JPH0442433A - Thin film magnetic recording disk and thin film magnetic recording disk drive device - Google Patents

Thin film magnetic recording disk and thin film magnetic recording disk drive device

Info

Publication number
JPH0442433A
JPH0442433A JP2150976A JP15097690A JPH0442433A JP H0442433 A JPH0442433 A JP H0442433A JP 2150976 A JP2150976 A JP 2150976A JP 15097690 A JP15097690 A JP 15097690A JP H0442433 A JPH0442433 A JP H0442433A
Authority
JP
Japan
Prior art keywords
magnetic
film
recording disk
magnetic recording
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2150976A
Other languages
Japanese (ja)
Other versions
JP2864670B2 (en
Inventor
Shunichi Uchinami
打浪 俊一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2150976A priority Critical patent/JP2864670B2/en
Publication of JPH0442433A publication Critical patent/JPH0442433A/en
Application granted granted Critical
Publication of JP2864670B2 publication Critical patent/JP2864670B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/74Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
    • G11B5/82Disk carriers

Landscapes

  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To perform recording/reproduction with high density by providing plural concentric circular grooves with specific depth set along a circumferential direction at a substrate, and providing magnetic film only in the grooves. CONSTITUTION:The plural concentric circular grooves with depth of 50-3,000Angstrom set along the circumferential direction are provided at the substrate, and the magnetic film 28 are provided only in the grooves. Therefore, the surface of the magnetic film 28 is formed at a position lower than a protrusive part where no magnetic film 28 is formed, and also, a thin film magnetic recording disk 1 always comes in contact with a slider plane 29 as moving the slider plane 29 of the magnetic head slidably on the protrusive part where no magnetic film 28 is formed when a recording/reproduction operation is performed. Thereby, no recording of a track position signal is required, and also, no dedicated servo head is required, and furthermore, overwrite characteristic can be improved and noise reduction can be attained, which enables the recording/ reproduction with high density to be performed.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は情報の磁気記録や再生に用いる薄膜磁気記録デ
ィスクおよび薄膜磁気記録ディスク駆動装置に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a thin film magnetic recording disk and a thin film magnetic recording disk drive device used for magnetic recording and reproduction of information.

従来の技術 近年、コンピュータの外部記憶装置に対する高容量化お
よび処理速度の高速化の要請は益々高まり、昔から使わ
れてきたフロッピー磁気記録ディスク駆動装置に代わっ
て薄膜磁気記録ディスク駆動装置が急速に使用され始め
ている。
BACKGROUND OF THE INVENTION In recent years, demands for higher capacity and faster processing speed for external storage devices for computers have been increasing, and thin-film magnetic recording disk drives are rapidly replacing the floppy magnetic recording disk drives that have been used for a long time. It is starting to be used.

以下に、従来の薄膜磁気記録ディスクおよび薄膜磁気記
録ディスク駆動装置について説明する。
A conventional thin film magnetic recording disk and a thin film magnetic recording disk drive device will be described below.

第7図に示すように、ニッケル・リン膜1oを被覆した
アivミニウム合金9等の基板の上に磁性金属合金また
は磁性金属酸化物等の磁性膜11を形成し、その上に保
護膜12を形成し、更に潤滑剤13を塗布している。基
板の表面にはテクスチャと呼ばれる同心円状の溝が数多
く円周方向に沿って付けられている。テクスチャの半径
方向のピッチは磁気ヘッドのトラック幅に比べて非常に
小さく、また、溝の幅や深さ社均質ではなく、表面の中
心線平均あらさRaが約60人から200人が一般的で
ある。基板の上に磁性膜11が、スバツタ法、蒸着法、
メツキ法等によシ、通常SOO人から4000人の厚み
で成膜されるため、テクスチャの溝に関係なく、基板の
表面に均質にしかも連続に成膜される。保護膜12とし
てはカーボンが良く使われ、また外側の表面に有機材料
から成る潤滑剤13が塗布される。
As shown in FIG. 7, a magnetic film 11 such as a magnetic metal alloy or a magnetic metal oxide is formed on a substrate such as an IV minium alloy 9 coated with a nickel-phosphorus film 1o, and a protective film 12 is formed on the substrate. is formed, and a lubricant 13 is further applied. On the surface of the substrate, many concentric grooves called textures are formed along the circumference. The radial pitch of the texture is very small compared to the track width of the magnetic head, and the width and depth of the grooves are not uniform, and the centerline average roughness Ra of the surface is generally about 60 to 200. be. A magnetic film 11 is formed on the substrate by a sputtering method, a vapor deposition method,
Since the film is usually formed to a thickness of 4,000 to 4,000 mm using the plating method, the film is uniformly and continuously formed on the surface of the substrate, regardless of the grooves in the texture. Carbon is often used as the protective film 12, and a lubricant 13 made of an organic material is applied to the outer surface.

