
定する方法とその装置の開発が必要になつてい
た。
Conventionally, the concentration of ammonia and hydrogen peroxide in an ammonia-based hydrogen peroxide cleaning solution widely used in semiconductor processes and the like has been measured separately. That is,
To measure the concentration of ammonia, the diaphragm-type ammonium ion electrode method, which has few interfering components and quick response, and the neutralization titration method using hydrochloric acid or sulfuric acid have been used. In addition, the concentration of hydrogen peroxide can be measured by colorimetric analysis using a color reaction with ammonia molybdate, or by using hydrogen peroxide's characteristic absorption of ultraviolet light at 240nm.
An absorbance method using a wavelength of m has been used.
However, all of the above analytical methods have the drawback that they are not only complicated to operate, but also require separate measurements. It became necessary to develop a measuring method and equipment.
本発明の目的は、上記した従来技術の欠点をな
くし、アンモニア性過酸化水素液中のアンモニア
と過酸化水素の濃度を同時に、簡便な方法で、簡
潔に測定する方法およびその装置を提供するにあ
る。
An object of the present invention is to eliminate the above-mentioned drawbacks of the prior art and to provide a method and apparatus for simultaneously and simply measuring the concentrations of ammonia and hydrogen peroxide in an ammoniacal hydrogen peroxide solution. be.
本発明は、アンモニア性過酸化水素液から試料
をとり、該試料中の過酸化水素と水とに分解し、
この試料をガスクロマトグラフに送つて、アンモ
ニア、酸素およびその水の各成分を検出し、その
検出結果を基にマイクロコピユータでアンモニア
と過酸化水素の濃度を計算し、計算結果を表示装
置に表示し、これらの操作を次の試料について順
次連続して繰り返し行うというのが、その要点で
ある。
The present invention takes a sample from an ammoniacal hydrogen peroxide solution, decomposes the sample into hydrogen peroxide and water,
This sample is sent to a gas chromatograph to detect ammonia, oxygen, and its water components.Based on the detection results, a microcopyter calculates the concentrations of ammonia and hydrogen peroxide, and the calculation results are displayed on a display device. However, the key point is to repeat these operations one after another for the next sample.
第１図は本発明の構成を明示するための全体構
成図である。 FIG. 1 is an overall configuration diagram for clearly showing the configuration of the present invention.
上記のように、本発明の基本的な考え方は、ア
ンモニアと過酸化水素の濃度をガスクロマトグラ
フによつて同時に簡潔に測定することである。し
かし、過酸化水素は分離カラム中で水と酸素とに
徐々に分解するため、ガスクロマトグラム中で明
瞭なピークを示さず、測定が困難である。そこ
で、本発明では、試料中の過酸化水素をあらかじ
め銅などの金属網を触媒として酸素と水とに分解
し、アンモニア、酸素および水の各成分の検出デ
ータを基にしてアンモニアと過酸化水素の濃度を
計算し測定することにしたものである。なお、こ
の際生じた酸素により触媒上でアンモニアが酸化
することも考えられるが、100℃前後の温度の金
属網触媒では、過酸化水素の反応は数秒で完了す
るので、アンモニアの酸化反応は本測定が影響を
受けるほどのものではない。 As mentioned above, the basic idea of the present invention is to simultaneously and simply measure the concentrations of ammonia and hydrogen peroxide by means of a gas chromatograph. However, since hydrogen peroxide gradually decomposes into water and oxygen in the separation column, it does not show clear peaks in a gas chromatogram, making measurement difficult. Therefore, in the present invention, hydrogen peroxide in a sample is decomposed into oxygen and water using a metal mesh such as copper as a catalyst, and ammonia and hydrogen peroxide are decomposed based on the detection data of each component of ammonia, oxygen, and water. We decided to calculate and measure the concentration of It is possible that the oxygen generated at this time oxidizes ammonia on the catalyst, but with a metal mesh catalyst at a temperature of around 100°C, the hydrogen peroxide reaction completes in a few seconds, so the actual oxidation reaction of ammonia is unlikely. Not enough to affect measurements.
