JPH0452292A - Method and device for producing gold plating - Google Patents
Method and device for producing gold platingInfo
- Publication number
- JPH0452292A JPH0452292A JP16369190A JP16369190A JPH0452292A JP H0452292 A JPH0452292 A JP H0452292A JP 16369190 A JP16369190 A JP 16369190A JP 16369190 A JP16369190 A JP 16369190A JP H0452292 A JPH0452292 A JP H0452292A
- Authority
- JP
- Japan
- Prior art keywords
- plated
- soln
- plating
- gold plating
- plating solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electroplating Methods And Accessories (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Abstract
Description
【発明の詳細な説明】
イ1発明の目的
〔産業上の利用分野〕
本発明は電極や保護膜として利用される金メッキの製造
方法及びその装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION (1) Object of the Invention [Field of Industrial Application] The present invention relates to a method for producing gold plating used as an electrode or a protective film, and an apparatus therefor.
従来この種の金メッキは、第4図に示すように金メッキ
液9を一定の温度に保ちながら、攪拌させて、液の流動
方向に垂直になるように被メッキ物1の面(マイナス電
位面)を位置して行う方法が一般的である。(この時、
プラス電位を液にかけておく)メッキ中に流す電流値は
、メッキ液の性質を考慮した上でメッキ液に浸水した被
メッキ物面の面積によって決定される。これによって、
メッキ(表面や軽さ)状態やメッキスピードが決定され
るため、浸水させる被メッキ物面の面積や電流値はメッ
キする上で大変重要である。Conventionally, this type of gold plating is carried out by stirring the gold plating solution 9 while keeping it at a constant temperature, as shown in FIG. A common method is to position the (At this time,
(A positive potential is applied to the solution.) The current value to be passed during plating is determined by the area of the object to be plated submerged in the plating solution, taking into consideration the properties of the plating solution. by this,
The area of the surface to be plated and the current value that are submerged in water are very important in plating because they determine the state of the plating (surface and lightness) and the plating speed.
金メッキ液9はホットプレート11の面は70℃にして
45℃〜55℃に保っている。液温は48.6℃がもっ
ともよい。このため、金メッキ液内の水分が蒸発し、そ
の結果液面が15mm/Hr程度の速度で下がる現象が
起こる。そうなれば、浸水させる被メッキ物面が下がっ
てしまうため、面積や電流値の設定が初期値に比べて変
化してしまう。これを防止するため、イオン交換水を随
時補給したり、メッキ液槽を大きくして(メッキ液の量
を多くする)対処していた。しかしこれらの方法では、
(前者は)メッキ液の濃度を低くしたり、(後者は)ラ
ンニングコストを大きくしていた〇
〔発明が解決しようとする課題〕
このような問題点を受けて本発明では、メッキ液の濃度
を下げること無く、少ないメッキ液量で一定のメッキ面
積を保つ金メッキの製造方法及びその装置を提供するも
のである。The gold plating solution 9 is kept at 45 to 55°C with the surface of the hot plate 11 at 70°C. The best liquid temperature is 48.6°C. As a result, the water in the gold plating solution evaporates, resulting in a phenomenon in which the liquid level drops at a rate of about 15 mm/hr. If this happens, the surface of the object to be plated that is flooded with water will be lowered, and the area and current value settings will change compared to the initial values. To prevent this, ion-exchanged water was replenished as needed, or the plating solution tank was made larger (increasing the amount of plating solution). However, these methods
(The former) lowers the concentration of the plating solution, and (the latter) increases the running cost.〇 [Problem to be solved by the invention] In response to these problems, the present invention reduces the concentration of the plating solution. To provide a method for manufacturing gold plating and an apparatus for the same, which maintains a constant plating area with a small amount of plating solution without lowering the surface area.
