JPH044399Y2 - - Google Patents

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Publication number
JPH044399Y2
JPH044399Y2 JP1986034827U JP3482786U JPH044399Y2 JP H044399 Y2 JPH044399 Y2 JP H044399Y2 JP 1986034827 U JP1986034827 U JP 1986034827U JP 3482786 U JP3482786 U JP 3482786U JP H044399 Y2 JPH044399 Y2 JP H044399Y2
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JP
Japan
Prior art keywords
thin film
polyimide
electrode
insulating
striped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986034827U
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Japanese (ja)
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JPS62147296U (en
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Description

【考案の詳細な説明】[Detailed explanation of the idea]

産業上の利用分野 本考案は薄膜EL素子に関するものであり、更
に詳しくはストライプ電極のエツジ状部分に於け
る絶縁破壊の防止手段として、ストライプ電極の
表面に段差の殆どない有機樹脂の絶縁被膜を形成
した薄膜EL素子に関するものである。 従来の技術 マトリクス型デイスプレイパネルを形成する薄
膜EL素子7は、第2図に示すように、ガラス板
等の透光性基板1の上に、透明電極として機能す
るストライプ電極2、第1の絶縁層3、発光層
4、第2の絶縁層5、および背面電極6を順次、
積層することによつて形成されている。斯くして
得られた薄膜EL素子7を、凹板状のカバーガラ
ス8で覆い、該カバーガラス8を、前記透光性基
板1上にエポキシ樹脂や光硬化性樹脂等の接着剤
を介して固着することによつて、マトリクス型デ
イスプレイパネルが形成されている。尚、透光性
基板1とカバーガラス8とからなる外囲器10内
には、薄膜EL素子7の耐湿性を向上させるため、
シリコンオイル等の絶縁性保護流体11が封入さ
れている。ここに於いて、ストライプ電極2は、
インジウムテインオキサイド〔以下、ITOとい
う〕、In,Sn等の酸化物等からなる透明電極層と
して、また背面電極6は、Al等からなる電極層
として形成されており、発光層4は、Mn等をド
ープしたZnS等から、また、第1および第2の絶
縁層3,5はY2O3やTa2O5等から形成されてい
る〔特公昭57−47559号公報、特開昭60−11876号
公報〕。 考案が解決しようとする問題点 上記の如きマトリクス型デイスプレイパネルに
於いては、実装コストを下げるために、ストライ
プ電極、例えばITOストライプ電極の一方の端子
のみから信号電圧を印加し、他方の端子は開放状
態にしている。ITO薄膜の電気抵抗値は略2.5×
10-4Ω・cmと大きいので、ストライプ電極の長さ
が増すほど該ストライプ電極の一方の端子から印
加された信号電圧の減衰の程度が大きくなる。
ITO薄膜の電気抵抗値を下げることには限度があ
るので、ストライプ電極の電気抵抗値を小さくす
るためには、ストライプ電極の構成部材たるITO
薄膜の膜厚を厚くせざるを得ない。このような理
由によつてITO薄膜の厚みを大きくすると、第2
図に見られるように、ストライプ電極のエツジ状
部分が急勾配となり、ストライプ電極の形成後積
層された第1および第2の絶縁層3,5、ならび
に発光層4の膜厚がエツジ状部分12で薄くな
り、この結果、該部にクラツクが発生し易くな
り、ストライプ電極のエツジ状部分で絶縁破壊さ
れる危険性が増大する。 本考案の主要な目的は、在来の薄膜EL素子に
認められた上記の如き問題点を解消し得る、スト
ライプ電極のエツジ状部分の絶縁性能の向上手段
を提供することにある。 問題点を解決するための手段 斯かる目的に鑑みて本考案は、透光性基板上に
ストライプ電極を形成してなる薄膜EL素子に於
いて、有機樹脂の絶縁被膜をスピン塗布法により
前記ストライプ電極の間隙および表面と直接接す
るように形成したことを特徴とする薄膜EL素子
を要旨とするものである。 作 用 スピン塗布法によつてストライプ電極の表面
に、エツジ状部分の補強層として機能する平坦な
表面を持つた有機樹脂、例えば梯子形ポリイミド
樹脂のコーテイング層を形成する。 実施例 第1図は本考案に係る薄膜EL素子の部分縦断
面図である。尚、前記第2図と同一の薄膜EL素
子の形成部材は同一の参照番号で表示するものと
して、細部に亘る説明を省略する。 ストライプ電極2の表面に平坦な絶縁被膜を形
成する手段として、エツチバツク法、バイアスス
パツタ法が知られているが、本考案に於いては絶
縁膜の形成素材が有機樹脂であることに着目し、
スピン塗布法を採用している。更に詳細に説明す
ると、ストライプ電極2を形成した透光性基板1
の表面に、液状の有機樹脂を滴下し、遠心力によ
る展延作用を利用して該ストライプ電極2の凹部
に厚く、また凸部に薄く有機樹脂を付着させるこ
とによつて、ストライプ電極2の表面に実質上段
差のない平坦な絶縁被膜13を形成している。 本考案に使用し得る有機樹脂としては、絶縁
性、耐熱性、機械的強度〔耐圧性〕、ならびにス
トライプ電極2の表面に対する接着性等を考慮し
て、ポリイミド系樹脂を中心にして、自己接着性
を有するポリイミドシリコン系樹脂、感光性ポリ
イミド樹脂等が好適である。前記ポリイミド系樹
脂の中では、直鎖状ポリイミド〔例えばDuPont
社のPYRALIN PI−2545、PI−2555〕、または
通常のポリイミドの変形として、梯子形構造を導
入したポリイミドイソインドロキナゾリンジオン
〔以下、PIQという〕が特に推奨される。
PYRALIN、PIQとも、その前駆体であるポリア
ミド酸の重合度を調整することによつて、目的に
応じた粘度、樹脂分濃度を有するものを得ること
ができる。下記第1表にPIQおよびPYRALINの
耐熱性と絶縁破壊強さを示す。PIQは、スピン塗
布によりストライプ電極2の表面に0.6乃至4μm
の薄膜を形成し得るように組成を調整されている
が、粘度、樹脂分濃度を調整することによつて、
500Å乃至20μmの極薄絶縁被膜を形成することも
可能である。
Industrial Application Field The present invention relates to thin-film EL devices, and more specifically, as a means to prevent dielectric breakdown at the edge-like portions of striped electrodes, an organic resin insulating coating with almost no steps is applied to the surface of the striped electrodes. The present invention relates to the formed thin film EL element. 2. Prior Art A thin film EL element 7 forming a matrix type display panel is, as shown in FIG. The layer 3, the light emitting layer 4, the second insulating layer 5, and the back electrode 6 are sequentially formed.
It is formed by laminating layers. The thus obtained thin film EL element 7 is covered with a concave plate-shaped cover glass 8, and the cover glass 8 is placed on the transparent substrate 1 with an adhesive such as an epoxy resin or a photocurable resin. By fixing them together, a matrix type display panel is formed. In order to improve the moisture resistance of the thin film EL element 7, inside the envelope 10 consisting of the transparent substrate 1 and the cover glass 8,
An insulating protective fluid 11 such as silicone oil is sealed. Here, the stripe electrode 2 is
The transparent electrode layer is formed of indium tein oxide (hereinafter referred to as ITO), an oxide of In, Sn, etc., the back electrode 6 is formed as an electrode layer of Al, etc., and the light emitting layer 4 is formed of Mn, etc. The first and second insulating layers 3 and 5 are made of Y2O3 , Ta2O5 , etc. [Japanese Patent Publication No. 57-47559, Japanese Unexamined Patent Application Publication No. 1986-60] Publication No. 11876]. Problems to be Solved by the Invention In the matrix type display panel as described above, in order to reduce mounting costs, a signal voltage is applied only from one terminal of the striped electrode, for example, an ITO striped electrode, and the signal voltage is applied from the other terminal. It is left open. The electrical resistance value of ITO thin film is approximately 2.5×
