JPH0453054U - - Google Patents
Info
- Publication number
- JPH0453054U JPH0453054U JP9153490U JP9153490U JPH0453054U JP H0453054 U JPH0453054 U JP H0453054U JP 9153490 U JP9153490 U JP 9153490U JP 9153490 U JP9153490 U JP 9153490U JP H0453054 U JPH0453054 U JP H0453054U
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- board
- substrate
- center
- periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例の成膜用マニピユレ
ータの基板加熱用ヒータ部分の平面図、第２図は
第１図の基板加熱用ヒータ部分に基板ホルダー１
１を装着した状態を示す断面図である。
１……基板ホルダー装着部、２……第１のヒー
タ線、３……第２のヒータ線、４……絶縁止め具
、５……基板中心部温度測定用熱電対、６……基
板周辺部温度測定用熱電対、７，９……熱電対導
入用絶縁がいし、８，１０……ヒータ線導入用絶
縁がいし、１１……基板ホルダー、１２……基板
。
FIG. 1 is a plan view of a heater portion for heating a substrate of a film forming manipulator according to an embodiment of the present invention, and FIG. 2 is a plan view of a heater portion for heating a substrate shown in FIG.
FIG. 1 is a sectional view showing a state in which the device 1 is attached. DESCRIPTION OF SYMBOLS 1... Board holder attachment part, 2... First heater wire, 3... Second heater wire, 4... Insulating stopper, 5... Thermocouple for measuring the temperature at the center of the board, 6... Surroundings of the board Thermocouple for temperature measurement, 7, 9... Insulating insulator for introducing thermocouple, 8, 10... Insulating insulator for introducing heater wire, 11... Substrate holder, 12... Substrate.
Claims (1)
線と、基板ホルダーまたは基板の中心部を加熱す
る第２のヒータ線を含み、基板ホルダーの周辺部
の温度と基板ホルダーまたは基板の中心部の温度
をモニタし、基板の昇温時には基板全体がほぼ同
一の温度に上昇するように、また基板の降温時に
は基板ホルダーの周辺部の温度が基板の中心部の
温度よりも常に低くなるように第１および第２の
ヒータ線に流す電流の量を調節するヒータを有す
ることを特徴とする成膜用マニピユレータ。[Claims for Utility Model Registration] A film-forming manipulator that includes a first heater wire that heats the periphery of the substrate holder and a second heater wire that heats the center of the substrate holder or the substrate. The temperature at the periphery and the temperature at the center of the substrate holder or substrate are monitored so that when the temperature of the board rises, the entire board rises to almost the same temperature, and when the temperature of the board falls, the temperature at the periphery of the board holder increases to the same temperature as the board. 1. A film-forming manipulator comprising a heater that adjusts the amount of current flowing through the first and second heater wires so that the temperature is always lower than the temperature at the center of the film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9153490U JPH0453054U (en) | 1990-09-03 | 1990-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9153490U JPH0453054U (en) | 1990-09-03 | 1990-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453054U true JPH0453054U (en) | 1992-05-06 |
Family
ID=31827266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9153490U Pending JPH0453054U (en) | 1990-09-03 | 1990-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453054U (en) |
-
1990
- 1990-09-03 JP JP9153490U patent/JPH0453054U/ja active Pending
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