JPH0441432B2 - - Google Patents
Info
- Publication number
- JPH0441432B2 JPH0441432B2 JP6167583A JP6167583A JPH0441432B2 JP H0441432 B2 JPH0441432 B2 JP H0441432B2 JP 6167583 A JP6167583 A JP 6167583A JP 6167583 A JP6167583 A JP 6167583A JP H0441432 B2 JPH0441432 B2 JP H0441432B2
- Authority
- JP
- Japan
- Prior art keywords
- groove
- pressure
- recording medium
- slider
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007667 floating Methods 0.000 claims description 22
- 230000004888 barrier function Effects 0.000 claims description 14
- 238000010586 diagram Methods 0.000 description 6
- 239000000428 dust Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 4
- 238000000992 sputter etching Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000005339 levitation Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B21/00—Head arrangements not specific to the method of recording or reproducing
- G11B21/16—Supporting the heads; Supporting the sockets for plug-in heads
- G11B21/20—Supporting the heads; Supporting the sockets for plug-in heads while the head is in operative position but stationary or permitting minor movements to follow irregularities in surface of record carrier
- G11B21/21—Supporting the heads; Supporting the sockets for plug-in heads while the head is in operative position but stationary or permitting minor movements to follow irregularities in surface of record carrier with provision for maintaining desired spacing of head from record carrier, e.g. fluid-dynamic spacing, slider
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は磁気ヘツドを保持し、この磁気ヘツド
を所定の間隙を隔てて記録媒体に安定に対向させ
て良好な磁気記録再生を行わしめ得る実用性の高
い浮動ヘツドスライダに関する。[Detailed Description of the Invention] [Technical Field of the Invention] The present invention provides a practical method for holding a magnetic head and stably facing a recording medium with a predetermined gap between the magnetic heads and performing good magnetic recording and reproduction. Regarding a highly flexible floating head slider.
情報処理システムの大容量記憶装置として所謂
ハードデイスクを記録媒体とした磁気デイスクク
記憶装置が多く用いられている。この装置はハー
ドデイスクを高速回転させ乍ら、その情報記録面
に微小間隙を隔てて磁気ヘツドを対向させ、高速
に情報の磁気記録再生を行うものである。しかし
て、上記微小間隙を隔てて磁気ヘツドをデイスク
の情報記録面に対向させるべく、従来専ら浮動ヘ
ツドスライダが用いられている。この浮動ヘツド
スライダは、例えば第1図に示すように情報記録
面に対向する面に2条の平行な滑面1a,1bを
形成してなるスライダ本体2の端部に磁気ヘツド
3を取付けたものである。上記滑面1a,1bは
磁気ヘツド3とデイスクとの相対的移動方向に設
けられたものであつて、その前方側、つまり磁気
ヘツド3の取付け部と反対側の端部は切欠加工さ
れ、昇圧機構としてのテーパ面4a,4bとされ
ている。
2. Description of the Related Art Magnetic disk storage devices using so-called hard disks as recording media are often used as large-capacity storage devices for information processing systems. This device rotates a hard disk at high speed while a magnetic head is placed opposite the information recording surface of the hard disk with a small gap therebetween, thereby performing magnetic recording and reproducing of information at high speed. Conventionally, therefore, a floating head slider has been exclusively used to make the magnetic head face the information recording surface of the disk across the minute gap. In this floating head slider, for example, as shown in FIG. 1, a magnetic head 3 is attached to the end of a slider body 2, which has two parallel smooth surfaces 1a and 1b formed on the surface facing the information recording surface. It is something. The smooth surfaces 1a and 1b are provided in the direction of relative movement between the magnetic head 3 and the disk, and the front end thereof, that is, the end opposite to the mounting part of the magnetic head 3, is cut out to increase pressure. The tapered surfaces 4a and 4b serve as mechanisms.
