JPH0442736U - - Google Patents
Info
- Publication number
- JPH0442736U JPH0442736U JP8355490U JP8355490U JPH0442736U JP H0442736 U JPH0442736 U JP H0442736U JP 8355490 U JP8355490 U JP 8355490U JP 8355490 U JP8355490 U JP 8355490U JP H0442736 U JPH0442736 U JP H0442736U
- Authority
- JP
- Japan
- Prior art keywords
- dicing blade
- disc
- main body
- shaped main
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims 1
- 239000007779 soft material Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Description
第１図は本考案のダイシング用ブレードおよび
それを用いたダイシング加工を示す断面図であり
、第２図はダイシング加工を説明するための断面
図、第３図は従来のダイシング用ブレードを示す
断面図、第４図はブレーキング加工を示す平面図
、第５図は従来のブレーキング状態を示す断面図
である。
１０……ダイシング用ブレード、１１……外縁
部、１２……中央層、１３および１４……側面層
、１５……シリコンウエハー。
Fig. 1 is a sectional view showing the dicing blade of the present invention and dicing processing using the same, Fig. 2 is a sectional view for explaining the dicing processing, and Fig. 3 is a sectional view showing a conventional dicing blade. FIG. 4 is a plan view showing the braking process, and FIG. 5 is a sectional view showing the conventional braking state. DESCRIPTION OF SYMBOLS 10... Dicing blade, 11... Outer edge part, 12... Center layer, 13 and 14... Side layer, 15... Silicon wafer.
Claims (1)
てその中央層が硬質材でかつ両側面層が軟質材で
構成されることを特徴とするダイシング用ブレー
ド。 ２ 前記デイスク状本体の外縁部における径方向
の断面が、両側面に対してその中央部において突
出する形状を有することを特徴とする請求項１に
記載のダイシング用ブレード。[Claims for Utility Model Registration] 1. A dicing blade characterized in that the disc-shaped main body has a three-layer structure in the thickness direction, the center layer of which is made of a hard material, and both side layers made of a soft material. 2. The dicing blade according to claim 1, wherein a radial cross section of the outer edge of the disc-shaped main body has a shape that projects at its center with respect to both side surfaces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8355490U JPH0442736U (en) | 1990-08-06 | 1990-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8355490U JPH0442736U (en) | 1990-08-06 | 1990-08-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0442736U true JPH0442736U (en) | 1992-04-10 |
Family
ID=31631318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8355490U Pending JPH0442736U (en) | 1990-08-06 | 1990-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0442736U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023023263A (en) * | 2021-08-04 | 2023-02-16 | 株式会社ディスコ | Cutting method of substrate |
-
1990
- 1990-08-06 JP JP8355490U patent/JPH0442736U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023023263A (en) * | 2021-08-04 | 2023-02-16 | 株式会社ディスコ | Cutting method of substrate |