JPH0442865A - How to apply powder for firing ceramic substrates - Google Patents

How to apply powder for firing ceramic substrates

Info

Publication number
JPH0442865A
JPH0442865A JP2149424A JP14942490A JPH0442865A JP H0442865 A JPH0442865 A JP H0442865A JP 2149424 A JP2149424 A JP 2149424A JP 14942490 A JP14942490 A JP 14942490A JP H0442865 A JPH0442865 A JP H0442865A
Authority
JP
Japan
Prior art keywords
powder
green sheet
setter
firing
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2149424A
Other languages
Japanese (ja)
Inventor
Katsuya Yamamoto
勝也 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2149424A priority Critical patent/JPH0442865A/en
Publication of JPH0442865A publication Critical patent/JPH0442865A/en
Pending legal-status Critical Current

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  • Compositions Of Oxide Ceramics (AREA)

Abstract

PURPOSE:To extremely uniformly coat a setter with spreading powder for sintering by forming a green sheet containing a spreading powder comprising boron nitride, etc., an organic binder and a plasticizer, placing the green sheet on the setter and subsequently calcining the green sheet. CONSTITUTION:A slurry containing a spreading powder comprising boron nitride powder, etc., and used for calcined ceramic substrates, an organic binder and a plasticizer is formed into a green sheet 4 on a carrier sheet 6. The green sheet 4 is peeled, placed on a setter 7 and calcined, thereby uniformly coating the setter 7 with the spreading powder 5. A green sheet 8 for a ceramic substrate is placed on the spreading powder-coated setter 7 and then calcined.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、セラミック基板の製造時に使用するセラミッ
ク基板焼成用敷粉の塗布方法に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for applying a coating powder for firing ceramic substrates used in manufacturing ceramic substrates.

従来の技術 近年、電子機器の小型化に伴い高密度実装の一手段とし
てセラミック多層基板が多く利用されている。
2. Description of the Related Art In recent years, with the miniaturization of electronic devices, ceramic multilayer substrates have been widely used as a means of high-density packaging.

従来よりセラミック多層基板には電子部品を高密度に実
装するために高品質でかつ高信頼性を備えたものが要求
され、それに伴ってセラミック多層基板を製造するとき
に使用される焼成用敷粉の塗布方法にも高品質で高い均
一性を有する塗布方法が要求されてきた。
Ceramic multilayer boards have traditionally been required to be of high quality and high reliability in order to mount electronic components at high density, and accordingly, the firing powder used when manufacturing ceramic multilayer boards has been required. There has also been a demand for a coating method with high quality and high uniformity.

以下図面を参照しながら、上述した従来のセラミック基
板焼成用敷粉の塗布方法の一例について説明する。
An example of a method of applying the above-mentioned conventional coating powder for firing a ceramic substrate will be described below with reference to the drawings.

第2図は従来のセラミック基板焼成用敷粉の塗布方法の
工程を示すものであり、図において、1はアルミナ等か
らできたセッター、2は焼成することによってセラミッ
ク多層基板となるグリーンシート、3は有機溶剤と混合
し、霧状にして吹きつけるだめの焼成用敷粉である。
Fig. 2 shows the steps of the conventional method of coating powder for firing ceramic substrates. In the figure, 1 is a setter made of alumina, 2 is a green sheet that becomes a ceramic multilayer board by firing, and 3 is a setter made of alumina. is a baking powder that is mixed with an organic solvent and sprayed on in the form of a mist.

以下その塗布方法について説明する。The coating method will be explained below.

セラミック多層基板を製造する場合、まずセッター1の
上に有機溶剤と混合した焼成用敷粉3をスプレーによっ
て霧状に吹きつけて塗布し、常温で乾燥して有機溶剤を
蒸発除去させる。つぎにその焼成用敷粉3の上にグリー
ンシート2をのせ、焼成を行うことによってセラミック
多層基板が得られる。この場合焼成用敷粉3はグリーン
シート2がセッター1に融着するのを防止するために用
いられるものである。
When manufacturing a ceramic multilayer substrate, first, a firing powder 3 mixed with an organic solvent is sprayed onto the setter 1 in the form of a mist, and dried at room temperature to evaporate and remove the organic solvent. Next, the green sheet 2 is placed on the baking powder 3 and fired to obtain a ceramic multilayer substrate. In this case, the baking powder 3 is used to prevent the green sheet 2 from being fused to the setter 1.

発明が解決しようとする課題 しかしながら上記のような構成では、セッター1の上に
焼成用敷粉3をむらなく均一に塗布することができず、
セラミック多層基板の反りや変形を生じたり、焼成に使
用される多数のセッター1間の塗布ばらつきなどでセラ
ミック多層基板の歩留りが低下するという課題を有して
いた。
Problems to be Solved by the Invention However, with the above configuration, it is not possible to evenly and uniformly apply the baking powder 3 onto the setter 1.
There have been problems in that the yield of ceramic multilayer substrates is reduced due to warping or deformation of the ceramic multilayer substrates, and coating variations among the many setters 1 used for firing.

