JPH0444639A - Device of manufacturing perpendicular magnetic recording medium - Google Patents

Abstract

PURPOSE:To form a uniform magnetic film by increasing the temperature of a base film from the side of a face to be formed by a ringular heater when forming a magnetic film for medium by sputtering. CONSTITUTION:A long base film 2 to be fed out from a feed-out roll 1 is intermittently traveled through a guide roll 3, and a perpendicular single layer medium is formed on the film by a sputtering method. In this device, a ring 5 equipped with the header is installed between the film and a sputtering target 4, and the outline part of a film forming part is heated by radiating heat from the ring. Then, by uniformly controlling the temperature of the entire film forming part when forming a magnetic substance film, the perpendicular single layer medium is obtained with satisfactory reproducing output distribution.

Description

DETAILED DESCRIPTION OF THE INVENTION A.8 Object of the Invention [Field of Industrial Application] The present invention relates to a manufacturing apparatus for manufacturing a perpendicular magnetic recording medium by a sputtering method.

[Conventional technology]

In recent years, with the demand for higher density magnetic recording, research has been actively conducted on so-called continuous magnetic thin film media in which the magnetic layer is formed only of magnetic materials. Since the magnetic layer of magnetic thin film media is continuous, it goes without saying that recording is possible in the longitudinal direction, but it is also possible to use a perpendicular recording method, which is expected to dramatically improve recording density. Development of applications to various product forms such as various magnetic tapes and disk-shaped magnetic recording media is underway.

As a magnetic layer of a magnetic recording medium suitable for this perpendicular magnetic recording system, a CoCr film or the like, which has a characteristic of having a good S/N ratio of reproduced signals, is used and is being studied.

Perpendicular single-layer media, consisting of a single magnetic layer, can be used for recording and reproducing with a conventional ring head and have a large storage capacity, so they are being considered for use in still video, floppy disks, etc. .

Conventionally, as shown in FIG. 2, an apparatus for manufacturing this type of magnetic disk has a long base film 2 fed out from a feed roll 1, which is intermittently run through a guide roll 3, and vertically sputtered by a sputtering method. Apparatus has been used to form layered media on films.

In this case, an appropriate tension is applied between the two guide rolls 3 in the film running direction, the movement of the base film 2 is stopped only during film formation, and the base film 2 is intermittently wound onto the winding roll 7. In this way, a perpendicular magnetic recording medium without curls or wrinkles after film formation is produced.

[Problem to be solved by the invention]

However, the perpendicular magnetic recording medium manufactured by the conventional apparatus shown in FIG. 2 has a problem in that the reproduction output decreases toward the outside of the medium, as shown in FIG. 3. The present inventor investigated this problem and found that the distance from the center of the medium using CoCr as the magnetic layer and the perpendicular coercive force (hereinafter referred to as Hc
(denoted as v). As shown in FIG. 4, it can be seen that the Hcv of CoCr becomes smaller toward the outside of the medium. Furthermore, as shown in FIG. 2, if a temperature gradient occurs in the stainless steel substrate holder 6 that controls the temperature of the base film 2 during film formation, H within the film will increase.
It was found that this had an effect on the cv distribution.

However, an object of the present invention is to create a perpendicular magnetic recording medium that can manufacture a magnetic film while controlling the temperature of the base film without a temperature gradient within the film formation region and homogenize the characteristics of the perpendicular magnetic recording medium formed within the base film. Our goal is to provide manufacturing equipment.

1. Structure of the invention [Means for solving the problem] The present invention provides a manufacturing apparatus for manufacturing a perpendicular magnetic recording medium on a long polymer film by a sputtering method.
An apparatus for manufacturing a perpendicular magnetic recording medium is provided, characterized in that a ring equipped with a heater is installed between the film and a sputtering target.

[Effect]

When forming a magnetic film for a perpendicular magnetic recording medium by sputtering, the temperature of the base film to be formed is set to the formation surface II.
By raising the temperature from i using a ring-shaped heater, the in-plane temperature gradient of the base film is reduced and a homogeneous magnetic film is formed.

〔Example〕

Hereinafter, the present invention will be explained in detail using the drawings.

FIG. 1 is a conceptual external perspective view showing a manufacturing apparatus according to an embodiment of the present invention.

FIG. 5 shows an explanatory diagram of a ring 5 equipped with a heater used in a manufacturing apparatus according to an embodiment of the present invention.

As shown in FIG. 5, this ring 5 has a heater 8 built into it so that the temperature of the ring body can be controlled, and as shown in FIG.
It is installed between the target 4 and the base film 2.

(Comparative Example) A single-layer perpendicular magnetic recording medium was manufactured using a CoCr magnetic material using a manufacturing apparatus in which the ring 5 was not energized and the temperature of the ring was not controlled.

(Example 1) A single-layer perpendicular magnetic recording medium was manufactured using a CoCr magnetic material using a manufacturing apparatus in which the temperature of the ring 5 was controlled at 100° C. under the same conditions as in the comparative example.

(Example 2) A single-layer perpendicular magnetic recording medium was manufactured using a CoCr magnetic material using a manufacturing apparatus in which the temperature of the ring 5 was controlled at 150° C. under the same conditions as in the comparative example.

When the electromagnetic conversion characteristics of the perpendicular magnetic recording media prepared in Example 1 and Example 2 were evaluated, as shown in FIG. As a result, a good reproduction output distribution is obtained.

According to the results of the above-mentioned examples, a good result can be achieved by heating the outer part of the film forming part by heat radiation from the ring and uniformly controlling the temperature of the entire film-shaped acid part during the formation of the magnetic film. It can be seen that a vertical single layer medium with a distribution of reproduction output is obtained. Further, although the CoCr magnetic film is shown in this embodiment, similar effects can be obtained with other magnetic materials.

C1 Effects of the Invention [Effects of the Invention] As described above, the present invention can provide an apparatus for manufacturing a perpendicular magnetic recording medium that provides uniform characteristics.

[Brief explanation of drawings]

FIG. 1 is an external perspective view schematically showing a manufacturing apparatus according to an embodiment of the present invention. FIG. 2 is an external perspective view schematically showing a conventional manufacturing apparatus. FIG. 3 is a diagram showing the relationship between the distance from the center of a medium produced by a conventional manufacturing apparatus and the reproduction output of the medium at that location. FIG. 4 is a diagram showing the relationship between the distance from the center of the medium manufactured by the conventional manufacturing apparatus shown in FIG. 3 and the Hev value of the medium in that portion. FIG. 5 is an explanatory diagram illustrating an outline of a ring equipped with a heater incorporated in a manufacturing apparatus according to an embodiment of the present invention. FIG. 6 is a diagram showing the relationship between the distance from the center of the medium and the reproduction output of the medium at that position in Comparative Example, Example, and Example 2. 1... Delivery roll, 2... Base film, 3
...Guitro~le, 4...Sputtering target, 5...Ring, 6...Subst holder, 7...Take-up roll. 8... Heater.

Claims (1)

[Claims] 1. A manufacturing device for producing perpendicular magnetic recording media by sputtering on a long polymer film, characterized in that a ring equipped with a heater is installed between the film and the sputtering target. Recording media manufacturing equipment.