JPH045249Y2 - - Google Patents

Description

[Detailed description of the invention] (Industrial field of application) This invention relates to a device for preventing the upper surface plate of a lap board from falling.

(Prior art) A shown in FIG. 4 is a semiconductor wafer lapping machine, in which a carrier 3 is arranged between an upper surface plate 1 and a lower surface plate 2, and a wafer 4 is held by this carrier 3. A wafer 4 is ground while rotating surface plates 1 and 2 and a carrier 3 at the same time.

The upper surface plate 1 can be rotatably suspended by a suspension member 5. As shown in FIG. 5, a hanging metal fitting 6 is attached to the upper end of the hanging body 5, and a hanging shaft 8 fitted with a spherical slide bearing 7 is horizontally supported by the metal fitting 6. , the outer peripheral surface of the spherical sliding bearing 7 is supported by a spherical sliding bearing box 9, and the bolt 12 at the top of the box 9 is connected to the cylinder 1 for lifting the upper surface plate.
By screwing and connecting the piston rod 11 to the tip of the piston rod 11, the suspension member 5 and the upper surface plate 1 are suspended so as to be swingable about the spherical slide bearing 7 as a fulcrum.

As mentioned above, the upper surface plate 1 and the suspension body 5 are suspended from the piston rod 11 of the cylinder 10 via the spherical sliding bearing 7, but since the weight of the upper surface plate 1 alone is about 1 ton, Suspension shaft 8 that supports spherical sliding bearing 7, support parts 6a, 6a of suspension fittings 6
The load applied to the support part 9a of the spherical plain bearing box body 9 is large, and although each of these parts has the necessary strength, if it breaks due to an unexpected cause, the 1-ton upper surface plate 1 will fall. If the upper surface plate 1 were to fall during loading and unloading of the wafer 4 or during maintenance of both the upper and lower surface plates 1 and 2, a tragic result would result.

(Technical Problem) A technical problem of the present invention is to prevent the upper surface plate from falling when the member supporting and supporting the spherical sliding bearing in the wafer lapping machine having the above structure breaks.

(Means for solving the technical problems) The means taken by the present invention to solve the above-mentioned technical problems are as follows: A suspension shaft fitted with a spherical sliding bearing is fixed to the part, and the spherical sliding bearing is supported by a spherical sliding bearing box,
In an upper surface plate drop prevention device in which the upper surface of the same spherical sliding bearing box body is connected to the piston rod of a cylinder for raising and lowering the upper surface plate, and the suspension body and the upper surface plate are attached to a wafer lapping plate which is suspended so as to be swingable. , through-holes are formed in the collar member of the spherical sliding bearing box body and the suspension metal base plate portion opposite to the collar member at the upper end of the suspension body, and a security rod is inserted through both through-holes in a loosely fitted state. Holding portions are provided at the upper and lower ends of the security rod, and a predetermined gap is provided between the holding portion on the lower end side and the penetrating end of the hanging metal base plate portion.

(Function) According to the above means, when the upper surface plate and the suspension body swing around the spherical sliding bearing as a fulcrum, the positional relationship between the receiving box body and the through holes at the upper end of the suspension body is shifted. The security rod that penetrates between the two through-bores moves in the radial and longitudinal directions with the upper end support part supported by the upper end surface of the through-hole of the receiving box and suspended. .

When the member that supports and supports the spherical sliding bearing breaks, the lower end surface of the through hole of the hanging body that is about to fall is caught by the holding part at the lower end of the security rod, and the upper surface plate and the hanging body are secured as described above. Suspend with a rod.

(Effects) The present invention is as described above, and even when the member supporting the spherical plain bearing breaks, the upper surface plate and the suspension body are suspended by the safety rod, and the upper surface plate is prevented from falling. This can prevent accidents caused by the upper surface plate falling.

In addition, when the suspension body vibrates, the security bolt is configured to move freely within the through-bore due to the displacement between the two through-holes, so the vibration of the suspension body is prevented by the security bolt. There will be no interruptions.

(Example) Hereinafter, an example of the present invention will be described based on the drawings.

Figure 1 shows the spherical sliding bearing 7 portion of a wafer lapping plate, and a hanging fitting 6 is attached to the upper end of a hanging holder 5, which rotatably suspends an upper surface plate (not shown), with a bolt 13. Fix the support part 6 of this hanging metal fitting 6.
A suspension shaft 8 fitted with a spherical plain bearing 7 at a and 6a
The spherical plain bearing 7 is supported by the sleeve 14.
The sleeve 14 is supported by the spherical sliding bearing box 9 through the sleeve 14, so that it can freely rotate on the inner circumferential surface of the sleeve 14. Then, the upper part of the spherical sliding bearing box 9 is connected to the tip of the piston rod 11 of the cylinder 10 for lifting the upper surface plate by a connecting means such as screwing, and the suspension body 5 and the upper surface plate are connected to the piston rod 11. It is configured to swing around the spherical slide bearing 7 in a suspended state.