第8図に示すように、薄膜磁気記録ディスク駆動装置は
フロッピー磁気記録ディスク駆動装置と異なシ、通常、
何枚かの薄膜磁気記録ディスク1を装置内部のモータス
ピンドル4に固定して外部環境から隔離した状態で用い
る構造になっている。
As shown in FIG. 8, the thin film magnetic recording disk drive device is different from the floppy magnetic recording disk drive device.
The structure is such that several thin-film magnetic recording disks 1 are fixed to a motor spindle 4 inside the device and used while being isolated from the external environment.

2は磁気ヘッド、3はヘッドアーム、5はモータ、6は
キャリッジ、7は可動コイル、8は永久磁石を示す。
2 is a magnetic head, 3 is a head arm, 5 is a motor, 6 is a carriage, 7 is a moving coil, and 8 is a permanent magnet.

第9図および第10図に示すように、磁気ヘッド2のス
ライダ19は、浮上面14と、トラック部16と、ギャ
ップ16と、コイル17を設けたヘッドコア18で構成
されている。矢印とは、スライダ19を押し付ける力、
矢印すは空気流、矢印Cは基板20の運動方向を示す。
As shown in FIGS. 9 and 10, the slider 19 of the magnetic head 2 includes an air bearing surface 14, a track portion 16, a gap 16, and a head core 18 provided with a coil 17. The arrow indicates the force pushing the slider 19;
The arrow C indicates the air flow, and the arrow C indicates the direction of movement of the substrate 20.

21は基板20の磁性膜を示す。Reference numeral 21 indicates a magnetic film of the substrate 20.

以上のように構成された薄膜磁気記録ディスク駆動装置
について、以下その動作について説明する。
The operation of the thin film magnetic recording disk drive device configured as described above will be described below.

情報を記録再生するための磁気ヘッド2は、通常、浮動
ヘッドと呼ばれる磁気ヘッド2が用いられ、非動作時は
薄膜磁気記録ディスク1の表面に接触した状態で静止し
ているが、起動時には薄膜磁気記録ディスク1の回転開
始と共に薄膜磁気記録ディスク1の面上を摺動しながら
浮上状態に至り、動作中は0215ミクロンないし0.
4ミクロンの浮上量で薄膜磁気記録ディスク1と接触す
ることなく飛行する。
The magnetic head 2 for recording and reproducing information is usually a magnetic head 2 called a floating head, which stands still in contact with the surface of the thin-film magnetic recording disk 1 when not in operation, but when started, the magnetic head 2 is in contact with the surface of the thin-film magnetic recording disk 1. When the magnetic recording disk 1 starts rotating, it reaches a floating state while sliding on the surface of the thin film magnetic recording disk 1, and during operation it reaches a floating state of 0.215 microns to 0.5 microns.
It flies without contacting the thin film magnetic recording disk 1 with a flying height of 4 microns.

また、停止時には、起動時と逆にディスクの回転速度の
低減と共に摺動しながら停止にいたる。
Furthermore, when stopping, the rotational speed of the disk decreases and the disk slides to a stop, contrary to when starting.

このような、方式を、コンタクト・スタート・ヌトップ
(CSS)方式と呼ぶ。
Such a method is called a contact start nullop (CSS) method.

フロッピー磁気記録ディスクは磁性酸化鉄を混ぜ込んだ
樹脂を数十ミクロン厚の柔軟なプラヌチック基板上に数
ミクロンの厚さに塗布したものであシ、しかも、上記樹
脂中に潤滑剤を含浸させているので、磁気ヘッドが常に
ディスク表面を摺動している状態で記録再生の動作を続
けても問題は起こりにくい。しかしながら、薄膜磁気記
録ディスクでは、記録容量を増大させるために、強い磁
性を有する金属磁性材料を用いており、また記録再生特
性を向上させるため、磁膜は薄くしなくてはならず、更
に、記録密度を高めるためと、ブタの処理スピードを迅
速にするため、薄膜磁気記録ディスクと磁気ヘッドとの
動作中における相対スピードがフロッピー磁気記録ディ
スクの場合に比べて著しく速い。したがって、磁気ヘッ
ドによる摺動時あるいは浮上時の突発的な異物の噛み込
み等によりたやすく破損される。このような現象を避け
るため、薄膜磁気記録ディスクを用いる場合には、記録
再生の動作中は常に薄膜磁気記録ディスク上を浮上する
浮動ヘッドを用いなくてはならず、また起動および停止
の際の接触時の摩擦係数を低減させるために、基板上の
テクスチャや、保護膜、潤滑剤等が必要となる。
A floppy magnetic recording disk is made by coating a resin mixed with magnetic iron oxide to a thickness of several microns on a flexible planutic substrate several tens of microns thick.Furthermore, the resin is impregnated with a lubricant. Therefore, problems are unlikely to occur even if recording and reproducing operations are continued with the magnetic head constantly sliding on the disk surface. However, thin-film magnetic recording disks use metal magnetic materials with strong magnetism to increase recording capacity, and to improve recording and reproducing characteristics, the magnetic film must be thin. In order to increase the recording density and to speed up the processing speed, the relative speed of the thin film magnetic recording disk and the magnetic head during operation is significantly faster than that of a floppy magnetic recording disk. Therefore, it is easily damaged due to unexpected foreign matter getting caught during sliding or floating by the magnetic head. To avoid this phenomenon, when using thin-film magnetic recording disks, it is necessary to use a floating head that flies above the thin-film magnetic recording disk during recording and playback operations, and also to In order to reduce the coefficient of friction during contact, texture on the substrate, a protective film, a lubricant, etc. are required.

