JPH0448621U - - Google Patents

Info

Publication number
JPH0448621U
JPH0448621U JP9172490U JP9172490U JPH0448621U JP H0448621 U JPH0448621 U JP H0448621U JP 9172490 U JP9172490 U JP 9172490U JP 9172490 U JP9172490 U JP 9172490U JP H0448621 U JPH0448621 U JP H0448621U
Authority
JP
Japan
Prior art keywords
liquid
substrate
liquid draining
draining chamber
conveying means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9172490U
Other languages
English (en)
Other versions
JPH083001Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990091724U priority Critical patent/JPH083001Y2/ja
Publication of JPH0448621U publication Critical patent/JPH0448621U/ja
Application granted granted Critical
Publication of JPH083001Y2 publication Critical patent/JPH083001Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Circuit Boards (AREA)
  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

【図面の簡単な説明】
図面は本考案の実施例を示し、第１図は本考案
にかかる液切り装置を含んでなる水平搬送式エツ
チングマシンの概念図、第２図は別実施例の要部
取り出し概念図である。 １……搬送手段、４……液切りチヤンバー、５
……チヤンバーの前側壁、６……基板搬入口、７
……チヤンバーの後側壁、８……基板搬出口、９
……エアナイフ、１０……強制排気手段、１５…
…排気口、１７……散水管、Ｗ……被処理基板。

Claims (1)

  1. 【実用新案登録請求の範囲】 液切りチンヤンバーの前側壁に基板搬入口を形
    成するとともに、液切りチヤンバーの後側壁に基
    板搬出口を形成し、液切りチヤンバー内に配置し
    た搬送手段で被処理基板を搬送可能に構成し、液
    切りチヤンバー内で搬送手段の少なくとも一面側
    にエアナイフを搬送手段に近接させて配置し、液
    切りチヤンバー内の搬送手段下方に強制排気手段
    と連通した排気口を設けてなる基板の液切り装置
    において、 液切りチヤンバーの少なくとも基板搬入口及び
    基板搬出口を形成している前後側壁の内壁面に液
    体を供給し、この液体を壁面に沿つて流下させる
    ように構成したことを特徴とする基板の液切り装
    置。
JP1990091724U 1990-08-31 1990-08-31 基板の液切り装置 Expired - Lifetime JPH083001Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990091724U JPH083001Y2 (ja) 1990-08-31 1990-08-31 基板の液切り装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990091724U JPH083001Y2 (ja) 1990-08-31 1990-08-31 基板の液切り装置

Publications (2)

Publication Number Publication Date
JPH0448621U true JPH0448621U (ja) 1992-04-24
JPH083001Y2 JPH083001Y2 (ja) 1996-01-29

Family

ID=31827607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990091724U Expired - Lifetime JPH083001Y2 (ja) 1990-08-31 1990-08-31 基板の液切り装置

Country Status (1)

Country Link
JP (1) JPH083001Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005251544A (ja) * 2004-03-04 2005-09-15 Toray Ind Inc パターンの形成方法、パターンの形成装置およびプラズマディスプレイ用部材の製造方法
WO2019097943A1 (ja) * 2017-11-16 2019-05-23 日本電気硝子株式会社 ガラス板の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6341630A (ja) * 1986-08-06 1988-02-22 Toyota Motor Corp 内燃機関の燃料噴射量制御方法
JPH0252436U (ja) * 1988-10-05 1990-04-16

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6341630A (ja) * 1986-08-06 1988-02-22 Toyota Motor Corp 内燃機関の燃料噴射量制御方法
JPH0252436U (ja) * 1988-10-05 1990-04-16

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005251544A (ja) * 2004-03-04 2005-09-15 Toray Ind Inc パターンの形成方法、パターンの形成装置およびプラズマディスプレイ用部材の製造方法
WO2019097943A1 (ja) * 2017-11-16 2019-05-23 日本電気硝子株式会社 ガラス板の製造方法

Also Published As

Publication number Publication date
JPH083001Y2 (ja) 1996-01-29

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EXPY Cancellation because of completion of term