しかして、このような構造の磁気ヘツド3を保
持してなる浮動ヘツドスライダによれば、第2図
aに示すようにデイスク5の情報記録面に対向配
置されたとき、デイスク5の高速回転に伴つて、
その情報記録面と前記滑面1a,1bとの間に空
気が流入し、前記テーパ面4a,4bを経て圧縮
された空気によつて第2図bに示す如き圧力がス
ライダの浮上力として生起される。この浮上力
と、スライダに加えられる荷重とが相俟つて上記
滑面1a,1bと情報記録面との間に所定の微小
間隙が設定される。 According to the floating head slider holding the magnetic head 3 having such a structure, when it is placed facing the information recording surface of the disk 5 as shown in FIG. Accompanied by
Air flows between the information recording surface and the smooth surfaces 1a and 1b, and the air compressed through the tapered surfaces 4a and 4b generates a pressure as shown in FIG. 2b as a floating force of the slider. be done. This floating force and the load applied to the slider work together to set a predetermined minute gap between the smooth surfaces 1a, 1b and the information recording surface.
ところで、このような浮動ヘツドスライダに保
持された磁気ヘツド3を用いて磁気記録再生を行
う場合、前記ヘツドスライダによつて設定される
情報記録面との間の微小間隙が非常に重要な意味
を持つ。例えば前記荷重を増やして間隙を狭くす
ればデイスク5に対するヘツド3の追従性が良く
なり、良好な磁気記録再生が可能となるが、その
反面、デイスク5の回転開始時や回転停止時には
前記浮上力が十分生起しないことからデイスク5
との摩擦が大きくなる。この結果、滑面1a,1
bおよび磁気ヘツド3の摩耗を招き、その寿命お
よび動作安定性が著しく劣化する。また前記荷重
を軽くして微小間隙を広くすると良好な磁気記録
再生が望めなくなる。従つて、良好な磁気記録再
生を可能とするべく上記荷重を最適設定するには
大きな困難が伴つた。 By the way, when performing magnetic recording and reproducing using the magnetic head 3 held by such a floating head slider, the minute gap between the information recording surface and the information recording surface set by the head slider has a very important meaning. have For example, if the load is increased and the gap is narrowed, the followability of the head 3 to the disk 5 will improve and good magnetic recording and reproducing will be possible, but on the other hand, when the disk 5 starts rotating or stops rotating, the levitation force disk 5 because it does not occur sufficiently.
There will be more friction with the As a result, the smooth surfaces 1a, 1
b and the magnetic head 3, resulting in a significant deterioration in their lifespan and operational stability. Furthermore, if the load is lightened to widen the minute gap, good magnetic recording and reproduction cannot be expected. Therefore, it is very difficult to optimally set the above-mentioned load to enable good magnetic recording and reproduction.
また上述した浮上力を得るテーパ面4a,4b
のテーパ角は非常に小さく、通常(0°20′)程度
である。従つて、このようなテーパ面4a,4b
を精度良く形成することが非常に難しく、製造歩
留りが悪いと云う問題もあつた。 In addition, the tapered surfaces 4a and 4b that obtain the above-mentioned levitation force
The taper angle of is very small, usually around (0°20'). Therefore, such tapered surfaces 4a, 4b
It was very difficult to form the film with high precision, and there was also the problem that the manufacturing yield was low.
つまり従来構造の浮動ヘツドスライダは、その
製造自体が難かしいことのみならず、装置への組
込みに際しても高精度な調整を必要とする等の不
具合を有していた。そして、その摩耗を防ぎ、常
に安定で良好な磁気記録再生を行わせることが難
かしかつた。 In other words, the floating head slider of the conventional structure has problems such as not only being difficult to manufacture, but also requiring highly accurate adjustment when incorporated into a device. It has been difficult to prevent this wear and to always perform stable and good magnetic recording and reproduction.
本発明はこのような事情を考慮してなされたも
ので、その目的とするところは、記録媒体との間
の微小間隙を安定に設定し、その摩耗を防いで良
好な磁気記録再生を可能とする安価で実用性の高
い浮動ヘツドスライダを提供することにある。
The present invention has been made in consideration of these circumstances, and its purpose is to stably set a minute gap between the recording medium and prevent its wear, thereby enabling good magnetic recording and reproduction. To provide an inexpensive and highly practical floating head slider.
本発明は、磁気ヘツドを記録媒体に対向させて
保持し記録媒体との対向面を滑面としたスライダ
本体と、このスライダ本体の上記滑面に設けられ
て滑面と記録媒体との間を通流する空気の圧力を
調整して滑面と記録媒体との間の浮上隙間を制御
する圧力調整溝とを具備したものであつて、特
に、上記圧力調整溝は、空気の通流方向に対して
異なる方向に傾斜するとともに滑面上にその交点
を有するように形成された少なくとも2本の溝の
集合よりなり、かつ上記圧力調整溝の一部には溝
内部と周囲領域とを分離して通流空気に対する絞
り流路を形成するように障壁が形成されているこ
とを特徴とするものである。
The present invention provides a slider body that holds a magnetic head facing a recording medium and has a smooth surface facing the recording medium, and a slider body that is provided on the smooth surface of the slider body to create a gap between the smooth surface and the recording medium. It is equipped with a pressure adjustment groove that controls the floating gap between the smooth surface and the recording medium by adjusting the pressure of the flowing air, and in particular, the pressure adjustment groove is It consists of a set of at least two grooves that are inclined in different directions and have intersection points on the smooth surface, and a part of the pressure adjustment groove has a groove separating the inside of the groove and the surrounding area. This is characterized in that a barrier is formed so as to form a constricted flow path for the flowing air.
かくして本発明によれば、滑面に設けた圧力調
整溝が空気の通流方向に対して異なる方向に傾斜
するとともに滑面上にその交点を有するように形
成された少なくとも2本の溝の集合よりなるの
で、流通する空気を溝の交点に効果的に集めるこ
とができる。したがつて、記録媒体との間を通流
する空気を有効に利用してヘツドの浮上隙間を設
定するに良好な圧力を安定に得ることができる。
これに加えて上記圧力調整溝の溝端部に設けた障
壁によつて上記空気流に混入している微小塵埃の
上記溝部への侵入を防ぎ、その溝部への滞留およ
び堆積を防止するので前記圧力調整溝の機能を常
に安定に働かせることができる。しかも、障壁を
備えた圧力調整溝は、例えばエツチング技術を利
用することによつて簡易に且つ高精度に形成する
ことができるので、浮動ヘツドスライダを歩留り
良く安価に製作することができる。故に、スライ
ダの動的安定性を確保し、磁気ヘツドによる良好
な記録再生を可能とする等の実用上多大なる効果
が奏せられる。
Thus, according to the present invention, the pressure adjustment grooves provided on the smooth surface are a set of at least two grooves formed so that they are inclined in different directions with respect to the air flow direction and have intersection points on the smooth surface. Therefore, the circulating air can be effectively collected at the intersection of the grooves. Therefore, by effectively utilizing the air flowing between the recording medium and the recording medium, it is possible to stably obtain a good pressure for setting the flying clearance of the head.
In addition, the barrier provided at the groove end of the pressure adjustment groove prevents fine dust mixed in the air flow from entering the groove, and prevents it from staying and accumulating in the groove. The function of the adjustment groove can always work stably. Furthermore, the pressure regulating groove provided with the barrier can be formed simply and with high precision by using etching technology, for example, so that the floating head slider can be manufactured at a high yield and at low cost. Therefore, great practical effects such as ensuring the dynamic stability of the slider and enabling good recording and reproduction by the magnetic head can be achieved.
以下、図面を参照して本発明の一実施例につき
説明する。
Hereinafter, one embodiment of the present invention will be described with reference to the drawings.
第3図は実施例に係る浮動ヘツドスライダの概
略構成を示す斜視図で、第1図に示す従来のヘツ
ドスライダと同一部分には同一符号を付して示し
てある。この浮動ヘツドスライダが特徴とすると
ころは、スライダ本体2の磁気記録媒体5に対向
する滑面1a,1bに、従来のテーパ面4a,4
bを形成することに代えて、昇圧用溝11a,1
1b,12a,12bと減圧用溝13a,13b
とを設けた点にある。上記昇圧用溝11a,11
bは滑面1a,1bの前方側に設けられたもので
あつて、磁気記録媒体5との相対的移動方向後方
側に先絞り形状を為す所謂「く」の字形状を為す
溝として実現されている。また他方の昇圧用溝1
2a,12bも同様な形状を有し、これらは前記
滑面1a,1bの後方側に設けられている。そし
て前記減圧用溝13a,13bは前記滑面1a,
1bの略中央部位置に、つまり昇圧用溝11a,
11b,12a,12bの中間位置に、前記相対
的移動方向後方側に末広がり形状を為す「く」字
状の溝として設けられている。これらの溝11
a,11b,12a,12b,13a,13b
は、例えば滑面1a,1bをその長手方向に4等
分する位置に設けられる。 FIG. 3 is a perspective view showing a schematic configuration of a floating head slider according to an embodiment, and the same parts as those of the conventional head slider shown in FIG. 1 are designated by the same reference numerals. This floating head slider is characterized by having conventional tapered surfaces 4a, 4 on the smooth surfaces 1a, 1b of the slider body 2 facing the magnetic recording medium 5.
Instead of forming the pressure increasing grooves 11a, 1
1b, 12a, 12b and pressure reducing grooves 13a, 13b
The point is that The pressure increasing grooves 11a, 11
b is provided on the front side of the smooth surfaces 1a and 1b, and is realized as a so-called ``dog''-shaped groove that has a tapered shape on the rear side in the direction of relative movement with the magnetic recording medium 5. ing. Also, the other boosting groove 1
2a and 12b also have a similar shape, and are provided on the rear side of the smooth surfaces 1a and 1b. The pressure reducing grooves 13a and 13b are formed by the smooth surfaces 1a and 13b.
1b, that is, the pressure increasing groove 11a,
A dogleg-shaped groove that widens toward the rear in the relative movement direction is provided at an intermediate position between 11b, 12a, and 12b. These grooves 11
a, 11b, 12a, 12b, 13a, 13b
are provided, for example, at positions that equally divide the smooth surfaces 1a and 1b into four in the longitudinal direction.
しかして、これらの各溝11a,11b,12
a,12b,13a,13bはイオンエツチング
法やスパツタエツチング法を用いて滑面1a,1
bにそれぞれ形成されるもので、その溝パターン
の位置精度および形状精度は、その原画パターン
を作成するに際して用いられるデイジタル測微計
の誤差程度と、極めて高いものとなる。またその
溝深さは、ウツチング加工速度が1時間当り1〜
2μmと小さい条件下でエツチング時間制御して規
定され、±0.1μm以下の誤差範囲内で所望寸法に
定められる。 Therefore, each of these grooves 11a, 11b, 12
a, 12b, 13a, 13b are smooth surfaces 1a, 1 using ion etching method or sputter etching method.
The positional accuracy and shape accuracy of the groove pattern are extremely high, comparable to the error of the digital micrometer used to create the original pattern. In addition, the depth of the groove is determined by the cutting speed of 1 to 1 per hour.
It is specified by controlling the etching time under conditions as small as 2 μm, and the desired dimensions are determined within an error range of ±0.1 μm or less.
かくしてこのようにスライダ本体2の滑面1
a,1bに昇圧用溝11a,11b,12a,1
2bと減圧用溝13a,13bとを設けてなる浮
動ヘツドスライダを磁気デイスク装置に組込み、
磁気デイスク記録媒体5に対向させて上記記録媒
体5を高速回転させると、第4図a,bに示すよ
うに、上記滑面1a,1bと記録媒体5との間に
通流する空気の圧力によつて、ヘツドスライダは
所定の微小間隙を形成して記録媒体5から浮上す
る。即ち、昇圧用溝11a,11b,12a,1
2bによつて前記通流空気が局部的に圧縮され、
これにより正の浮上力が生起されてスライダ本体
2が持ち上げられる。そして同時に減圧用溝13
a,13bは前記通流空気を局部的に膨張させ、
負圧を発生させる。この負圧は、スライダ本体2
の滑面1a,1bと記録媒体5との間の間隙を狭
くしようとする作用を呈するものである。 In this way, the smooth surface 1 of the slider body 2
Pressure increasing grooves 11a, 11b, 12a, 1 in a, 1b
2b and pressure-reducing grooves 13a, 13b are incorporated into a magnetic disk device,
When the recording medium 5 is rotated at high speed while facing the magnetic disk recording medium 5, the pressure of the air flowing between the smooth surfaces 1a and 1b and the recording medium 5 increases as shown in FIGS. 4a and 4b. As a result, the head slider floats above the recording medium 5 while forming a predetermined minute gap. That is, the pressure increasing grooves 11a, 11b, 12a, 1
2b locally compresses the flowing air;
This generates a positive floating force and lifts the slider body 2. At the same time, the pressure reducing groove 13
a, 13b locally expands the flowing air;
Generate negative pressure. This negative pressure is applied to the slider body 2
This has the effect of narrowing the gap between the smooth surfaces 1a, 1b and the recording medium 5.
