JPH0443000U - - Google Patents
Info
- Publication number
- JPH0443000U JPH0443000U JP8558790U JP8558790U JPH0443000U JP H0443000 U JPH0443000 U JP H0443000U JP 8558790 U JP8558790 U JP 8558790U JP 8558790 U JP8558790 U JP 8558790U JP H0443000 U JPH0443000 U JP H0443000U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pipe
- liquid
- leak detection
- gas piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 7
- 238000009423 ventilation Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 4
- 239000012780 transparent material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Pipeline Systems (AREA)
- Regulation And Control Of Combustion (AREA)
Description
第１図は本考案に係るガス漏れ検知用ガス配管
構造を示す説明図、第２図は従来のガス漏れ検知
用ガス配管構造の実施例を示す説明図である。
１０……ガス配管、１２……ガスボンベ、１４
……薄膜形成装置、２２……クリーンルーム、３
４……パイプ、３６……市水、４６，５４……通
気孔、５０……排気主ダクト。
FIG. 1 is an explanatory diagram showing a gas piping structure for gas leak detection according to the present invention, and FIG. 2 is an explanatory diagram showing an example of a conventional gas piping structure for gas leak detection. 10...Gas piping, 12...Gas cylinder, 14
... Thin film forming device, 22 ... Clean room, 3
4...pipe, 36...city water, 46, 54...ventilation hole, 50...main exhaust duct.
Claims (1)
ス配管の外側に設けて二重管構造とし、このガス
配管とパイプとの間に液体を封入したことを特徴
とするガス漏れ検知用ガス配管構造。 (2) 前記ガス配管から前記液体を介して漏れた
ガスを検知するガス検知センサを、前記パイプの
通気孔に取付けたことを特徴とする請求項(1)記
載のガス漏れ検知用ガス配管構造。 (3) 前記ガス配管から漏れて前記液体中に溶け
たガスの溶存成分を検出するガス成分検出センサ
を、液体中に取付けたことを特徴とする請求項(1
)記載のガス漏れ検知用ガス配管構造。[Claims for Utility Model Registration] (1) A pipe made of a transparent material with ventilation holes formed on the outside of a gas pipe to form a double pipe structure, and a liquid sealed between the gas pipe and the pipe. Characteristic gas piping structure for gas leak detection. (2) The gas piping structure for gas leak detection according to claim (1), characterized in that a gas detection sensor for detecting gas leaking from the gas piping via the liquid is attached to a vent hole of the pipe. . (3) Claim (1) characterized in that a gas component detection sensor for detecting dissolved components of gas leaking from the gas piping and dissolved in the liquid is installed in the liquid.
) Gas piping structure for gas leak detection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8558790U JPH0443000U (en) | 1990-08-13 | 1990-08-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8558790U JPH0443000U (en) | 1990-08-13 | 1990-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0443000U true JPH0443000U (en) | 1992-04-13 |
Family
ID=31634805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8558790U Pending JPH0443000U (en) | 1990-08-13 | 1990-08-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0443000U (en) |
-
1990
- 1990-08-13 JP JP8558790U patent/JPH0443000U/ja active Pending
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