JPH0453052U - - Google Patents
Info
- Publication number
- JPH0453052U JPH0453052U JP9426990U JP9426990U JPH0453052U JP H0453052 U JPH0453052 U JP H0453052U JP 9426990 U JP9426990 U JP 9426990U JP 9426990 U JP9426990 U JP 9426990U JP H0453052 U JPH0453052 U JP H0453052U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- evaporation
- melting
- source crucible
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 17
- 230000008020 evaporation Effects 0.000 claims description 16
- 238000002844 melting Methods 0.000 claims description 8
- 230000008018 melting Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Description
第１図及び第２図は、いずれもこの考案の蒸発
源るつぼの一実施例を示す概略縦断面図である。
第３図及び第４図は、いずれも従来の蒸発源るつ
ぼの概略縦断面図であり、そのうち第４図はクヌ
ーセンセル型の蒸発源るつぼの概略縦断面図であ
る。
１０……仕切り壁、２０……蒸発室、３０……
溶融室、４０……湯（溶融した蒸着材）、５０…
…導通用孔、６０……導通用細管、７０……加圧
ガス導入用孔。
FIG. 1 and FIG. 2 are both schematic longitudinal sectional views showing one embodiment of the evaporation source crucible of this invention.
3 and 4 are both schematic vertical cross-sectional views of conventional evaporation source crucibles, of which FIG. 4 is a schematic vertical cross-sectional view of a Knudsen cell type evaporation source crucible. 10... Partition wall, 20... Evaporation chamber, 30...
Melting chamber, 40... Hot water (melted vapor deposition material), 50...
...Hole for conduction, 60...Thin tube for conduction, 70...Hole for pressurized gas introduction.
Claims (1)
している蒸発源るつぼにおいて、凹部が仕切り壁
により上部の蒸発室と下部の溶融室とに分けられ
ており、蒸発室は底面に導通用孔を有しており、
溶融室は側面に加圧ガス導入用孔を有しており、
蒸発室と溶融室とは、蒸発室の底面の導通用孔か
ら溶融室の底面付近まで設けられている導通用細
管により導通していることを特徴とする蒸発源る
つぼ。 (2) 蒸発室とそれに連なる導通用細管とからな
る部品と、溶融室部品との、二つの部品の組合わ
せからなる請求項１記載の蒸発源るつぼ。 (3) 蒸発室部品と、導通用細管部品と、溶融室
部品との、三つの部品の組合わせからなる請求項
１記載の蒸発源るつぼ。 (4) 蒸発室の底面の導通用孔に、溶融した蒸着
材の整流用キヤツプが載置されている請求項１〜
３のいずれか１項に記載の蒸発源るつぼ。[Claims for Utility Model Registration] (1) In an evaporation source crucible having a recess for melting and evaporating a deposition material, the recess is divided by a partition wall into an upper evaporation chamber and a lower melting chamber. The evaporation chamber has a conduction hole on the bottom.
The melting chamber has a pressurized gas introduction hole on the side.
An evaporation source crucible characterized in that the evaporation chamber and the melting chamber are in communication with each other through a conduction thin tube provided from a conduction hole in the bottom of the evaporation chamber to near the bottom of the melting chamber. (2) The evaporation source crucible according to claim 1, comprising a combination of two parts: a part consisting of an evaporation chamber and a conductive thin tube connected thereto, and a melting chamber part. (3) The evaporation source crucible according to claim 1, comprising a combination of three parts: an evaporation chamber part, a conductive capillary part, and a melting chamber part. (4) Claims 1 to 4, wherein a cap for rectifying the melted vapor deposition material is placed in the conduction hole in the bottom of the evaporation chamber.
3. The evaporation source crucible according to any one of 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9426990U JPH0453052U (en) | 1990-09-06 | 1990-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9426990U JPH0453052U (en) | 1990-09-06 | 1990-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453052U true JPH0453052U (en) | 1992-05-06 |
Family
ID=31832090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9426990U Pending JPH0453052U (en) | 1990-09-06 | 1990-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453052U (en) |
-
1990
- 1990-09-06 JP JP9426990U patent/JPH0453052U/ja active Pending