JPH0448620U - - Google Patents
Info
- Publication number
- JPH0448620U JPH0448620U JP9172590U JP9172590U JPH0448620U JP H0448620 U JPH0448620 U JP H0448620U JP 9172590 U JP9172590 U JP 9172590U JP 9172590 U JP9172590 U JP 9172590U JP H0448620 U JPH0448620 U JP H0448620U
- Authority
- JP
- Japan
- Prior art keywords
- rinse
- cleaning water
- unit
- water tank
- rinsing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Description
第１図は本考案に係る純水リンス装置の１例を
示す前段のリンスユニツトの縦断正面図、第２図
は第１図の−線矢視平面図、第３図〜第５図
はそのリンスユニツトの作用説明図、第６図は従
来例に係る洗浄装置の概要図、第７図は洗浄装置
の２連配置図である。
２……リンスユニツト、３……リンスチヤンバ
ー、４……基板搬送手段（基板搬送ローラ）、７
……洗浄水タンク、１０……揚水ポンプ、１１…
…回収タンク、１３……排水管、Ｗ……基板。
Fig. 1 is a longitudinal sectional front view of a front-stage rinsing unit showing an example of a deionized water rinsing device according to the present invention, Fig. 2 is a plan view taken along the - line in Fig. 1, and Figs. FIG. 6 is a schematic diagram of a conventional cleaning device, and FIG. 7 is a diagram showing the arrangement of two cleaning devices. 2...Rinse unit, 3...Rinse chamber, 4...Substrate transport means (substrate transport roller), 7
...Washing water tank, 10...Water pump, 11...
...Recovery tank, 13...Drain pipe, W...Substrate.
Claims (1)
個以上のリンスユニツトを左右に連設し、各リン
スチヤンバの内部に基板搬送手段を設け、被処理
基板を左右いずれかの方向へ搬送して基板の洗浄
処理を２回以上行うように構成し、 最後段のリンスユニツトを除き、他の前段のリ
ンスユニツトは、基板のリンス処理をなすリンス
チヤンバーの他に、後段のリンスユニツトで使用
された洗浄水を貯溜する洗浄水タンクと、洗浄水
タンク内の洗浄水をリンスチヤンバー内に汲み揚
げる揚水ポンプと、洗浄水タンク内に連通状に配
置され、リンスチヤンバー内で使用された洗浄水
を洗浄水タンク内の洗浄水と同水位で回収する回
収タンクとを具備して成り、 中段のリンスユニツトにあつては、回収タンク
内の洗浄水を前段リンスユニツトへ供給し、最前
段のリンスユニツトにあつては、回収タンク内の
洗浄水を外部へ排出するように構成し、 後段のリンスユニツトで使用された洗浄水を当
該洗浄水タンクへ給水することにより、基板の流
れの前段よりも後段では順次純度の高い洗浄水で
基板をリンス処理するように構成したカスケード
式洗浄装置において、 リンスユニツトの回収タンクを洗浄水タンクの
左内側と右内側とに選択配置可能に装着し、左内
側位置では当該リンスユニツトの右側に位置する
後段リンスユニツトより排出される洗浄水を当該
洗浄水タンクで受け、右内側位置では当該リンス
ユニツトの左側に位置する後段リンスユニツトよ
り排出される洗浄水を当該洗浄水タンクで受ける
ように構成したことを特徴とするカスケード式洗
浄装置。 ２ 各リンスユニツトの洗浄水タンクに排水管を
付設して、回収タンク内の洗浄水の排水位置と非
常時の洗浄水タンク内のオーバーフロー水の排水
位置とに選択配置可能に構成した請求項１に記載
したカスケード式洗浄装置。[Claims for Utility Model Registration] 1. Each device is equipped with a rinsing chamber.2.
a plurality of rinsing units are arranged side by side on the left and right, a substrate transporting means is provided inside each rinsing chamber, and the substrate to be processed is transported in either the left or right direction to perform the cleaning process on the substrate two or more times, Except for the last-stage rinse unit, the other front-stage rinse units have a rinse chamber that performs the substrate rinsing process, a cleaning water tank that stores the cleaning water used in the subsequent-stage rinse unit, and a cleaning water tank. A pump that pumps up the washing water inside the rinse chamber into the rinse chamber is placed in communication with the wash water tank, and the wash water used in the rinse chamber is recovered at the same water level as the wash water in the wash water tank. The middle rinsing unit supplies the cleaning water in the recovery tank to the first rinsing unit, and the first rinsing unit supplies the cleaning water in the recovery tank to the first rinsing unit. By configuring the system so that it is discharged to the outside, and supplying the cleaning water used in the subsequent rinsing unit to the cleaning water tank, the substrates can be rinsed with higher purity cleaning water in the latter stages of the flow of substrates. In a cascade type cleaning device configured to do this, the recovery tank of the rinse unit is selectively installed on the inside left side and the inside right side of the cleaning water tank, and in the inside left position, the recovery tank of the rinse unit located on the right side of the rinse unit is The cleaning water tank is configured to receive the cleaning water discharged from the rinse water tank, and the cleaning water tank is configured to receive the cleaning water discharged from the rear rinse unit located on the left side of the rinse unit at the right inner position. Cascade type cleaning equipment. 2. Claim 1, wherein a drain pipe is attached to the wash water tank of each rinse unit so that the drain pipe can be selectively placed at the drain position of the wash water in the recovery tank and the drain position of the overflow water in the wash water tank in case of an emergency. Cascade type cleaning equipment described in .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9172590U JP2511367Y2 (en) | 1990-08-31 | 1990-08-31 | Cascade type cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9172590U JP2511367Y2 (en) | 1990-08-31 | 1990-08-31 | Cascade type cleaning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0448620U true JPH0448620U (en) | 1992-04-24 |
| JP2511367Y2 JP2511367Y2 (en) | 1996-09-25 |
Family
ID=31827608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9172590U Expired - Fee Related JP2511367Y2 (en) | 1990-08-31 | 1990-08-31 | Cascade type cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2511367Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6207086B1 (en) * | 1999-02-18 | 2001-03-27 | Johnson & Johnson Vision Care, Inc. | Method and apparatus for washing or hydration of ophthalmic devices |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3124635U (en) | 2006-06-12 | 2006-08-24 | 横浜ゴム株式会社 | Pneumatic tire |
-
1990
- 1990-08-31 JP JP9172590U patent/JP2511367Y2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2511367Y2 (en) | 1996-09-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |