JPH0448540A - Quadrupole electromagnet device - Google Patents
Quadrupole electromagnet deviceInfo
- Publication number
- JPH0448540A JPH0448540A JP2155356A JP15535690A JPH0448540A JP H0448540 A JPH0448540 A JP H0448540A JP 2155356 A JP2155356 A JP 2155356A JP 15535690 A JP15535690 A JP 15535690A JP H0448540 A JPH0448540 A JP H0448540A
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- Prior art keywords
- magnetic field
- magnetic
- magnetic pole
- electromagnet device
- quadrupole electromagnet
- Prior art date
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Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明は、例えば荷電粒子ビームの輸送路などに設け
られ、荷電粒子ビームの収束や発散を行う四極電磁石装
置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a quadrupole electromagnetic device that is installed, for example, in a charged particle beam transport path and converges or diverges the charged particle beam.
［従来の技術］
第７図は従来の荷電粒子ビーム装置用の四極電磁石装置
の一例を示す断面構成図である。[Prior Art] FIG. 7 is a cross-sectional configuration diagram showing an example of a conventional quadrupole electromagnet device for a charged particle beam device.
図において、符号（１）は円環状のヨーク、（２）はそ
れぞれヨーク（１）の内周面上に設けられ、かつ２本の
直交する直線上に２個ずつが該２直線の交点を挟んで互
いに対向するように配置されている４個の磁極部、（３
）は各磁極部（２）に設けられているコイルであり、こ
のコイル（３）により、互いに対向する２個の＆ｉｌ！
極部（２）の先端部がＮ極に、残りの２個の磁極部（２
）の先端部が８％になるように各磁極部（２）が磁化さ
れている。In the figure, symbol (1) is an annular yoke, symbol (2) is provided on the inner circumferential surface of the yoke (1), and two of each are located on two orthogonal straight lines, each pointing at the intersection of the two straight lines. Four magnetic pole parts, (3
) is a coil provided in each magnetic pole part (2), and this coil (3) allows two &il!
The tip of the pole part (2) is the N pole, and the remaining two magnetic pole parts (2
) Each magnetic pole part (2) is magnetized so that the tip of the magnetic pole part (2) becomes 8%.
次に、第８図は例えば“ＰｒｏｃｅｅｄｉｎＦｌｓ
ｏｆ ｔｈｅ９ｔｈ ＩＮＴＥＲＮＡＴＩＯＮＡＬ
Ｃ０ＮＦＥＲＥＮＣＥ ＯＮ Ｍ＾（：ＮＥＴ
ＴＥＣＨＮＯＬＯ（：Ｙ”「プロシーデインゲス・オブ
・ザ・ナインス・インターナショナル・コンフェレンス
・オン・マグネット・テクノロジーＪ （Ｚｕｒｉｅｈ
Ｓｅｐｔｅｍｂｅｒ９−１３．１９８５）１１４〜１
１７ページに示された従来の四極ｔＷｉ石装置の磁極部
（２ンの先端部の拡大図である。Next, FIG. 8 shows, for example, “ProceedinFls
of the9th INTERNATIONAL
C0NFERENCE ON M^(:NET
TECHNOLO(:Y”Proceedings of the Ninth International Conference on Magnet Technology
September9-13.1985) 114-1
This is an enlarged view of the tip of the magnetic pole part (2 inches) of the conventional quadrupole tWi stone device shown on page 17.
この図のように、磁極部（２）の先端部は全体的には双
曲線形状となっているが、その一部が双曲線から外れた
形状となっており、この部分はシム（２ａ）と呼ばれて
いる。As shown in this figure, the tip of the magnetic pole part (2) has a hyperbolic shape as a whole, but a part of it deviates from the hyperbola, and this part is called a shim (2a). It is.
上記のように構成された従来の四極電磁石装置において
は、第７図の破線の範囲内を荷電粒子ビームが輸送され
る。このとき、各磁極の間には、図中矢印の磁力線に示
すような磁界が発生しており、これにより荷電粒子ビー
ムが集束・発散される。In the conventional quadrupole electromagnet device configured as described above, a charged particle beam is transported within the range indicated by the broken line in FIG. At this time, a magnetic field is generated between each magnetic pole as indicated by lines of magnetic force indicated by arrows in the figure, and the charged particle beam is thereby focused and diverged.
