JPH0449018B2 - - Google Patents

Abstract

A tunnel module consists of an upper part (1), which is downwardly delimited by high-performance filters (15), and two side walls (3, 4). The upper part (1) has three chambers (9, 10, 11) which are divided by two intermediate bottoms (7, 8) and lie on top of one another, a fan (16) and a return air opening (14). The chambers (9, 10, 11) are interconnected by means of openings (12, 13) arranged on alternate sides in the intermediate bottoms (7, 8), the opening (12) of the upper intermediate bottom (7) and the return air opening (14) being situated on opposite sides. In order to produce a low-turbulence airflow, which is provided with a high static pressure content, in the lower chamber (11) in front of the high-performance filters (15), with low energy expenditure, the fan (16) is arranged in the central chamber (10) below the opening (12) of the upper intermediate bottom (7). <IMAGE>

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a tunnel module according to the preamble of claim 1.

Certain production processes, for example related to microelectronics, precision instrumentation, optics, or pharmacy, require a clean, dust-free environment provided by clean room engineering equipment.

In the so-called laminar flow process, highly filtered air is passed through a clean room in a displaced flow with little turbulence.

[Prior Art] In the laminar flow clean room apparatus described in European Patent Application No. 0202110, as shown in FIG. 101 and an intermediate ceiling 102 made up of a high-performance filter 103. High performance filter 10
The air purified by 3 is transferred to clean room 1
06 downwards and vertically through it, being sucked in at the floor plate 105 and returned to the blower 112 via the passage 109 and the side 110. In this equipment,
The engineering equipment that makes up the clean room is stationary and cannot be quickly adapted to new production conditions.

As production conditions in many sectors change rapidly, cleanrooms that can be assembled and disassembled quickly allow for the rapid construction of new cleanrooms, the demolition of old cleanrooms, or the expansion or contraction of existing cleanrooms. There is a lot of interest in the system.

This led to the development of the module system. One of them is the pamphlet “Reinraum-Technik fuer die Elektronik”
(Babcock−BSH Reinraum−Technik, 6.86)
It is described in. The clean room tunnel system shown on page 004 concerns transportable modules that can be arranged in any number.

One tunnel module of the refurbished system described above consists of one upper part 201 and both side walls with double walls 202, 203, as shown in FIG. This upper part 201 has a chamber unit with two return air intakes 208, one blower 207 and three chambers 204, 205, 206 located one above the other. In this case, the lower chamber 206
is limited from below by the arrangement of a high performance mechanical filter 209. Double wall 202 of the side wall,
The air returned during 203 passes through an upper chamber 204, a blower 207, and an intermediate chamber 205, is supplied from both sides to a lower chamber 206, and is then supplied to a clean room 210 through a high-performance mechanical filter 209.

Supplying air from both sides into one room creates undesirable turbulence, which, for example, prevents the conversion of dynamic pressure to static pressure.

A prerequisite for laminar flow in clean rooms is a homogeneous velocity distribution behind a high-performance mechanical filter. This homogeneous velocity distribution is caused by uniform impingement with the filter.

High performance mechanical filters have high air resistance which greatly reduces flow rates. therefore,
Only the static pressure of the airflow in front of the high performance mechanical filter (on the near side) is essentially effective. Laminar flow methods therefore require as low a turbulent air flow as possible with the highest possible static pressure in the chamber in front of the high performance mechanical filter.

A less turbulent flow is facilitated by a unilateral air supply to the chamber in front of the high performance mechanical filter. The static pressure of the flow can be increased by converting dynamic pressure to static pressure.

Such conversion is accomplished by passing the air through a chamber unit having multiple chambers, thereby reducing the flow velocity. Conversion from dynamic pressure to static pressure results in large energy losses and high energy demands of the blower.

A tunnel module with a similar structure is available in the pamphlet “ias/Clean Room Tunnels, LVT Tunnel”.
Series 2 (CRT-5-84)", as can be seen in FIG. There are room units partitioned by intermediate walls 303.

Each of the two room units has two partition plates 30.
It has three chambers 306, 307, 308 which are divided by 4, 305 and located above and below, one blower 309, and one return air port 310. This blower 309 is present in a box 314 in front of the upper chamber 306 on one side of the upper part 301;
The return air port 310 is connected to the box 314 of this blower 309.
It is located in The three chambers 306, 307,
308 is the opening 31 of the partition plates 304 and 305
In this case, the opening 311 of the upper partition plate 304 is located on the opposite side to the return air port 310, and the opening 312 of the lower partition plate 305 is located on the side opposite to the return air port 310. 310
Located on the side.