アンモニア、酸素および水のガスクロマトグラ
フは、カラムの種類によつて若干異なるが、一般
に第２図のようになり、測定するピークの出る位
置（カラムに入れてからの時間）の間隔は一定で
ある。従つて、ガスクロマトグラフの試料自動注
入器とマイクロコンピユータ（またはタイマ）と
を連動させることにより繰り返し測定を自動的に
行うことができ、アンモニアと過酸化水素の濃度
の連続測定が可能となる。 Gas chromatographs for ammonia, oxygen, and water differ slightly depending on the type of column, but generally they look like the one shown in Figure 2, and the intervals between the measured peak positions (time after entering the column) are constant. . Therefore, by linking the automatic sample injector of the gas chromatograph and the microcomputer (or timer), repeated measurements can be performed automatically, making it possible to continuously measure the concentrations of ammonia and hydrogen peroxide.
アンモニアと過酸化水素の濃度は、次のように
して求められる。すなわち、あらかじめ酸素、ア
ンモニア、水それぞれの濃度換算のフアクタfO2、
fNH3、fH2Oを求めておき、次の式からそれぞれの
濃度が計算できる。 The concentrations of ammonia and hydrogen peroxide are determined as follows. In other words, the factor f O2 in terms of concentration of oxygen, ammonia, and water is calculated in advance,
After determining f NH3 and f H2O , the respective concentrations can be calculated using the following formulas.
アンモニアの濃度＝SNH3×fNH3／SO2fO2＋SNH3fNH3＋
SH2OfH2O……(1)
過酸化水素の濃度＝SO×fO／SO2fO2＋SNH3fNH3＋SH2O
fH2O……(2)
ここで、SO2、SNH3、SH2Oは、ガスクロマトグラ
ムにおける酸素、アンモニア、水それぞれのピー
ク面積である。 Concentration of ammonia = S NH3 ×f NH3 /S O2 f O2 +S NH3 f NH3 +
S H2O f H2O ……(1) Concentration of hydrogen peroxide = S O ×f O /S O2 f O2 +S NH3 f NH3 +S H2O
f H2O ...(2) Here, S O2 , S NH3 , and S H2O are the respective peak areas of oxygen, ammonia, and water in the gas chromatogram.
本発明の具体的実施例につき第３図を参照して
詳細に説明する。第３図は本発明の装置の構成を
示す構成図である。図において、１はアンモニア
性過酸化水素洗浄液を収納した洗浄液槽で、通常
60〜80℃に保温されている。洗浄液槽１中の洗浄
液はポンプ２により、８方コツクと２本のサンプ
ルルプーをもつ試料自動注入器３の１つのサンプ
ルループ内に送り込まれ、排出パイプ４を通つて
元の洗浄液槽１と循環している。試料自動注入器
３のサンプルループの容量は2μである。試料
自動注入器３のコツクが測定側に切り換えられる
と、ヘリウムボンベ１５からのヘリウムガスはサ
ンプルループ内の試料を気化室５へ送り込む。こ
のときのヘリウムガスの流量は50ml／minであ
る。この気化室５の内部には銅の網６がセツトさ
れており、100℃に加温されている。この気化室
５内で、過酸化水素は酸素と水とに分解される。
その後、恒温槽７内の分離カラム８で、酸素、ア
ンモニア、水はそれぞれ分離し、保持時間の短い
順に熱伝導度検出器９に達する。熱伝導度検出器
９の出力する信号は、増幅器１０、Ａ／Ｄ変換器
１１、インタフエース１２を経て、マイクロコン
ピユータ１３に送られ、ここでデータ処理され、
表示装置１４に表示される。
A specific embodiment of the present invention will be described in detail with reference to FIG. FIG. 3 is a block diagram showing the structure of the apparatus of the present invention. In the figure, 1 is a cleaning solution tank containing ammonia-based hydrogen peroxide cleaning solution.