An upper surface plate drop prevention device B is provided between the above-mentioned spherical sliding bearing box body 9 and the upper end member of the suspension body 5.

The upper surface plate fall prevention device B is a spherical sliding bearing box body 9
The side member and the member on the upper end side of the suspension body 5 are connected by means other than the spherical sliding bearing 7, and a collar member 15 is screwed onto the circumferential surface of the spherical sliding bearing box body 9. The collar member 15 is fixed with a nut 16, and through holes 17, 17, 17 are opened in this collar member 15, and at the same time, holes 17, 17, 17 are provided in the base plate portion 6b of the hanging fitting 6 at positions directly below the through holes 17, 17, 17. Open through holes 17', 17', 17'. A holding portion 18a is provided at the upper end between each of the through holes 17 and 17'.
The securing rods 18, 18, 18 provided with this are passed through, and a holding portion 18b is screwed onto the lower end of the rod 18.

The above-mentioned through-holes 17 and 17' are opened one size larger than the diameter of the security rod 18, and a predetermined gap a is provided between the holding part 18b on the lower end side and the lower end of the through-hole 17 of the base plate part 6b, Both through holes 17, 17'
The security rod 18 passing through the holes 17 and 17'
It is constructed so that it can freely move in the radial direction and the length direction.

Although bolts and nuts were used for the security rod 18 and the holding parts 18a and 18b, the security rod and the upper end side holding part were machined as one piece, and a ring-shaped holding part retaining pin was attached to the lower end of the security rod. It is also optional to use a fixed configuration. (Not shown) When the upper surface plate and the hanging body 5 swing around the spherical sliding bearing 7, the through hole 17 of the collar member 15 stops and the through hole 1 of the hanging metal fitting 6 swings.
7', but due to the displacement of both through holes 17, 17', each security rod 18 moves in the radial and longitudinal directions within the through holes 17, 17'. Due to the free movement, the swinging movement of the suspension member 5 is not inhibited by the securing rod 18.

The support part 6 of the hanging shaft 8 and the hanging fitting 6
a, or the support portion 9a of the spherical plain bearing box body 9
When the upper surface plate breaks, the lower end surface around each through hole 17' of the hanging metal fitting 6 which is about to fall together with the upper surface plate is received by the holding part 18b, and the upper surface plate and the suspension body 5 are held by the securing rods 18, 18. , 18 to prevent the upper surface plate from falling.

The above-mentioned upper surface plate drop prevention device B is constructed using bolts and nuts for the security rod 18 and the receiving portions 18a, 18b, and therefore can be manufactured extremely easily.

Incidentally, it is optional whether one or more security rods be provided.

[Brief explanation of the drawing]

Figure 1 is a cross-sectional view taken along the line X-X of Figure 3, Figure 2 is a vertical side view showing the spherical sliding bearing of a wafer lapping plate equipped with a surface plate dropping device according to the present invention, and Figure 3 is a cross-sectional view of Figure 1. FIG. 4 is a longitudinal sectional view showing a conventional wafer lapping machine, and FIG. 5 is an enlarged view showing a spherical sliding bearing of the wafer lapping machine. In the figure, A...Wafer lapping plate, B...Upper surface plate fall prevention device, a...Gap, 1...Upper surface plate, 5
... Hanging body, 7 ... Spherical slide bearing, 8 ... Hanging shaft, 9 ... Spherical slide bearing box, 10 ... Upper surface plate lifting cylinder, 11 ... Piston rod, 17
...Through hole (spherical plain bearing box body side), 17'...
Penetration (suspension body side), 18...Security rod, 18a...
... Holder body (upper end side), 18b... Holder body (lower end side).

Claims (1)

[Scope of utility model registration request] A suspension shaft fitted with a spherical slide bearing is fixed to the upper end of the suspension holder that rotatably suspends the upper surface plate of the wafer lapping plate main body, and the spherical slide bearing is attached to the spherical slide bearing box. At the same time, the upper part of the spherical sliding bearing box body is connected to the piston rod of the cylinder for raising and lowering the upper surface plate, and the upper surface plate is lowered to be attached to the wafer lapping plate which is suspended so that the suspension body and the upper surface plate can vibrate freely. In the prevention device, through-holes are formed in the flange member of the spherical sliding bearing box body and the suspension metal base plate portion opposite to the flange member at the upper end of the suspension body, and a security rod is loosely fitted between both the through-holes. To prevent the upper surface plate of the lap board from falling, a holding part is provided at the upper and lower ends of the security rod, and a predetermined gap is provided between the holding part on the lower end side and the penetrating end of the hanging metal board part. Device.