しかしてこれらの溝11a,11b,12a,
12b,13a,13bが生起する流通空気によ
る滑面1a,1bと記録媒体5との間の圧力分布
は、概略的には第4図bに示すようになり、これ
らが相互にバランスしてスライダ本体2は、その
滑面1a,1bと記録媒体5との間に所定の微小
間隙を安定に形成して浮上がることになる。 However, these grooves 11a, 11b, 12a,
The pressure distribution between the recording medium 5 and the smooth surfaces 1a, 1b due to the circulating air generated by the air flow generated by the air flow generated by the air flow generated by the air flow generated by the pressure distributions 12b, 13a, 13b is approximately as shown in FIG. The main body 2 floats while stably forming a predetermined minute gap between its smooth surfaces 1a, 1b and the recording medium 5.
ところで、前記昇圧用溝11a,11b,12
a,12bおよび減圧用溝13a,13bはそれ
ぞれ次のようにして、その作用を呈する。即ち、
昇圧用溝11a,11b,12a,12bは、前
述したように相対移動方向後方側に先絞りの形状
を有する。従つて、滑面1a,1bと記録媒体5
との間に上記相対移動方向前方側より流入する空
気は、前述昇圧用溝11a,11b,12a,1
2bに入り込んだとき、その先絞り形状によつて
徐々に圧縮されることになる。この圧縮された空
気が溝上面に逃げ道を求め、元の状態に戻ろうと
するので、この力がスライダの浮上力(正の圧
力)を生起することになる。これに対して、減圧
用溝13a,13bに入り込んだ通流空気は、上
記減圧用溝13a,13bが相対移動方向後方側
に末広がり形状である為、前記昇圧用溝11a,
11b,12a,12bの場合とは逆に徐々に膨
張過程を辿る。この結果、空気は元の状態に戻る
べく、溝の有効断面積を小さくすべく負圧を発生
することになる。従つて、このようにして圧力を
生起する昇圧用溝11a,11b,12a,12
bおよび減圧用溝13a,13bにとつては、そ
の溝形状が非常に重要な役割りを担うと云える。 By the way, the pressure increasing grooves 11a, 11b, 12
a, 12b and pressure reducing grooves 13a, 13b each exhibit their functions as follows. That is,
As described above, the pressure increasing grooves 11a, 11b, 12a, and 12b have a tapered shape on the rear side in the relative movement direction. Therefore, the smooth surfaces 1a, 1b and the recording medium 5
The air flowing from the front side in the relative movement direction between the above-mentioned pressure increasing grooves 11a, 11b, 12a,
When it enters 2b, it is gradually compressed due to its drawing shape. This compressed air seeks an escape route on the upper surface of the groove and attempts to return to its original state, and this force causes a floating force (positive pressure) on the slider. On the other hand, since the pressure reducing grooves 13a and 13b have a shape that widens toward the rear in the relative movement direction, the flowing air that has entered the pressure reducing grooves 13a and 13b is
Contrary to the case of 11b, 12a, and 12b, the expansion process gradually follows. As a result, a negative pressure is generated to reduce the effective cross-sectional area of the groove so that the air returns to its original state. Therefore, the pressure increasing grooves 11a, 11b, 12a, 12 that generate pressure in this way
It can be said that the shape of the grooves 13b and 13a and 13b for pressure reduction plays a very important role.
