JPH0451771B2 - - Google Patents

Info

Publication number
JPH0451771B2
JPH0451771B2 JP7921387A JP7921387A JPH0451771B2 JP H0451771 B2 JPH0451771 B2 JP H0451771B2 JP 7921387 A JP7921387 A JP 7921387A JP 7921387 A JP7921387 A JP 7921387A JP H0451771 B2 JPH0451771 B2 JP H0451771B2
Authority
JP
Japan
Prior art keywords
laser
laser beam
beam splitter
electrical signal
piezoelectric actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7921387A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63243819A (ja
Inventor
Masayoshi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Radio Co Ltd
Original Assignee
Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Radio Co Ltd filed Critical Japan Radio Co Ltd
Priority to JP7921387A priority Critical patent/JPS63243819A/ja
Publication of JPS63243819A publication Critical patent/JPS63243819A/ja
Publication of JPH0451771B2 publication Critical patent/JPH0451771B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP7921387A 1987-03-31 1987-03-31 微小振動測定装置 Granted JPS63243819A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7921387A JPS63243819A (ja) 1987-03-31 1987-03-31 微小振動測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7921387A JPS63243819A (ja) 1987-03-31 1987-03-31 微小振動測定装置

Publications (2)

Publication Number Publication Date
JPS63243819A JPS63243819A (ja) 1988-10-11
JPH0451771B2 true JPH0451771B2 (2) 1992-08-20

Family

ID=13683655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7921387A Granted JPS63243819A (ja) 1987-03-31 1987-03-31 微小振動測定装置

Country Status (1)

Country Link
JP (1) JPS63243819A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007285898A (ja) * 2006-04-17 2007-11-01 Tokai Univ レーザ振動計

Also Published As

Publication number Publication date
JPS63243819A (ja) 1988-10-11

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees