JPH044752U - - Google Patents
Info
- Publication number
- JPH044752U JPH044752U JP4614690U JP4614690U JPH044752U JP H044752 U JPH044752 U JP H044752U JP 4614690 U JP4614690 U JP 4614690U JP 4614690 U JP4614690 U JP 4614690U JP H044752 U JPH044752 U JP H044752U
- Authority
- JP
- Japan
- Prior art keywords
- device sections
- sections
- markers
- defective
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000001875 compounds Chemical class 0.000 claims description 4
- 230000002950 deficient Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000007547 defect Effects 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の実施例１を示す平面図、第２
図は本考案の実施例２を示す平面図、第３図は従
来の素子の平面図である。
１，１１……化合物ＦＥＴ素子のゲート電極、
１，１２……化合物ＦＥＴ素子のドレイン電極、
３，１３……化合物ＦＥＴ素子のソース電極、４
，１４……ゲート電極１のボンデイングパツド部
、５，１５……ドレイン電極２のボンデイングパ
ツド部、６，１６……ソース電極３のボンデイン
グパツド部、７，８……不良マーカ専用パターン
、９……打刻傷。
Figure 1 is a plan view showing the first embodiment of the present invention;
The figure is a plan view showing Embodiment 2 of the present invention, and FIG. 3 is a plan view of a conventional element. 1, 11...gate electrode of compound FET element,
1, 12...Drain electrode of compound FET element,
3, 13...Source electrode of compound FET element, 4
, 14... Bonding pad portion of gate electrode 1, 5, 15... Bonding pad portion of drain electrode 2, 6, 16... Bonding pad portion of source electrode 3, 7, 8... Defect marker pattern , 9... Puncture scratches.
Claims (1)
に、不良マーカの専用パターンを形成したことを
特徴とする化合物半導体素子。 A compound semiconductor device characterized in that a dedicated pattern of defective markers is formed within the device sections of a wafer on which a large number of device sections have been formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4614690U JPH044752U (en) | 1990-04-26 | 1990-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4614690U JPH044752U (en) | 1990-04-26 | 1990-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH044752U true JPH044752U (en) | 1992-01-16 |
Family
ID=31560968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4614690U Pending JPH044752U (en) | 1990-04-26 | 1990-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044752U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53111939U (en) * | 1977-02-16 | 1978-09-06 |
-
1990
- 1990-04-26 JP JP4614690U patent/JPH044752U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53111939U (en) * | 1977-02-16 | 1978-09-06 |