記録再生の過程においては、ディスク表面の磁性膜の全
領域を用いるのではなく、複数個の同心円状のトラック
と称される離散する帯域に情報を書き込む。現在、使わ
れている薄膜磁気記録ディスクにおいては、トラックの
幅は約20ミクロンであり、トラックどうしの間隔は約
数ミクロンである。この場合、対応する磁気ヘッドの磁
界を発生させ、かつ、再生起電力を得るだめのギャップ
部の幅が約20ミクロンとなる。動作中は磁気ヘッドが
このトラック上を浮上しつつ、ディスクが高速で回転し
ており、他の情報を記録再生したい時には、半径方向に
、磁気ヘッドが浮上しながら移動し、他のトランクに至
る。通常、均質で連続な磁性膜上でのトランク位置を正
確に検出するために、予め各トラック位置にサーボ情報
と呼ばれるデータを書き込んでおき、このデータを専用
に読み出すサーボヘッドと呼ばれる磁気ヘッドが用いら
れる。
In the process of recording and reproducing, information is written in a plurality of discrete bands called concentric tracks, rather than using the entire area of the magnetic film on the disk surface. In thin film magnetic recording disks currently in use, the track width is about 20 microns, and the spacing between the tracks is about several microns. In this case, the width of the gap portion for generating the magnetic field of the corresponding magnetic head and obtaining the regenerative electromotive force is about 20 microns. During operation, the magnetic head floats on this track while the disk rotates at high speed, and when it is desired to record or reproduce other information, the magnetic head moves in the radial direction while floating, reaching other trunks. . Normally, in order to accurately detect the trunk position on a homogeneous and continuous magnetic film, data called servo information is written in advance at each track position, and a magnetic head called a servo head is used to specifically read out this data. It will be done.

発明が解決しようとする課題 しかしながら、上記の従来の構成では、記録容量の高容
量化に伴い、記録再生の効率を高めるため、磁気ヘッド
の浮上量の低減が要望されており、従来0、.1’ 5
ミクロンないし0.4ミクロンの浮上量が0.1ミクロ
ン以下に成ろうとしている。この場合、低浮上化になる
にしたがって、浮上中あるいは浮上しながらのトラック
位置を探すだめのディスク半径方向への移動中に磁気ヘ
ッドがディスクと衝突する機会が増え、更に、CSS時
に浮上に至るまでの摺動の時間および停止に至るまでの
摺動の時間が長くなり、保護膜や磁性膜の破損の機会が
増加するという問題点を有していた。
Problems to be Solved by the Invention However, in the above-mentioned conventional configuration, as the recording capacity increases, there is a need to reduce the flying height of the magnetic head in order to improve the efficiency of recording and reproduction. 1' 5
The flying height of microns to 0.4 microns is about to become 0.1 microns or less. In this case, as the flying height becomes lower, there is an increased chance that the magnetic head will collide with the disk while it is floating or moving in the radial direction of the disk to search for the track position, and furthermore, the magnetic head will fly during CSS. The problem is that the time it takes for the slide to stop and the time it takes for the slide to stop are longer, increasing the chances of damage to the protective film or the magnetic film.

まだ基板自体も磁気ヘッドの低浮上化に伴って、表面の
中心線平均粗さR&を更に小さくする必要があり、この
ような平坦な基板を用いた場合薄膜磁気記録ディスクと
磁気ヘッド間の静止摩擦係数や動摩擦係数が増大し、吸
着現象を起こしたり、カーボン練の削れを起こすという
問題点を有していた。
It is still necessary to further reduce the center line average roughness R& of the surface of the substrate itself as the flying height of the magnetic head is lowered. The friction coefficient and the dynamic friction coefficient increase, causing problems such as adsorption phenomena and scraping of the carbon paste.