口0発明の構成
〔課題を解決するための手段〕
本発明では液の流動方向に垂直になるように被メッキ物
面(マイナス電位面)を位置して行う方法を改善し、メ
ッキ液面に平行に被メッキ物面(マイナス電位面)を位
置してメッキ液攪拌方向と反対方向に回転させながらメ
ッキを行うことを特徴としている。この時、被メッキ物
の回転速度は、攪拌効果を考慮して、メッキ液攪拌速度
の10分の1以下に設定する。Structure of the Invention [Means for Solving the Problems] The present invention improves the method of positioning the surface of the object to be plated (negative potential surface) perpendicular to the flow direction of the liquid, and It is characterized by performing plating while positioning the surface of the object to be plated (negative potential surface) in parallel and rotating it in the opposite direction to the direction in which the plating solution is stirred. At this time, the rotation speed of the object to be plated is set to one-tenth or less of the plating solution stirring speed in consideration of the stirring effect.
即ち本発明は、
1、メッキ液を一定の温度に保ち、液に電荷をかけるこ
とにより、誘電体物の表面にメッキを行う金メッキに於
て、被メッキ面をメッキ液面に平行に位置して浸水させ
、被メッキ物の回転とメッキ液攪拌方向を逆方向に回転
させながらメッキを行うことを特徴とする金メッキの方
法。That is, the present invention has the following features: 1. In gold plating, in which the surface of a dielectric object is plated by keeping the plating solution at a constant temperature and applying an electric charge to the solution, the surface to be plated is positioned parallel to the surface of the plating solution. A gold plating method characterized by plating by submerging the object in water and performing plating while rotating the object to be plated and stirring the plating solution in opposite directions.
2、メッキ液を一定の温度に保ち、メッキ液を攪拌させ
て、メッキ液の流動方向に垂直になるように被メッキ物
とプラス電極面を設けた金メ・ツキ装置に於て、被メッ
キ物をメッキ液面に平行に位置し、被メッキ物の回転と
メッキ液攪拌方向を逆方向に回転させながら金メッキす
ることを特徴とする金メッキ装置である。2. The plating solution is kept at a constant temperature, the plating solution is stirred, and the plated object is placed in a gold plating device with a positive electrode surface perpendicular to the flow direction of the plating solution. This gold plating apparatus is characterized in that the object is placed parallel to the surface of the plating solution, and the object is plated with gold while rotating the object to be plated and stirring the plating solution in opposite directions.
この金メッキの製造方法及びその装置を用し)ることに
よって、第3図に示すように金メッキ液9に浸水される
被メッキ物1の面は常に液面下に位置することができ、
従って液の蒸発量に左右されることなく一定に保ことが
できるため、メッキの速度や質が一定に保つことができ
る。By using this gold plating manufacturing method and apparatus, the surface of the object 1 to be plated immersed in the gold plating solution 9 can always be located below the liquid level, as shown in FIG.
Therefore, the amount of evaporation of the liquid can be kept constant regardless of the amount of evaporation, so the speed and quality of plating can be kept constant.
第3図は被メッキ物をメッキ液面に平行に位置し、被メ
ッキ物の回転とメッキ液攪拌方向を逆方向に回転させな
がら金メッキする金メッキ装置の断面図である。FIG. 3 is a cross-sectional view of a gold plating apparatus in which the object to be plated is positioned parallel to the surface of the plating solution, and the object to be plated is plated with gold while rotating the object and stirring the plating solution in opposite directions.