The lower chamber 308 is limited from below by the arrangement of a high performance filter 313.

In this tunnel module, chambers 306, 30
By supplying air to 7,308 from one side, a flow with less turbulence can be obtained.
In front of the high performance filter 313 (on the near side), the ratio of static pressure to the total pressure is high. However, each of the three chambers 306, 307, 3
Air blower 30 that must be pumped through 08
9's energy demand is extremely high. Furthermore, the blower box 314 becomes a flow obstruction, causing additional energy loss.

[Problem to be solved by the invention] The problem of the invention is to solve the problem of a tunnel module for assembling a clean room using the laminar flow method, which guarantees a uniform velocity distribution in the clean room with the lowest possible energy demand. It's about doing.

[Means for solving the problem of the present invention] This problem is solved according to the present invention by the features set forth in claim 1.

Thanks to the features of claim 1, the blower for generating a low-turbulence airflow with high static pressure in the lower chamber in front of the high-performance filter requires essentially less energy. Due to the arrangement of the blower on the side facing the return air opening in the intermediate chamber, frictional losses are essentially small. Flow obstacles due to the blower box in front of the upper chamber are avoided. Due to the suction of return air through the upper chamber, the air flow to the blower is homogeneous.

The arrangement of the blower with a suction nozzle projecting into the upper chamber according to claim 2 further reduces the energy demand of the blower.

An advantage of the features of claim 3 is that the construction of the blower with a motor with a rotor on the outside and a stator on the inside and with backwardly bent blades further reduces the energy demand. be. Flow obstacles due to the casing are avoided.

The arrangement of the blower according to claim 4 maximizes the efficiency of the blower compared to a relatively large spacing to the side walls or an asymmetrical arrangement between the front and rear walls. .

An advantage of the features of claim 5 lies in the directing of the air flow to the suction nozzle of the blower.

The features of claim 6 result in a homogenization of the airflow in the upper chamber above the blower.

An advantage of the features of claim 7 is the simultaneous homogenization and directing of the air flow to the blower.

By means of the baffle plate according to claim 8, the flow of air led through the opening in the lower partition plate is obstructed and at this point the conversion of dynamic pressure into static pressure is assisted.

The features of claim 9 result in an effective reduction of the noise level in the clean room.

The noise level is further reduced by the arrangement of an intermediate sound deadening element according to claim 10. The sound deadening member also facilitates low loss conversion from dynamic pressure to static pressure.

The features of claim 11 result in an advantageous flow with less turbulence in the chamber in front of the high performance filter.

For tunnel modules installed in semi-clean external areas, the features of claim 12 of a so-called open design are advantageous.

The features of claim 13 are advantageous for open construction tunnel modules when conditioned air is required.

For tunnel modules in contaminated external areas, the features of claim 14 of a so-called closed construction are advantageous.

An advantage of the features of claim 15 lies in the simple construction of the tunnel module.

The tunnel module with the features of claim 16 is characteristically suitable for the construction of a wide clean room.

EXAMPLES The drawings are used to explain the invention on the basis of briefly illustrated examples.

Example 1 Tunnel module with open construction The tunnel module consists of an upper part 1 supported by two U-profiles 2 and two side walls 3, 4.

The upper part 1 is rectangular and has one chamber unit. This room unit has upper part 1
It extends over the entire width of the The side walls 5, 6 as well as the front and rear walls parallel to the plane of illustration, which are not visible in the drawing, are constructed of metal plates with bent edges. The upper part 1 is divided by two partition plates 7, 8 into three flat chambers 9, 10, 11 located one above the other in three layers. The heights of the upper chamber 9 and the middle chamber 10 are approximately the same. The height of the lower chamber 11 is approximately half the height of the intermediate chamber 9.
It is. Each room 9, 10, 11 has a partition plate 7,
They are connected to each other by openings 12, 13 arranged on different sides of 8.

The upper chamber 9 has a return air opening 14 in the side wall 6. The opening 12 of the upper partition plate 7 is located near the opposite side wall 5. Lower partition plate 8
The opening 13 is located between the edge of the lower partition plate 8 and the side wall 6, which does not completely reach the side wall 6 having the return air opening 14.

The lower chamber 11 is bounded from below by six high-performance mechanical filters 15 arranged side by side in a tiled manner and suspended in a grid-like frame. These six high-performance mechanical filters 15 are arranged, two in the front and back, and three in the horizontal direction. This high performance mechanical filter 15 is equipped with a dry gasket and a liquid tight gasket.