このような荷電粒子ビームに対する集束・発散のレンズ
作用を持たせるため、各磁極間の磁界の磁場強度は、中
心点ＯでＯになり、かつこの中心点Ｏからの距離に比例
した大きさになるように設計されている６例えば、第８
図のＸ軸上では、磁場強度Ｂ、＝ｋＸ（ｋ：比例定数）
となっている。In order to provide such a focusing/diverging lens effect to the charged particle beam, the magnetic field strength of the magnetic field between each magnetic pole is O at the center point O, and the magnitude is proportional to the distance from the center point O. For example, the 8th
On the X-axis of the figure, magnetic field strength B, = kX (k: constant of proportionality)
It becomes.
第９図はこのようなＸ軸上の磁場分布を示す中心点Ｏか
らの距離と磁場強度との関係図である。FIG. 9 is a diagram showing the relationship between the distance from the center point O and the magnetic field strength, showing such a magnetic field distribution on the X-axis.
図において、実ｌＩＡは磁極面にシム〈２ａ）を設けた
磁極部（２〉を用いた場合の磁場分布、−点鎖ＩＩＢは
シム（２ａ）を設けていない双曲線形状の磁極面の磁極
部を用いた場合の磁場分布である。この図のように、シ
ム（２ａ）を設けることにより、磁場分布が補正され、
磁場勾配が一定となる領域、即ち良磁場領域が広くなっ
ている。In the figure, the actual IIA is the magnetic field distribution when using the magnetic pole part (2) with a shim (2a) provided on the magnetic pole surface, and the -dot chain IIB is the magnetic field distribution of a hyperbolic-shaped magnetic pole face without the shim (2a). This is the magnetic field distribution when using .As shown in this figure, by providing the shim (2a), the magnetic field distribution is corrected,
The region where the magnetic field gradient is constant, that is, the good magnetic field region is widened.
［発明が解決しようとする課題］
上記のように構成された従来の四極電磁石装置において
は、双曲線状の磁極面にシム（２ａ）を設けることによ
り良磁場領域を広げているので、磁極部（２）の形状を
決定するために計算機を使用した大掛かりな磁場解析を
必要とするという問題点があった。また、磁場分布は磁
極部（２）の工作精度に依存しており、工作誤差による
磁場分布の誤差を補正することができないという問題点
もあった。さらに、磁場強度が高くなると磁気飽和して
磁場分布が変化するので、励磁の程度により艮磁場領域
が変化するが、このような磁場分布の変化を補正できな
いという問題点もあった。[Problems to be Solved by the Invention] In the conventional quadrupole electromagnet device configured as described above, the good magnetic field area is expanded by providing a shim (2a) on the hyperbolic magnetic pole surface. 2) There was a problem in that a large-scale magnetic field analysis using a computer was required to determine the shape. Furthermore, the magnetic field distribution depends on the machining accuracy of the magnetic pole part (2), and there is also the problem that errors in the magnetic field distribution due to machining errors cannot be corrected. Furthermore, as the magnetic field strength increases, magnetic saturation occurs and the magnetic field distribution changes, so the magnetic field region changes depending on the degree of excitation, but there is also the problem that such changes in the magnetic field distribution cannot be corrected.
この発明は、上記のような問題点を解決することを課題
としてなされたものであり、工作誤差や励磁程度による
磁場分布の変化を補正することができ、また磁極部の形
状を容易に決定できる四極電磁石装置を得ることを目的
とする。This invention was made with the aim of solving the above-mentioned problems, and it is possible to correct changes in the magnetic field distribution due to machining errors and the degree of excitation, and it is also possible to easily determine the shape of the magnetic pole part. The purpose is to obtain a quadrupole electromagnet device.
［課題を解決するための手段］
請求項（１）に係る発明の四極電磁石装置は、磁極部の
先端部近傍に穴を設けるとともに、磁気的特性がａｔ掻
部と興なる磁場補正部材をその穴に挿入したものである
。[Means for Solving the Problem] The quadrupole electromagnet device of the invention according to claim (1) is provided with a hole in the vicinity of the tip of the magnetic pole part, and a magnetic field correction member whose magnetic properties are similar to the scratch part. It is inserted into a hole.
