JPH0445977B2 - - Google Patents

Info

Publication number
JPH0445977B2
JPH0445977B2 JP56146929A JP14692981A JPH0445977B2 JP H0445977 B2 JPH0445977 B2 JP H0445977B2 JP 56146929 A JP56146929 A JP 56146929A JP 14692981 A JP14692981 A JP 14692981A JP H0445977 B2 JPH0445977 B2 JP H0445977B2
Authority
JP
Japan
Prior art keywords
carbon
reactive gas
gas
supplying
fibrous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56146929A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5849609A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP56146929A priority Critical patent/JPS5849609A/ja
Publication of JPS5849609A publication Critical patent/JPS5849609A/ja
Priority to JP1135037A priority patent/JPH03158468A/ja
Publication of JPH0445977B2 publication Critical patent/JPH0445977B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
JP56146929A 1981-09-17 1981-09-17 炭素およびその作製方法 Granted JPS5849609A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP56146929A JPS5849609A (ja) 1981-09-17 1981-09-17 炭素およびその作製方法
JP1135037A JPH03158468A (ja) 1981-09-17 1989-05-29 炭素を主成分とする被膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56146929A JPS5849609A (ja) 1981-09-17 1981-09-17 炭素およびその作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP61285536A Division JPS62171910A (ja) 1986-11-29 1986-11-29 炭素

Publications (2)

Publication Number Publication Date
JPS5849609A JPS5849609A (ja) 1983-03-23
JPH0445977B2 true JPH0445977B2 (th) 1992-07-28

Family

ID=15418760

Family Applications (2)

Application Number Title Priority Date Filing Date
JP56146929A Granted JPS5849609A (ja) 1981-09-17 1981-09-17 炭素およびその作製方法
JP1135037A Pending JPH03158468A (ja) 1981-09-17 1989-05-29 炭素を主成分とする被膜

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP1135037A Pending JPH03158468A (ja) 1981-09-17 1989-05-29 炭素を主成分とする被膜

Country Status (1)

Country Link
JP (2) JPS5849609A (th)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5643343A (en) * 1993-11-23 1997-07-01 Selifanov; Oleg Vladimirovich Abrasive material for precision surface treatment and a method for the manufacturing thereof
US5711773A (en) * 1994-11-17 1998-01-27 Plasmoteg Engineering Center Abrasive material for precision surface treatment and a method for the manufacturing thereof
DE69624139T2 (de) * 1995-12-01 2003-06-12 E.I. Du Pont De Nemours And Co., Wilmington Kapazitativ gekuppelter rf-reaktor für die beschichtung mit diamantartigem kohlenstoff
AU710700B2 (en) * 1995-12-01 1999-09-30 E.I. Du Pont De Nemours And Company Diamond-like-carbon coated aramid fibers having improved mechanical properties
DE102004033090A1 (de) * 2004-07-08 2006-02-09 Klaus Dr. Rennebeck Element zur Wärmeableitung
JP5282203B2 (ja) * 2008-07-22 2013-09-04 帝人株式会社 機能性繊維及び機能性繊維製品
CN110820320A (zh) * 2019-11-06 2020-02-21 西安奕斯伟硅片技术有限公司 保温毡及其制备方法、拉晶炉

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SOLID STATE COMMUN *

Also Published As

Publication number Publication date
JPH03158468A (ja) 1991-07-08
JPS5849609A (ja) 1983-03-23

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