JPH0448436A - Spin drying system for disk - Google Patents

Abstract

PURPOSE:To uniformly dry a disk by preliminarily preventing a washing liquid from remaining as drops in the inner circumferential area and then rotating the disk at high speed for high speed spin drying with the inner diameter of the disk fixed with a chuck. CONSTITUTION:Even after predrying the disk D to prevent a washing liquid from remaining as drops in the inner circumferential area, the liquid remains as a thin film on the surface and inner edge of the disk D. Then, the disk D is moved from a transfer chuck 1 to a spindle 10, while an injection nozzle 6 for nitrogen is kept in some distance from the disk D. Then the spindle 10 is fast rotated to splash the remaining liquid on the disk D from the outer circumferential edge by centrifugal force that the surface of the disk and the inner edge are dried by spin drying method. Thereby, the disk can be completely dried without allowing stains or the like to appear on the disk surface.

Description

[Detailed description of the invention]

[Industrial Application Field 1] The present invention relates to a disk spin drying method for high-speed spin drying after cleaning a disk such as a magnetic disk. [Prior Art 1] In the manufacturing process of a magnetic disk, before and after forming a magnetic recording film, the surface of the magnetic recording film is cleaned to remove dust, dirt, etc. attached thereto. Here, the disk is cleaned by brush cleaning using a cleaning liquid, high frequency cleaning, etc. After cleaning the disk, the disk must be dried. For example, the disk must be dried. A number of methods have been proposed, including hot water, vapor drying, nitrogen gas spraying, and spin drying. Of these, the spin drying method can dry disks with simple equipment. , the most widely used. To perform this spin drying, the cleaned disk is chucked with a chuck member provided on the spindle.
By rotating the spindle at high speed, the cleaning liquid adhering to the disk surface is scattered from the outer peripheral edge part by the action of centrifugal force. When the disk is spin-dried, the chuck member usually chucks the inner peripheral portion of the disk.

PROBLEM TO BE SOLVED BY THE INVENTION 1 By the way, as mentioned above, when spin drying is performed with the inner peripheral part of the disk chucked, although it is hardly noticeable to the naked eye, Slight smearing occurs on the surface of the disc. The cause of this smearing is that after the disk has been cleaned, the cleaning liquid adheres not only to its surface but also to its inner edge.
Therefore, when a chuck member is brought into contact with this inner edge and the disc is rotated, liquid will remain in the contact part of this chuck member, and this liquid will continue until the disc stops rotating from a high speed state. This is due to the fact that when the speed becomes low, the dirt transfers to the already dry surface of the disk and partially stains the disk. In recent years, the recording density of magnetic disks has been dramatically improved, and as a result, if the surface of the disk is not completely uniform, it will be difficult to write or read information. There is a risk of causing problems. Therefore, if the above-mentioned run-in occurs on the surface of the disc, even if the stain is slight, it will adversely affect the quality of the disc as a product. The present invention has been made in view of the above-mentioned points, and its purpose is to dry the disk evenly and completely without causing any smearing on the surface during high-speed spin drying of the disk. The object of the present invention is to provide a spin drying method for discs. [Means for Solving the Problems] In order to achieve the above-mentioned object, the present invention chucks the outer periphery of the disk and rotates the disk before the disk is delivered to the chuck means for spin drying. The feature is that gas ejection nozzles are arranged facing toward the inner circumference, and while the disk or nozzle is rotated, gas is blown from the nozzles to remove the cleaning liquid from the inner circumference of the disk in advance. be.

[Effect]

