JPH0442910Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] The present invention uses a molecular beam epitaxial device (hereinafter referred to as
This invention relates to an improvement in a jig for introducing a substance with a relatively low melting point into a vacuum device such as an MBE (MBE) using an air lock without breaking the vacuum of the device.

[Conventional technology]

Figure 2 shows a conventional sample introduction jig.

1 is a magnet, 2 is a gate valve, 3 is a sample tray, 4 is a sample, and 5 is a crucible for holding the sample.

With the gate valve closed, the sample introduction jig is removed and the sample 4 is placed in the sample tray 3. Attach the jig to the device again and perform the specified evacuation. After evacuation, the gate valve 2 is opened and the magnet 1 is operated to move the sample tray close to the sample crucible 5. The sample was transferred from the sample tray to the sample crucible by rotating the magnet and tilting the tray.

[Conventional problems]

However, the conventional sample introduction jig configured in this manner has the following problems.

(a) A highly skilled technique is required to bring the sample tray close to the entrance of the sample crucible, and if the entrance to the crucible is not horizontal, it is not easy to transfer the sample from the tray to the crucible. If you take too much time, foreign matter near the entrance to the crucible will stick to the sample.
May cause contamination.

(b) When transferring a sample from a saucer to a crucible, the sample does not fall gradually to the bottom of the crucible, but often falls all at once, and in the case of crucibles made of materials such as PBN, the bottom of the crucible cracks.

The present invention aims to eliminate the above-mentioned drawbacks and provide a jig for quickly transferring a sample from a saucer to a crucible without adhering foreign matter to the sample.

[Means for solving problems]

When introducing a substance with a relatively low melting point such as Ga, In, Al, etc. into a vacuum device such as MBE, a heater is installed around the outer periphery of the saucer at the tip of the sample introduction jig to heat and melt the sample. A conduit leading to a sample crucible was provided at the bottom of the saucer.

[Function] By providing the introduction pipe at the bottom of the saucer, the introduction pipe at the bottom of the saucer can be easily moved to the crucible entrance. In addition, by providing a heater wire around the outer periphery of the saucer, the sample can be melted and easily transferred to the crucible through the introduction tube.

〔Example〕

A sectional view of an embodiment of the present invention is shown in FIG.
6 is a heater provided on the outer periphery of the sample tray 3;
8 is an introduction pipe provided downward from the bottom of the saucer 3;
is the current introduction terminal. Note that (1) to (5) are the same as the conventional ones.

The operation according to the present invention is similar to that of the conventional method in that the sample is placed in a receiving tray and then the receiving tray is moved close to the crucible. After bringing the introduction tube 7 at the bottom of the saucer close to the entrance of the crucible, electricity is applied to the heater wire 6 from the current introduction terminal 8 to dissolve the sample. The dissolved sample enters the crucible through the introduction tube.

As is clear from the above examples, if the sample introduction jig with the structure of the present invention is used, the introduction pipe is smaller than the cross-sectional area of the crucible entrance, so it is easy to align the crucible and the saucer. . Furthermore, even if the crucible is in a nearly horizontal state, the sample is introduced through the introduction tube, making it easy to move the sample. Since the sample is melted using a heater, no mechanical vibration or force is applied to the crucible, so the crucible does not crack. This has the advantage that foreign matter around the crucible entrance does not adhere to the sample, oxides on the sample surface remain attached to the wall inside the saucer, and the cleaning material inside the sample enters the crucible.

[Effect of idea]

According to this invention, on the outer periphery of the saucer at the tip of the jig,
A heater is provided to heat and melt the sample, and an introduction tube is also provided at the bottom of the saucer, so that the sample melted by the heater is guided from the bottom of the saucer to the crucible below, without contaminating the sample. It has the excellent effect of being able to be quickly introduced into a crucible.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a sample introduction jig according to the present invention, and FIG. 2 shows a conventional one. In the figure, 1 is a magnet, 2 is a gate valve, 3 is a sample tray, 4 is a sample, 5 is a crucible for holding the sample, 6 is a heater, 7 is an introduction tube, and 8 is a current introduction terminal. Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims (1)

[Scope of utility model registration request] In a jig that introduces a sample into a vacuum device using an air lock, a heater is installed around the outer periphery of the sample tray at the tip of the jig to heat and melt the sample, and an introduction tube is installed downward from the bottom of the tray to melt the sample. 1. A sample introduction jig, characterized in that the sample is guided from the bottom of the saucer through an introduction tube to a lower sample holding crucible arranged in a vacuum chamber.