JPH044400A - Gas supply unit with bomb - Google Patents

Abstract

PURPOSE:To prevent the mixing of air into each gas supply line at the time of the replacement of a bomb by providing a gas channel between the end of a gas supply line and the valve inlet of a bomb, and introducing purging gas into the channel when the bomb is replaced. CONSTITUTION:Gas channels 17 are provided between ends of gas supply lines 3a, 3b and valve inlets 16 of bombs respectively, and the bomb side apertures of the lines 3a, 3b are connected to the channels 17 respectively. When a bomb, for instance bomb 1a, is replaced, a switching valve 8a in a purge line 7a and a switching valve 18a in an auxiliary purge line 19a are opened to blow N2 gas for purge toward the valve inlet 16 through the gas channel 17 and the end of gas supply line 3a. Thereby air flowing in from the bomb side aperture of the gas supply line and the bomb side aperture of the purge line can be stopped to replace the bomb safely.

Description

[Detailed description of the invention] (Industrial application field) The present invention relates to a gas supply device with a cylinder.

(Prior art) Fig. 3 shows a conventional semiconductor material gas supply device attached to a cylinder, where la and Ib are cylinders for semiconductor material gas such as silane and boss fin, respectively, 2 is a gas supply port, and 3a and 3b are the cylinders for semiconductor material gas such as silane and boss fin, respectively. Gas supply lines 4a, 4b and 5a, 5b communicating between the gas supply port 2 and the gas supply ports 2a and 2b are the gas supply lines 3a, respectively.

3b is a high-pressure on-off valve on the cylinder side and a low-pressure on-off valve on the gas supply port side, 6 is an N2 gas source for purging, and 7a.

7b are the N2 gas source 6 and the gas supply line 3a, respectively.
, a purge line communicating between the cylinder connection parts of 3b, 8
a and 8b are on-off valves inserted in the purge lines 7a and 7b, respectively, 9 is a ventro, and 10a and 10b are cylinder sides of the high-pressure on-off valves 4a and 4b in this ventro 9 and the gas supply lines 3a and 3b, respectively. A hent line, 11a, communicating between the openings.

Reference numeral 11b denotes an on-off valve inserted in the hentline 10a, 10b, respectively. Reference numeral 12 denotes an ejector 113 for applying a vacuum to the hentro 9. A high-pressure N2 gas is supplied to the ejector 12 to produce an ejector action. The gas source, 14, is its supply line.

In such a conventional gas supply device for a cylinder, for example, when the gas in the cylinder 1a is exhausted, this is detected and the gas supply line is automatically switched from 3a to 3b to use 1b for the cylinder. The cylinder 1a is replaced with a new cylinder while the cylinder 1b is being used.

When replacing the cylinder 1a, in order to prevent the harmful or dangerous gas remaining in the gas supply line 3a from leaking to the outside, the high pressure and low pressure on-off valves 4a in the gas supply line 3a, before disconnecting the cylinder 1a, 5a, and open/close valve 8a in purge line 7a and hent line 10a.
The on-off valve 11a inside is opened to discharge the purge N2 gas from the purge N2 gas source 6 through the purge line 7a, the gas supply line 3a on the bong side and the vent line 10a, and at this time, the ejector 12 The vacuum evacuation action facilitates the evacuation, so that harmful or dangerous gases from within the gas supply line 3a on the cylinder side are completely discharged into a vent gas processing mechanism (not shown).

(Problem to be Solved by the Invention) However, in the conventional gas supply device attached to a cylinder as described above, there are some communication passages between the valve port of the cylinder and the cylinder connection part of the gas supply line. When replacing the cylinder and connecting the new cylinder to the gas supply line, air enters the communication passage, and when gas supply starts, this air is inconveniently sent into the gas supply line. Such air is an impurity for, for example, semiconductor material gas, and even a very small amount of it is unacceptable.

The present invention seeks to eliminate the above-mentioned drawbacks.

(Means for Solving the Problems) The gas supply device for a gas cylinder of the present invention communicates between a gas supply port and a gas cylinder through a gas supply line, and when replacing the gas cylinder, the gas in the gas supply line is replaced by a gas for purging. In the gas supply device with a cylinder, a passage is provided in a mouth portion of the gas cylinder connected to the gas supply line to reach a valve port of the cylinder from an end of the gas supply line, and the cylinder is connected to the passage. It is characterized in that it is constructed so that the above-mentioned purge gas is introduced at the time of replacement.

(Function) In the gas supply device with a cylinder of the present invention, when the supply line is removed from the bomber metal part for cylinder replacement, outside air does not enter into the communication passage between the cylinder valve port and the cylinder connection part of the gas supply line. As shown, purge N2 gas is blown out from the connection with the Pompero gold prior to gas supply.

(Example) The present invention will be explained in detail below with reference to the drawings.

In the present invention, as shown in FIG. 1, on-off valves 18a and 18 are connected between the purge N2 gas source 6 and the cylinder-side openings of the high-pressure on-off valves 4a and 4b in the gas supply ports 3a and 3b, respectively.
-4= As shown in FIG. 2, the purge lines 7a and 7t+ are connected to the cylinder I? , Ib through a cap nut 15 to form a gas passage 17 that surrounds the outer periphery of the ends of the purge lines 7a and 7b and reaches the valve port 16 of the cylinder,
The cylinder side openings of the gas supply lines 3a and 3b are connected to this gas passage 17, and when replacing the cylinder 1a, for example, the on-off valve 8a of the purge line 7a is connected.
Then, the on-off valve 18a of the auxiliary purge line 19a is opened to blow out the purging N2 gas toward the valve port 16 to the cylinder via the gas passage 17 and the end of the gas supply line 3a on the cylinder side.

Since the gas supply device for the cylinder of the present invention has the above-described configuration, the purge N2 gas blown toward the valve port 16 of the cylinder when replacing the cylinder closes the cylinder side opening of the gas supply line and the side opening of the purge line to the cylinder. This prevents air from entering through the mouth, allowing you to safely exchange bongs.

(Effects of the Invention) As described above, according to the gas supply device for a bong of the present invention, it is possible to prevent air from entering each line when replacing a bong.

[Brief explanation of drawings]

Fig. 1 is a configuration diagram of a gas supply device with a cylinder according to the present invention;
The figure is a sectional view of a cylinder connection fitting, and FIG. 3 is a configuration diagram of a conventional gas supply device with a cylinder. la, lb...Cylinder, 2...Gas supply port, 3a,
3b, 14... Gas supply line, 4a. 4b...High pressure on/off valve, 5a, 5b...Low pressure on/off valve,
6,13...N2 gas source, 7a, 7b...barge line, 8a, 8b, lla, llb...opening/closing valve, 9.
...Ventoro, 10a, 10b...Hentline, 1
2...Ejector-115...Bukuro nut, 16...
Valve port, 17... Gas passage, 18a, 18b... Open/close valve, 19a, 19b... Auxiliary purge line. 71

Claims (1)

[Claims] (1) In a gas supply device with a cylinder, in which the gas supply port and the cylinder are connected by a gas supply line, and when the cylinder is replaced, the gas in the gas supply line is exhausted via the vent line using purge gas. In the mouth part of the gas cylinder connected to the supply line,
A gas supply device with a cylinder, characterized in that a passage is provided from an end of the gas supply line to a valve port of the cylinder, and the purge gas is introduced into the passage when replacing the cylinder.