The temperature is kept at 60-80℃. The cleaning liquid in the cleaning liquid tank 1 is pumped by the pump 2 into one sample loop of the automatic sample injector 3, which has an eight-way tap and two sample loops, and is circulated back to the original cleaning liquid tank 1 through the discharge pipe 4. are doing. The sample loop capacity of the automatic sample injector 3 is 2μ. When the tip of the automatic sample injector 3 is switched to the measurement side, helium gas from the helium cylinder 15 feeds the sample in the sample loop into the vaporization chamber 5. The flow rate of helium gas at this time was 50 ml/min. A copper net 6 is set inside the vaporization chamber 5 and heated to 100°C. Within this vaporization chamber 5, hydrogen peroxide is decomposed into oxygen and water.
Thereafter, oxygen, ammonia, and water are separated in a separation column 8 in a constant temperature bath 7, and reach a thermal conductivity detector 9 in the order of shortest retention time. The signal output from the thermal conductivity detector 9 is sent to a microcomputer 13 via an amplifier 10, an A/D converter 11, and an interface 12, where it is data-processed.
It is displayed on the display device 14.
上記の構成において、分離カラム８に、60〜80
メツシユのポリスチレンジビニルベンゼンからな
るポーラスポリマビーズを充填した内径３mmφ長
さ１ｍのステンレス製カラムを用い、恒温槽７の
温度を120℃で測定したときの、増幅器１０の出
力を直接記録計に取り出した結果を第２図に示
す。この図からわかるように、１つの試料につい
ての測定は２分以内で終了する。そこで、マイク
ロコンピユータ１３やタイマ（図示せず）の指令
により、試料自動注入器３が切り換わり、次の試
料の測定に移るようになつている。この操作が繰
り返されることにより、ほぼ２分間隔でアンモニ
アと過酸化水素の濃度を連続して測定することが
できる。 In the above configuration, separation column 8 contains 60 to 80
Using a stainless steel column with an inner diameter of 3 mm and a length of 1 m filled with porous polymer beads made of mesh polystyrene divinylbenzene, the output of the amplifier 10 was taken directly to the recorder when the temperature of the thermostatic chamber 7 was measured at 120°C. The results are shown in Figure 2. As can be seen from this figure, the measurement for one sample is completed within 2 minutes. Therefore, the automatic sample injector 3 is switched in response to a command from the microcomputer 13 or a timer (not shown) to proceed to measurement of the next sample. By repeating this operation, the concentrations of ammonia and hydrogen peroxide can be continuously measured at approximately 2 minute intervals.
ここで、マイクロコンピユータのソフトウエア
を第４図のフローチヤートに従つて説明する。前
記したように、ガスクロマトグラムにおいて各成
分のピークの出る位置の間隔は一定であり、酸
素、アンモニア、水の順に出る。スタート（ｔ＝
０）から酸素のピークの出始めるまでの時間を
t1、出終るまでの時間をt2、同様にアンモニアに
ついての時間をそれぞれt3およびt4、水について
の時間をそれぞれt5およびt6とする。スタートし
てからの時間ｔが、t1＜ｔ＜t2となると、ガスク
ロマトグラフから酸素の検出成分のデータを受け
とり、このデータにより酸素のピーク面積SO2を
計算する。さらに時間が経過し、t3＜ｔ＜t4とな
ると、アンモニアの検出成分のデータを受けと
り、アンモニアのピーク面積SNH3を計算する。同
様に、t5＜ｔ＜t6となると、水の検出成分のデー
タを受けとり、水のピーク面積SH2Oを計算する。
以上のようにSO2、SNH3、SH2Oが全部求められる
と、あらかじめ求めておいた濃度換算のフアクタ
fO2、fNH3、fH2Oを用いて、前記(1)、(2)式の計算を
行い、アンモニアと過酸化水素の濃度を求める。
この計算が終れば、計算結果の表示を行い、さら
に、次の試料の採取と注入するよう指令を出す。 Here, the software of the microcomputer will be explained according to the flowchart of FIG. As mentioned above, in the gas chromatogram, the intervals between the peak positions of each component are constant, and the peaks appear in the order of oxygen, ammonia, and water. Start (t=
0) until the oxygen peak begins to appear
Let t 1 be the time until the end of the discharge, t 2 be the time, t 3 and t 4 be the time for ammonia, respectively, and t 5 and t 6 be the time for water, respectively. When the time t after the start becomes t 1 <t < t 2 , data on the detected oxygen component is received from the gas chromatograph, and the oxygen peak area S O2 is calculated from this data. When further time passes and t 3 <t < t 4 , data on the detected component of ammonia is received, and the peak area S NH3 of ammonia is calculated. Similarly, when t 5 <t < t 6 , data on detected components of water is received, and the peak area of water S H2O is calculated.
