JPH0453056U - - Google Patents
Info
- Publication number
- JPH0453056U JPH0453056U JP9223390U JP9223390U JPH0453056U JP H0453056 U JPH0453056 U JP H0453056U JP 9223390 U JP9223390 U JP 9223390U JP 9223390 U JP9223390 U JP 9223390U JP H0453056 U JPH0453056 U JP H0453056U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- atmospheric pressure
- internal pressure
- foil
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011888 foil Substances 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9223390U JPH0754283Y2 (ja) | 1990-08-31 | 1990-08-31 | 真空装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9223390U JPH0754283Y2 (ja) | 1990-08-31 | 1990-08-31 | 真空装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0453056U true JPH0453056U (2) | 1992-05-06 |
| JPH0754283Y2 JPH0754283Y2 (ja) | 1995-12-18 |
Family
ID=31828531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9223390U Expired - Lifetime JPH0754283Y2 (ja) | 1990-08-31 | 1990-08-31 | 真空装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0754283Y2 (2) |
-
1990
- 1990-08-31 JP JP9223390U patent/JPH0754283Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0754283Y2 (ja) | 1995-12-18 |
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