JPH0446364Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a device for supporting electron beam deflection electrodes in an electron beam drawing device or the like while maintaining a predetermined interval.

[Technical background of the invention and its problems]

As shown in FIG. 1, the electron beam deflection electrode has a pair of electrodes 1 and 2 arranged parallel to each other, and the electron beam 3 is passed between them. In FIG. 1, x is The distance between the electrodes, d is the electrode length, and l is the deflection distance. The amount of deflection y in this device is expressed by the following formula, where V _p is the acceleration voltage of the electron beam 3 and E is the electrostatic field strength between the electrodes 1 and 2.

y=Ed(l+d/2)/2V _p (1) That is, by controlling the electrostatic field strength E, the deflection amount y can be controlled. The electrostatic field strength E is expressed as follows, where V _p is the potential difference between electrodes 1 and 2.
It is expressed by the following formula (2).

E=V _p /x...(2) As is clear from equation (2), if the distance x between the electrodes is not constant, the deflection amount y and the control voltage (electrode 1,
The linearity with the potential difference V _p ) between the two voltages becomes poor. Therefore,
Not only the absolute value but also the parallelism of the distance x between the electrodes must be maintained more accurately. By the way, in the past, the electrodes 1 and 2 were inserted into an integrated hollow cylinder (not shown) and fixed with external screws, which made it difficult to measure and manage the parallelism between the electrodes 1 and 2. The reproducibility of assembly and adjustment was poor, and the parallel accuracy was limited to about 1×10 ^-2 rad.

[Purpose of invention]

An object of the present invention is to provide a support device for electron beam deflection electrodes that allows a pair of deflection electrodes to be installed while maintaining a predetermined spacing and higher parallelism precision, and that allows accurate assembly and adjustment. be.

[Summary of the idea]

In order to achieve this object, the present invention positions and fixes a pair of deflection electrodes inside a holder that is vertically divided to form part of a pair of cylinders. The opposing surfaces of the deflection electrodes and the opposing surfaces of the holder are formed parallel to each other, and the pair of holders are butted against each other directly or through a spacer, so that the deflection electrodes each fixed to these are spaced at a predetermined distance. They are arranged parallel to each other and facing each other.

〔Example〕

Figures 2 to 4 below show an embodiment of the present invention.
The diagram will be explained. In Figure 2, 11,1
Reference numeral 2 denotes a pair of deflection electrodes (hereinafter referred to as electrodes), the back sides of which are integrally fixed to holders 15 and 16 with an adhesive or the like via electrically insulating cylinders 13 and 14. As shown in FIG. 3, the holders 15 and 16 are formed by vertically dividing a hollow cylindrical body into two halves, and as shown more clearly in FIG. ), the electrode 1 is placed inside the halved hollow cylindrical holder 15.
1.

The electrode 11 and the holder 15 (the same goes for the electrode 12 and the holder 16), which are fixed integrally as described above, are parallel to the lower surface A at a predetermined angle, for example, as shown in FIG. V block 20 having V-shaped surfaces B1 and B2 formed in the direction perpendicular to the plane of the paper
The upper surface of the holder 15 and the electrode 11 in the same figure, that is, the holder 16 and the electrode 1 that form a pair, are placed on top as shown in the figure, with the outer circumferential surface of the holder 15 as a reference.
The opposing surfaces 15a and 11a are made parallel to each other, and the dimensions ε thereof are processed to a predetermined value. At this time, the facing surface 15a of the holder 15 is processed so as to be located on the central axis of the outer peripheral surface of the holder 15.

The holders 15 and 16 formed as described above are
As shown in FIGS. 2 and 3, it is inserted into the outer cylinder 17, and the opposing surfaces 15a,
16a are butted against each other, and the holders 15 and 16 are fixed to the outer cylinder 17 using screws (not shown) or the like. In addition, in Figure 2, 1
8 and 19 are power supply terminals.

In the apparatus shown in FIG. 2, a total of four pairs of electrodes 21, 22, and 23, which are similar to the electrode pair 10 configured as described above, are inserted into an outer cylinder 17, and their lower ends are connected to a stepped portion 17a.
The upper end side is pressed by a holding plate (not shown), etc., and the middle electrode pair 21,
22 has a phase shifted by 90 degrees with respect to the upper and lower electrode pair 10 and 23.

Since this device is configured so that the electrodes 11 and 12 are supported by the holders 15 and 16 as described above, as shown in FIG. If the distance ε and parallelism between the opposing surface 15a and the opposing surface 11a of the electrode 11 are precisely processed, then the opposing surfaces 15a, 1 of the pair of holders 15, 16 are simply processed.
It is only necessary to butt and set the electrodes 6a, and it becomes possible to keep the spacing and parallelism of the opposing surfaces 11a and 12a of the electrodes 11 and 12 within a predetermined accuracy without performing any measurement or adjustment work.

Then, the opposing surfaces 15a and 11 shown in FIG.
Processing a is performed by attaching the electrode 1 to the holder 15 as described above.
After fixing 1, it can be done on the same machine, so
The spacing ε and parallelism can be made with very high precision. In fact, when manufactured using this method, the parallelism of the opposing surfaces 11a and 12a of the electrodes 11 and 12 can be adjusted to 1 relatively easily.
We were able to keep it below ×10 ^-3 rad.

In the above-mentioned embodiment, the holders 15 and 16 are shaped like hollow cylindrical bodies vertically divided into halves, but these may be cylindrical bodies divided vertically, and the holders 15 and 16 are Opposing surface 15 of 15 and 16
It goes without saying that various changes can be made, such as interposing a spacer between a and 16a.

[Effect of idea]

As described above, according to the present invention, the distance between the pair of deflection electrodes, especially the parallelism of the opposing surfaces, can be made highly accurate, and there is no need to measure and adjust the parallelism between the electrodes during assembly. Not only does assembly become extremely easy, it also prevents contamination of the electrode section with oil and dirt, resulting in improved quality.

[Brief explanation of the drawing]

Fig. 1 is a principle diagram of an electron beam deflection device, Fig. 2 is a longitudinal sectional view showing an embodiment of the present invention, and Fig. 3 is a diagram showing the principle of an electron beam deflection device.
The top view of the figure and FIG. 4 are diagrams for explaining an example of how to process the electrode and the holder. 1, 2, 11, 12... Deflection electrode, 10, 2
1, 22, 23... Electrode pair, 13, 14... Electrical insulating cylinder, 15, 16... Holder, 17... Outer cylinder,
18, 19... terminal, 20... V block.

Claims (1)

[Claims for Utility Model Registration] 1. A support device for deflection electrodes that are arranged opposite to each other in pairs, and a holder configured to vertically divide the deflection electrodes to form part of a pair of cylinders. Position and fix each inside of
An electron beam deflection electrode support, characterized in that the facing surfaces of the respective deflection electrodes and the facing surfaces of the holders are formed parallel to each other, and the paired holders are brought into contact with each other directly or through a spacer. Device. 2. The electronic device according to claim 1, wherein the outer surface of the holder is formed into a cylindrical surface, and the holder is inserted into an outer cylinder having a hole that matches the cylindrical surface. Deflection electrode support device for wire. 3. The electron beam deflection electrode support device according to claim 2, wherein a plurality of sets of holders are inserted into one outer cylinder to constitute one unit.