請求項（２）に係る発明の四極を磁石装！は、磁極部の
先端部に、磁場補正用のシムコイルを取り付けたもので
ある。The quadrupole of the invention according to claim (2) is equipped with a magnet! In this example, a shim coil for magnetic field correction is attached to the tip of the magnetic pole part.
請求項（３）に係る発明の四極電磁石装置は、磁場を補
正するための磁場調整片を、隣合う磁極部間に位置調整
可能に設けたものである。In the quadrupole electromagnet device of the invention according to claim (3), a magnetic field adjusting piece for correcting the magnetic field is provided between adjacent magnetic pole parts so that the position thereof can be adjusted.
［作用〕
請求項（１）に係る発明においては、磁場補正部材を交
換したり磁場補正部材の向きを変えたりすることにより
、磁場分布を特徴する
請求項（２）に係る発明においては、シムコイルに流す
電流を調整してシムコイルに生じる磁場を調整すること
により、磁場分布を特徴する請求項（３）に係る発明に
おいては、磁場調整片の位置を調整することにより、磁
場分布を補正する。[Operation] In the invention according to claim (1), the magnetic field distribution is characterized by replacing the magnetic field correction member or changing the direction of the magnetic field correction member.In the invention according to claim (2), the shim coil In the invention according to claim (3), in which the magnetic field distribution is characterized by adjusting the magnetic field generated in the shim coil by adjusting the current flowing through the shim coil, the magnetic field distribution is corrected by adjusting the position of the magnetic field adjusting piece.
［実施例］
以下、請求項（１）に係る発明（以下、第１発明と略称
する。）の実施例を図について説明する。[Example] Hereinafter, an example of the invention according to claim (1) (hereinafter abbreviated as the first invention) will be described with reference to the drawings.
第１図は第１発明の第１実施例による四極電磁石装置の
要部を拡大して示す構成図であり、第７図と同−又は相
当部分には同一符号を付し、その説明を省略する。FIG. 1 is an enlarged configuration diagram showing the main parts of a quadrupole electromagnet device according to a first embodiment of the first invention, and the same or equivalent parts as in FIG. 7 are given the same reference numerals and their explanations are omitted. do.
図において、符号（２ｂ）は磁極部（２）の先端部の近
傍に２個ずつ設けられている穴、（４）は穴（２ｂ）に
挿入されている磁場補正部材であり、この磁場補正部材
（４）は、それぞれ磁性体と非磁性体とを交互に積層し
てなっており、これにより全体として磁気的に異方性と
なっている。In the figure, reference numerals (2b) are two holes provided near the tip of the magnetic pole part (2), and (4) is a magnetic field correction member inserted into the hole (2b), which corrects the magnetic field. Each member (4) is made up of alternating layers of magnetic material and non-magnetic material, thereby making the member as a whole magnetically anisotropic.
上記のように構成された四極電磁石装置においては、磁
気異方性を有する磁場補正部材（４）を穴（２ｂ）内で
回転することにより、穴（２ｂ）の部分における磁気抵
抗を変化させ、全体の磁場分布を変化させることができ
る。即ち、第１図に示すように、磁場補正部材（４）を
その各層が磁力線（５）に沿うようにセットすれば、磁
力線（５）は磁場補正部材（４）内を通過しやすく、こ
の部分の磁束密度は大きくなる。また、第１図の状態か
ら磁場補正部材（４）を９０°回転させ、磁力線（５）
が磁場補正部材（４）の各層を貫くようにすれば、磁力
線（５）は磁場補正部材（４）内を通過しにくくなり、
この部分の磁束密度が小さくなる。In the quadrupole electromagnet device configured as described above, the magnetic field correction member (4) having magnetic anisotropy is rotated within the hole (2b) to change the magnetic resistance in the hole (2b), The overall magnetic field distribution can be changed. That is, as shown in FIG. 1, if the magnetic field correction member (4) is set so that each layer of the magnetic field correction member (4) follows the lines of magnetic force (5), the lines of magnetic force (5) will easily pass through the inside of the magnetic field correction member (4). The magnetic flux density in that part increases. In addition, the magnetic field correction member (4) is rotated 90 degrees from the state shown in Fig. 1, and the lines of magnetic force (5) are
By penetrating each layer of the magnetic field correction member (4), it becomes difficult for the magnetic field lines (5) to pass through the inside of the magnetic field correction member (4),
The magnetic flux density in this part becomes small.