本発明は、上記課題を解決するものであり、セッター上
に極めて高度な均一性を有する焼成用敷粉を形成できる
セラミック基板焼成用敷粉の塗布方法を提供することを
目的とするものである。
The present invention solves the above-mentioned problems, and aims to provide a method for applying a ceramic substrate firing powder that can form a firing powder with extremely high uniformity on a setter. .

課題を解決するための手段 本発明は上記目的を達成するために、千ソ化ボロン粉等
からなるセラミック基板焼成用敷粉と有機結合剤および
可塑剤を含むスラリーをキャリアシート上に成嘆してグ
リーンシートを作成し、その後グ肥−7−J−Q)曾簾
Uでセッターにのせて焼成することによって焼成用敷粉
をむらなく均一に塗布形成するものである。
Means for Solving the Problems In order to achieve the above-mentioned objects, the present invention provides a method in which a slurry containing a ceramic substrate firing powder made of boron peroxide powder, an organic binder, and a plasticizer is placed on a carrier sheet. A green sheet is prepared, and then the green sheet is placed on a setter with a screen curtain U and fired, so that the baking powder is evenly and uniformly applied.

作   用 したがって本発明によれば、上記した構成によってセラ
ミック焼成用敷粉と有機結合剤および可塑剤を混ぜ合わ
せたグリーンシートを士らツーにのせ、焼成したもので
あり、グリーンシート中に焼成用敷粉がむらなく均一に
分散して存在しているためセッター上にはむらなくセラ
ミック焼成用敷粉が塗布形成さnることになる。
Therefore, according to the present invention, a green sheet prepared by mixing ceramic firing powder, an organic binder, and a plasticizer with the above-mentioned configuration is placed on a ceramic plate and fired. Since the bedding powder is distributed evenly and evenly, the bedding powder for ceramic firing is evenly coated and formed on the setter.

実施例 以下本発明の一実施例のセラミック基板焼成用敷粉の塗
布方法について図面を参照しながら説明する。
EXAMPLE Hereinafter, a method of applying a coating powder for firing a ceramic substrate according to an example of the present invention will be described with reference to the drawings.

第1図は本発明の一実施例におけるセラミック基板焼成
用敷粉を塗布する工程を示すものであり、図において、
4はチッ化ボロン粉末等よりなるセラミック焼成用敷粉
と有機物結合剤および1lliJ塑剤等を混ぜ合わせた
グリーンシート、6はグリーンシート4を焼成して有機
物結合剤および可塑剤とが分解散逸して残ったセラミッ
ク基板焼成用敷粉である。
FIG. 1 shows the process of applying powder for firing ceramic substrates in one embodiment of the present invention.
4 is a green sheet prepared by mixing a ceramic firing powder made of boron nitride powder, an organic binder, 1lliJ plasticizer, etc., and 6 is a green sheet in which the organic binder and plasticizer are separated and lost by firing the green sheet 4. This is the remaining powder for firing ceramic substrates.

以下セラミック基板焼成用敷粉6の塗布方法について詳
しく説明する。
The method for applying the coating powder 6 for firing ceramic substrates will be described in detail below.

セラミック基板焼成用敷粉5としてチッ化ボロン粉末と
有機物結合剤および可塑剤等を混ぜ合わせ、計量後ボー
ルミルにて混練したのちに、ドクターブレード法により
キャリアシートθ上に厚さ50μmのグリーンシート4
を成形し、乾燥後ロール状に巻取る。次に巻取りしたグ
リーンシート4をキャリアシート6より剥離したのちに
所定の寸法に切断する。所定の寸法に切断されたグリー
ンシート4をアルミナ等のセラミック系材料よりなる七
ツタ7の上に1枚のせて温度900’c′t′宵機物結
合剤を分解散逸させる。このようにして焼成の済んだセ
ッター7の上にはセラミック基板焼成用敷粉6がむらな
く均一に塗布形成される。次にセラミック基板焼成用敷
粉6が均一に塗布されたセッター7の上にセラミック基
板のグリーンシート8をのせ高温で焼成することにより
セラミック基板が得られる。
Boron nitride powder, an organic binder, a plasticizer, etc. are mixed together as a ceramic substrate baking powder 5, and after being weighed and kneaded in a ball mill, a green sheet 4 with a thickness of 50 μm is placed on a carrier sheet θ using a doctor blade method.
It is molded, dried and then wound into a roll. Next, the wound green sheet 4 is peeled off from the carrier sheet 6 and then cut into a predetermined size. A green sheet 4 cut into a predetermined size is placed on a seven-piece vine 7 made of a ceramic material such as alumina, and heated to a temperature of 900'c't' to decompose and dissipate the binder. The ceramic substrate firing powder 6 is evenly and uniformly coated on the setter 7 which has been fired in this manner. Next, a ceramic substrate green sheet 8 is placed on the setter 7 to which the ceramic substrate baking powder 6 is evenly applied and is baked at a high temperature to obtain a ceramic substrate.