さらに従来の薄膜磁気記録ディスクは、磁性膜が均質で
連続な磁性金属薄膜であるため、サーボシヌテムを用い
ても、情報を書き込んだり読みだしたりする場合に完全
にトランク位置を一致させる事は不可能であシ、前に記
録されたトラックの上に新しいデータを記録する場合、
前のデータを記録したトラックかられずかにずれた薄膜
磁気記録ディスク上の半径方向位置に記録されることが
ある。再生ヘッドがこのトラックから信号を読み取る時
、トラックの縁部では薄膜磁気記録ディスク上の前に記
録された信号も拾いあげることになる。このため、通常
オーバーライド特性と呼ばれる特性が劣化するという問
題点や記録過程において、記録ヘッドからの漏洩磁界が
トラックの縁に本来の情報とは無関係の好ましくない磁
化パターンが形成され、再生過程において情報を読み取
る際にこの磁化パターンがノイズとなり、エラーの原因
となるという問題点を有していた。
Furthermore, because the magnetic film of conventional thin-film magnetic recording disks is a homogeneous and continuous magnetic metal thin film, it is impossible to perfectly align the trunk positions when writing or reading information, even with the use of servosynutems. Yes, if you want to record new data on top of a previously recorded track,
Data may be recorded at a radial position on a thin film magnetic recording disk that is slightly offset from the track on which previous data was recorded. When the read head reads a signal from this track, it will also pick up previously recorded signals on the thin film magnetic recording disk at the edges of the track. For this reason, there is a problem that the characteristics normally called override characteristics deteriorate, and during the recording process, the leakage magnetic field from the recording head forms an undesirable magnetization pattern at the edge of the track that is unrelated to the original information, and during the reproduction process, the information is This magnetization pattern becomes noise when reading the data, causing an error.

以上のような問題点を軽減するため、平坦な基板を用い
、薄膜磁気記録ディスクの半径方向に磁性膜と非磁性膜
とを、交互に形成して、複数の同心円状の離散磁性膜ト
ラックを作製する方法がある(例えば特開平1−279
421号公報)。この方法では磁性膜の分離は、リソグ
ラフィ法によシ実施されておシ、トラック間の領域には
、基板とは異なった材質の非磁性材料を充填している。
In order to alleviate the above problems, a flat substrate is used, and magnetic films and non-magnetic films are alternately formed in the radial direction of the thin-film magnetic recording disk to form a plurality of concentric discrete magnetic film tracks. There is a method of manufacturing (for example, Japanese Patent Application Laid-Open No. 1-279
Publication No. 421). In this method, separation of the magnetic film is performed by lithography, and the regions between the tracks are filled with a nonmagnetic material different from that of the substrate.

また磁気ヘッドとの組み合せによる使用法は、あくまで
従来の用い方を前提としており、動作中は磁気ヘッドは
ディスク面上を浮上する。この方法によれば、離散磁性
膜トラックにより、オーバーライド特性及び漏洩磁界に
よるノイズの低減に関しては改善されているが、C8S
特性や磁気ヘッドの浮上特性に関してはほとんど改善さ
れておらず、また、リングラフィにより磁性膜をエツチ
ングしたあと、空隙を非磁性材料で充填する製造方法は
非常に煩雑であるという問題点を有していた。
Further, the usage in combination with a magnetic head is based on the premise that it is used in a conventional manner, and the magnetic head flies above the disk surface during operation. According to this method, override characteristics and noise reduction due to leakage magnetic fields are improved by using discrete magnetic film tracks, but C8S
There has been little improvement in the characteristics and flying characteristics of the magnetic head, and the manufacturing method, which involves etching the magnetic film using phosphorography and then filling the void with non-magnetic material, is extremely complicated. was.

本発明は上記従来の問題点を解決するもので、トランク
位置信号を記録する必要がなく、専用のサーボヘッドも
用いずに、オーバーライド特性の向上とノイズp低減が
でき、高密度の記録再生が可能な信頼性の高い薄膜磁気
記録ディスクおよび薄膜磁気記録ディスク駆動装置を提
供することを目的とする。
The present invention solves the above-mentioned conventional problems. It is not necessary to record trunk position signals, and without using a dedicated servo head, it is possible to improve override characteristics and reduce noise p, and enables high-density recording and playback. An object of the present invention is to provide a highly reliable thin film magnetic recording disk and a thin film magnetic recording disk drive device.

課題を解決するだめの手段 この目的を達成するために本発明の薄膜磁気記録ディス
クおよび薄膜磁気記録ディスク駆動装置は、基板に円周
方向に沿った複数の同心円の深さが60〜3000人の
溝を備え、前記溝の中のみに磁性膜を備えた構成および
基板が複数の同心円の溝を有し前記溝の中にのみ平坦な
表面を有する磁性膜トラックが形成され、前記磁性膜ト
ラックの間の領域を成す基板の表面が磁性膜トラックの
表面から60〜3000人の高さになっている薄膜磁気
記録ディスクを用い、記録再生用の磁気ヘッドのスライ
ダ面が前記磁性膜トラックの間の領域を摺動する構成を
有している。
Means for Solving the Problem In order to achieve this object, the thin film magnetic recording disk and thin film magnetic recording disk drive device of the present invention provide a substrate with a plurality of concentric circles along the circumferential direction having a depth of 60 to 3,000 people. A structure including a groove and a magnetic film only in the groove, and a substrate having a plurality of concentric grooves and a magnetic film track having a flat surface only in the groove, and a magnetic film track having a flat surface only in the groove. A thin film magnetic recording disk is used in which the surface of the substrate forming the area between the magnetic film tracks is at a height of 60 to 3000 mm above the surface of the magnetic film tracks, and the slider surface of the magnetic head for recording and reproduction is located between the magnetic film tracks. It has a configuration that slides over the area.