このように、磁場補正部材（４）の向きを変えることに
より、部分的な磁束の増減を行うことができるため、磁
極部（２）の工作誤差などによる磁場分布の補正をする
ことができ、良磁場領域を容易に広げることができる。In this way, by changing the direction of the magnetic field correction member (4), it is possible to partially increase or decrease the magnetic flux, so it is possible to correct the magnetic field distribution due to machining errors of the magnetic pole part (2), etc. Good magnetic field area can be easily expanded.
また、磁場測定を行うことにより、励磁強度に応じた磁
場補正部材（４）の最適な向きを調べておけば、励磁程
度による磁場分布の変化に対しても補正をすることがで
き、良磁場領域を容易に広げることができる。In addition, by measuring the magnetic field and finding out the optimal orientation of the magnetic field correction member (4) according to the excitation intensity, it is possible to correct for changes in the magnetic field distribution depending on the degree of excitation. You can easily expand your area.
これらにより、磁極部（２）の形状を容易に決定できる
。These allow the shape of the magnetic pole part (2) to be easily determined.
なお、上記実施例では磁場補正部材（４）として磁性体
と非磁性体とを交互に積層することにより磁気的に異方
性を持たせたものを示したが、磁気的特性として異方性
を持つ１つの材料からなるものを用いてもよく、このよ
うな部材の向きを変えたり、部材そのものを他の材料か
らなるものに交換したりすることにより、上記実施例と
同様の効果が得られる。In addition, in the above embodiment, the magnetic field correction member (4) is made to have magnetic anisotropy by alternately laminating magnetic and non-magnetic materials, but the magnetic field correction member (4) has anisotropy as a magnetic property. Alternatively, by changing the direction of such a member or replacing the member itself with one made of another material, the same effect as in the above embodiment can be obtained. It will be done.
また、磁場補正部材（４）は、磁極部（２）と磁気特性
が異なるものであれば、必ずしも磁気異方性を示すもの
でなくてもよく、磁極部（２）と磁気特性が異なる材料
からなるものや、そのような複数の材料を組み合わせた
ものを用いてもよい。In addition, the magnetic field correction member (4) does not necessarily have to exhibit magnetic anisotropy as long as it has different magnetic properties from the magnetic pole part (2), and is made of a material that has different magnetic properties from the magnetic pole part (2). or a combination of a plurality of such materials may be used.
例えば、第２図に示すように、材ＨＡからなる円柱状の
部材に断面扇形状の切欠を設け、この切欠部分に材ｉＢ
からなる部材を取り付けてなる磁場補正部材（４）を用
いてもよい、また、第２図の材料Ｂの部分をエアギャッ
プにするなどしてもよく、かつＡ、Ｂ部分の形状は図の
形状に限定されない、また、材料Ａ、Ｈのいずれか一方
が、磁極部（２）の材料と同じであってもよく、磁場補
正部材（４）全体として磁極部（２）と磁気的特性が異
なっていれば、上記実施例のような効果が得られる。For example, as shown in Fig. 2, a notch with a fan-shaped cross section is provided in a cylindrical member made of material HA, and this notch portion is filled with material iB.
You may also use a magnetic field correction member (4) which is made by attaching a member made of the above material.Also, the material B part in Fig. 2 may be made into an air gap, and the shapes of the A and B parts are as shown in the figure. It is not limited to the shape, and either one of the materials A and H may be the same as the material of the magnetic pole part (2), and the magnetic field correction member (4) as a whole has the same magnetic properties as the magnetic pole part (2). If they are different, effects similar to those of the above embodiment can be obtained.
さらに、穴（２ｂ）及び磁場補正部材（４）の形状や個
数、及び位置なども上記実施例に限定されるものではな
く、種々の変更が可能である。Furthermore, the shape, number, position, etc. of the hole (2b) and the magnetic field correction member (4) are not limited to the above embodiments, and various changes are possible.
次に、請求項（２）に係る発明（以下、第２発明と略称
する。）の実施例を図について説明する。Next, an embodiment of the invention according to claim (2) (hereinafter referred to as the second invention) will be described with reference to the drawings.