尚、これらの溝11a,11b,12a,12
b,13a,13bを滑面1a,1bのどこに設
けるかと云うことも、上記滑面1a,1bと記録
媒体5との間に所望する圧力分布を得る上で重要
となることは云うまでもない。この際、昇圧用溝
11a,11b,12a,12bによつて得られ
る浮上力により、滑面1a,1bと記録媒体5が
平行になれば、スライダ本体2の記録媒体5に対
する追従特性が良くなる。そして、このことは、
磁気ヘツド3による記録再生特性の向上を促が
し、またそのクラツシユ防止にも大きく寄与す
る。しかもスライダのピツチング方向に対する安
定性も増す。従つて、これらのことを考慮すれ
ば、各滑面1a,1bにおいて前述したように2
ケ所ずつ設けられる昇圧用溝11a,11b,1
2a,12b間の距離をできる限り長く設定する
ことが望ましいと云える。然し乍ら、これらの溝
11a,11b,12a,12bを滑面1a,1
bの空気流入端部側および空気流出端部側に近接
させて設けると、記録媒体5の回転開始時や停止
時において上記滑面1a,1bが記録媒体5に接
触して、上記端部の摩耗や欠けを生じることがあ
り、これによつて溝形状が変化する虞れがある。
故に溝形状変化による圧力発生状態の変化を防ぐ
ことを考慮した上で、前記昇圧用溝11a,11
b,12a,12bの形成位置を設定することが
望ましい。従つて、これを考慮した上で各溝11
a,11b,12a,12b,13a,13bを
滑面1a,1bにそれぞれ設ければ、スライダ本
体2のピツチング方向に対する安定性を確保し、
デイスク記録媒体5に対する追従特性の向上を図
つて良好な記録再生を行わしめることが可能とな
る。 Note that these grooves 11a, 11b, 12a, 12
It goes without saying that where on the smooth surfaces 1a, 1b the smooth surfaces 1a, 13b, 13a, 13b are provided is also important in obtaining the desired pressure distribution between the smooth surfaces 1a, 1b and the recording medium 5. . At this time, if the sliding surfaces 1a, 1b and the recording medium 5 become parallel to each other due to the floating force obtained by the pressure increasing grooves 11a, 11b, 12a, 12b, the tracking characteristics of the slider body 2 with respect to the recording medium 5 will improve. . And this means that
This promotes improvement in the recording and reproducing characteristics of the magnetic head 3, and also greatly contributes to prevention of crashes. Moreover, the stability of the slider in the pitching direction is also increased. Therefore, taking these things into consideration, as mentioned above, 2 on each smooth surface 1a, 1b.
Pressure increasing grooves 11a, 11b, 1 provided at different locations
It can be said that it is desirable to set the distance between 2a and 12b as long as possible. However, these grooves 11a, 11b, 12a, 12b are formed on smooth surfaces 1a, 1.
If the smooth surfaces 1a and 1b are provided close to the air inflow end and the air outflow end of b, the smooth surfaces 1a and 1b will come into contact with the recording medium 5 when the recording medium 5 starts or stops rotating. Abrasion or chipping may occur, which may change the groove shape.
Therefore, in consideration of preventing changes in the pressure generation state due to changes in the groove shape, the pressure increasing grooves 11a, 11
It is desirable to set the formation positions of b, 12a, and 12b. Therefore, taking this into consideration, each groove 11
If a, 11b, 12a, 12b, 13a, 13b are respectively provided on the smooth surfaces 1a, 1b, stability in the pitching direction of the slider body 2 is ensured,
It becomes possible to improve the tracking characteristics for the disk recording medium 5 and perform good recording and reproduction.
ところで、基本的には上述した作用を呈する昇
圧用溝および減圧用溝、つまり圧力調整溝15に
は、第5図にその要部構成を示すようにその溝端
部に障壁15が設けられている。この障壁15
は、上記圧力調整溝14の溝内部と、この溝内部
とは空気圧力を異にする周囲領域とを分離するも
のである。そして、これにより、記録媒体5との
間を通流する空気に混入している微小塵埃の上記
溝内部への侵入、そしてこの溝内部での滞留およ
び堆積が防がれるようになつている。 By the way, the pressure increasing groove and the pressure reducing groove, that is, the pressure regulating groove 15, which basically exhibit the above-mentioned function, are provided with a barrier 15 at the end of the groove, as shown in FIG. . This barrier 15
This separates the inside of the pressure adjusting groove 14 from the surrounding area where the air pressure is different from the inside of this groove. This prevents fine dust mixed in the air flowing between the recording medium 5 and the recording medium 5 from entering the groove, and from staying and accumulating inside the groove.