A blower 16 is present in the intermediate chamber 10 , the suction nozzle 17 of which is located in the opening 12 of the upper partition plate 7 , and the blower is fixed to the upper partition plate 7 . The blower 16 is configured as a radial blower without a casing, with a motor 18 having a rotor on the outside and a stator on the inside, and has rearwardly bent blades 19. The distance between the side wall 5 closest to the axis 20 of the blower and the coaxial line corresponds to approximately 0.8 times the diameter of the blower 16. The axis 20 of the blower is located midway between the front and rear walls.

In the upper chamber 9, the cover 21 and the upper partition plate 7 are covered by a sound deadening member 22 extending from the side wall 6 to the vicinity of the suction nozzle 17.
The thickness of each sound deadening member 22 is approximately one third of the height of the upper chamber 9, so that between the same sound deadening members, the height is also approximately one third of the height of the chamber. A gap remains. In the cover 21 above the suction nozzle 17 there is an opening closed by a cap for servicing the blower.

A baffle plate 23 parallel to the front and rear walls traverses above the suction nozzle 17 . This baffle plate projects slightly beyond the suction nozzle 17 on both sides and terminates just before the sound deadening member 22 on the return air opening 14 side of the suction nozzle 17.

Two inlet plates 24 extend between the front wall and the rear wall, and the inlet plates 24 reach within the space between the sound deadening members 22 at one end, and are bent downward at the other end. and directly reaches the suction nozzle 17. Within said gap, both inlet plates 24 adjoin each other in the center and then adjoin the baffle plate 23 . In the gap between the sound deadening members 22, the inlet plate 24 is approximately one-third of the height of the gap. The distance between the edge of the inlet plate 24 on the suction nozzle 17 and the axis 20 of the blower is approximately 10% of the diameter of the suction nozzle 17.

Two partition plates 7 and 8 that limit the intermediate chamber 10
A sound deadening member 25 is attached in the intermediate chamber 10, and the sound deadening member is attached to the blower 16.
It extends toward the side wall 6 and reaches the center of the intermediate chamber 10. The thickness of the sound deadening member and the thickness of the gap remaining in the middle of the sound deadening member are each about one third of the height of the chamber.

A sound deadening member 26 is similarly provided on both partition plates 7 and 8 in the remaining half of the intermediate chamber 10 on the side wall 6 side. The thickness of this sound deadening member is only about one-sixth of the height of the chamber. A further intermediate sound deadening member 27 having a thickness of approximately one third of the height of the chamber is present intermediate the two sound deadening members 26 . This intermediate sound deadening member 2
At the top and bottom of 7, there are spaces left with a height of approximately one-sixth of the height of the chamber. The gap continues between the silencing members 25 in the half of the intermediate chamber 10 facing the blower 16, and as a result, the cross section of the gap resembles the shape of a tuning fork.

At the end of the intermediate sound deadening member 27 on the side wall 6, there is a deflecting plate 28 that extends from the sound deadening member 27 into the lower chamber 11 through the center of the opening 13 of the lower partition plate 8 and reaches from the front wall to the rear wall. is installed. The edge of this baffle plate 28 is connected to the lower chamber 1
It projects horizontally below the lower partition plate 8 at a height of approximately 1/2 of 1.

On the side wall 6, at approximately 40% of the height of the lower chamber 11, there is a long and narrow plate-shaped baffle plate 2 that reaches from the front wall to the rear wall.
9 is provided. This baffle plate 29 connects the lower chamber 11 below the opening 13 of the lower partition plate 8.
It protrudes horizontally inward. The distance between the edge of the baffle plate 29 and the baffle plate 28 is approximately half the height of the lower chamber 11.

The spare filter 30 and the water-cooled air cooler 31 are fixed to the side wall 6 in front of the return air port 14 at an acute angle with respect to the vertical line. The air cooler 31 and the auxiliary filter 30 are arranged one on top of the other in a sandwich-like manner, the auxiliary filter 30 being on the outside. Both extend over the entire width of the side wall 6.

Exhaust ports 32 and 33 are present near the bottom of the side walls 3 and 4 of the tunnel module.

The direction of air flow is indicated by arrows. The free interior space of the upper chamber 9 and the middle chamber 10 constitutes a hairpin-shaped air passage. Intermediate room 10
In the region of
It is branched by. This branching path is
By means of the baffle plate 28 it continues in the opening 13 of the lower partition plate 8 and in the following small area of the lower chamber 11.

