JPH0444496U - - Google Patents

Info

Publication number
JPH0444496U
JPH0444496U JP8624490U JP8624490U JPH0444496U JP H0444496 U JPH0444496 U JP H0444496U JP 8624490 U JP8624490 U JP 8624490U JP 8624490 U JP8624490 U JP 8624490U JP H0444496 U JPH0444496 U JP H0444496U
Authority
JP
Japan
Prior art keywords
blade
vacuum pump
gas molecules
rotary blade
fixed blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8624490U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8624490U priority Critical patent/JPH0444496U/ja
Publication of JPH0444496U publication Critical patent/JPH0444496U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図および第２図は本考案による真空ポンプ
の第１実施例を示す図であり、第１図はロータ翼
とステータ翼の断面図、第２図はステータ翼の平
面図、第３図ないし第７図はそれぞれ本考案の第
２ないし第６実施例を示すロータ翼とステータ翼
の断面図、第８図ないし第１０図は従来の真空ポ
ンプを示す図であり、第８図はその全体断面図、
第９図はロータ翼とステータ翼の断面図、第１０
図はステータ翼の平面図である。 ５……ロータ翼（回転翼）、６……ステータ翼
（固定翼）、５ａ，５ｂ，５ｃ……渦巻溝、６ａ
，６ｃ，６ｄ……渦巻溝。 1 and 2 are diagrams showing a first embodiment of the vacuum pump according to the present invention, in which FIG. 1 is a sectional view of the rotor blade and stator blade, FIG. 2 is a plan view of the stator blade, and FIG. 7 to 7 are cross-sectional views of rotor blades and stator blades respectively showing second to sixth embodiments of the present invention, and FIGS. 8 to 10 are views showing conventional vacuum pumps, and FIG. Overall sectional view,
Figure 9 is a sectional view of the rotor blade and stator blade, Figure 10
The figure is a plan view of the stator blade. 5... Rotor blade (rotor blade), 6... Stator blade (fixed blade), 5a, 5b, 5c... Spiral groove, 6a
, 6c, 6d... spiral groove.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 回転翼と固定翼との相対回転により気体分子を
加速して目的空間を真空にする真空ポンプにおい
て、前記回転翼と固定翼との互に対向するいずれ
か一方の、あるいは両方の面に、前記回転翼の回
転により半径外方への気体分子の流れを作るよう
な渦巻溝を形成することを特徴とする真空ポンプ
。 In a vacuum pump that accelerates gas molecules and evacuates a target space by the relative rotation of a rotary blade and a fixed blade, the above-mentioned is applied to one or both of the mutually opposing surfaces of the rotary blade and the fixed blade. A vacuum pump characterized by forming a spiral groove that creates a flow of gas molecules radially outward by the rotation of a rotor blade.
JP8624490U 1990-08-16 1990-08-16 Pending JPH0444496U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8624490U JPH0444496U (en) 1990-08-16 1990-08-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8624490U JPH0444496U (en) 1990-08-16 1990-08-16

Publications (1)

Publication Number Publication Date
JPH0444496U true JPH0444496U (en) 1992-04-15

Family

ID=31817815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8624490U Pending JPH0444496U (en) 1990-08-16 1990-08-16

Country Status (1)

Country Link
JP (1) JPH0444496U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006509951A (en) * 2002-12-17 2006-03-23 ザ ビーオーシー グループ ピーエルシー Vacuum pump discharge device
EP2863063A3 (en) * 2013-10-15 2015-08-26 Pfeiffer Vacuum Gmbh Vacuum pump
JP2016142156A (en) * 2015-01-30 2016-08-08 エドワーズ株式会社 Vacuum pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006509951A (en) * 2002-12-17 2006-03-23 ザ ビーオーシー グループ ピーエルシー Vacuum pump discharge device
EP2863063A3 (en) * 2013-10-15 2015-08-26 Pfeiffer Vacuum Gmbh Vacuum pump
JP2016142156A (en) * 2015-01-30 2016-08-08 エドワーズ株式会社 Vacuum pump

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