JPH0445906U - - Google Patents
Info
- Publication number
- JPH0445906U JPH0445906U JP8696390U JP8696390U JPH0445906U JP H0445906 U JPH0445906 U JP H0445906U JP 8696390 U JP8696390 U JP 8696390U JP 8696390 U JP8696390 U JP 8696390U JP H0445906 U JPH0445906 U JP H0445906U
- Authority
- JP
- Japan
- Prior art keywords
- lens
- interferometers
- light source
- curvature
- interference fringes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 5
- 230000010287 polarization Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Description
第１図は本考案の横ずらし干渉計の一実施例を
示す構成図であり、三角光路共通パス干渉光学系
としたもの、第２図は本考案の横ずらし干渉計の
他の実施例を示す構成図であり、サバール偏光干
渉光学系としたもの、第３図は従来例である。
Ｒ……光源、Ｌ１……第１のシリンドリカルレ
ンズ（集光レンズ）、ＢＳ……ビームスプリツタ
、Ｍ１……第１ミラー、Ｍ２……第２ミラー、Ｌ
２……第２のシリンドリカルレンズ（フーリエ変
換レンズ）、Ｄ……検出器、Ｐ１……偏光子、Ｓ
……サバール板、Ｐ２……検光子。
Fig. 1 is a configuration diagram showing one embodiment of the transversely shifting interferometer of the present invention, which has a triangular optical path common path interference optical system, and Fig. 2 shows another embodiment of the transversely displacing interferometer of the present invention. 3 is a configuration diagram showing a Savart polarization interference optical system, and FIG. 3 is a conventional example. R...Light source, L1 ...First cylindrical lens (condensing lens), BS...Beam splitter, M1 ...First mirror, M2 ...Second mirror, L
2 ... Second cylindrical lens (Fourier transform lens), D... Detector, P 1 ... Polarizer, S
...Savart board, P2 ...analyzer.
Claims (1)
等の横ずらし干渉計において用いられ、干渉縞を
検出位置に形成させるフーリエ変換レンズの代り
として、 光源の光軸に対して垂直な平面上に設置され、
光源からの光を検出器へ焦光するための第１のレ
ンズと、 この第１のレンズの出力側の光路であると共に
前記光源の光軸に対して垂直な平面上に設置され
、横ずらし干渉縞を焦点位置に形成するための第
２のレンズを備え、 前記第１のレンズおよび第２のレンズは、一方
向にのみ曲率を持つと共に、この第１のレンズお
よび第２のレンズの曲率を持つ方向を互いに直交
するように設置したことを特徴とする横ずらし干
渉計。[Claim for Utility Model Registration] It is used in side-shifting interferometers such as triangular optical path common path interferometers and Savart polarization interferometers, and is used in place of the Fourier transform lens that forms interference fringes at the detection position, relative to the optical axis of the light source. placed on a vertical plane,
a first lens for focusing light from a light source onto a detector; a second lens for forming interference fringes at a focal position, the first lens and the second lens having curvature only in one direction, and the curvature of the first lens and the second lens A lateral displacement interferometer characterized by being installed so that the directions of the two sides are perpendicular to each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8696390U JPH0445906U (en) | 1990-08-20 | 1990-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8696390U JPH0445906U (en) | 1990-08-20 | 1990-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0445906U true JPH0445906U (en) | 1992-04-20 |
Family
ID=31818929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8696390U Pending JPH0445906U (en) | 1990-08-20 | 1990-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0445906U (en) |
-
1990
- 1990-08-20 JP JP8696390U patent/JPH0445906U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100700444B1 (en) | Independent alignment sensor with self-reference mark | |
| KR0158681B1 (en) | Apparatus for projecting a mask pattern on a substrate | |
| JPH04233218A (en) | Device designed for projecting mask pattern on substrate | |
| JPH03272406A (en) | Alignment method and device | |
| US7355719B2 (en) | Interferometer for measuring perpendicular translations | |
| US9651358B2 (en) | Grazing-incidence interferometer with dual-side measurement capability using a common image plane | |
| JPH07120213A (en) | Tracking laser interferometer | |
| JPH0445906U (en) | ||
| US6525824B1 (en) | Dual beam optical interferometer | |
| JPH0416177Y2 (en) | ||
| JPS62265613A (en) | Two-dimensional deflecting device for light beam | |
| JPH0540011A (en) | Gauge interferometer | |
| JPH0391709A (en) | Scanning differential interference microscope | |
| JPH05203408A (en) | Phase difference detector | |
| JP2891715B2 (en) | Fringe scanning interferometer | |
| US6816265B1 (en) | Passive tilt correction on two axes | |
| JPH01250804A (en) | Interferometer | |
| US4023906A (en) | Compact three-beam interferometer | |
| JPH0355045Y2 (en) | ||
| JPH0712545A (en) | Atomic force microscope detector with differential heterodyne interferometer using optical fiber array | |
| JPH1195174A (en) | Imaging optics | |
| RU1779913C (en) | Interferometer for measuring motions of object | |
| JPH0549922B2 (en) | ||
| JPH03113110U (en) | ||
| JPH09257579A (en) | Interferometer |