FIG. 2 shows the arrangement of four tunnel modules in an open structure. The tunnel modules are arranged in series with alternating orientations. In this case, the blowers 16 are present alternately on both the left and right sides of the arrangement within the continuous tunnel module. The tunnel modules are bolted together in the U-profile 2. This arrangement allows the front wall 34 to
and a rear wall 35. The arrows shown in FIG. 2 indicate the direction of air flow at the level of the upper chamber 9.

In operation, air is drawn in from the outside area via the prefilter 30, the cooler 31, the return air opening 14 and the upper chamber 9 by the blower 16, and then via the intermediate chamber 10 and the lower chamber 11 into the high-performance mechanical filter. 15 and sent to a clean room. This purified air flows through the clean room in layers and leaves the clean room through the exhaust ports 32,33.

EXAMPLE 2 Sealed Tunnel Module The sealed tunnel module shown in FIG. 3 corresponds to the tunnel module of Example 1 with the following exceptions.

2 in front of the side walls 3 and 4 of the tunnel module.
Heavy walls 36 and 37 are present. This double wall ends at the top with an upper chamber 9 which projects beyond the intermediate chamber 10 and the lower chamber 11 on both sides.
Side wall 4 and double wall 3 existing on the return air port 14 side
The space between 7 and 7 communicates with the upper chamber 9 via the return air port 14. The width of this gap is approximately the same as the width of the gap provided between the sound deadening members 22 of the upper chamber 9. Tunnel module side walls 3, 4 and double wall 3
The space between 6 and 37 is the exhaust port 3 near the bottom.
It communicates with the clean room via 2 and 33. The space on the side of the blower 16 is closed to the chamber unit of the upper part 1.

The lower chamber 11 has eight high-performance mechanical filters 15.
are bounded downwardly by, in each case two pieces one after the other and four pieces arranged side by side.

Example 2 shown here is to maintain laminar flow.
It has a breathable double bottom that requires a width of at least 4.5m. The exhaust ports 32 and 33 are located below the double bottom 38.

FIG. 4 shows three tunnel modules of closed construction arranged in series with alternating orientations. The arrangement of the three tunnel modules is defined in front and behind by a front wall 39 and a rear wall 40. 1 between side walls 3, 4 and double walls 36, 37
The spaces adjacent to each other on the sides communicate with each other. The arrow represents the direction of air flow at the height of the upper chamber 9.

In operation, air passes through the double bottom 38;
Below the double bottom 38, the exhaust ports 32 on both sides,
33 and passes through the exhaust ports 32, 33 into the mutually communicating space between the side walls 3, 4 and the double walls 36, 37. Air is sucked from the room into the room unit of the tunnel module through the return air port 14 communicating with the room, is transported through the room unit, is purified, and is again supplied to the clean room. Ru.

In the three tunnel module arrangement shown in Figure 4, the air between the left side is drawn into the chamber system of the middle tunnel module, and the air between the right side is drawn into the front and rear tunnel modules. Sucked into Yule's room unit.

Example 3 Tunnel module with two chamber units FIG. 5 shows the arrangement of the four front and back tunnel modules of Example 3.

The tunnel module of Example 3 differs from the tunnel module of Example 2 in the following points. That is, example 3
In the tunnel module, two chamber systems separated by a central wall 41 are arranged mirror-image side by side. The double chamber unit of the tunnel module has a blower 1 installed in the central wall 41.
They face each other with the sides where 6 is present. Return air ports 14 are correspondingly present on both sides of the tunnel module.

This arrangement of four tunnel modules is limited by a front wall 42 and a rear wall 43.

Tunnel module side walls 3, 4 and double wall 3
6 and 37, which are adjacent to each other on one side, communicate with each other. The arrow in Figure 5 is
It represents the direction of air flow at the height of the upper chamber 9.

During operation, air flowing out from the exhaust ports 32, 33 passes through the gap between the side walls 3, 4 and the double walls 36, 37 on both sides of the tunnel module.
It is sucked into separate room units, transported through the same room unit, purified, and then supplied to the clean room again.

[Brief explanation of drawings]

Fig. 1 is a sectional view of an open structure tunnel module equipped with a spare filter and a cooler, Fig. 2 is a view showing the arrangement of an open structure tunnel module, Fig. 3 is a view showing an example of a sealed structure, Figure 4 shows the arrangement of three tunnel modules with a sealed structure, Figure 5 shows the arrangement of a plurality of tunnel modules with two chamber units, and Figures 6, 7, and 8 FIG. 3 is a diagram showing the prior art of the present invention, respectively. 1... Upper part, 3, 4... Side wall, 5... Side wall of chamber unit, 7, 8... Partition plate, 9... Upper chamber, 10... Middle chamber, 11... Lower chamber, 12, 13
...Opening, 14...Return air port, 15...High performance mechanical filter, 16...Blower, 17...Suction nozzle, 18...Motor, 19...Blade,
20... Axis of the blower, 22, 25, 26, 27
... Sound deadening member, 23 ... Current plate, 24 ... Inflow plate, 28 ... Deflection plate, 29 ... Baffle plate, 30 ...
... Spare filter, 31 ... Cooler, 36, 37
...Double wall.

Claims (1)

[Scope of Claims] 1. A tunnel module for configuring a laminar flow clean room consisting of two side walls 3, 4 and an upper part 1 including at least one chamber unit, wherein the chamber unit comprises: 3 divided by two partition plates 7 and 8 and located above and below each other
three chambers 9, 10, 11, one blower 16,
one return air opening 14, in which case the three chambers 9, 10, 11 communicate with each other via openings 12, 13 arranged on different sides of the partition plates 7, 8. The opening 12 of the upper partition plate 7 and the return air port 14 are located on opposite sides of the chamber unit, and the lower chamber 11 is separated by a high-performance filter 15. The tunnel module is characterized in that the blower 16 is disposed in the intermediate chamber 10 and below the opening 12 of the upper partition plate 7. Yule. 2. The tunnel module according to claim 1, wherein the suction nozzle 17 of the blower 16 passes through the opening 12 of the upper partition plate 7 and projects into the upper chamber 9. 3. The blower 16 is a radial blower without a casing, comprising a motor 18 having a rotor on the outside and a stator on the inside, and blades 19 bent backwards. The tunnel module described in 2. 4. The axis 20 of the blower 16 is centered between the front and rear walls of the room unit, separated from one side wall 5 of the room unit by 0.75 to 0.85 times the diameter of the blower. Tunnel module according to any one of claims 1 to 3. 5 the upper chamber 9 above the suction nozzle 17;
Inside, on the side facing the return air opening 14, perpendicularly to the front wall and the rear wall of the chamber unit, at least one inlet plate 24 connects the upper chamber 9.
In this case, the inflow plate 24 is rounded downward near the axis 20 of the blower 16 and approaches near the suction nozzle 17. The tunnel module according to any one of claims 2 to 4, characterized in that: 6. In the upper chamber 9, a rectifying plate 23 is installed across the top of the suction nozzle 17 and parallel to the front wall and the rear wall of the chamber unit. The tunnel module according to any one of items 2 to 5. 7. There are two inlet plates 24, in which one inlet plate extends between the baffle plate 23 and the front wall of the chamber unit, and the other inlet plate extends between the baffle plate 23 and the front wall of the chamber unit. 7. The tunnel module of claim 6, wherein the tunnel module extends between the tunnel unit and the rear wall of the chamber unit. 8. A baffle plate 29 projects into the lower chamber 11 below the opening 13 of the lower partition plate 8 and above the high-performance filter 15. The tunnel module according to any one of the items. 9 In the upper chamber 9, the cover 21 and the upper partition plate 7 are covered, and in the middle chamber 10, both the partition plates 7 and 8 are covered by sound deadening members 22, 25, and 26. Tunnel module according to any one of claims 1 to 8, characterized in that: 10 In a half region of the intermediate chamber 10 on the side opposite to the blower 16, an intermediate sound deadening member 27 is attached between the sound deadening members 26, and in this case, the thickness of the sound deadening member 26 in the half region is ,
It is approximately half the thickness of the sound deadening member in the half region facing the blower 16, and the middle sound deadening member 27
10. The tunnel module according to claim 9, characterized in that half of the half protrudes above the opening 13 of the lower partition plate 8. 11. A baffle plate 28 is attached to an end of the middle sound deadening member 27, and the baffle plate projects into the lower chamber 11 through the opening 13 of the lower partition plate 8. The tunnel module according to claim 10. 12. The tunnel module according to any one of claims 1 to 11, characterized in that a spare filter (30) is attached in front of each of the return air ports (14). 13 A water-cooled air cooler 31 is installed in front of the return air port 14 and behind the preliminary filter 30.
Claim 1 characterized in that:
The tunnel module described in 2. 14. Tunnel module according to any one of claims 1 to 11, characterized in that double walls 36, 37 are attached in front of the side walls 3, 4 of the tunnel module. 15. Claim 1, characterized in that one chamber unit extends over the entire width of the upper part 1.
The tunnel module according to any one of items 1 to 14. 16. Tunnel module according to claim 1, characterized in that in the upper part 1 two chamber units are arranged side by side.