Once S O2 , S NH3 , and S H2O are all determined as described above, the concentration conversion factor determined in advance is
Using f O2 , f NH3 , and f H2O , calculate the above equations (1) and (2) to determine the concentrations of ammonia and hydrogen peroxide.
When this calculation is completed, the calculation result is displayed and a command is issued to collect and inject the next sample.
上記の計算をマイクロコンピユータ１３により
行わせ、測定時間ごとにプロツトしたグラフを表
示装置１４に表示させることにより、アンモニア
性過酸化水素洗浄液中のアンモニアと過酸化水素
の濃度の時間的変化を正確に連続的に測定するこ
とができる。 By having the microcomputer 13 perform the above calculations and displaying graphs plotted at each measurement time on the display device 14, changes over time in the concentrations of ammonia and hydrogen peroxide in the ammonia-based hydrogen peroxide cleaning solution can be accurately observed. Can be measured continuously.
以上説明したように、本発明によれば、アンモ
ニア性過酸化水素液中のアンモニアと過酸化水素
の濃度を同時に簡潔に、しかも連続して測定する
ことが可能となる。また、従来方法では、試料を
量的に正確に採取する必要があるが、試料は60〜
80℃の高温でかつ気泡を含むため正確に採取する
ことができなかつたのに対し、本発明では、溶媒
の水も定量するので、試料自動注入器での試料採
取の精度は高い必要はない。さらに、従来法での
測定精度は、室温に冷却する等の操作により精度
が悪く、10％程度であつたが、本発明により、測
定精度を１％程度に向上できる。また、本発明に
よれば、測定時間も著しく短縮される。
As described above, according to the present invention, it is possible to measure the concentrations of ammonia and hydrogen peroxide in an ammoniacal hydrogen peroxide solution simultaneously, simply, and continuously. In addition, with the conventional method, it is necessary to collect the sample quantitatively accurately, but the sample is
Accurate sampling was not possible due to the high temperature of 80°C and the presence of air bubbles; however, in the present invention, since water as a solvent is also quantified, there is no need for high accuracy in sampling with an automatic sample injector. . Further, the measurement accuracy in the conventional method was about 10% due to poor accuracy due to operations such as cooling to room temperature, but the present invention can improve the measurement accuracy to about 1%. Furthermore, according to the present invention, measurement time is also significantly shortened.
第１図は本発明の構成を明示するための全体構
成図、第２図は本発明による酸素、アンモニアお
よび水のガスクロマトグラフの例、第３図は本発
明による装置の構成を示す構成図、第４図は本発
明におけるソフトウエアのフローチヤートであ
る。
符号の説明、１……洗浄液槽、２……ポンプ、
３……試料自動注入器、４……排出パイプ、５…
…気化室、６……銅の網、７……恒温槽、８……
分離カラム、９……熱伝導度検出器、１０……増
幅器、１１……Ａ／Ｄ変換器、１２……インタフ
エース、１３……マイクロコンピユータ、１４…
…表示装置。
FIG. 1 is an overall configuration diagram for clearly showing the configuration of the present invention, FIG. 2 is an example of a gas chromatograph of oxygen, ammonia, and water according to the present invention, and FIG. 3 is a configuration diagram showing the configuration of an apparatus according to the present invention. FIG. 4 is a flowchart of the software in the present invention. Explanation of symbols, 1...Cleaning liquid tank, 2...Pump,
3... Automatic sample injector, 4... Discharge pipe, 5...
...Vaporization chamber, 6...Copper net, 7...Thermostat, 8...
Separation column, 9...thermal conductivity detector, 10...amplifier, 11...A/D converter, 12...interface, 13...microcomputer, 14...
...display device.