第３図は第２発明の第１実施例による四極電磁石装置の
要部を拡大して示す構成図であり、第７図と同−又は相
当部分には同一符号を付し、その説明を省略する。FIG. 3 is an enlarged configuration diagram showing the main parts of the quadrupole electromagnet device according to the first embodiment of the second invention, and the same or equivalent parts as in FIG. do.
図において、符号（６）は各磁極部（２）の先端部の両
角部にそれぞれ取り付けられているシムコイルである。In the figure, shim coils (6) are attached to both corners of the tip of each magnetic pole part (2).
上記のように精成された四極電磁石装置においては、シ
ムコイル（６）に電流を流すことにより、部分的に磁場
の増減を行うことができる。このため、磁極部（２）の
工作誤差などによる磁場分布の補正をすることができ、
磁場勾配の直線性の良い良磁場領域を容易に広げること
ができる。また、磁場測定を行うことにより、シムコイ
ル（６）に流す最適電流値を、励磁強度に応じて求めて
おけば、励磁程度による磁場分布の変化に対しても補正
をすることができる。これらにより、磁極部（２）の形
状を容易に決定できる。In the quadrupole electromagnet device refined as described above, the magnetic field can be partially increased or decreased by passing a current through the shim coil (6). Therefore, it is possible to correct the magnetic field distribution due to machining errors in the magnetic pole part (2), etc.
A good magnetic field region with good linearity of magnetic field gradient can be easily expanded. Furthermore, if the optimum current value to be passed through the shim coil (6) is determined according to the excitation intensity by measuring the magnetic field, it is possible to correct changes in the magnetic field distribution depending on the degree of excitation. These allow the shape of the magnetic pole portion (2) to be easily determined.
なお、シムコイル（６）の個数や配置は上記実施例に限
定されるものではなく１例えば第４図に示すように、シ
ムコイル（６）のターン数を増して、シムコイル（６）
を分散させても同様の効果が得られる。Note that the number and arrangement of the shim coils (6) are not limited to the above embodiments. For example, as shown in FIG.
A similar effect can be obtained by dispersing .
次に、請求項（３）に係る発明（以下、第３発明と略称
する。）の実施例を図について説明する。Next, an embodiment of the invention according to claim (3) (hereinafter abbreviated as the third invention) will be described with reference to the drawings.
第５図は第３発明の一実施例による四極電磁石装置を示
す構成図、第６図は第５図の要部を拡大して示す構成図
であり、第７図と同−又は相当部分には同一符号を付し
、その説明を省略する。FIG. 5 is a block diagram showing a quadrupole electromagnet device according to an embodiment of the third invention, and FIG. 6 is a block diagram showing an enlarged main part of FIG. are given the same reference numerals and their explanations will be omitted.
図において、符号（１１）はヨーク（１）を貫通して各
磁極部（２）間に挿入されているロッドであり、このロ
ッド（１１）は、ヨーク（１）の外周部に設けられた位
！！ＩＩ整機構（１２）によりヨーク（１）の内側への
挿入量を調整可能になっている。In the figure, the code (11) is a rod that penetrates the yoke (1) and is inserted between each magnetic pole part (2), and this rod (11) is provided on the outer circumference of the yoke (1). Rank! ! The amount of insertion into the inside of the yoke (1) can be adjusted by the II adjustment mechanism (12).
（１３）はロッド（１１）の先端部に取り付けられてい
る非磁性体製のホルダ、（１４）はホルダ（１３）に保
持されている磁性体製の磁場調整片、（１５）は各磁極
部（２）の先端部の両角部に設けられているスライド台
であり、このスライド台（１５）に沿ってホルダ（１３
）が摺動する。(13) is a non-magnetic holder attached to the tip of the rod (11), (14) is a magnetic field adjustment piece held in the holder (13), and (15) is each magnetic pole. This is a slide stand provided at both corners of the tip of the part (2), and the holder (13) is placed along this slide stand (15).
) slides.
