JPH0445646U - - Google Patents

Info

Publication number
JPH0445646U
JPH0445646U JP8580690U JP8580690U JPH0445646U JP H0445646 U JPH0445646 U JP H0445646U JP 8580690 U JP8580690 U JP 8580690U JP 8580690 U JP8580690 U JP 8580690U JP H0445646 U JPH0445646 U JP H0445646U
Authority
JP
Japan
Prior art keywords
stage
traveling device
magnetic levitation
levitation traveling
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8580690U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8580690U priority Critical patent/JPH0445646U/ja
Publication of JPH0445646U publication Critical patent/JPH0445646U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Machine Tool Units (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の一実施例の全体の構成を示
す要部破断側面図である。第２図は第１図に示し
たリフト機構およびワーク取付ステージの要部破
断側面図である。第３図は第２図示した板ばねの
平面図である。 図において、１はレール、２は磁気浮上スライ
ダ、３は浮上用電磁石、５はリニアモータ、６は
リフト機構、８は永久磁石、９は可動部、１０は
コイル、１３はワーク取付ステージ、１５はエア
サクシヨンホール、１６はワーク吸着溝、１７は
ワークを示す。 FIG. 1 is a fragmentary side view showing the overall structure of an embodiment of this invention. FIG. 2 is a cutaway side view of essential parts of the lift mechanism and workpiece mounting stage shown in FIG. 1. FIG. 3 is a plan view of the leaf spring shown in FIG. In the figure, 1 is a rail, 2 is a magnetically levitated slider, 3 is a levitation electromagnet, 5 is a linear motor, 6 is a lift mechanism, 8 is a permanent magnet, 9 is a movable part, 10 is a coil, 13 is a workpiece mounting stage, 15 16 is an air suction hole, 16 is a work suction groove, and 17 is a workpiece.

Claims (1)

【実用新案登録請求の範囲】 レール上をステージが磁気浮上しながら走行す
る磁気浮上走行装置であつて、 前記ステージの上に設けられ、空気吸入口と、
前記空気吸入口に連通し、その上に載置されたワ
ークを吸着するための吸着溝が形成されたワーク
取付ステージを備えたことを特徴とする、磁気浮
上走行装置。[Scope of Claim for Utility Model Registration] A magnetic levitation traveling device in which a stage travels on a rail while being magnetically levitated, comprising: an air intake port provided on the stage;
A magnetic levitation traveling device comprising a workpiece mounting stage communicating with the air suction port and having a suction groove formed thereon for suctioning a workpiece placed thereon.
JP8580690U 1990-08-13 1990-08-13 Pending JPH0445646U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8580690U JPH0445646U (en) 1990-08-13 1990-08-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8580690U JPH0445646U (en) 1990-08-13 1990-08-13

Publications (1)

Publication Number Publication Date
JPH0445646U true JPH0445646U (en) 1992-04-17

Family

ID=31817182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8580690U Pending JPH0445646U (en) 1990-08-13 1990-08-13

Country Status (1)

Country Link
JP (1) JPH0445646U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01312072A (en) * 1988-06-13 1989-12-15 Asahi Glass Co Ltd Vacuum treatment equipment
JPH02180535A (en) * 1988-12-30 1990-07-13 Yamaha Corp Work table

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01312072A (en) * 1988-06-13 1989-12-15 Asahi Glass Co Ltd Vacuum treatment equipment
JPH02180535A (en) * 1988-12-30 1990-07-13 Yamaha Corp Work table

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