JPH0444360U - - Google Patents

Info

Publication number
JPH0444360U
JPH0444360U JP8643790U JP8643790U JPH0444360U JP H0444360 U JPH0444360 U JP H0444360U JP 8643790 U JP8643790 U JP 8643790U JP 8643790 U JP8643790 U JP 8643790U JP H0444360 U JPH0444360 U JP H0444360U
Authority
JP
Japan
Prior art keywords
crucible
lid
cell
film formation
mouth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8643790U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8643790U priority Critical patent/JPH0444360U/ja
Publication of JPH0444360U publication Critical patent/JPH0444360U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す成膜用Ｋセル
の縦断面図である。 １……るつぼ、２……るつぼ１の蓋、３……ヒ
ータ線、４……サポータ、５……ヒータ用絶縁が
いし、６……金属の蓋、７……るつぼ１および蓋
６のおさえ、８……熱電対、９……熱電対絶縁が
いし。

Claims (1)

    【実用新案登録請求の範囲】
  1. 成膜用Ｋセルにおいて、るつぼの口に設けられ
    た蓋の上に設けられた金属製の蓋と、前記るつぼ
    および前記両蓋を取巻くように前記るつぼの口付
    近に密に巻かれたヒータ線を含み、前記るつぼを
    加熱するとともに、前記金属製の蓋を加熱するこ
    とにより前記るつぼの蓋の温度を上げるヒータと
    を有することを特徴とする成膜用Ｋセル。
JP8643790U 1990-08-20 1990-08-20 Pending JPH0444360U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8643790U JPH0444360U (ja) 1990-08-20 1990-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8643790U JPH0444360U (ja) 1990-08-20 1990-08-20

Publications (1)

Publication Number Publication Date
JPH0444360U true JPH0444360U (ja) 1992-04-15

Family

ID=31818103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8643790U Pending JPH0444360U (ja) 1990-08-20 1990-08-20

Country Status (1)

Country Link
JP (1) JPH0444360U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008261056A (ja) * 2003-08-04 2008-10-30 Lg Display Co Ltd 有機電界発光層の蒸着源
JP2013012543A (ja) * 2011-06-28 2013-01-17 Fujitsu Ltd 分子線結晶成長装置及び半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008261056A (ja) * 2003-08-04 2008-10-30 Lg Display Co Ltd 有機電界発光層の蒸着源
JP2013012543A (ja) * 2011-06-28 2013-01-17 Fujitsu Ltd 分子線結晶成長装置及び半導体装置の製造方法

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