JPH0446545U - - Google Patents

Info

Publication number
JPH0446545U
JPH0446545U JP8903490U JP8903490U JPH0446545U JP H0446545 U JPH0446545 U JP H0446545U JP 8903490 U JP8903490 U JP 8903490U JP 8903490 U JP8903490 U JP 8903490U JP H0446545 U JPH0446545 U JP H0446545U
Authority
JP
Japan
Prior art keywords
storage cassette
board
board storage
mounting table
transfer arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8903490U
Other languages
Japanese (ja)
Other versions
JP2505476Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8903490U priority Critical patent/JP2505476Y2/en
Publication of JPH0446545U publication Critical patent/JPH0446545U/ja
Application granted granted Critical
Publication of JP2505476Y2 publication Critical patent/JP2505476Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図および第２図は本考案の一実施例に係り
、第１図は基板収納カセツト載置台の外観斜視図
、第２図はその作用説明図である。第３図は従来
例の問題点の説明に供する図である。 １０……基板収納カセツト、１３……カセツト
連結部材、２０……基板載置台、２３……ピン（
突出体）、３０……搬送アーム。 1 and 2 relate to an embodiment of the present invention, in which FIG. 1 is an external perspective view of a substrate storage cassette mounting table, and FIG. 2 is an explanatory view of its operation. FIG. 3 is a diagram for explaining the problems of the conventional example. 10... Board storage cassette, 13... Cassette connection member, 20... Board mounting stand, 23... Pin (
projecting body), 30...transport arm.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 基板を多段に収納した基板収納カセツトから搬
送アームを用いて基板を取り出すために、前記基
板収納カセツトが載置される基板収納カセツト載
置台に、前記基板収納カセツト内の最下段の基板
を、最下段基板下面とカセツト連結部材上面の間
隙を前記搬送アームの厚み以上に確保するための
突出体を配設したことを特徴とする基板収納カセ
ツト載置台。 In order to take out a board from a board storage cassette in which boards are stored in multiple stages using a transfer arm, the lowest board in the board storage cassette is placed on the board storage cassette mounting table on which the board storage cassette is placed. A substrate storage cassette mounting table characterized in that a protrusion is provided to ensure a gap between the lower surface of the lower substrate and the upper surface of the cassette connecting member greater than the thickness of the transfer arm.
JP8903490U 1990-08-24 1990-08-24 Substrate storage cassette mounting table Expired - Lifetime JP2505476Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8903490U JP2505476Y2 (en) 1990-08-24 1990-08-24 Substrate storage cassette mounting table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8903490U JP2505476Y2 (en) 1990-08-24 1990-08-24 Substrate storage cassette mounting table

Publications (2)

Publication Number Publication Date
JPH0446545U true JPH0446545U (en) 1992-04-21
JP2505476Y2 JP2505476Y2 (en) 1996-07-31

Family

ID=31822738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8903490U Expired - Lifetime JP2505476Y2 (en) 1990-08-24 1990-08-24 Substrate storage cassette mounting table

Country Status (1)

Country Link
JP (1) JP2505476Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003086656A (en) * 2001-09-14 2003-03-20 Disco Abrasive Syst Ltd Plate-like object carrying-in / out device, plate-like material carrying-out method and carrying-in method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003086656A (en) * 2001-09-14 2003-03-20 Disco Abrasive Syst Ltd Plate-like object carrying-in / out device, plate-like material carrying-out method and carrying-in method

Also Published As

Publication number Publication date
JP2505476Y2 (en) 1996-07-31

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