上記のように構成された四極電磁石装置においては、磁
極部（２）間に挿入された磁場調整片（１４）が、通過
する磁力線の磁路の磁気抵抗を減らすように働く、この
ため、位置調整機構（１２）によりロッド（１１）の挿
入量を調整して、磁場調整片（１４）の位置を中心に近
付けたり遠ざけたりすることにより、第９図に示した磁
場分布の補正を行うことができる。つまり、磁場調整片
（１４）の移動は、第８図のシム（２ａ）の作用を可変
にする効果がある。In the quadrupole electromagnet device configured as described above, the magnetic field adjusting piece (14) inserted between the magnetic pole parts (2) works to reduce the magnetic resistance of the magnetic path of the passing magnetic lines of force. By adjusting the insertion amount of the rod (11) using the adjustment mechanism (12) and moving the position of the magnetic field adjustment piece (14) closer to or farther from the center, the magnetic field distribution shown in FIG. 9 is corrected. I can do it. In other words, the movement of the magnetic field adjustment piece (14) has the effect of varying the action of the shim (2a) in FIG. 8.
このように、磁場調整片（１４）の位置を調整すること
により、部分的に磁場の増減を行うことができ、磁極部
（２）の工作誤差などによる磁場分布の補正をすること
ができ、従って良磁場領域を容易に広げることができる
。また、磁場測定を行うことにより、磁場調整片（１４
）の最適位置を、励磁強度に応じて求めておけば、励磁
程度による磁場分布の変化に対しても補正をすることが
でき、これらにより磁極部（２）の形状決定が簡単にな
る。In this way, by adjusting the position of the magnetic field adjustment piece (14), it is possible to partially increase or decrease the magnetic field, and it is possible to correct the magnetic field distribution due to machining errors of the magnetic pole part (2), etc. Therefore, the good magnetic field region can be easily expanded. In addition, by performing magnetic field measurement, the magnetic field adjustment piece (14
) is found in accordance with the excitation intensity, it is possible to correct changes in the magnetic field distribution due to the degree of excitation, and thereby the shape of the magnetic pole portion (2) can be easily determined.
なお、上記実施例では磁場調整片（１４）として磁性体
製のものを示したが、例えば磁気的に異方性を持つもの
を利用するなどしてもよい。In the above embodiment, the magnetic field adjusting piece (14) is made of a magnetic material, but it is also possible to use a magnetically anisotropic material, for example.
［発明の効果］
以上説明したように、請求項（１）に係る発明の四極電
磁石装置は、磁極部の先端部近傍に穴を設けるとともに
、磁気的特性が磁極部と異なる磁場補正部材をその穴に
挿入したので、磁場補正部材を交換したり、磁場補正部
材の向きを変えたりすることにより、工作誤差や励磁程
度による磁場分布の変化を補正することができ、良磁場
領域を容易に広げることができ、また磁極部の形状を容
易に決定できるなどの効果を奏する。[Effects of the Invention] As explained above, the quadrupole electromagnet device of the invention according to claim (1) is provided with a hole near the tip of the magnetic pole part and a magnetic field correction member whose magnetic properties are different from those of the magnetic pole part. Since it is inserted into the hole, changes in the magnetic field distribution due to machining errors and excitation level can be corrected by replacing the magnetic field correction member or changing the direction of the magnetic field correction member, making it easy to expand the good magnetic field area. In addition, the shape of the magnetic pole portion can be determined easily.
また、ｉ＊請求項２）に係る発明の四極電磁石装置は、
磁極部の先端部に、磁場補正用のシムコイルを取り付け
たので、シムコイルに流す電流を調整してシムコイルに
生じる磁場を調整することにより全体の磁場分布を補正
することができ、請求項（１）に係る発明と同様の効果
を奏する。In addition, the quadrupole electromagnet device of the invention according to i*Claim 2):
Since a shim coil for magnetic field correction is attached to the tip of the magnetic pole part, the overall magnetic field distribution can be corrected by adjusting the current flowing through the shim coil and adjusting the magnetic field generated in the shim coil, as claimed in claim (1). This invention has the same effect as the invention related to.
さらに、請求項（３）に係る発明の四極を磁石装置は、
磁場を補正するための磁場！ｌｌｌｌ音片隣合う磁極部
間に位置調整可能に設けたので２磁場調整片の位置を調
整することにより磁場分布を調整る。Furthermore, the quadrupole magnet device of the invention according to claim (3) comprises:
A magnetic field to correct the magnetic field! Since the vibrating pieces are provided so that their positions can be adjusted between adjacent magnetic pole parts, the magnetic field distribution can be adjusted by adjusting the positions of the two magnetic field adjustment pieces.
