JPH0754283Y2 - 真空装置 - Google Patents

真空装置

Info

Publication number
JPH0754283Y2
JPH0754283Y2 JP9223390U JP9223390U JPH0754283Y2 JP H0754283 Y2 JPH0754283 Y2 JP H0754283Y2 JP 9223390 U JP9223390 U JP 9223390U JP 9223390 U JP9223390 U JP 9223390U JP H0754283 Y2 JPH0754283 Y2 JP H0754283Y2
Authority
JP
Japan
Prior art keywords
chamber
foil
pressure
atmospheric pressure
leak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9223390U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0453056U (2
Inventor
真 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP9223390U priority Critical patent/JPH0754283Y2/ja
Publication of JPH0453056U publication Critical patent/JPH0453056U/ja
Application granted granted Critical
Publication of JPH0754283Y2 publication Critical patent/JPH0754283Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9223390U 1990-08-31 1990-08-31 真空装置 Expired - Lifetime JPH0754283Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9223390U JPH0754283Y2 (ja) 1990-08-31 1990-08-31 真空装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9223390U JPH0754283Y2 (ja) 1990-08-31 1990-08-31 真空装置

Publications (2)

Publication Number Publication Date
JPH0453056U JPH0453056U (2) 1992-05-06
JPH0754283Y2 true JPH0754283Y2 (ja) 1995-12-18

Family

ID=31828531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9223390U Expired - Lifetime JPH0754283Y2 (ja) 1990-08-31 1990-08-31 真空装置

Country Status (1)

Country Link
JP (1) JPH0754283Y2 (2)

Also Published As

Publication number Publication date
JPH0453056U (2) 1992-05-06

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