JPH044355Y2 - - Google Patents

Description

[Detailed description of the invention] (a) Industrial application field The present invention relates to an electrostatic hemispherical energy analyzer suitable for use in analysis such as ESCA and Auger electron spectroscopy.

(b) Prior art and its problems A conventional distributed energy analyzer of this type is shown in FIG. 3. This electrostatic hemispherical energy analyzer a has a hemispherical inner electrode p and outer electrode q arranged concentrically with one point as the center o. It is covered with a magnetic shield m made of a high magnetic permeability material such as. Then, a predetermined voltage V is applied between both electrodes p and q.

Therefore, charged particles such as electrons and ions excited and emitted from the sample s by X-rays or electron beams are focused by the lens system l, and then pass through the incident slit i.
and is guided into the electric field formed between the electrodes p and q. The charged particles in the electric field are attracted and repelled by the electrodes p and q, and their orbits are changed. After the charged particles that have passed between the electrodes p and q pass through the exit slit j, they are detected by the detector d. be done. By scanning the voltage V applied to both electrodes, charged particles with a certain energy width are sequentially extracted, and thereby the energy spectrum of the charged particles emitted from the sample s is measured.

By the way, in the case of the conventional example having such a configuration, the inner electrode and the outer electrode are cut out from the material and processed using an NC grinding machine or the like, which requires a lot of processing time, lacks mass productivity, and increases costs. Further, it is difficult to position the inner electrode and the outer electrode to arrange them concentrically, and adjustment takes a long time. Moreover, since the inner electrode p and the outer electrode q are covered with a magnetic shield m, the volume of the vacuum housing increases accordingly, making the entire device larger and requiring more time to vacuum. Analysis becomes time-consuming. Furthermore, since the space between the inner and outer electrodes, which serves as a path for charged particles to pass through, has a structure that is open on the input and output slits i and j sides, the effect of shielding external magnetic fields is still insufficient. There are some problems.

This invention eliminates these conventional inconveniences and
It is an object of the present invention to provide a device that can be manufactured simply and at low cost, that allows easy positioning and adjustment of inner and outer electrodes, and that the entire device has a compact shape.

(c) Means for solving the problem In order to achieve the above-mentioned purpose, the energy analyzer of the present invention has an inner electrode and an outer electrode made of plate material molded into a hemispherical shape, which are arranged concentrically. A flange portion is formed on the outer peripheral edge of the inner electrode, and a through hole is provided in the flange portion of the inner electrode for inputting and outputting charged particles, while both flanges are fixed to each other with an input slit, an output slit, and an insulating spacer in between. .

(d) Embodiment FIG. 1 is a longitudinal sectional view of an electrostatic hemispherical energy analyzer according to an embodiment of the present invention. The electrostatic hemispherical energy analyzer 1 of this embodiment includes a hemispherical inner electrode 2 and an outer electrode 4. Both electrodes 2 and 4 are made of μ metal, permalloy, Co-
It is formed by drawing, pressing, underwater discharge molding, etc. using plate material of high magnetic permeability material for magnetic shielding such as Netic.
are arranged concentrically around the center.

Further, the inner electrode 2 and the outer electrode 4 have flange portions 6 and 8 formed on their respective outer peripheral edges. The outer peripheral edge of each flange portion 6, 8 is folded back to form an axis alignment adjustment portion 10, 12, and the flange portion 6 of the inner electrode 2 is provided with through holes 14, 14 for entering and exiting charged particles. It is provided. The diameter of each of the through holes 14, 14 is set so as not to interfere with the entry and exit of charged particles. Furthermore, the flange portions 6 and 8 of the inner electrode 2 and the outer electrode 4 are insulated from the entrance slit 16 and insulating spacers 18 and 20 on the charged particle entrance side, and between the exit slit 22 and the charged particle exit side. They are fixed to each other with bolts 24 and nuts 26 with spacers 18 and 20 in between. The entrance slit 16 and the exit slit 22 are set so that their charged particle passing surfaces coincide with the common axis O of the inner electrode and the outer electrode.

In addition, 30 is a sample to be analyzed, 32 is a converging lens system for guiding charged particles emitted from the sample 30 into the electric field formed between both electrodes 2 and 4, and 3
2 is a detector such as an Elctron multiplier that detects charged particles passing between the electrodes 2 and 4; 34;
is a power supply for voltage scanning applied to the inner electrode 2 and the outer electrode 4.

Therefore, in this electrostatic hemispherical energy analyzer 1, both the inner electrode 2 and the outer electrode 4 are formed by drawing or pressing a plate material, which is easier to manufacture than in the past. In addition, when assembling the inner electrode 2 and the outer electrode 4,
It is necessary to arrange them concentrically, but the position adjustment in the vertical direction in the figure for this purpose is done using insulating spacers 18 and 20.
By changing the thickness _Δt , the position adjustment in the horizontal direction in the figure can be performed so that the distance _Δl between the axis alignment adjustment parts 10 and 12 of the inner electrode 2 and the outer electrode 4 is constant along the circumferential direction. You can do each as follows. After position adjustment, both flanges 6 and 8 are fixed with bolts 24 and nuts 26. In the electrostatic hemispherical energy analyzer 1 assembled in this way, the entrance and exit ends of the space between the inner electrode 2 and the outer electrode 4, which serves as a passage for charged particles, are covered by the flange portion 6 of the inner electrode 2. This makes it even less susceptible to the effects of external magnetic fields than in the past.

(E) Effect As described above, according to the present invention, both the inner electrode and the outer electrode are formed from plate materials by drawing or pressing, so they can be manufactured at low cost.
Moreover, mass production becomes possible. Further, by adjusting the overlapping position of the flange portions formed on the inner electrode and the outer electrode and the thickness of the insulating spacer, the axes of the inner electrode and the outer electrode can be made to coincide with each other with high precision. In addition, the space between the inner electrode and the outer electrode, which is the path for charged particles to pass through, is covered by the flange part of the inner electrode at the incident and exit ends of the charged particles, so it is more susceptible to the influence of external magnetic fields than before. Excellent effects such as making it more difficult to use are exhibited.

[Brief explanation of drawings]

FIG. 1 is a longitudinal sectional view of an electrostatic hemispherical energy analyzer according to an embodiment of the present invention, FIG. 2 is an enlarged sectional view of the flanges of the inner and outer electrodes in FIG. 1, and FIG. FIG. 1 is a vertical cross-sectional view of a conventional electrostatic hemispherical energy analyzer. 1... Electrostatic hemispherical energy analyzer, 2...
...Inner electrode, 4...Outer electrode, 6...Mesh electrode.

Claims (1)

[Claims for Utility Model Registration] (1) An inner electrode and an outer electrode formed by molding plate material into a hemispherical shape are arranged concentrically, a flange is formed on the outer peripheral edge of both electrodes, and the flange of the inner electrode is arranged concentrically. 1. An electrostatic hemispherical energy analyzer characterized in that a through hole is provided in the part for entering and exiting charged particles, and both flange parts are fixed to each other with an entrance slit, an exit slit, and an insulating spacer interposed therebetween. (2) The electrostatic hemispherical energy analyzer according to claim 1, wherein both the inner electrode and the outer electrode are made of a high magnetic permeability material for magnetic shielding.