Before chucking the inner periphery of the disk with the spin-drying chuck means, the cleaning liquid on the inner periphery of the disk is removed in advance, the inner periphery is preliminarily dried, and then the spin-drying chuck means is used to chuck the inner periphery of the disk. By making it contact with the disk and performing high-speed spin drying, it is possible to prevent the cleaning liquid from remaining between the chuck means and the inner edge of the disk, and after the disk is spin-dried, the cleaning liquid can be applied to the disk surface. There is no risk of leakage. Here, the preliminary drying performed while chucking and rotating the outer periphery of the disk is not necessarily intended to completely dry the inner periphery of the disk. All you need to do is to prevent accumulations, so even spraying gas for a short period of time can have a great effect. and,
The entire disk is dried by rotating the disk at high speed while being chucked by a spin-drying chuck means. After cleaning the disk, the cleaning process is then transferred to the drying process, and the outer periphery of the disk is usually chucked in order to be transferred to the spin drying chuck means. The disks are transferred by a transfer chuck means. Therefore, a disk rotation mechanism is attached to this chuck means for transfer, and the disk is chucked by the chuck means for transfer, and just before the transfer, gas is blown while rotating the disk, and then immediately spin drying is performed. In this way, the removal of the liquid on the inner peripheral edge and the spin drying can be performed almost continuously, and more complete and even drying can be achieved. [Example] Hereinafter, an example of the present invention will be described in detail based on the drawings. FIG. 1 shows a schematic configuration of an apparatus for pre-drying the inner peripheral edge of a disk D, and FIG. 2 shows a schematic configuration of an apparatus for high-speed spin drying. First, in FIG. 1, reference numeral 1 indicates a transfer chuck means for receiving the disk D from the cleaning process and delivering it to the drying process. It has two displaceable wooden arms 2.2,
A pair of upper and lower chuck pieces 3.3 is attached to each arm. The chucking piece 3 contacts the outer periphery of the disk D to chuck it, and each chucking piece 3 is rotatable relative to the arm 2. Therefore, with the arms 2 and 2 separated, the disk D
The disc D can be chucked by facing the discs D and displacing them in a direction toward each other. Further, 4 indicates a drive roller, and the drive roller 4 is attached to the rotating shaft 5a of the motor 5. This drive roller 4 is also capable of approaching and separating from the outer periphery of the disk D, and the chuck piece 3 of the transfer chuck means 1 holds the disk D.
When the drive roller 4 is brought into contact with the outer periphery of the disc D and rotated while the disc D is chucked, the disc D will follow this and rotate. Then,
The transfer chuck means l and the motor 5 for rotating the drive roller 4 are attached to a transfer mechanism such as a robot, and this transfer mechanism takes out the cleaned disk D from the cleaning process and puts it into the drying process. It has a configuration that allows it to be transferred. Next, the drying process is performed as shown in Figure 2. A spindle 10 is provided, on which are mounted three chuck pieces 11 forming chuck means for spin drying. By bringing the chuck piece 11 into contact with the inner periphery of the disk D, the disk D can be spin-dried at high speed by rotating the spindle 10 while the disk D is chucked. In this manner, the nitrogen gas jetting nozzle 6 is used to pre-dry the inner circumferential portion of the disk that the charac piece 11 comes into contact with before performing high-speed spin drying of the disk D by the spindle IO. This nitrogen gas jetting nozzle 6 is disposed so as to face the inner periphery of the disk D at the transfer position where the disk D is transferred from the transfer chuck means l to the chuck piece 11 of the spindle IO. The cleaning liquid adhering to the inner surface of the disk D can be removed before the disk D is transferred to the spindle 10 side. The disk D is spin-dried using the apparatus having the above-described configuration. Next, a method for performing the drying will be described. First, the disk D is cleaned, and its outer periphery is chucked by the chuck piece 3 of the transfer chuck means 1, with the cleaning liquid still attached to its surface, and the disk D is carried into the drying process. Then, the disk D is on the spindle 1
0 before being received by chuck piece 11 of
As shown in FIG. 3, the nitrogen gas jetting nozzle 6 faces the inner periphery of the disk D. As shown in FIG. Therefore, by operating the motor 5 and rotationally driving the drive roller 4, the disk D is rotated, and
Nitrogen gas is ejected from the nitrogen gas ejection nozzle e. As a result, the droplets W of the cleaning liquid that remain on the inner peripheral portion of the disk D are removed. Here, the nitrogen gas jetting nozzle 6 does not completely dry the disk D, but is only used to prevent the cleaning liquid adhering to the inner edge from becoming droplets and staying. , so that nitrogen gas is ejected for a very short period of time. Even after performing the pre-drying process to prevent droplets from staying on the inner circumference of the disk D, a thin liquid film remains on the surface and inner and outer edges of the disk D. remains. Therefore, immediately after spraying this nitrogen gas, the transfer chuck means 1 is transferred to the spindle 1.
At this time, the nitrogen gas jetting nozzle 6 is separated from the disk D. In this state, by rotating the spindle 1o at high speed, the cleaning liquid adhering to the surface of the disk D is scattered from the outer peripheral edge by the action of centrifugal force, thereby spin-drying both the front and back surfaces and the inner and outer edges. I do. Therefore, the cleaning liquid does not stay in the form of droplets between the chuck piece 11 and the inner edge of the disk D, so the spin drying described above is completed and the spindle is decelerated from the high speed rotation state. There is no risk that the liquid will flow out from the inner edge and re-stain the surface of the disk D, which has already been dried, until it is stopped. Allow it to dry. In addition, in the above-mentioned embodiment, when performing pre-drying, the configuration was shown in which the disk D was rotationally driven by the drive roller 4, but the disk D was fixed and the nitrogen gas jetting nozzle was 6 may be rotated, and the gas blown toward the disk D may be not only nitrogen gas but also clean air, for example, and this gas may be heated if necessary. good. Advantageous Effects of the Invention 1 As explained above, in the present invention, while the outer periphery of the cleaned disk is chucked and rotated. By spraying gas toward the inner periphery of the disk to prevent the cleaning liquid from staying in the form of droplets on the inner periphery, the inner diameter of the disk is chucked and rotated at high speed. Since high-speed spin drying is performed, the disk can be dried extremely smoothly, efficiently, and evenly without causing stains or the like on the surface of the disk.

[Brief explanation of drawings]

The drawings show an embodiment of the present invention, in which FIG. 1 is an explanatory diagram of an apparatus configuration for pre-drying the inner peripheral edge of a disk D, and FIG. 2 is an explanatory diagram of an apparatus configuration for performing high-speed spin drying. The explanatory diagram, FIG. 3, is an explanatory diagram of the action of pre-drying. 1: Transfer chuck means, 2: Arm, 3: Chuck piece, 4: Drive roller, 5: Motor, 6: Nitrogen gas jet nozzle, 10 Varnish spindle, 11: Chuck piece,
D: Disc.

Claims (1)

[Claims] After cleaning a disk such as a magnetic disk, the disk is transferred from a disk transfer means that chucks the outer periphery of the disk to a spin drying chuck means, and the inner periphery of the disk is chucked by the spin drying chuck means and rotated at high speed. The disk is spin-dried, and before being transferred to the spin-drying chuck means, the outer periphery of the disk is chucked, and gas jet nozzles are arranged facing toward the inner periphery of the disk. A disk spin drying method characterized in that while rotating the disk or nozzle, gas is blown from the nozzle to remove cleaning liquid from the inner periphery of the disk.