Since it is as large as 10 -4 Ω·cm, the longer the stripe electrode becomes, the greater the degree of attenuation of the signal voltage applied from one terminal of the stripe electrode becomes.
There is a limit to reducing the electrical resistance of an ITO thin film, so in order to reduce the electrical resistance of a striped electrode, it is necessary to
It is necessary to increase the thickness of the thin film. For these reasons, if the thickness of the ITO thin film is increased, the second
As seen in the figure, the edge-shaped portion of the striped electrode has a steep slope, and the film thickness of the first and second insulating layers 3 and 5 and the light-emitting layer 4 that are laminated after the formation of the striped electrode is reduced to the edge-shaped portion 12. As a result, cracks are likely to occur in this area, increasing the risk of dielectric breakdown at the edge-like portions of the striped electrode. The main purpose of the present invention is to provide a means for improving the insulation performance of the edge-shaped portions of striped electrodes, which can solve the above-mentioned problems observed in conventional thin film EL devices. Means for Solving the Problems In view of this objective, the present invention provides a thin-film EL device in which striped electrodes are formed on a transparent substrate, in which an insulating film of organic resin is applied to the striped electrodes by spin coating. The gist of this invention is a thin film EL element characterized by being formed so as to be in direct contact with the gap and surface of the electrode. Operation A coating layer of an organic resin, such as a ladder-shaped polyimide resin, having a flat surface, which functions as a reinforcing layer for the edge-shaped portion, is formed on the surface of the striped electrode by a spin coating method. Embodiment FIG. 1 is a partial vertical cross-sectional view of a thin film EL device according to the present invention. Incidentally, the members forming the thin film EL element that are the same as those in FIG. 2 are indicated by the same reference numerals, and a detailed explanation will be omitted. The etchback method and the bias sputtering method are known as means for forming a flat insulating film on the surface of the striped electrode 2, but in the present invention, we focused on the fact that the material for forming the insulating film is an organic resin. ,
A spin coating method is used. To explain in more detail, a transparent substrate 1 on which striped electrodes 2 are formed
By dropping liquid organic resin onto the surface of the stripe electrode 2 and using the spreading action of centrifugal force to apply the organic resin thickly to the concave portions of the stripe electrode 2 and thinly to the convex portions of the stripe electrode 2, the stripe electrode 2 is formed. A flat insulating coating 13 with substantially no steps is formed on the surface. Organic resins that can be used in this invention include self-adhesive resins, mainly polyimide resins, taking into consideration insulation, heat resistance, mechanical strength [pressure resistance], and adhesiveness to the surface of the striped electrode 2. Preferred are polyimide silicone resins, photosensitive polyimide resins, and the like. Among the polyimide resins, linear polyimides [e.g. DuPont
Particularly recommended are PYRALIN PI-2545, PI-2555] manufactured by Co., Ltd., or polyimide isoindoquinazolinedione (hereinafter referred to as PIQ) in which a ladder structure is introduced as a modification of the usual polyimide.
Both PYRALIN and PIQ can be obtained with a viscosity and resin concentration that suit the purpose by adjusting the degree of polymerization of their precursor polyamic acid. Table 1 below shows the heat resistance and dielectric breakdown strength of PIQ and PYRALIN. PIQ is coated on the surface of stripe electrode 2 with a thickness of 0.6 to 4 μm by spin coating.
The composition has been adjusted to form a thin film, but by adjusting the viscosity and resin concentration,
It is also possible to form an extremely thin insulating film of 500 Å to 20 μm.