このように本実施例によれば、セラミック基板焼成用敷
粉6をグリーンシート状とすることによりセラミック基
板焼成用敷粉6をグリーンシート4内に均一に分散する
ことができるためセッター7上の全体にむらなく均一な
セラミック基板焼成用敷粉5が塗布形成できることにな
る。
As described above, according to the present embodiment, by making the ceramic substrate firing powder 6 into a green sheet shape, the ceramic substrate firing powder 6 can be uniformly dispersed within the green sheet 4, so that the powder on the setter 7 This means that the ceramic substrate firing powder 5 can be applied and formed evenly and uniformly over the entire surface.

なお、本実施例においてグリーンシート4の成形方法を
ドクターブレード法としたが、これ以外の方法でグリー
ンシート4を成形することもできる。
In this embodiment, the green sheet 4 is formed using a doctor blade method, but the green sheet 4 can also be formed using other methods.

また実施例において焼成温度を900°Cとしたが、有
機物結合剤および可塑剤を分解散逸できる温度であれば
他の温度でも焼成に可能である。
Further, although the firing temperature was set at 900°C in the examples, other temperatures may be used as long as the organic binder and plasticizer can be dissociated and released.

また実施例において、グリーンシート4の厚みを60μ
mとしたが、これ以外の厚さを存するグリーンシート4
においても同様の効果が得られる。
In addition, in the example, the thickness of the green sheet 4 is 60 μm.
green sheet 4 having a thickness other than this.
Similar effects can also be obtained.

また実施例においてアルミナ以外ン 用したが、アルミナ以外にジルコニア、ムライト等のセ
ラミック系のセッターも使用可能である。
Further, in the embodiment, a setter other than alumina was used, but other than alumina, a ceramic setter such as zirconia or mullite can also be used.

発明の効果 本発明は上記実施例より明らかなように、セラミック基
板焼成用敷粉と有機結合剤および可塑剤を混合してグリ
ーンシートを作成し、セッターの上にのせて焼成するも
のであり、セッターの上にセラミック焼成用敷粉をむら
なく分散して塗布形成することができるものであり、セ
ラミック基板の反りや変形の発生を防止し歩留り向上に
大きな効果を有するものである。
Effects of the Invention As is clear from the above examples, the present invention is to prepare a green sheet by mixing a ceramic substrate firing powder, an organic binder, and a plasticizer, and then place it on a setter and fire it. This allows ceramic firing powder to be evenly distributed and coated onto the setter, and is highly effective in preventing warpage and deformation of ceramic substrates and improving yield.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一笑施例におけるセラミック基板焼成
用敷粉の塗布方法を説明するための工程図、第2図は従
来のセラミック基板焼成用敷粉の塗布方法を説明するた
めの工程図である。 4・・・・・・クリーンシート、6・・・・・・セラミ
ック基板焼成用敷粉、6・・・・・・キャリアシート、
7・・・・・・セッター 代理人の氏名 弁理士 粟 野 重 孝 ほか1名番 口【【]
FIG. 1 is a process diagram for explaining a method of applying a coating powder for firing a ceramic substrate in a simple embodiment of the present invention, and FIG. 2 is a process diagram for explaining a conventional method of applying a coating powder for firing a ceramic substrate. It is. 4... Clean sheet, 6... Ceramic substrate baking powder, 6... Carrier sheet,
7...Name of setter agent Patent attorney Shigetaka Awano and 1 other person [[]

Claims (1)

【特許請求の範囲】[Claims]  チッ化ボロン粉末等よりなるセラミック基板焼成用敷
粉と有機結合剤および可塑剤を含むスラリーをキャリア
シート上に成膜してグリーンシートを作成し、その後グ
リーンシートを剥離してセッターにのせて焼成すること
によりセッター上にセラミック焼成用敷粉をむらなく塗
布形成することを特徴とするセラミック基板焼成用敷粉
の塗布方法。
A green sheet is created by forming a slurry containing a ceramic substrate firing powder made of boron nitride powder, an organic binder, and a plasticizer on a carrier sheet, and then the green sheet is peeled off and placed on a setter for firing. A method for applying a ceramic substrate firing powder, characterized in that the ceramic firing powder is evenly applied and formed on a setter by applying the following steps.
JP2149424A 1990-06-07 1990-06-07 How to apply powder for firing ceramic substrates Pending JPH0442865A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2149424A JPH0442865A (en) 1990-06-07 1990-06-07 How to apply powder for firing ceramic substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2149424A JPH0442865A (en) 1990-06-07 1990-06-07 How to apply powder for firing ceramic substrates

Publications (1)

Publication Number Publication Date
JPH0442865A true JPH0442865A (en) 1992-02-13

Family

ID=15474809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2149424A Pending JPH0442865A (en) 1990-06-07 1990-06-07 How to apply powder for firing ceramic substrates

Country Status (1)

Country Link
JP (1) JPH0442865A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005047723A (en) * 2003-07-29 2005-02-24 Kyocera Corp Manufacturing method of ceramic fired body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005047723A (en) * 2003-07-29 2005-02-24 Kyocera Corp Manufacturing method of ceramic fired body

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