作   用 この構成によって、薄膜磁気記録ディスクの磁性膜の表
面は、磁性膜が形成されていない突出部の表面より低い
位置に形成されることになる。また記録再生の動作時に
は、磁性膜が形成されていない突出部の上を磁気ヘッド
のスライダ面が摺動しながら常に薄膜磁気記録ディスク
とスライダ部とが接触された状態となる。
Function: With this configuration, the surface of the magnetic film of the thin-film magnetic recording disk is formed at a position lower than the surface of the protrusion on which no magnetic film is formed. Further, during the recording/reproducing operation, the slider surface of the magnetic head slides on the protrusion on which no magnetic film is formed, so that the thin-film magnetic recording disk and the slider section are always in contact with each other.

実施例 以下本発明の第1の実施例について、図面を参照しなが
ら説明する。ポリエーテルイミドにより、溝加工を施し
た金型を用いて射出成形したプラスチックの基板の形状
は、円周方向に複数個の同心円状の溝を有し、内周から
外周まで一定で、溝幅は5ミクロン、溝深さは330O
人、溝中心ピッチは7ミクロンである。溝の深さは、記
録再生ヘッドと溝の中に形成される磁性膜との間隔が設
計上の電磁変換特性を得るために許される最大の間隔に
なるように決められる。即ち、ディスクの内周側と外周
側とで溝の深さを変えることも可能である。また溝の形
状は表面から深さ方向に垂直に切り立った形状とし、溝
の底面はできるだけ平坦に仕上げる。溝の側面は上記の
垂直面ではなく、高さ方向に上部に狭くなった斜めの面
でも良い。
EXAMPLE A first example of the present invention will be described below with reference to the drawings. The shape of the plastic substrate injection molded using a mold with grooves made of polyetherimide has multiple concentric grooves in the circumferential direction, and the groove width is constant from the inner circumference to the outer circumference. is 5 microns, groove depth is 330O
The groove center pitch is 7 microns. The depth of the groove is determined so that the distance between the recording/reproducing head and the magnetic film formed in the groove is the maximum distance allowed to obtain designed electromagnetic conversion characteristics. That is, it is also possible to change the depth of the grooves between the inner and outer circumferential sides of the disk. In addition, the shape of the groove is vertical to the depth direction from the surface, and the bottom surface of the groove is finished as flat as possible. The side surfaces of the groove may not be the above-mentioned vertical surfaces, but may be diagonal surfaces that become narrower at the top in the height direction.

また、溝と溝との間の畝の部分の表面はできるだけ平坦
であることが望ましい。
Further, it is desirable that the surface of the ridge portion between the grooves be as flat as possible.

第2図に示すように、プラスチックの基板22を加熱し
、充分にガヌ出しを行った後、ヌパッタリング法を用い
順次金属薄膜を形成させる。金属薄膜は、膜厚2000
人のクロミウム膜23.膜厚60o人のコバルト、ニッ
ケル、クロミウム合金膜24および膜厚300人のクロ
ミウム膜25の順に形成する。上記の膜付けは、蒸着、
メツキ。
As shown in FIG. 2, after a plastic substrate 22 is heated and sufficiently exposed, a metal thin film is sequentially formed using a spattering method. The metal thin film has a film thickness of 2000 mm.
Human chromium membrane23. A cobalt, nickel, and chromium alloy film 24 with a thickness of 60 degrees and a chromium film 25 with a thickness of 300 degrees are formed in this order. The above film attachment can be done by vapor deposition,
Metsuki.

CVD等で行っても良い。You may also use CVD or the like.

ついで、第3図に示すように、セラミック製で高速な周
速でも浮上しないようにスライダ部に格子状に切込みの
入ったヘッド(ワツフル・ヘッド)を用い、高速で基板
22の表面の畝の部分を摺動し、畝の部分の表面の金属
薄膜を削り取り洗浄する。金属薄膜を除去するために、
砥粒の付着したラッピングテープで擦っても良い。つい
で、第4図に示すように、表面に膜厚200人のカーボ
ン膜27を同じくスパッタ法を用いて形成する。
Next, as shown in FIG. 3, the ridges on the surface of the substrate 22 are removed at high speed using a head made of ceramic and having grid-like notches in the slider section (Watzful head) to prevent floating even at high circumferential speeds. The parts are slid and the thin metal film on the surface of the ridges is scraped off and cleaned. To remove the metal thin film,
You can also rub it with wrapping tape that has abrasive particles attached. Then, as shown in FIG. 4, a carbon film 27 having a thickness of 200 mm is formed on the surface using the same sputtering method.