【表】【table】

【表】 以下、本考案の実施態様を具体例の記述に基づ
いて説明する。ガラス製の透光性基板1の上にス
トライプ電極2として厚さ約1800ÅのITO膜を積
層した後、スピン塗布法によつて該ストライプ電
極上に梯子状ポリイミド樹脂〔PIQ〕を塗布し、
更に、約300℃でベーキングしてPIQの薄膜より
なる絶縁被膜13を形成した。この状態で、透光
性基板1の上面を基準にして絶縁被膜13の膜厚
を計測した結果、平均厚み2100Åが記録され、ま
た該PIQが、ストライプ電極2,2間の凹部上面
からストライプ電極2の上面に亘つて、実質上段
差の認められない平坦面を形成している事実が確
認された。以後、常法に従つて透光性基板1の周
縁部に固着している余分の梯子状ポリイミド樹脂
を剥離し、第1の絶縁層3、発光層4、第2の絶
縁層5、および背面電極6を順次、積層すること
によつて薄膜EL素子7を作成した。 以上、本考案の実施態様をストライプ電極2の
形成素材としてITOを、また絶縁被膜13の形成
素材として梯子状ポリイミド樹脂を使用した例示
に基いて説明したが、本考案の権利範囲は斯かる
実施例の記載によつて限定的に解釈されるべきも
のではなく、数多くの応用例を包含することがで
きる。例えば、前記絶縁被膜13の膜厚を調整す
ることによつて、第1の絶縁層3の配設を省略す
ることも可能である。 考案の効果 以上の説明から理解されるように、スピン塗布
法によつてストライプ電極の表面に、エツジ状部
分の補強層として機能する有機樹脂製の絶縁被膜
を形成することができる。該絶縁被膜は、実質上
段差の認められない平坦な表面特性を具備してい
るから、在来の薄膜EL素子に於いて問題となつ
ていたエツジ状部分の段差に起因する絶縁層や発
光層の膜厚減少を未然に回避し、ストライプ電極
の段差に起因する絶縁破壊の防止に顕著な効果を
発揮する。
[Table] Hereinafter, embodiments of the present invention will be described based on descriptions of specific examples. After laminating an ITO film with a thickness of about 1800 Å as a stripe electrode 2 on a transparent substrate 1 made of glass, a ladder-shaped polyimide resin [PIQ] was applied onto the stripe electrode by spin coating,
Further, baking was performed at approximately 300° C. to form an insulating coating 13 made of a thin film of PIQ. In this state, the film thickness of the insulating coating 13 was measured using the upper surface of the transparent substrate 1 as a reference, and as a result, an average thickness of 2100 Å was recorded, and the PIQ was measured from the upper surface of the recess between the striped electrodes 2 to the striped electrode. It was confirmed that a flat surface with virtually no difference in level was formed over the upper surface of the sample. Thereafter, the excess ladder-shaped polyimide resin adhered to the periphery of the light-transmitting substrate 1 is peeled off according to a conventional method, and the first insulating layer 3, the light-emitting layer 4, the second insulating layer 5, and the back surface are removed. A thin film EL element 7 was created by sequentially stacking electrodes 6. The embodiments of the present invention have been described above based on examples in which ITO is used as the material for forming the striped electrode 2 and ladder-shaped polyimide resin is used as the material for forming the insulating coating 13. The description of the examples should not be construed as limiting, and can include numerous application examples. For example, by adjusting the thickness of the insulating film 13, it is also possible to omit the provision of the first insulating layer 3. Effects of the Idea As can be understood from the above explanation, an insulating film made of organic resin that functions as a reinforcing layer for the edge-shaped portion can be formed on the surface of the striped electrode by the spin coating method. Since the insulating film has a flat surface with virtually no differences in level, it is possible to eliminate the problem in the insulating layer and light-emitting layer due to the level difference in the edge-like portions, which has been a problem in conventional thin film EL devices. It is extremely effective in preventing dielectric breakdown caused by the step difference in the stripe electrode.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案に係る薄膜EL素子の部分縦断
面図であり、第2図は在来の薄膜EL素子の部分
縦断面図である。 1……透光性基板、2……ストライプ電極〔透
明電極〕、3……第1の絶縁層、4……発光層、
5……第2の絶縁層、6……背面電極、7……薄
膜EL素子、13……有機樹脂製の絶縁被膜。
FIG. 1 is a partial vertical sectional view of a thin film EL device according to the present invention, and FIG. 2 is a partial vertical sectional view of a conventional thin film EL device. DESCRIPTION OF SYMBOLS 1...Transparent substrate, 2...Stripe electrode [transparent electrode], 3...First insulating layer, 4...Light emitting layer,
5... Second insulating layer, 6... Back electrode, 7... Thin film EL element, 13... Insulating coating made of organic resin.

