JPH0447717Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to the structure of a mask storage case used in semiconductor manufacturing.

[Background of the idea]

In semiconductor manufacturing, when copying a circuit pattern onto a semiconductor substrate (hereinafter referred to as a ``wafer'') using a photomask or reticle (hereinafter collectively referred to as a ``mask''), even extremely fine foreign particles on the mask may be It is well known that this causes defects in circuit patterns and becomes a major hindrance to improving yields in semiconductor manufacturing. Therefore, in order to eliminate such obstacles, a pre-cleaned mask is stored in a mask case, and the subsequent transport to the printing exposure position is automatically carried out without manual operation, which can cause foreign matter to adhere. An automask loader configured to perform this function has already been developed. This automatic mask loader also has a function to inspect the adhesion of minute foreign matter on the mask surface, which can cause circuit pattern defects. It is structured so that it can be determined whether

However, even if the mask is clean, if the inside of the mask case is dirty or dust is generated from inside the exposure device or transport device, it may occur while the mask is being stored in the mask case or while being transported to the printing exposure position. , foreign matter may adhere. In particular, when each of a plurality of masks is stored one by one in a substantially airtight mask case, cleaning the mask case requires a great deal of cost and time.

[Purpose of invention]

In view of the above circumstances, it is an object of the present invention to provide a dustproof case for a mask for semiconductor device manufacturing that can prevent foreign matter suspected of adhering to the mask from scattering, at least while the mask is being stored.

[Summary of the idea]

In order to achieve the above object, the present invention has a self-adhesive and removable adhesive sheet pasted on at least the bottom surface of a mask case that stores a plate-shaped mask, or on the inner surface of the top lid facing the bottom surface. The technical point is that the mask is supported between the bottom surface of the cloth and the inner surface of the top lid.

〔Example〕

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view showing an embodiment of the present invention with the top lid of a dust mask case opened. Opening/closing door 3 that covers the front side of 1
It consists of a bottom surface 1a of the main body 1 and an inner surface 2 of the upper lid 2.
A removable self-adhesive adhesive sheets 4A and 4B are respectively applied to almost the entire surface of a. The main body 1 has a lower part 5a and an upper part 5b around the opening end surface 1b as shown in FIG.
A mask 6 is placed on the lower part 5a. The upper lid 2 is connected to the opening end surface 1 of the main body 1.
The main body 1 is supported by hinges 7 implanted on both sides opposite to the main body 1 so as to be openable and closable as shown by the arrow A in FIG. It is configured to cover the top of the moreover,
An opening/closing door 3 is attached to the free end side of the upper lid 2 via a hinge 8 so as to be rotatable relative to the upper lid 2 as shown by arrow B in FIG.
b, and when the opening/closing door 3 further rotates and engages with the open end surface 1b of the main body 1, the mask case is configured to be in a substantially sealed state.

FIG. 2 is a partial sectional view showing a state in which the upper lid 2 of the mask case shown in the embodiment shown in FIG. 1 is closed.
A plurality of magnets 9 are embedded at predetermined positions in the upper part 5b of the main body 1, as shown in FIG. 2, and a magnetic body 10 is embedded in the upper lid 2 at a position opposite thereto. Thereby, when the upper lid 2 engages with the upper stage portion 5b, it is attracted by magnetic force, so that it will not be opened inadvertently. A magnet 11 is also embedded in the opening end surface 1b of the main body 1, as shown in FIG. 1, and the opening/closing door 3 is configured to be attracted to the opening end surface 1b by magnetic force. Of course, the opening/closing door 3 may be biased to the closed state using a force other than magnetic force (biasing force of a spring). The height h 1 from the top surface of the adhesive sheet 4A attached to the bottom surface 1a of the main body 1 to the bottom top surface 5a of the bottom section is equal to the height _h1 of the mask 6 placed on the bottom top surface 5a of the bottom section.
The height is sufficient to insert the tip of a mask transporting arm (not shown) into the space formed between the lower surface of the lower surface and the adhesive sheet 4A, and the upper surface 5 of the lower part
The distance _h2 from a to the adhesive sheet 4B attached to the inner surface 2a of the upper lid 2 is such that the mask does not touch both the upper surface 5a of the lower part and the adhesive sheet 4B.
The size is such that the mask can be taken out and inserted by the mask carrying arm.

Since the dust mask case shown in the embodiment shown in FIG. 1 is constructed as described above, when the top cover 2 is opened together with the opening/closing door 3, the bottom surface 1a of the main body 1 and the inner surface 2a of the top cover 2 are completely exposed. Therefore, the self-adhesive adhesive sheets 4A and 4B can be cut and applied very easily in accordance with the shapes of the bottom surface 1a and inner surface 2a. By pasting the adhesive sheets 4A, 4B, the bottom surface 1a of the main body 1 and the inner surface 2a of the upper lid 2 are covered with the adhesive sheets 4A, 4B. Therefore, foreign matter adhering to the bottom surface 1a and the inner surface 2a of the upper lid is suppressed by this, and foreign matter generated after adhesion, once attached to the adhesive sheets 4A, 4B, is dispersed again and is attached to the mask 6. It will not stick to the top. Therefore, even if the cleanliness of the dust mask case itself decreases to some extent, the adhesive sheets 4A, 4
Since B continues to capture foreign matter, the clean atmosphere inside the case is maintained for a long time.

In addition, when cleaning the dust mask case, the top cover 2 can be fully opened along with the opening/closing door 3, so the adhesive sheets 4A and 4B can be peeled off appropriately and the inside of the case and the adhesive sheets 4A and 4B can be easily cleaned. It becomes possible to reapply or replace 4A and 4B extremely easily.

In addition, this adhesive sheet can be cut and cut according to the shape of the place where it is applied, without losing its adhesiveness.
Since it can be peeled off as is, it is desirable to apply it also to the ceiling wall of the mask transport path. This reduces the chances of foreign matter adhering to the mask, and prevents dust from being brought into the case with the mask when storing the mask after cleaning inspection or after use in the dust-proof mask case. I can do it.

[Effect of idea]

As described above, according to the present invention, since a self-adhesive and removable adhesive sheet is attached to the inner surface of the top lid and the bottom of the case, foreign matter inside the case that adheres to the adhesive sheet will not be scattered again. Since there is no dust, the internal atmosphere is kept clean, and even if the mask is stored for a long time, there is no foreign matter attached to it, and it can be maintained in a clean state for a long time. Furthermore, since the adhesive sheet is widely exposed when the top cover is opened, there is an advantage that not only the case itself can be cleaned, but also the adhesive sheet can be easily peeled off and cleaned or replaced.

[Brief explanation of the drawing]

Figure 1 is a perspective view showing an embodiment of the present invention;
This figure is a partial sectional view showing a part of the embodiment shown in FIG. 1 with the top cover closed. Explanation of symbols of main parts, 1...Main body, 1a...
Bottom surface, 2...Top lid, 2a...Inner surface, 3...Opening/closing door, 4A, 4B...Adhesive sheet, 5a...Lower section, 6...Mask, 7...Hinge, 9...Magnet.

Claims (1)

[Scope of utility model registration request] In a mask case that stores a plate-shaped mask in a substantially hermetically sealed manner, a self-adhesive and removable adhesive sheet is affixed to at least the bottom surface of the mask case or the inner surface of the top lid facing the bottom surface,
A dustproof case for a mask for semiconductor device manufacturing, characterized in that the mask is supported between the bottom surface and the inner surface of the top cover.