第6図に示すように、カーボン膜26でなく潤滑剤を塗
布して、膜厚20人の潤滑膜27を形成させたり、第6
図に示すように、膜厚200人のカーボン膜26の上に
さらに潤滑剤を塗布して膜厚2o人の潤滑膜27を形成
させても良い。この場合、磁気ヘッドのギャップ部の表
面と磁性膜トラック表面との間隔は720八となる。
As shown in FIG. 6, a lubricant may be applied instead of the carbon film 26 to form a lubricant film 27 with a thickness of 20 mm.
As shown in the figure, a lubricant may be further applied on the carbon film 26 with a thickness of 200 mm to form a lubricant film 27 with a thickness of 20 mm. In this case, the distance between the surface of the gap portion of the magnetic head and the surface of the magnetic film track is 7208.

以上のように本実施例によれば、基板に円周方向に沿っ
た複数の同心円の深さが60〜3000人の溝を備え、
この溝の中のみに磁性膜を設けることにより、磁気ヘッ
ドの摺動面が薄膜磁気記録ディスクの突出部のみを常に
摺動することになるので薄膜磁気記録ディスクの磁性膜
の破損を無くすることができる。
As described above, according to this embodiment, the substrate is provided with a plurality of concentric grooves having a depth of 60 to 3000 people along the circumferential direction,
By providing a magnetic film only in this groove, the sliding surface of the magnetic head always slides only on the protrusion of the thin-film magnetic recording disk, thereby eliminating damage to the magnetic film of the thin-film magnetic recording disk. I can do it.

以下本発明の第2の実施例について、図面を参照しなが
ら説明する。
A second embodiment of the present invention will be described below with reference to the drawings.

第1図に示すように、薄膜磁気記録ディスク1の溝の部
分に磁性膜28が形成されており、磁気へラド2のスラ
イダ部29と、薄膜磁気記録ディスク1の突出部を介し
て接している。磁気ヘッドのギャップ部3oの幅は、薄
膜磁気記録ディスク1の溝の中の磁性膜28の幅即ちト
ラックの幅よシ広く設計されている。磁気ヘッド2のス
ライダ面29及びギャップ部3oが薄膜磁気記録ディス
ク1の円周方向を摺動しながら記録再生の動作を行う時
も、また半径方向を摺動しながらトラック位置を検出す
る時も決して磁性膜28に接触しない構造になっている
As shown in FIG. 1, a magnetic film 28 is formed in the groove portion of the thin-film magnetic recording disk 1, and is in contact with the slider portion 29 of the magnetic helad 2 via the protruding portion of the thin-film magnetic recording disk 1. There is. The width of the gap portion 3o of the magnetic head is designed to be wider than the width of the magnetic film 28 in the groove of the thin-film magnetic recording disk 1, that is, the width of the track. Both when the slider surface 29 and the gap portion 3o of the magnetic head 2 perform recording and reproducing operations while sliding in the circumferential direction of the thin-film magnetic recording disk 1, and when detecting the track position while sliding in the radial direction. The structure is such that it never comes into contact with the magnetic film 28.

磁気へ、ド2は3レール型の形状とし、2つのスライダ
部29をポリエーテルイミドにより作製し、士ンターレ
ールのギャップ部30を挟む磁束の流れる部分のみをフ
ェライトで作製した。また七ンターレールがスライダ部
29より突出しないように気をつけた。
Regarding magnetism, the magnetic field 2 has a three-rail shape, the two slider parts 29 are made of polyetherimide, and only the part where the magnetic flux flows between the gap parts 30 of the interrails is made of ferrite. Also, care was taken to ensure that the seven-point rail did not protrude beyond the slider portion 29.

磁気ヘッドとしては、現在用いられている浮動ヘッドで
もよいし、あるいは、フロッピーディスク用磁気ヘッド
のタイプでも良い。但し、磁気ヘッドのスライダ面の材
質は、摺動すべき薄膜磁気記録ディスクの材質によって
決められるべきであり、その材質がプラスチック材料の
場合には、磁気ヘッドのスライダ面の材質もプラスチッ
ク材料で作る方が、一方が選択的に摩耗されることがな
いので望ましい。磁気ヘッドに掛ける加重は、走行中に
磁性膜面からの揚力が磁気ヘッドに働くので、薄膜磁気
記録ディスクの突出部の走行方向の変動に追従できる程
度の加重で良い。
The magnetic head may be a currently used floating head or a type of magnetic head for floppy disks. However, the material of the slider surface of the magnetic head should be determined by the material of the thin-film magnetic recording disk to be slid on, and if that material is plastic, the material of the slider surface of the magnetic head should also be made of plastic material. This is desirable because one side is not selectively worn away. The load applied to the magnetic head may be such that it can follow the fluctuations in the running direction of the protrusion of the thin-film magnetic recording disk, since the lifting force from the magnetic film surface acts on the magnetic head during running.

