JPH0446546U - - Google Patents
Info
- Publication number
- JPH0446546U JPH0446546U JP8770290U JP8770290U JPH0446546U JP H0446546 U JPH0446546 U JP H0446546U JP 8770290 U JP8770290 U JP 8770290U JP 8770290 U JP8770290 U JP 8770290U JP H0446546 U JPH0446546 U JP H0446546U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotating shaft
- wafers
- shaft
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は、本考案の一実施例を示す回転軸の斜
視図、第２図は、回転軸の回転角度が０°の状態
を示す断面図、第３図は、回転軸の回転角度が９
０°の状態を示す断面図、第４図は、回転軸の回
転角度が１８０°の状態を示す断面図、第５図は
、回転軸の回転角度が２７０°の状態を示す断面
図、第６図は、従来のウエハキヤリアの一例を説
明するための図である。
１……回転軸、４……第一の突起、５……第二
の突起、６……第三の突起、８……ウエハキヤリ
ア、１２……第一群のウエハ、１３……第二群の
ウエハ、１４……第三群のウエハ。
FIG. 1 is a perspective view of a rotating shaft showing an embodiment of the present invention, FIG. 2 is a cross-sectional view showing a state where the rotation angle of the rotating shaft is 0°, and FIG. 9
4 is a sectional view showing a state where the rotation angle of the rotating shaft is 180°; FIG. 5 is a sectional view showing a state where the rotation angle of the rotating shaft is 270°; FIG. 6 is a diagram for explaining an example of a conventional wafer carrier. DESCRIPTION OF SYMBOLS 1...Rotation shaft, 4...First protrusion, 5...Second protrusion, 6...Third protrusion, 8...Wafer carrier, 12...First group of wafers, 13...Second Group of wafers, 14... 3rd group of wafers.
Claims (1)
アにおいて、 上記ウエハキヤリアの下部に上記ウエハの並び
方向に沿つて回転軸を回転自在に配設し、上記ウ
エハを上記回転軸でもつて下方から支持するとと
もに、 上記回転軸が回転させられたときに上記ウエハ
を上方に持ち上げる突起を上記回転軸上に複数個
形成し、 かつ上記複数の突起の突出方向を予め定めた分
類方法に従つて複数種類に分けることにより、上
記回転軸の回転角度に応じて選択されたウエハの
みが上記突起により上方に持ち上げられるように
したことを特徴とするウエハキヤリア。[Claim for Utility Model Registration] In a wafer carrier for storing and transporting wafers, a rotating shaft is rotatably disposed at the lower part of the wafer carrier along the direction in which the wafers are arranged, and the wafer is rotated as described above. A plurality of protrusions are formed on the rotating shaft to support the wafer from below with a shaft and lift the wafer upward when the rotating shaft is rotated, and the protruding direction of the plurality of protrusions is predetermined. The wafer carrier is characterized in that by dividing the wafer into a plurality of types according to a method, only wafers selected according to the rotation angle of the rotation shaft can be lifted upward by the projection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8770290U JPH0446546U (en) | 1990-08-22 | 1990-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8770290U JPH0446546U (en) | 1990-08-22 | 1990-08-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0446546U true JPH0446546U (en) | 1992-04-21 |
Family
ID=31820295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8770290U Pending JPH0446546U (en) | 1990-08-22 | 1990-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0446546U (en) |
-
1990
- 1990-08-22 JP JP8770290U patent/JPH0446546U/ja active Pending
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