第１図は第１発明の第１実施例を示す構成図、第２図は
第１発明の第２実施例を示ず構成図、第３図は第２発明
の第１実施例を示す構成図、第４図は第２発明の第２実
施例を示す構成図、第５図は第３発明の一実施例を示す
構成図、第６図は第５図の要部を拡大して示す構成図、
第７図は従来例を示す構成図、第８図は従来装置の要部
を拡大して示す構成図、第９図は第８Ｉ２！のＸ軸上の
磁場分布を示す中心点Ｏからの距離と磁場強度との関係
図である。
図において、（２）は磁極部、（２ｂ）は穴、（４）は
磁場補正部材、（６）はシムコイル、（１４）は磁場調
整片である。
なお、各図中、同一符号は同−又は相当部分を示す。FIG. 1 is a configuration diagram showing the first embodiment of the first invention, FIG. 2 is a configuration diagram not showing the second embodiment of the first invention, and FIG. 3 is a configuration diagram showing the first embodiment of the second invention. 4 is a block diagram showing a second embodiment of the second invention, FIG. 5 is a block diagram showing an embodiment of the third invention, and FIG. 6 is an enlarged view of the main part of FIG. 5. Diagram,
FIG. 7 is a block diagram showing a conventional example, FIG. 8 is a block diagram showing an enlarged main part of the conventional device, and FIG. 9 is a block diagram showing 8I2! FIG. 2 is a diagram showing the relationship between the distance from the center point O and the magnetic field strength, showing the magnetic field distribution on the X-axis of FIG. In the figure, (2) is a magnetic pole part, (2b) is a hole, (4) is a magnetic field correction member, (6) is a shim coil, and (14) is a magnetic field adjustment piece. In each figure, the same reference numerals indicate the same or corresponding parts.
Claims (3)
散を行う四極電磁石装置において、前記磁極部の先端部
近傍に穴が設けられているとともに、磁気的特性が前記
磁極部と異なっている磁場補正部材が前記穴に挿入され
ていることを特徴とする四極電磁石装置。(1) In a quadrupole electromagnet device that has four magnetic pole parts and focuses and diverges a charged particle beam, a hole is provided near the tip of the magnetic pole part, and the magnetic properties are different from those of the magnetic pole part. A quadrupole electromagnet device, characterized in that different magnetic field correction members are inserted into the holes.
散を行う四極電磁石装置において、前記磁極部の先端部
に磁場補正用のシムコイルが取り付けられていることを
特徴とする四極電磁石装置。(2) A quadrupole electromagnet device that has four magnetic pole parts and focuses and diverges a charged particle beam, characterized in that a shim coil for magnetic field correction is attached to the tip of the magnetic pole part. Device.
散を行う四極電磁石装置において、磁場を補正するため
の磁場調整片が、隣合う前記磁極部の間に位置調整可能
に設けられていることを特徴とする四極電磁石装置。(3) In a quadrupole electromagnet device that has four magnetic pole parts and focuses and diverges a charged particle beam, a magnetic field adjustment piece for correcting the magnetic field is provided between adjacent magnetic pole parts so that the position can be adjusted. A quadrupole electromagnet device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2155356A JP3068630B2 (en) | 1990-06-15 | 1990-06-15 | Quadrupole magnet device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2155356A JP3068630B2 (en) | 1990-06-15 | 1990-06-15 | Quadrupole magnet device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0448540A true JPH0448540A (en) | 1992-02-18 |
| JP3068630B2 JP3068630B2 (en) | 2000-07-24 |
Family
ID=15604119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2155356A Expired - Fee Related JP3068630B2 (en) | 1990-06-15 | 1990-06-15 | Quadrupole magnet device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3068630B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116417216A (en) * | 2021-12-31 | 2023-07-11 | 上海三环磁性材料有限公司 | A magnetic field direction correction device and method passing through different interfaces |
-
1990
- 1990-06-15 JP JP2155356A patent/JP3068630B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116417216A (en) * | 2021-12-31 | 2023-07-11 | 上海三环磁性材料有限公司 | A magnetic field direction correction device and method passing through different interfaces |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3068630B2 (en) | 2000-07-24 |
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