以上のように本実施例によれば、基板が複数の同心円の
溝を有し、その溝の中にのみ磁性膜トラックが形成され
、磁性膜トラックの間の領域を成す表面が磁性膜トラッ
クの表面よシ高くなっている薄膜磁気記録ディスクを用
い、磁気ヘッドのスライダ面が磁性膜トラックの間の領
域を摺動する構成により、記録再生の動作中に、磁性膜
が形成されていない薄膜磁気記録ディスクの突出部の上
を磁気ヘッドのスライダ面が高速で摺動しながら常に薄
膜磁気記録ディスクとスライダ面とが接触した状態で用
いることができる為、5ooOÅ以下50人に至るよう
ないかなる低浮上でも膜を痛めることなく、安定して高
密度で効率良く情報の記録再生を行うことができる。ま
た磁気ヘッドの静止時及び摺動時のディスクへの接触面
積が小さいので、静止摩擦係数及び動摩擦係数が小さく
なシ、吸着現象や薄膜磁気記録ディスクの表面の破壊が
起こりにくい。更に、常時、磁気ヘッドが薄膜磁気記録
ディスクの突出部に接触しながら摺動するため、ごみな
どの噛み込みによる突発的な衝撃力が発生しない。また
磁気ヘッドのギャップ幅がディスクの磁性膜トラック幅
よシ広いため、記録および再生の際にトラックずれをお
こさず、したがって、オーバーライド特性が向上する。
As described above, according to this embodiment, the substrate has a plurality of concentric grooves, the magnetic film tracks are formed only in the grooves, and the surface forming the area between the magnetic film tracks is Using a thin-film magnetic recording disk that is higher than the surface, the slider surface of the magnetic head slides in the area between the magnetic film tracks, so that during recording and reproducing operations, thin-film magnetic recording without a magnetic film is formed. Since the slider surface of the magnetic head slides on the protrusion of the recording disk at high speed and can be used in a state where the thin film magnetic recording disk and the slider surface are always in contact with each other, it is possible to reduce the Even when levitating, the film is not damaged, and information can be recorded and reproduced stably and efficiently at high density. In addition, since the contact area of the magnetic head with the disk when it is stationary and when it is sliding is small, the coefficient of static friction and the coefficient of dynamic friction are small, and adhesion phenomena and destruction of the surface of the thin-film magnetic recording disk are less likely to occur. Furthermore, since the magnetic head always slides in contact with the protrusion of the thin-film magnetic recording disk, no sudden impact force is generated due to biting of dust or the like. Furthermore, since the gap width of the magnetic head is wider than the magnetic film track width of the disk, no track deviation occurs during recording and reproduction, and therefore, override characteristics are improved.

さらに、記録ヘッドからの漏洩磁界がトラックの縁に及
ぶことがないので、このことによるノイズも軽減するこ
とができる。
Furthermore, since the leakage magnetic field from the recording head does not reach the edge of the track, noise caused by this can also be reduced.

発明の効果 以上の実施例の説明からも明らかなように本発明は、基
板に同心円の溝を備え、その溝の中のみに磁性膜を備え
た構成および基板の同心円の溝に平坦な表面を有する磁
性膜トラックが形成され、その磁性膜トラックの間の領
域の基板の表面が磁性膜トラックの表面よシ高くなって
いる薄膜磁気記録ディスクを用い、磁気ヘッドのスライ
ダ面を磁性膜トラックの間の領域を摺動させる構成にょ
シ、磁性膜の破損を防止でき、トラック位置信号の記録
を必要とせずまた専用のサーボヘッドを用いる必要がな
く、さらにオーバーライド特性の向上とノイズ低減を図
ることができ、高密度の記録再生ができる優れた薄膜磁
気記録ディスクおよび薄膜磁気記録ディスク駆動装置を
実現できるものである。
Effects of the Invention As is clear from the description of the embodiments above, the present invention has a configuration in which a substrate is provided with concentric grooves and a magnetic film is provided only in the grooves, and a flat surface is provided in the concentric grooves of the substrate. Using a thin film magnetic recording disk in which magnetic film tracks are formed and the surface of the substrate in the area between the magnetic film tracks is higher than the surface of the magnetic film tracks, the slider surface of the magnetic head is moved between the magnetic film tracks. This structure prevents damage to the magnetic film, eliminates the need to record track position signals, eliminates the need for a dedicated servo head, and improves override characteristics and reduces noise. Therefore, it is possible to realize an excellent thin film magnetic recording disk and a thin film magnetic recording disk drive device that can perform high-density recording and reproduction.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の第2の実施例の薄膜磁気記録ディスク
駆動装置の磁気ヘッドと薄膜磁気記録ディスクとの位置
関係を示す部分断面図、第2図ないし第6図は本発明の
第1の実施例の薄膜磁気記録ディスクの製造工程段階別
の磁性膜、カーボン膜および潤滑膜ならびにこれらの組
合せ膜の形成状態を示す断面図、第7図は従来の薄膜磁
気記録ディスクの部分断面図、第8図は従来の薄膜磁気
記録ディスク駆動装置の構成図、第9図は同浮動ヘッド
の構成を示す斜視図、第10図は同磁気ヘッドのスライ
ダと薄膜磁気記録ディスクの動作時の状態を示す概念図
である。 1・・・・・・薄膜磁気記録ディスク、2・・・・・・
磁気ヘッド、16・・・・・・トラック部、18・・・
・・・ヘッドコア、19・・・・・・スライダ、22・
・・・・・基板、23.25・・・・・・クロミウム膜
、24・・・・・・コバルト・ニッケル・クロミウム合
金膜、26・・・・・・カーボン膜、27・・・・・・
潤滑膜、28・・・・・・磁性膜、29・・・・・・ス
ライダ面、30・・・・・・ギャップ部。 代理人の氏名 弁理士 粟 野 重 孝 #1か1名ζ
) 味 区
FIG. 1 is a partial sectional view showing the positional relationship between the magnetic head and the thin film magnetic recording disk of a thin film magnetic recording disk drive device according to a second embodiment of the present invention, and FIGS. FIG. 7 is a partial cross-sectional view of a conventional thin-film magnetic recording disk; Fig. 8 is a configuration diagram of a conventional thin film magnetic recording disk drive device, Fig. 9 is a perspective view showing the configuration of the same floating head, and Fig. 10 shows the operating state of the slider of the same magnetic head and the thin film magnetic recording disk. FIG. 1... Thin film magnetic recording disk, 2...
Magnetic head, 16...Track section, 18...
...Head core, 19...Slider, 22.
...Substrate, 23.25...Chromium film, 24...Cobalt-nickel-chromium alloy film, 26...Carbon film, 27...・
Lubricating film, 28...Magnetic film, 29...Slider surface, 30...Gap portion. Name of agent: Patent attorney Shigetaka Awano #1 or 1 personζ
) Aji Ward