尚、この障壁15は、例えば第6図a〜dに示
す形状として形成することが可能である。即ち、
第6図a,bにそれぞれ示すように、溝内部と周
囲領域とを完全に分離することなしに、空気流の
溝内部に対する絞り流路としての作用を呈するよ
うにして、前記微小塵埃の進入を防ぐようにして
もよい。また障壁15の高さを第6図cに示すよ
うに溝深さに比して低くするようにしてもよく、
更には第6図dに示すように障壁15を多段に形
成するようにしてもよい。 Note that this barrier 15 can be formed, for example, in the shapes shown in FIGS. 6a to 6d. That is,
As shown in FIGS. 6a and 6b, the fine dust can enter the groove without completely separating the inside of the groove and the surrounding area, so that the air flow acts as a restricting channel for the inside of the groove. It may be possible to prevent this. Further, the height of the barrier 15 may be made lower than the groove depth as shown in FIG. 6c.
Furthermore, the barrier 15 may be formed in multiple stages as shown in FIG. 6d.
更に、溝内部に侵入してしまつた微小塵埃を排
出するべく、第7図に示すように圧力調整溝14
の内部に、スライダ本体2の反対側面に連通する
孔16を設けることも有効である。 Furthermore, in order to discharge minute dust that has entered the inside of the groove, a pressure adjustment groove 14 is installed as shown in FIG.
It is also effective to provide a hole 16 inside the slider body 2 that communicates with the opposite side of the slider body 2.
かくして上述したように滑面に圧力調整溝を備
え、且つその圧力調整溝の溝端部に障壁を設けた
構造の本浮動ヘツドスライダによれば、前記圧力
調整溝による空気流の有効利用によつてスライダ
本体2の安定で良好な浮上力を得ることができ
る。そして、この圧力調整溝の作用によつてスラ
イダの動的安定性を高め、その摩耗を防止して記
録媒体に対する追従性を高めることができ、磁気
ヘツドによる良好な記録再生を可能ならしめる。
その上、圧力調整溝の溝端部に設けた障壁が、上
記溝内部への塵埃の侵入を効果的に防止するの
で、溝内部における塵埃の滞留や堆積による機能
劣化を招来する虞れがない。従つて、スライダの
動的安定性を長期に亘つて信頼性良く確保するこ
とが可能となる。 Thus, as described above, according to the present floating head slider having a structure in which a pressure adjustment groove is provided on the smooth surface and a barrier is provided at the groove end of the pressure adjustment groove, the airflow can be effectively utilized by the pressure adjustment groove. A stable and good flying force of the slider body 2 can be obtained. The action of this pressure adjustment groove increases the dynamic stability of the slider, prevents its wear, and improves the ability to follow the recording medium, allowing the magnetic head to perform good recording and reproduction.
Furthermore, since the barrier provided at the end of the pressure regulating groove effectively prevents dust from entering the groove, there is no risk of functional deterioration due to accumulation or accumulation of dust inside the groove. Therefore, it is possible to reliably ensure the dynamic stability of the slider over a long period of time.
また上記構成の圧力調整溝は、スパツタエツチ
ング法や、イオンエツチング法を用いることによ
つてスライダ本体の滑面に簡易に、且つ高精度に
形成することが可能である。従つて従来のテーパ
面を形成するものとは異つて、安価に歩留り良く
製作することができ、その実用的利点が極めて高
い。 Further, the pressure adjusting groove having the above structure can be easily formed on the smooth surface of the slider body with high precision by using a sputter etching method or an ion etching method. Therefore, unlike conventional tapered surfaces, it can be manufactured at low cost and with good yield, and has extremely high practical advantages.
尚、本発明は上記実施例に限定されるものでは
ない。例えば溝形状やその溝深さ、更には滑面上
の溝形成位置、また障壁の形状等は仕様に応じて
定めればよい。要するにその要旨を逸脱しない範
囲で種々変形して実施可能である。 Note that the present invention is not limited to the above embodiments. For example, the groove shape, the groove depth, the groove formation position on the smooth surface, the barrier shape, etc. may be determined according to the specifications. In short, various modifications can be made without departing from the gist of the invention.
