JPH0442295U - - Google Patents
Info
- Publication number
- JPH0442295U JPH0442295U JP8403190U JP8403190U JPH0442295U JP H0442295 U JPH0442295 U JP H0442295U JP 8403190 U JP8403190 U JP 8403190U JP 8403190 U JP8403190 U JP 8403190U JP H0442295 U JPH0442295 U JP H0442295U
- Authority
- JP
- Japan
- Prior art keywords
- ball bearing
- leaf spring
- molecular pump
- turbo molecular
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims description 3
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案の一実施例を示す側断面図、第
２図は玉軸受が熱変形した状態を示す側断面図、
第３図は従来のターボ分子ポンプを示す側断面図
、第４図はその玉軸受の支持構造を示す側断面図
、第５図及び第６図はそれぞれ冷却後の玉軸受の
位置を示す側断面図である。
２……ロータ、３……回転軸、４，５……ラジ
アル磁気軸受、５……スラスト磁気軸受、８……
保護用玉軸受、１１……板ばね、１２……保持板
、ｃ……隙間。
FIG. 1 is a side sectional view showing an embodiment of the present invention, FIG. 2 is a side sectional view showing a ball bearing in a thermally deformed state,
Figure 3 is a side sectional view showing a conventional turbo molecular pump, Figure 4 is a side sectional view showing its ball bearing support structure, and Figures 5 and 6 are side views showing the position of the ball bearing after cooling. FIG. 2... Rotor, 3... Rotating shaft, 4, 5... Radial magnetic bearing, 5... Thrust magnetic bearing, 8...
Protective ball bearing, 11... leaf spring, 12... holding plate, c... gap.
Claims (1)
構成された磁気浮上型ターボ分子ポンプにおいて
、前記磁気軸受の保護用玉軸受を板ばねにより支
持すると共に、該板ばねを保持板により隙間を設
けて保持したことを特徴とするターボ分子ポンプ
の保護用玉軸受の支持構造。 In a magnetically levitated turbo molecular pump composed of a rotor supported by a magnetic bearing and a stator, a protective ball bearing of the magnetic bearing is supported by a leaf spring, and a gap is provided between the leaf spring by a retaining plate. A support structure for a protective ball bearing of a turbo molecular pump, which is characterized by holding a ball bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8403190U JPH0442295U (en) | 1990-08-10 | 1990-08-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8403190U JPH0442295U (en) | 1990-08-10 | 1990-08-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0442295U true JPH0442295U (en) | 1992-04-09 |
Family
ID=31632184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8403190U Pending JPH0442295U (en) | 1990-08-10 | 1990-08-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0442295U (en) |
-
1990
- 1990-08-10 JP JP8403190U patent/JPH0442295U/ja active Pending