Claims (1)
内部に金属網を保持した気化室に注入して、該金
属網の触媒作用により該試料中の過酸化水素を酸
素と水とに分解させ、該気化室から出る試料をガ
スクロマトグラフに導いて、該試料中のアンモニ
ア、酸素および水の各成分を検出し、検出結果を
基にアンモニアと過酸化水素の濃度を計算し、計
算結果を表示装置により表示し、これらの操作を
次の試料について順次連続して繰り返し行うこと
を特徴とするアンモニア性過酸化水素液中のアン
モニアと過酸化水素の濃度を測定する方法。 ２ アンモニア性過酸化水素液の試料をとり、こ
れを自動注入する動作を行う、２本以上のサンプ
ルループをもつ自動試料注入器と、該自動試料注
入器から試料が注入され、該試料中の過酸化水素
を酸素と水とに分解するための触媒となる金属網
を内部に保持した気化室と、該気化室からの試料
中のアンモニア、酸素および水の各成分を検出す
るガスクロマトグラフと、該ガスクロマトグラフ
の検出結果を基にアンモニアと過酸化水素の濃度
を計算する計算機能ブロツクと、計算結果を表示
する表示機能ブロツクと、計算結果の表示後に前
記自動試料注入器に次の試料採取注入動作をさせ
る指令を出す指令機能ブロツクとから構成される
ことを特徴とするアンモニア性過酸化水素液中の
アンモニアと過酸化水素の濃度を測定する装置。[Claims] 1. A sample taken from an ammoniacal hydrogen peroxide solution is injected into a vaporization chamber that has a metal mesh inside, and the hydrogen peroxide in the sample is converted into oxygen and water by the catalytic action of the metal mesh. The sample coming out of the vaporization chamber is guided to a gas chromatograph to detect each component of ammonia, oxygen and water in the sample, and the concentrations of ammonia and hydrogen peroxide are calculated based on the detection results, A method for measuring the concentrations of ammonia and hydrogen peroxide in an ammoniacal hydrogen peroxide solution, characterized by displaying the calculation results on a display device and repeating these operations successively for the next sample. 2. An automatic sample injector with two or more sample loops that takes a sample of ammoniacal hydrogen peroxide solution and automatically injects it; a vaporization chamber containing a metal mesh serving as a catalyst for decomposing hydrogen peroxide into oxygen and water; a gas chromatograph for detecting each component of ammonia, oxygen, and water in a sample from the vaporization chamber; A calculation function block that calculates the concentrations of ammonia and hydrogen peroxide based on the detection results of the gas chromatograph, a display function block that displays the calculation results, and a display function block that injects the next sample into the automatic sample injector after displaying the calculation results. 1. A device for measuring the concentrations of ammonia and hydrogen peroxide in an ammonia-based hydrogen peroxide solution, comprising a command function block that issues commands for operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11697683A JPS6010170A (en) | 1983-06-30 | 1983-06-30 | Method and device for measuring the concentration of ammonia and hydrogen peroxide in an ammoniacal hydrogen peroxide solution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11697683A JPS6010170A (en) | 1983-06-30 | 1983-06-30 | Method and device for measuring the concentration of ammonia and hydrogen peroxide in an ammoniacal hydrogen peroxide solution |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6010170A JPS6010170A (en) | 1985-01-19 |
| JPH0441306B2 true JPH0441306B2 (en) | 1992-07-07 |
Family
ID=14700411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11697683A Granted JPS6010170A (en) | 1983-06-30 | 1983-06-30 | Method and device for measuring the concentration of ammonia and hydrogen peroxide in an ammoniacal hydrogen peroxide solution |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6010170A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0752187B2 (en) * | 1989-06-08 | 1995-06-05 | 栗田工業株式会社 | Organic substance analyzer |
| JP2014035275A (en) * | 2012-08-09 | 2014-02-24 | Shimadzu Corp | Gas chromatograph |
| JP6393363B2 (en) * | 2017-04-27 | 2018-09-19 | 株式会社島津製作所 | Gas chromatograph |
| JP7036228B2 (en) * | 2018-12-12 | 2022-03-15 | 株式会社島津製作所 | Chemiluminescent sulfur detector |
-
1983
- 1983-06-30 JP JP11697683A patent/JPS6010170A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6010170A (en) | 1985-01-19 |
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