第1図は従来の浮動ヘツドスライダの一例を示
す図、第2図a,bは第1図に示す従来スライダ
の動作姿勢とその浮上力の圧力分布を示す図、第
3図は本発明の一実施例に係る浮動ヘツドスライ
ダの概略構成を示す図、第4図a,bは実施例ス
ライダの動作姿勢とその浮上力の圧力分布を示す
図、第5図は実施例に係る圧力調整溝の要部構成
図、第6図a〜dは溝端部に設けられる障壁の変
形例を示す図、第7図は溝内部に孔を設けた圧力
調整溝の例を示す図である。
1a,1b……滑面、2……スライダ本体、3
……磁気ヘツド、5……記録媒体、11a,11
b,12a,12b……昇圧用溝、13a,13
b……減圧用溝、14……圧力調整溝(昇圧、減
圧)、15……障壁、16……孔。
FIG. 1 is a diagram showing an example of a conventional floating head slider, FIGS. 2 a and b are diagrams showing the operating posture of the conventional slider shown in FIG. 1 and the pressure distribution of its floating force, and FIG. A diagram showing a schematic configuration of a floating head slider according to an embodiment, FIGS. 4a and 4b are diagrams showing the operating posture of the embodiment slider and the pressure distribution of its levitation force, and FIG. 5 is a pressure adjustment groove according to the embodiment. FIGS. 6a to 6d are diagrams showing a modification of the barrier provided at the end of the groove, and FIG. 7 is a diagram showing an example of a pressure regulating groove in which a hole is provided inside the groove. 1a, 1b...smooth surface, 2...slider body, 3
...Magnetic head, 5...Recording medium, 11a, 11
b, 12a, 12b...pressure boosting groove, 13a, 13
b... pressure reduction groove, 14... pressure adjustment groove (pressure increase, pressure reduction), 15... barrier, 16... hole.
Claims (1)
記記録媒体との対向面を滑面としたスライダ本体
と、 このスライダ本体の上記滑面に設けられて前記
滑面と記録媒体との間を通流する空気の圧力を調
整して前記滑面と記録媒体との間の浮上隙間を制
御する圧力調整溝とを具備し、 上記圧力調整溝は、空気の通流方向に対して異
なる方向に傾斜するとともに上記滑面上にその交
点を有するように形成された少なくとも2本の溝
の集合よりなり、かつ上記圧力調整溝の一部には
溝内部と周囲領域とを分離して通流空気に対する
絞り流路を形成するように障壁が形成されている
ことを特徴とする浮動ヘツドスライダ。[Scope of Claims] 1. A slider body that holds a magnetic head facing a recording medium and has a smooth surface facing the recording medium; a pressure adjustment groove that controls the floating gap between the smooth surface and the recording medium by adjusting the pressure of the air flowing between the medium and the recording medium, and the pressure adjustment groove is arranged in the air flow direction. a set of at least two grooves formed so as to be inclined in different directions with respect to each other and having intersection points on the smooth surface, and a part of the pressure adjusting groove is separated from the inside of the groove and the surrounding area. A floating head slider characterized in that a barrier is formed to form a constricted flow path for flowing air.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6167583A JPS59186170A (en) | 1983-04-08 | 1983-04-08 | Floating head slider |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6167583A JPS59186170A (en) | 1983-04-08 | 1983-04-08 | Floating head slider |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59186170A JPS59186170A (en) | 1984-10-22 |
| JPH0441432B2 true JPH0441432B2 (en) | 1992-07-08 |
Family
ID=13178057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6167583A Granted JPS59186170A (en) | 1983-04-08 | 1983-04-08 | Floating head slider |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59186170A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2185314B (en) * | 1986-01-14 | 1990-09-26 | Canon Kk | Encoder |
| KR930009999B1 (en) * | 1986-03-07 | 1993-10-13 | 가부시기가이샤 히다찌세이사꾸쇼 | Magnetic Head Slider and Manufacturing Method of Magnetic Disk Using Slider |
| JPH07122929B2 (en) * | 1986-12-24 | 1995-12-25 | 株式会社日立製作所 | Magnetic head slider |
| JPS63187478A (en) * | 1987-01-30 | 1988-08-03 | Hitachi Ltd | head slider |
| US5086360A (en) * | 1990-09-06 | 1992-02-04 | Applied Magnetics Corporation | Constant flying height slider |
| US5940249A (en) * | 1997-11-10 | 1999-08-17 | International Business Machines Corporation | Shielded air bearing slider |
-
1983
- 1983-04-08 JP JP6167583A patent/JPS59186170A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59186170A (en) | 1984-10-22 |
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