Claims (1)

【実用新案登録請求の範囲】 (1) 透光性基板上にストライプ電極を形成してな
る薄膜EL素子に於いて、有機樹脂の絶縁被膜
をスピン塗布法により前記ストライプ電極の間
隙および表面と直接接するように形成したこと
を特徴とする薄膜EL素子。 (2) 前記有機樹脂が、ポリイミド系樹脂、ポリイ
ミドシリコン系樹脂および感光性ポリイミド樹
脂の群から選ばれた絶縁性樹脂である、実用新
案登録請求の範囲第1項に記載の薄膜EL素子。 (3) 前記ポリイミド系樹脂が直鎖状ポリイミドま
たは梯子状ポリイミドである実用新案登録請求
の範囲第2項に記載の薄膜EL素子。
[Claims for Utility Model Registration] (1) In a thin film EL device in which striped electrodes are formed on a transparent substrate, an insulating coating of organic resin is applied directly to the gaps and surfaces of the striped electrodes by spin coating. A thin film EL element characterized by being formed so that they are in contact with each other. (2) The thin film EL device according to claim 1, wherein the organic resin is an insulating resin selected from the group of polyimide resins, polyimide silicone resins, and photosensitive polyimide resins. (3) The thin film EL device according to claim 2, wherein the polyimide resin is a linear polyimide or a ladder polyimide.
JP1986034827U 1986-03-11 1986-03-11 Expired JPH044399Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986034827U JPH044399Y2 (en) 1986-03-11 1986-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986034827U JPH044399Y2 (en) 1986-03-11 1986-03-11

Publications (2)

Publication Number Publication Date
JPS62147296U JPS62147296U (en) 1987-09-17
JPH044399Y2 true JPH044399Y2 (en) 1992-02-07

Family

ID=30843743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986034827U Expired JPH044399Y2 (en) 1986-03-11 1986-03-11

Country Status (1)

Country Link
JP (1) JPH044399Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0750632B2 (en) * 1988-06-10 1995-05-31 シャープ株式会社 Thin film EL device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57144583A (en) * 1981-03-03 1982-09-07 Matsushita Electric Industrial Co Ltd Double-layer electrode type x-y matrix display unit
JPS58166670U (en) * 1982-04-28 1983-11-07 伊勢電子工業株式会社 Thin film electroluminescent device
JPS62115693A (en) * 1985-11-13 1987-05-27 アルプス電気株式会社 Thin film el display device

Also Published As

Publication number Publication date
JPS62147296U (en) 1987-09-17

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