JPH044262U - - Google Patents
Info
- Publication number
- JPH044262U JPH044262U JP4456890U JP4456890U JPH044262U JP H044262 U JPH044262 U JP H044262U JP 4456890 U JP4456890 U JP 4456890U JP 4456890 U JP4456890 U JP 4456890U JP H044262 U JPH044262 U JP H044262U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- window
- scattered light
- laser
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
第１図はこの考案の一実施例である粒子検出装
置の主要部の概略構成を示す断面図、第２図は、
従来の真空装置の排気ライン等のような低圧ガス
流中の粒子を検出する粒子検出装置の概略を示す
図である。
図中、１……レーザ発振部、２……コリメータ
レンズ、３……窓機構、３ａ……窓、４，６……
検出領域、５……パイプ、７……取付部。
FIG. 1 is a cross-sectional view showing the schematic configuration of the main parts of a particle detection device that is an embodiment of this invention, and FIG.
1 is a diagram schematically showing a particle detection device for detecting particles in a low-pressure gas flow such as an exhaust line of a conventional vacuum device. In the figure, 1... Laser oscillation unit, 2... Collimator lens, 3... Window mechanism, 3a... Window, 4, 6...
Detection area, 5...Pipe, 7...Mounting part.
Claims (1)
パイプの中間部に窓機構を有し、この窓機構はレ
ーザを透過する透明部材で機密に構成された窓と
、この窓の外側に配置されたレーザ発振部と、前
記窓の内側もしくは外側に配置され、該パイプ間
を通過する粒子がレーザ光に照射されて発生する
散乱光を検出する散乱光検出器と、前記レーザの
進む方向のパイプ内に配置されたビームストツパ
とを具備したことを特徴とする粒子検出装置。 Both ends of the pipe are formed so that they can be connected to other structures, and there is a window mechanism in the middle of the pipe. a scattered light detector disposed inside or outside the window and detecting scattered light generated when particles passing between the pipes are irradiated with laser light; and a direction in which the laser travels. A particle detection device characterized by comprising a beam stopper disposed in a pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4456890U JPH044262U (en) | 1990-04-27 | 1990-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4456890U JPH044262U (en) | 1990-04-27 | 1990-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH044262U true JPH044262U (en) | 1992-01-16 |
Family
ID=31557990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4456890U Pending JPH044262U (en) | 1990-04-27 | 1990-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044262U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62215843A (en) * | 1985-12-10 | 1987-09-22 | ハイ イ−ルド テクノロジ− | Particle detector for wafer processor |
| JPH01184441A (en) * | 1988-01-19 | 1989-07-24 | Fujitsu Ltd | Grain counter |
| JPH0222534A (en) * | 1988-07-11 | 1990-01-25 | Fujitsu Ltd | Particle measuring instrument |
-
1990
- 1990-04-27 JP JP4456890U patent/JPH044262U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62215843A (en) * | 1985-12-10 | 1987-09-22 | ハイ イ−ルド テクノロジ− | Particle detector for wafer processor |
| JPH01184441A (en) * | 1988-01-19 | 1989-07-24 | Fujitsu Ltd | Grain counter |
| JPH0222534A (en) * | 1988-07-11 | 1990-01-25 | Fujitsu Ltd | Particle measuring instrument |
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