金メッキ液として亜硝酸金であるニュートロネックス3
09を用いた。金メッキする試料の被メッキ物1として
50■履×30■■の表面(片面)をCr−Au蒸着し
たスライド硝子を用いた。又、無電解ニッケルを下地と
した誘電体としてもよい。試料の被メッキ物1を固定す
るホルダ一部2は、第1図に示したような形状をしてお
り、回転モータ一部のホルダー回転軸3を介して被メッ
キ物1を回転させ、メッキ面に電流が流れるようにホル
ダ一部2の爪の部分に第2図のようなホルダ一部2の中
に電極4を内蔵した。これらを用いて第3図のような金
メッキの装置で金メッキを行った。Neutronex 3, which is gold nitrite as a gold plating solution
09 was used. As the plated object 1 of the sample to be plated with gold, a glass slide measuring 50 mm x 30 mm was used, the surface (one side) of which was deposited with Cr--Au. Alternatively, it may be a dielectric material based on electroless nickel. The holder part 2 that fixes the sample to be plated 1 has a shape as shown in FIG. An electrode 4 was built into the holder part 2 as shown in FIG. 2 at the claw part of the holder part 2 so that a current could flow through the surface. Using these materials, gold plating was performed using a gold plating apparatus as shown in FIG.
第3図に於て、金メッキ装置として被メッキ物1をホル
ダ一部2に取り付け、モーター回転部5に連結されたホ
ルダー回転軸3を介してホルダー部2を回転させ、金メ
ッキ槽7に電源から電極をとりプラス電極部6を金メッ
キ液に垂直に立て、金メッキ液9の温度をコントロール
するために熱伝対を入れて温度を測定し、回転スター9
−8によって金メッキ液を攪拌する金メッキ装置である
。In FIG. 3, as a gold plating device, an object 1 to be plated is attached to a holder part 2, the holder part 2 is rotated via a holder rotation shaft 3 connected to a motor rotation part 5, and a gold plating tank 7 is connected to a power supply. Take the electrode, stand the positive electrode part 6 vertically in the gold plating solution, insert a thermocouple to measure the temperature in order to control the temperature of the gold plating solution 9, and turn the rotating star 9.
This is a gold plating device that stirs the gold plating solution using -8.
回転スターラー8とホルダ一部2との回転方向は逆方向
である。プラス電極部6はTi−Ptエキスパンダーで
あり、Ti下地に白金2μmのメッキを施したものであ
る。試料の被メッキ物のホルダ一部2の回転速度は30
RPMに保って行った。又、プラス電極6と試料面であ
る被メッキ物1に与える電流は最適条件を3.7mA/
c腸2、さらにホルダ一部2の爪の部分の損失を考慮し
て、55朧Aとした。メッキ時間は100分とした。The rotating directions of the rotary stirrer 8 and the holder part 2 are opposite to each other. The positive electrode section 6 is a Ti--Pt expander, and has a Ti base plated with platinum of 2 .mu.m. The rotation speed of the holder part 2 of the sample to be plated is 30
I kept it at RPM. In addition, the optimal condition for the current applied to the positive electrode 6 and the plated object 1, which is the sample surface, is 3.7 mA/
Taking into consideration the loss of the C intestine 2 and the claw portion of the holder part 2, it was set to 55 Oboro A. The plating time was 100 minutes.
このようにして作製したメッキ膜をECRエッチング装
置で約2μmはど表面Au層のエツチングを行って膜厚
を測定したところ、16.2μm(下地電極部膜厚を除
く)であった。エツチング後の表面状態も200倍で凹
凸が確認できないほど良好であった。The Au layer on the surface of the plated film thus prepared was etched by about 2 μm using an ECR etching apparatus, and the film thickness was measured to be 16.2 μm (excluding the thickness of the base electrode portion). The surface condition after etching was so good that no unevenness could be seen under 200x magnification.
ハ0発明の効果
〔発明の効果〕
上述した如く被メッキ面をメッキ液面に平行に位置して
浸水させ、被メッキ面の回転方向とメッキ液を攪拌方向
を逆方向に回転することにより、金メッキの表面の状態
や密着性をみたが、凹凸が確認できないほど良好な金メ
ッキが得られ、歩留が30%以上も向上した。C0 Effects of the Invention [Effects of the Invention] As described above, by immersing the surface to be plated in water parallel to the level of the plating solution, and rotating the direction of rotation of the surface to be plated and the direction of stirring the plating solution in the opposite direction, The surface condition and adhesion of the gold plating were examined, and the gold plating was so good that no irregularities could be observed, and the yield was improved by more than 30%.