Claims (2)

【特許請求の範囲】[Claims] (1)基板に円周方向に沿った複数の同心円の深さが6
0〜3000Åの溝を備え、前記溝の中のみに磁性膜を
備えた薄膜磁気記録ディスク。
(1) The depth of multiple concentric circles along the circumferential direction of the board is 6
A thin film magnetic recording disk comprising grooves of 0 to 3000 Å and a magnetic film only within the grooves.
(2)基板が複数の同心円の溝を有し、前記溝の中に平
坦な表面を有する磁性膜トラックが形成され、前記磁性
膜トラックの間の領域を成す基板の表面が磁性膜トラッ
クの表面から50〜3000Åの高さになっている薄膜
磁気記録ディスクを用い、記録再生用の磁気ヘッドのス
ライダ面が前記磁性膜トラックの間の領域を摺動する薄
膜磁気記録ディスク駆動装置。
(2) The substrate has a plurality of concentric grooves, a magnetic film track having a flat surface is formed in the groove, and the surface of the substrate forming the area between the magnetic film tracks is the surface of the magnetic film track. A thin film magnetic recording disk drive device using a thin film magnetic recording disk having a height of 50 to 3000 Å, in which a slider surface of a magnetic head for recording and reproduction slides in an area between the magnetic film tracks.
JP2150976A 1990-06-08 1990-06-08 Thin film magnetic recording disk and thin film magnetic recording disk drive Expired - Fee Related JP2864670B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2150976A JP2864670B2 (en) 1990-06-08 1990-06-08 Thin film magnetic recording disk and thin film magnetic recording disk drive

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2150976A JP2864670B2 (en) 1990-06-08 1990-06-08 Thin film magnetic recording disk and thin film magnetic recording disk drive

Publications (2)

Publication Number Publication Date
JPH0442433A true JPH0442433A (en) 1992-02-13
JP2864670B2 JP2864670B2 (en) 1999-03-03

Family

ID=15508565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2150976A Expired - Fee Related JP2864670B2 (en) 1990-06-08 1990-06-08 Thin film magnetic recording disk and thin film magnetic recording disk drive

Country Status (1)

Country Link
JP (1) JP2864670B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04134626A (en) * 1990-09-21 1992-05-08 Sharp Corp Method of manufacturing magnetic memory element
JPH1069631A (en) * 1997-07-14 1998-03-10 Sharp Corp Recording / reproducing method for magnetic memory element
WO1998016932A1 (en) * 1996-10-17 1998-04-23 Sony Corporation Discoidal recording medium, head slider and recording and/or playback apparatus
US6118632A (en) * 1997-02-12 2000-09-12 International Business Machines Corporation Magnetic disk stack having laser-bump identifiers on magnetic disks

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04134626A (en) * 1990-09-21 1992-05-08 Sharp Corp Method of manufacturing magnetic memory element
WO1998016932A1 (en) * 1996-10-17 1998-04-23 Sony Corporation Discoidal recording medium, head slider and recording and/or playback apparatus
US6118632A (en) * 1997-02-12 2000-09-12 International Business Machines Corporation Magnetic disk stack having laser-bump identifiers on magnetic disks
JPH1069631A (en) * 1997-07-14 1998-03-10 Sharp Corp Recording / reproducing method for magnetic memory element

Also Published As

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