JPH0447653A - transmission electron microscope - Google Patents

Abstract

PURPOSE:To allow a single unit of device to exert both analytical and super- high resolution observing functions by incorporating at least two sets of an objective lens, specimen chamber, and specimen fine motion device into this microscope according to the present invention - one is suitable for analysis while the other suitable for observation of a transmission image with super high resolution. CONSTITUTION:To perform micro-part element analysis, an electron beam 3 is shrunk to the nanometric region by the ahead mag. field of No.1 objective lens 5 strong emergized and a convergence lens 4 and cast onto the specimen surface. Signal such as X-ray generated from the specimen 8 is received by an analyzer 10. No.2 objective lens is weak energized and acts as an enlargement lens having a long focus. No.2 specomen holder 14 is taken out of No.2 specimen chamber 12. To make observation of super-high resolution image, the specimen 8 is fixed to the No.2 specimen holder 14 coupled with No.2 specimen fine motion device 13. The transmission image focused by the No.2 objective lens 11 is enlarged by an intermediate lens 15. No.1 specimen holder 9 is taken out of No.1 specimen fine motion device 7 at a standstill.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a transmission electron microscope, and in particular to a material suitable for analytical functions such as elemental analysis and ultra-high resolution transmission image observation of fine structures such as atomic arrangement. This invention relates to an object lens, a sample chamber, and a sample fine movement device.

[Conventional technology]

A conventional transmission electron microscope consists of an objective lens, a sample chamber, a sample fine movement device, and other components. Furthermore, the objective lens of an apparatus mainly used for analysis and that used for ultra-high resolution transmission image observation have essentially different shapes, and require sample fine movement devices of different methods and mechanisms. Therefore, with conventional devices, it is necessary to combine them into analysis-oriented devices that sacrifice resolution to some extent.
Or, they either sacrificed analytical capabilities and integrated the equipment into an ultra-high resolution oriented device. In order to satisfy both conditions with a single device, it is possible to prepare objective lenses, sample chambers, and sample fine movement devices for analysis and ultra-high resolution, and then exchange them as necessary. However, this work requires knowledge for replacement and fine adjustment after replacement. Furthermore, due to the exchange operation, the mirror-like structure kept in a high vacuum was exposed to the atmosphere, resulting in a significant increase in sample contamination of the measurement sample after exchange.

[Problem to be solved by the invention]

” Part 2 Conventional technology does not give consideration to both analysis in the nanometer range and ultra-high-resolution transmission image observation, and users are forced to compromise on each function or have to deal with complicated objective lenses, sample chambers, and sample micro-movements. They were either forced to replace the equipment. Further, even if the exchange operation is performed successfully, no consideration is given to the problem of sample contamination that occurs afterward, and there is a problem in that the sample contamination during observation continues for a while after the exchange.

The purpose of the present invention is to achieve both analysis in the nanometer range and observation of ultra-high-resolution transmitted images of atomic arrangements, etc., without causing problems such as replacing complex and delicate parts such as objective lenses, or increasing sample contamination due to replacement operations. The aim is to realize this.

[Means to solve the problem]

In order to achieve the above purpose, the objective lens, sample chamber, and
It was decided to incorporate two or more sets of sample fine movement devices, one suitable for analysis and one suitable for ultra-high resolution transmission image observation.

[Effect]

While the objective lens for analysis, the sample chamber, and the sample fine movement device are in operation, the current in the objective lens for ultra-high resolution transmission image observation is weakened, and the operation of the sample fine movement device for that objective lens is also canceled. Further, while the objective lens for ultra-high resolution transmission image observation is in operation, the objective lens for analysis is weakened and the operation of the sample fine movement device is canceled. In this way, while one lens is in operation, the other lenses are weakened and the sample fine movement device is deactivated, so there is no possibility of malfunction.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1-3. A transmission electron microscope] has an electron gun 2 and a converging lens 4 that converges an electron beam 3 emitted from the electron gun 2. Below the converging lens 4 is the j-th objective lens 5.
．． First sample chamber6. A first sample fine movement device 7, a first sample holder 9 supporting the sample 8, an analyzer 10 for performing elemental analysis of the sample 8, and a second objective lens 11 below. Second
Sample chamber 12, second sample fine movement device 13. Second sample holder 14, intermediate lens 15. Projection lens 16. Observation room 17,
There is a fluorescent screen 18.

FIG. 2 shows a case in which microscopic elemental analysis of sample 8 is performed in this embodiment. The electron beam 3 is reduced to a nanometer region by the converging lens 4 and the forward magnetic field of the strongly excited first objective lens 5, and is irradiated onto the sample surface. Signals such as X-rays generated from the sample 8 are received by the analyzer 10.

The second objective lens is weakly excited and acts as a long focus magnifying lens. The second sample holder 14 is extracted from the second sample chamber 12. The operation of the second sample fine movement device is stopped.

FIG. 3 shows a case where an ultra-high resolution transmission image of the atomic arrangement in a sample is observed. The sample 8 is fixed to a second sample holder 14 connected to a second sample fine movement device 13 . The transmitted image focused by the second objective lens 1 is magnified by the intermediate lens 15. The first sample holder 9 is removed from the first sample fine movement device 7 which has stopped operating. The first objective lens 5 is used to adjust the irradiation area of the sample 8 with the electron beam 3.

The proper use of the first objective lens 5 and the second objective lens 11 is as described in Part 2, but the first sample chamber 6, first sample holder 9, and first sample fine movement device 7 are It is composed of materials that generate less noise that can be detrimental to analysis. Furthermore, the first sample chamber 6 has a configuration that allows the analyzer 10 to be mounted at an optimal position.

On the other hand, the second objective lens 11- has a structure that gives top priority to image resolution, and the second sample holder 14 and second sample fine movement device 13 have a structure that gives top priority to the mechanical stability of the sample 8. ing.

〔Effect of the invention〕

According to the present invention, a single transmission electron microscope is equipped with a so-called analytical electron microscope capable of elemental analysis of extremely small parts in the nanometer range, and an ultra-high resolution electron microscope capable of observing ultrafine structures such as atomic arrangement. It can have the functions of two microscope devices. This means that the equipment purchase cost, operating cost, space required for installation, etc. can be halved, and the same results as before can be obtained.

In addition, even with conventional equipment, if you change the objective lens, sample chamber, sample fine movement device, etc., one equipment can be used for both analysis and ultra-high resolution, but the operation of changing lenses etc. It was complex, and required adjustment by a skilled engineer to fully utilize both functions, making it impossible for ordinary users to perform the operations. The present invention also has the effect of freeing the user from such complicated operations.

[Brief explanation of drawings]

FIG. 1 is a diagram showing the layerer h of a transmission electron microscope configured according to the present invention, FIG. 2 is a diagram showing the objective lens and its surrounding parts, and the layerer I of the apparatus when used for analysis. The figure shows a layout when used for ultra-high resolution observation.

Claims (1)

[Claims] 1. Consists of the electron beam emitted by the electron gun, a converging lens that converges the electron beam, a sample chamber placed below it, an objective lens for focusing the sample, and magnifying the image, and a magnifying lens system. A transmission electron microscope characterized in that a mirror body includes a plurality of objective lenses, a sample chamber, and a sample fine movement device.