第1図(a)、(b)、(c)は本発明実施例に使用し
た被メッキ物をホルダ一部に装着した外観図を示し、第
1図(a)は被メッキ物をホルダ一部に装着した外観正
面図、第1図(b)は第1図(a)の上面図、第1図(
c)は第1図(a)の下面図である。
第2図は被メッキ物ホルダーの爪の部分の構造を示す部
分拡大正面図。
第3図は本発明実施例で用いたメッキ装置の概略断面図
を示す。
第4図は従来の金メッキ装置の概略断面図を示す。
1・・・非メッキ物、2・・・ホルダ一部、3・・・ホ
ルダー回転軸、4・・・電極、5・・・回転モータ一部
、6・・・プラス電極部、7・・・金メッキ槽、8・・
・回転スターラー、9・・・金メッキ液、10・・・熱
伝対、11・・・ホットプレート。FIGS. 1(a), (b), and (c) show external views of the object to be plated used in the embodiments of the present invention mounted on a part of the holder, and FIG. 1(a) shows the object to be plated attached to the holder. Fig. 1(b) is a top view of Fig. 1(a), and Fig. 1(b) is a front view of the external appearance attached to the
c) is a bottom view of FIG. 1(a). FIG. 2 is a partially enlarged front view showing the structure of the claw portion of the object holder. FIG. 3 shows a schematic sectional view of the plating apparatus used in the embodiment of the present invention. FIG. 4 shows a schematic cross-sectional view of a conventional gold plating apparatus. DESCRIPTION OF SYMBOLS 1... Non-plated item, 2... Part of holder, 3... Holder rotating shaft, 4... Electrode, 5... Part of rotating motor, 6... Positive electrode part, 7...・Gold plating tank, 8...
- Rotating stirrer, 9... Gold plating solution, 10... Thermocouple, 11... Hot plate.
Claims (1)
とにより、誘電体物の表面にメッキを行う金メッキに於
て、被メッキ面をメッキ液面に平行に位置して浸水させ
、被メッキ物の回転とメッキ液攪拌方向を逆方向に回転
させながらメッキを行うことを特徴とする金メッキの方
法。 2、メッキ液を一定の温度に保ち、メッキ液を攪拌させ
て、メッキ液の流動方向に垂直になるように被メッキ物
とプラス電極面を設けた金メッキ装置に於て、被メッキ
物をメッキ液面に平行に位置し、被メッキ物の回転とメ
ッキ液攪拌方向を逆方向に回転させながら金メッキする
ことを特徴とする金メッキ装置。[Claims] 1. In gold plating, in which the surface of a dielectric object is plated by keeping the plating solution at a constant temperature and applying an electric charge to the solution, the surface to be plated is positioned parallel to the level of the plating solution. A gold plating method characterized by plating while rotating the object to be plated and stirring the plating solution in opposite directions. 2. The plating solution is kept at a constant temperature, the plating solution is agitated, and the object to be plated is plated in a gold plating device with a positive electrode surface perpendicular to the direction of flow of the plating solution. A gold plating device that is located parallel to the liquid surface and performs gold plating while rotating the object to be plated and stirring the plating solution in opposite directions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16369190A JPH0452292A (en) | 1990-06-20 | 1990-06-20 | Method and device for producing gold plating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16369190A JPH0452292A (en) | 1990-06-20 | 1990-06-20 | Method and device for producing gold plating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0452292A true JPH0452292A (en) | 1992-02-20 |
Family
ID=15778772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16369190A Pending JPH0452292A (en) | 1990-06-20 | 1990-06-20 | Method and device for producing gold plating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452292A (en) |
-
1990
- 1990-06-20 JP JP16369190A patent/JPH0452292A/en active Pending
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